>>> 'ionmill' problem from jayyang -- Thu Dec  7 14:35:18 1989 <<<

Cry-pump temperature was high and needs regeneration.

>>> 'ionmill' problem from gtdu -- Thu Dec  7 19:28:05 1989 <<<

cy
r
Cry-pump temperature is too high to operate it and need
regeneration.

>>> 'ionmill' problem from parrish -- Fri Dec  8 08:06:58 1989 <<<

system down for regenerating cryo-pump.

>>> 'ionmill' problem from parrish -- Fri Dec  8 15:40:40 1989 <<<

update:   system cooling down and should be at operating pressure about
          6:00 or 6:30 pm today.

>>> 'ionmill' problem from xwu -- Sat Dec  9 16:50:22 1989 <<<

When I was trying to seal the glass tube off from ionmill,
it broke so that the system exposured to atmosphere (very short, 
I turned the valve off immediately, but cryo pump needs to
be regenerated, the ionmill is down.

I'm sorry about that.

Xin

>>> 'ionmill' problem from parrish -- Mon Dec 11 08:07:42 1989 <<<

problem:   after further inspection I found the glass cylinder chipped
           also, and the compressor left on after the system had been dumped

cause:     the stainless steel top has feedthroughs at a bolt circle that is
           close to the glass cylinder and has to be lowered and watched to 
           asure the feedthroughs don`t touch the glass. A sign was put on the 
	   front of the system, stating that the compressor should be shut off
	   if the cryo needs regenerating.

solution:  epoxy is being applied to the glass cylinder, and should be dried
	   this afternoon, the boot gasket was cleaned, and the gate valve o-
	   ring was cleaned,and checked.
	   Being careful is the only solution to avoid the chipping of the
	   glass cylinder, and carefully following instructions.
	   .

>>> 'ionmill' problem from parrish -- Mon Dec 11 15:21:27 1989 <<<

update:   did not get the epoxy sanded off today, will start on it first
          thing in the morning.

>>> 'ionmill' problem from parrish -- Tue Dec 12 07:22:44 1989 <<<

Glass cylinder is back on the system and is cooling off. System should
be up by 11:000 am tthis morning.

>>> 'ionmill' problem from mmesser -- Tue Dec 19 21:07:32 1989 <<<

When I turn on the power supply, the cathode current wont go above 2 amps.

>>> 'ionmill' problem from parrish -- Wed Dec 20 11:04:05 1989 <<<

the system is working properly, I don`t see a problem and the system is being
used.

>>> 'ionmill' problem from parrish -- Wed Jan 31 08:01:52 1990 <<<

chamber pressure at 1000 microns and cryo-temp. in the green
will start system in regeneration process. 

>>> 'ionmill' problem from rnorman -- Wed Jan 31 14:46:29 1990 <<<

Problem: Chamber vacuum elevated and cryo temp high.

Cause: Cryo warmed up.

Solution: Parrish started the regen earlier today.  It was
          just now pumped out and the cryo compressor turned
          on.  The ionmill will be up for use in 2 hrs. when
          the cryo is below 20~k on the cryo gauge.

>>> 'ionmill' problem from parrish -- Fri Feb  2 06:28:05 1990 <<<

cryo-head temp. above 40k, system is being regenerated.

>>> 'ionmill' problem from parrish -- Fri Feb  2 15:28:27 1990 <<<

problem:    cryo temp. at 40k

cause:      system may not have had a good regeneration before last used.

solution;   regenerated system, chamber pressure is 1x10-6. system should
            reach low 7 range in about 1/2 hour.

>>> 'ionmill' problem from bierach -- Wed Feb  7 17:13:33 1990 <<<

The argon flow was somewhat erratic, and midway through my
run the controller lost it and the filament blew. (It was set
as 8x10E-5).  Otherwise OK.

>>> 'ionmill' problem from bob -- Fri Feb  9 15:48:19 1990 <<<

The argon flow controller was checked out along with the filaments
on the ionmill. Everything seems to be in working condition and the
unstable flow reported by bierach could not be reproduced. The
ionmill is up.

>>> 'ionmill' problem from bullard -- Fri Mar  2 11:53:08 1990 <<<

After about 5 minutes of stable milling conditions, the argon pressure
started to fluctuate, as well as the arc voltage, arc current, and target
current.  Finally, the arc voltage pegged past 60 and the arc current 
dropped to zero.  At this point I went through the shutdown procedure as
given in the manual, in order to avert further problems.

I notice that the argon pressure is less than 5 psi, maybe that is the
root of the problem.

