>>> 'tylan12' problem from judy -- Mon Jan 15 00:48:18 1990 <<<

The back boat of tylan 12 is full of poly flakes.

>>> 'tylan12' problem from bob -- Tue Jan 16 10:41:12 1990 <<<

The boats on tylan12 will be cleaned by the Process Staff
shortly. tylan12 is up for use until then.

>>> 'tylan12' problem from hyeh -- Wed Jan 17 14:22:42 1990 <<<

The Load zone temperature refuses to stabilize after about 3 hours.

>>> 'tylan12' problem from tom -- Thu Jan 18 09:52:57 1990 <<<

Problem:    User reports difficulty stabilizing load zone. It stayed
            to low for 3 hrs.
Cause:      It is always difficult to run these tubes at 450 C.  Variations
            in glassware position, coating thickness, time for loading, and
            N2 flow can cause it to get stuck on the edge of the KP band.
Solution:   The tube stabilized ok for users on Tuesday. I modified the 
            standard recipes, inching up the KR values slightly and brought
            the KP band from 4 to 5 C. This should help. I also dumped out
            most of the poly flakes in the rear boat and removed a flaky 
            dummy wafer and wiped off the cantilevers.

>>> 'tylan12' problem from bob -- Mon Jan 29 15:53:28 1990 <<<

Debra has redone dummy wafers for tylan12 and I have cleaned the glassware
in HF. One new wafer carrier bottom has been installed. tylan12 has been
cleaned and is ready for use.
It has gone from a spelunkers dream to a vlsi processing tool!
tylan12 is up.

>>> 'tylan12' problem from field -- Mon Jan 29 16:49:27 1990 <<<

Boats were cleaned and rods cleared of flakes. End of tube vaccumed.
tylan12 is up

>>> 'tylan12' problem from carlos -- Wed Feb  7 20:50:25 1990 <<<

The boat will not automatically load and unload. Also it needs a 
temperature calibration since it did not stabilize after 3 hrs.

>>> 'tylan12' problem from evan -- Fri Feb  9 11:30:37 1990 <<<

The alternate gas for n2 has been changed from argon to neon.  It is still
switched in by setting CCOUT10=ON.  This was done at hyeh's request.

>>> 'tylan12' problem from evan -- Fri Feb  9 11:45:58 1990 <<<

problem: boat loader not working
solution: reset boat loader and ran boats all the way out and back in

>>> 'tylan12' problem from cjkim -- Sat Feb 17 21:05:15 1990 <<<


VDOLTOC for 2hrs 05min.

>>> 'tylan12' problem from judy -- Mon Feb 19 17:24:32 1990 <<<

VDOLTOC - 2 hr deposition - goal ~2 um - measured 2500 A!?!?!?

Upon reviewing my monitor of the tylan run I noticed that the 
SIH4 flow decresed to 0 throughout the run (see below).
Maybe the SIH4 is out or the injectors are plugged.

----------------------------------------------------------------

TASK COMPLETE
Mon Feb 19 13:33:25 PST 1990

02/19/90   13:35:04
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:16:08     0080    01:55:47     00:04:13  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  452.0  0548  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  449.7  0276  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  451.7  0508  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    452.0        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    449.5        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    452.2        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.4        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = G   59.7        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE
-----------------------------------------------------------------
Mon Feb 19 13:41:01 PST 1990

02/19/90   13:42:40
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:23:44     0080    01:48:11     00:11:49  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  451.0  0548  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  451.2  0276  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  452.2  0463  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    450.7        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    451.0        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    452.5        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.4        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = L    1.5        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE
-----------------------------------------------------------------
Mon Feb 19 13:48:37 PST 1990

02/19/90   13:50:17
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:31:21     0080    01:40:34     00:19:26  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  450.7  0532  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  451.5  0268  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  451.2  0439  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    451.0        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    451.0        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    451.5        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.5        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = L     .0        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE

>>> 'tylan12' problem from evan -- Tue Feb 20 09:13:03 1990 <<<

problem: SiH4  stopped flowing during a run
cause: flow shutoff valve tripped
solution:  this is a known problem that has been discussed in past problem
reports.  the shutoff valve has been placed in override position so this should not occur again.  the valve will be replaced with a higher flow model during thenext cylinder change.  the cylinder pressure was 320 psi when this occured.

tylan12 is up 

>>> 'tylan12' problem from hyeh -- Wed Feb 28 18:30:44 1990 <<<

I tried to do LTO.ARG for 2:40.  The tube aborted after 1:30.
I think that the pump efficiency is going down and the pressure went from
1 torr to 2 torr and the alarm tripped.
Can someone clean the pump out (change the oil?)

