>>> 'sink3' problem from field -- Wed Jan 10 22:53:47 1990 <<<

Rinse Start 2, which controls tanks 4 - 6, seems to be connected
to Cycle End, so that as soon as I push Rinse Start 2 so I can
fill tanks 4-6, Cycle End lights up and the tanks won't fill.

>>> 'sink3' problem from phillip -- Thu Jan 11 07:30:31 1990 <<<

P: Short cycle on rinse tanks4,5,6.
S: Reset timer to 6 minute rinse interval.
   The problem as reported by Leslie is fixed.

>>> 'sink3' problem from denlinge -- Sat Apr 21 12:22:30 1990 <<<

The EDP temp controller won't turn on.  If anyone could mail me a quick tip
about how to get it on, I would appreciate it.

>>> 'sink3' problem from wenzel -- Sat Apr 21 14:42:39 1990 <<<

Temp controller for EDP bath not working -- it appears to be
the low liquid sensor.

>>> 'sink3' problem from dchin -- Sun Apr 22 22:22:41 1990 <<<

The glass container for KOH is broken. The bottom of the container became
extremely thin after a long period under KOH solution. When I loaded the wafer
cassettee, the cassettee hit the bottom and punched a hole at the thinnest
region of the container accidentally. When I came back to check my wafers,
all the solution in the container has been lost. The container need to be
replaced. 

David

>>> 'sink3' problem from bob -- Mon Apr 23 15:41:52 1990 <<<

A replacement bath for the KOH bath is in the process of being installed.
It should be operational sometime tomorow.

>>> 'sink3' fix from phillip -- Tue Apr 24 10:49:49 1990 <<<

P: 1. EDP temp. controller not working per Denlinge.
   2. KOH bath quartz beaker etched through bottom per Dchin.
   3. Tank1 drain constantly on.
S: 1: Fixed leaky n2 liquid sensor line.
   2. Installed new teflon immersion heater in
      teflon tank under supervision of the RH controller. :wq
   3. Replaced plunger mechanism in SV7.

Sink3 is up and available for use

>>> 'sink3' problem from dchin -- Sat Apr 28 13:37:54 1990 <<<

The temperature controller for KOH etch does not work. It could not be turned
on.

>>> 'sink3' problem from dchin -- Sat Apr 28 16:56:49 1990 <<<

Forget about the earlier problem I reported. The problem was due to that
the thermocouple didn't immerse under the solution deep enough. By pushing
the T.C. little deeper into the solution, it worked fine.

>>> 'sink3' problem from phillip -- Tue May  1 13:15:58 1990 <<<

The heater on the EDP etch has gone bad.
It will be replaced 5/2/90 in the a.m.

>>> 'sink3' fix from phillip -- Wed May  2 07:25:08 1990 <<<

P: EDP etch not heating. 
S: Replaced defected 'Corning model S35' hot plate.
   The problem as reported by Nam Kim is repaired.

>>> 'sink3' fix from phillip -- Thu May  3 06:53:37 1990 <<<

P: 'low liquid' sensor doomed to fail because the
    n2 tubing is kinked at 90degree transition.
S: Drilled out right angle 'galtek' fitting and installed
   in trouble spot of edp process apparatus.
sink3 is up and available for use.

>>> 'sink3' problem from nam -- Fri May  4 17:00:57 1990 <<<

Tank 1 is leaky.  The tankful of water just drained out in ~5 min
without drain solenoid on.

>>> 'sink3' fix from phillip -- Mon May  7 07:39:17 1990 <<<

P: Tank1 drains perpetually.
S: Replaced all o-rings and return spring
   in the nacom drain valve. The problem as
   reportedf by Nam is fixed.

>>> 'sink3' problem from nam -- Thu May 10 16:34:24 1990 <<<

Tank1 fill button wanted to be on all the time.

>>> 'sink3' fix from phillip -- Fri May 11 07:10:46 1990 <<<

Mtced fill components of tank1 operation.
The problem as reported by Nam should be fixed.
