>>> 'technics-c' problem from carlos -- Wed Jan  3 13:33:16 1990 <<<

The auto mode is not working due to high presssure in the chamber

>>> 'technics-c' problem from bob -- Mon Jan  8 14:13:48 1990 <<<

A user reports the base pressure of technics-c is too high to run
the machine in auto.

Marilyn will PM the machine and do a )2 clean which will solve this
problem. In the meantime Leslie Field reports technics-c is operating
in the automode.

technics-c is up.

>>> 'technics-c' problem from bill -- Wed Jan 17 07:20:35 1990 <<<

Plasma unstable during 300 W O2 scourge,
I varied power from 180 to 300 W and noted plasma
fluctuations throughout that power range.
The plasma is not grossly unstable ( the power remains constant )
but the fluctuations are noticable - 

>>> 'technics-c' problem from marilyn -- Wed Jan 17 09:29:01 1990 <<<

Problem: User reported that the plasma was unstable/flickering during
         an O2 scourge
Cause:   Undetermined
Solution:Observed the O2 clean for one hour; 30 minutes with the heater
         on, and 30 minutes with the heater off.  The power (300 watts)
         was stable for this entire period; no flickering was observed.
         Technics-c is UP.

>>> 'technics-c' problem from bill -- Tue Jan 23 13:23:43 1990 <<<


High base pressure ~37 mtorr after 20min scourge and 5min pumping.
It is still able to run - but it takes a long time to reach the acceptable
pressure ( 37 or 38 mtorr) at which gases are turned on.
Recommend long scourge with hot platen before much more use.

>>> 'technics-c' problem from bob -- Fri Jan 26 11:23:04 1990 <<<

A preventative maintenance plasma clean will be done today to reduce
the high base pressure on technics-c. If problems persist
they'll be investigated.
'
s

>>> 'technics-c' problem from marilyn -- Fri Jan 26 15:57:18 1990 <<<

Problem: Plasma lost towards the end of the O2 clean.

>>> 'technics-c' problem from bob -- Fri Jan 26 16:18:15 1990 <<<

Problem:   Marilyn reports loss of plasma on technics-c
	
Cause:     This occurred during a long high power (300w)
           hot clean. We have recently converted to air 
           cooling on the upper electrode and added a high
           temp cut out switch to monitor the upper electrode
           temp. It is possible that it tripped. 

           The base
           pressure is currently 30 mtorr and the ROR is about
           1mtorr/minute. This ROR reflects a very clean leak
           free chamber; however the higher than normal
           base pressure may indicate pump problems or a
           drift in the zero of the baratron. This message
           will be cc'd to parrish who can determine this.

Solution:  Increase in air cooling of upper electrode. 

	**********************************************           

	   technics-c is up. The upper limit on the low
           pressure setting has  been raised to 40 mtorr
           to compensate for the higher than normal base
           pressure. Users should experience absolutely no
           problems from this!

>>> 'technics-c' problem from parrish -- Mon Jan 29 13:50:21 1990 <<<

system down to change oil in the roughing-pump.

>>> 'technics-c' problem from parrish -- Mon Jan 29 15:36:26 1990 <<<

problem:    base pressure at 40 microns

cause:      baratron out of calibration

solution:   recalibrated baratron with a calibrated standard
            system is up.

>>> 'technics-c' problem from rolfe -- Thu Feb 15 15:18:22 1990 <<<

Technics-c is making a hissing sound while not in use.

>>> 'technics-c' problem from bob -- Fri Feb 16 16:19:36 1990 <<<

technics-c has air cooling to it's top powered electrode.
A fitting broke off and replacing it properly requires
removing the upper electrode. For this long weekend, a 
temporary fix is in place. A permanent repiar will be 
made next week.
technics-c is up for use.

>>> 'technics-c' problem from phillip -- Mon Feb 26 06:30:55 1990 <<<

The -c machine will be out of commision until 9:00am today
(Monday) for repairs of the cooling system.

>>> 'technics-c' problem from phillip -- Mon Feb 26 09:47:56 1990 <<<

P: Broken air cooling fitting.
S: Replaced broken teflon elbow at top of platen.

   (This involved replacing o-rings top and bottom of 
    platen. Also cleaned quartz insulator ring.)
The -c is available for use.

>>> 'technics-c' problem from alley -- Mon Apr 23 23:07:03 1990 <<<

Carlos had enabled technics-c for my use.  At the end of my next to last
batch (5th batch of 6), the power level gradually fell from a stable 450W
to 0.  There was no doubt good reason for this.  I was running a 10 minute
450W O2 ash program, rather than the standard 300W program.  I believe 
people have done this before, but probably 
not for five consecutive batches.  I did have some concern, so I was doing
five minute time outs inbetween ash batches, but obviously this wasn't 
sufficient.  My guess is that the tuning network heated up, mistuned and 
either it and/or the supply failed.  

Rod Alley

>>> 'technics-c' fix from debra -- Tue Apr 24 08:18:30 1990 <<<

temperature sensor on upper electrode caused power to be shut down
to system due to multiple, high power etches.

>>> 'technics-c' fix from bob -- Fri Apr 27 08:43:38 1990 <<<

Problem: User reports gurgling of pump on technics-c
Cause:   The cause is not determined
Solution:The pump fluid was checked and was about 1/2 inch below 
         the sight glass. About 75CC's of Krytox was added which
         raised the level above the sight glass. The oil level
         was sufficient and not the cause of this gurgling.
         The liklely cause is oil accumulation in the exhaust
         hose and or oil accumulation in the duct transition.
         James Parrish will check this out on his return and
         as appropriate solution will be applied. He will update
         the pump database with this pump check

         technics-c is up and no problems are caused by this noise.