>>> 'tylan12' problem from evan -- Thu Mar  1 10:50:10 1990 <<<

problem: process pressure too high
solution: changed KK's in the inline filter.
throughput rates back to normal.
tylan12 is up

>>> 'tylan12' problem from hhsu -- Fri Mar  2 21:59:36 1990 <<<

I replaced 9 test wafers, they are in very bad shape.  I also noticed
a crack line on the outer boat of tylan12, please replace it as
soon as possible.

>>> 'tylan12' problem from jimmoon -- Thu Mar  8 13:06:53 1990 <<<

Low-flow silane controller is behaving abnormally.
I have asked for a level of 6 in five depositions now
and the rate of deposition has steadily declined
from 17A/min to 11A/min.  Readout on the TYCOM for
the latest run was 3.4 instead of 6.

>>> 'tylan12' problem from evan -- Fri Mar  9 14:44:00 1990 <<<

Confirmed that 1-10 sccm SiH4 MFC is not functioning.  The regular SiH4
is operating correctly.  MFC will have to be pulled and serviced.
tylan12 is up except for low-flow silane.

>>> 'tylan12' problem from evan -- Tue Mar 13 14:06:41 1990 <<<

problem: low-flow SiH4 MFC not delivering requested flow.
cause: blocked valve/sensor
solution: removed and cleaned MFC. recalibrated and reinstalled. tested
and got full flow.

low-flow SiH4 is back up

>>> 'tylan12' problem from evan -- Tue Mar 13 14:11:48 1990 <<<

tylan11 and tylan12 are down for a change from PH3 to a 50/50 mix of
PH3 and SiH4.  The lines are being pumped out overnight.  The new MFC's
and gas cylinder will be installed Wednesday a.m.

>>> 'tylan12' problem from evan -- Wed Mar 14 14:51:56 1990 <<<

Installation of new MFC and gas cylinder for PH3/SiH4 mix has been completed.
tylan12 is up

>>> 'tylan12' problem from evan -- Tue Apr  3 17:32:43 1990 <<<

The Ph3 and SiH4 lines are pumping down to the bottle overnight.

>>> 'tylan12' problem from evan -- Wed Apr  4 16:51:52 1990 <<<

The PH3/SiH4 MFC does not close down below 5-6 sccm when requesting a
lower ammount.  Since most recipes call for 10 sccm or greater, this
is not a major problem.  Replacement MFC will be obtained.

>>> 'tylan12' problem from evan -- Wed Apr  4 17:02:15 1990 <<<

see previous report for PH3 flow problem.
tylan12 is up

>>> 'tylan12' fix from evan -- Fri Apr  6 11:47:22 1990 <<<

The erratic base pressure reading is due to the loading problem caused
when control is switched from AUTO to MAN mode.  A 10 mTorr reading in
AUTO jumps to 70 mTorr when switched to MAN.  The +15 on the baratron
head drops 0.03v during this switch.  At the zero setting range, this is
significant.  The loading is caused when the relays are energized in AUTO
mode.  tylan12 has the most relays switching of all the LPCVD tubes.
A larger capacity power supply might be needed to relieve this problem.

>>> 'tylan12' problem from evan -- Tue Apr 10 16:08:25 1990 <<<

The CALIBL temp shows 350 degrees when TEMPL = 450.  Suspect that
tc cable is shorted.  This plug has been pulled from amp board so
CALIBL will read 1373 and therefore be ignored.  tylan12 can still
be operated in this mode.

>>> 'tylan12' problem from jimmoon -- Thu Apr 12 09:15:54 1990 <<<

Thermocouple problem, as detailed by Evan on 4/10.
Also, load zone firing rate would not adjust itself
to bring the temperature up into the desired range;
hence the tube sat for nearly 12 hours without 
stabilizing.  Acknowledged past the stabilization
step and deposition proceeded normally.
Thicknesses were 50% different from front to back
of the front boat.