>>> 'ionmill' problem from bob -- Tue Mar  6 11:57:20 1990 <<<

The ionmill experiences pressure burst on the Ar input.
The cause of this is likely the pzt contorl valve or the 
pressure regulator supplying it. James Parrish will
look into this problem shortly. Users will be posted.
.

>>> 'ionmill' problem from parrish -- Fri Mar  9 07:46:35 1990 <<<

system down for repair of pressure burst.

>>> 'ionmill' problem from parrish -- Fri Mar  9 10:25:08 1990 <<<

problem:    pressure brust when argon is flowing

cause:      PZT control valve

solution:   removed the valve, cleaned and replaced. Ran the Argon for
            15 mins. and it was controlling the flow according to the
            pressure gauge. System can be used.

>>> 'ionmill' problem from bob -- Mon Mar 19 14:04:56 1990 <<<

Problems previously reported for the pressure control valve
turned out to be problems with a leaking rotary feedthrough.
The packing nut has been tightened and pressure control is
now excellent. James will clean and repack this feedthrough
during the next regeneration cycle.

>>> 'ionmill' problem from bierach -- Mon Mar 19 15:09:41 1990 <<<

The same problem with pressure fluctuations occured.  Bob isolated
the problem as a leak in the rotation platform feedthrough.  When
tightened up, all was well.

>>> 'ionmill' problem from bullard -- Tue Mar 20 12:32:24 1990 <<<

Argon pressure fluctuations are still occuring after about 5-10 minutes
of stable milling conditions.  Shut down after 10 minutes.

>>> 'ionmill' problem from rosal -- Fri Mar 23 11:58:28 1990 <<<

Cooling water line sprung a leak when the substrate cooling switch was
turned off.  The Argon flow was unstable and the gas flow controller
shut off a few times.  It would not last long enough to do milling.

>>> 'ionmill' problem from bob -- Fri Mar 23 14:54:11 1990 <<<

The o-rings in the rotary feedthrough for the substrate rotation
were replaced and lubricated. This should fix problems that 
were reported for poor argon control.

The proteus interlock plastic case fractured and our spare was installed.

The valves that control the fas into the machine are facing backward and 
need to be rotated.

The ionmill is tested and up. The valve rotation will be done next week.

The ionmill is up.

>>> 'ionmill' problem from bmartin -- Mon Apr  2 19:45:42 1990 <<<

Cryopump needs regeneration.  Turned off to let it warm up overnight.

>>> 'ionmill' problem from parrish -- Tue Apr  3 11:42:13 1990 <<<

problem:   cryo-pump reported to need regenerating

cause:     no cause was given,the compressor was turned off.

solution:  ran N2 for 2.5 hours and regenerated system
           cold-heah temp.18K chamber press.3x10-7
           system is up for use.

>>> 'ionmill' problem from parrish -- Tue Apr  3 12:43:05 1990 <<<

problem:   valves facing backwards

cause:     retighten of the valve block, no slot for the electrical connection

solution:  removed the base holding the valve block and machined in a slot for
           the electrical connection.

>>> 'ionmill' problem from bmartin -- Wed Apr  4 17:42:29 1990 <<<

Cryopump needs regeneration.  Turned it off to let it warm up.

>>> 'ionmill' problem from parrish -- Thu Apr  5 07:27:02 1990 <<<

update:   system is being regenerated and should be up by noon today.

>>> 'ionmill' problem from parrish -- Thu Apr  5 15:02:23 1990 <<<

problem:    system need regenerating

cause:      high base pressure

solution:   regenerated cryo-pump, system is up

>>> 'ionmill' problem from bmartin -- Thu Apr  5 20:31:19 1990 <<<

Three runs on the ionmill.  During shutdown procedure, the pressure
and the temperature of the cryopump were too high, so I turned off
the cryopump to allow it to warm up overnight.

>>> 'ionmill' fix from evan -- Fri Apr  6 16:07:49 1990 <<<

parrish has regenerated the cryopump.
ionmill is up

>>> 'ionmill' problem from rosal -- Fri Apr  6 18:30:12 1990 <<<

the the hydrogen bottle used for the torch is empty.

>>> 'ionmill' problem from kuchta -- Wed Apr 11 16:22:37 1990 <<<

high voltage unable to turn on due to problem with water flow interlock.
James Parrish is cognitive of the specifics of this problem
Dan

>>> 'ionmill' fix from parrish -- Fri Apr 13 07:58:34 1990 <<<

problem:    no high voltage

cause:      low water flow

solution:   adjusted water flow, interlock is working. 