>>> 'tylan12' problem from evan -- Fri Apr 13 14:23:22 1990 <<<

CALIBL readout error cause has not been found yet.  Since tube is usable
as is, I will continue on Monday.

>>> 'tylan12' problem from evan -- Mon Apr 16 10:33:49 1990 <<<

The CALIBL error has been joined by TEMPL reading too high.
tylan12 is down till this is fixed.

>>> 'tylan12' problem from evan -- Tue Apr 17 09:16:02 1990 <<<

tylan12 is down through Wednesday for repair of t/c readouts.

>>> 'tylan12' problem from evan -- Wed Apr 18 16:49:40 1990 <<<

So solution found for CALIBL reading incorrectly.  A call will go in
to tylan for more information.
tylan 12 is usuable as is.

>>> 'tylan12' fix from evan -- Thu Apr 19 13:27:25 1990 <<<

problem: false readings from CALIBL t/c
cause: unknown
solution: since tylan12 can't be calibrated by normal means, a new recipe
LTOKMSET has been written to force the best known KM values into memory.
This is to be used after the control circuit boards have been reset during
work on the bank.  tylan12 should temp stabilize in a normal amount of time.

Repair of CALIBL is awaiting advise from Tystar and/or heavenly intervention.

tylan12 is up

>>> 'tylan12' problem from tang -- Thu Apr 19 21:24:40 1990 <<<


The tycom reported that the load zone temp was at 1322.2 C.
The "front" indicator light on the control panel was not
flashing (no firing at the load zone).  I suspect a bad
thermal couple on the load zone.

I have aborted my run, with my wafers still in tylan12.  I've
tried to run ltostnby, but I'm not sure if it will pass the temp
check step. Probably not.

I was running sdoltod from the standard diskette.

>>> 'tylan12' fix from tom -- Fri Apr 20 09:57:10 1990 <<<

Problem:    User reports that load zone is way high (~1300 C)
Cause:      Calibrate step in SDOLTOD recipe.
Solution:   Reset boards to get rid of offset caused by calibrate step.
            Ran LTOKMSET. Ran LTOSTNBY. Tylan12 is up.

>>> 'tylan12' problem from alley -- Wed Apr 25 16:19:38 1990 <<<

21 "run" wafers and 3 deposition monitors.  SDOLTOD for 01:50:00,
target 2um of doped PSG based on the results of Bill Tang's recent
attempt at the same thickness.
Yes, I have some problems to report.  I didn't pass leak check
the first time through.  I restarted the deposition (SDOLTOD,
01:50:00, target 2um of doped PSG based on the results of 
Bill Tang's recent attempt at a similar thickness) and watched
the tube step through the recipe.  During
temperature equilibration, the source zone stuck ~441.5 C and
stayed there; after a while, I acknowledged it.  A few minutes
into the actual deposition, all three zones were at 450 C, so
this was probably the right thing to do.
The deposition ran through, I unloaded the wafers, and found the
third problem:  the deposited PSG  was very hazy.  The haziness
was worse going from the load end to the source:  the front wafer
had mild haze mostly apparent at the 3 through 6 o'clock quarter,
the last wafer had really bad, uniform haze.  Debra and I looked
at one of the deposition monitors under UV:  it had lots of
large particulates.   Monitor thicknesses were:

         center of source boat:  26125, very uniform (I have more data)
         front of source boat:  24997, but very nonuniform (I was told
                                not to use this position, but I wanted
                                to find out how bad it was; I won't bother
                                again)
         center of load boat:   21625, very uniform

Debra has talked to me about this problem.  The wafers were very clean
going into the furnace, and I checked the boat covers for signs of spalling
(what I thought had happened).  I suppose it's due to the gas phase nucleation
she mentioned.  I'm sorry to say that I wasn't present for the whole deposition.
The two times I checked in, the pressure (and other conditions) were stable, 
but then, it was a long deposition.  Bill Tang is aware of the problem I had
but will be attempting a thinner deposition anyway.  If his results are okay,
I'll strip my wafers and try again.  I will try to watch my processes more 
closely in the future so that I can at least be more certain of what happened.
If this was due to pressure fluctuation, please see what can be done to elim-
inate these.

RLA

>>> 'tylan12' fix from parrish -- Fri May 11 13:33:25 1990 <<<

the oil filter elements has been changed
