>>> 'gcaws' problem from phillip -- Wed Jan  3 08:27:31 1990 <<<

P: No lamp on taurus box per Dave H.

S: The taurus feature is in good order on this machine.
   The local controller 'enables/disables' with a visual 
   indication.

>>> 'gcaws' problem from evan -- Wed Jan 10 10:19:54 1990 <<<

enabled to borrow a 32 board for testing gcapg pdp-11.

>>> 'gcaws' problem from bob -- Fri Jan 26 08:54:48 1990 <<<

Problem:  Omniprize shuts down Ushio 350P lamos as used by the new
          Maximus 1000.

Cause:    The house exhaust was excessive making the temp regulation
          outside the dynamic range of the Omniprize.

Solution: The manual galvenized damper was already at
          minimum. The servo damper was found to be fully
	  closed most of the time. A call to:
		Gary Gear (PLS-1000 designer)
 		Embedded Controls
		7320 E Butherus, Suite 200A
		Scottsdale, AZ 85260
		1-206-951-2713
	  was made and he donated us a precision iris.
          This was installed after a Cory Hall power
          shutdown and set to a setting that produced good 
	  servo damper control. The Omniprize will be
	  returned from the "A" mode to the automatic mode
          on Jan 29th and tested.

Current parameters are as follows:
V = 57-58.5    (Controller allows +-2V fluctuations)
I = 6-6.2 amps (+.4,-1.5 allowed)
T = 172-175C   (+-5 degrees C)
W = 350-353    (+- 5 watts)

Steve Hoagland has set the first hours operating parameters
at their maximum tolerances:
V = 50-69, I = 5-7.4, T = 165-180
Since the controller attempts to regulate temp to the mid
point of the initial band and the manufacturer recommends
160-170 C for a Maximus1000 housing, the temp band should be
narrowed before the next lamp replacement. 

For more information on the controller consult the manual on
file.


.

>>> 'gcaws' problem from field -- Sat Jan 27 18:25:48 1990 <<<


Video screen for wafer alignment completely dark - lamps were
on in the lamps illuminating the wafer, so that's not the problem.

Therefore - wafer stepper can be used for first level exposure ONLY
until the video/camera is fixed.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 08:51:53 1990 <<<

The Sierra video monitor is not displaying an image after the
tone.  The monitor is blank.  This problem is being looked into,
and you will be informed of progress.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 11:35:57 1990 <<<

After checking the "Output Video" of the CCU it was found that
a video signal was getting to the Sierra Monitor.  If no signal
was found the "Input Video" of the CCU would have been checked,
if a signal was there the CCU would have been bad. As such, 
the Sierra Monitor is bad and will need to be repaired. We
have another monitor that is being pick-up from SVA at this time.
When the monitor arrives this after noon it will be install ASAP.
The gcaws should be up for full operation by mid-afternoon, 3PM.

NOTE: The gcaws is up at this time for FIRST LEVEL only.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 14:39:51 1990 <<<

Problem: Sierra Monitor blank/no video.

Cause: The monitor went out, looks like the high voltage section.

Solution: Took out Sierra and replaced with the older spare; 
          was repaired by SVA.  The bad monitor will be repaired
          shortly and put back in ASAP.  The gcaws is up for full
          operation.

>>> 'gcaws' problem from carlos -- Mon Jan 29 16:55:41 1990 <<<

I've got about 1um misalignment even though the mask looks perfect
under the gcaws microscope. Can this be related to the camera ???

>>> 'gcaws' problem from marilyn -- Tue Jan 30 08:34:32 1990 <<<

Problem: Error #2: Possible bad lamp or incorrect set-up limits.
         234 hours
         System has been powered down for a lamp change.

>>> 'gcaws' problem from marilyn -- Tue Jan 30 11:24:31 1990 <<<

Problem: Error #2 Possible bad lamp or incorrect set-up limits
Cause: Omniprise Controller was changed from MANUAL to AUTO mode
Solution: System was powered down
          Robert Norman reset the limits
          System powered up again

>>> 'gcaws' problem from field -- Tue Jan 30 12:30:51 1990 <<<

Wafer stepper showing "low wafer vac"

>>> 'gcaws' problem from field -- Tue Jan 30 12:31:31 1990 <<<

And now not showing "low wafer vac" - seems to have been specific
to that wafer...?

>>> 'gcaws' problem from bob -- Wed Jan 31 08:07:30 1990 <<<

An attempt to run the Omniprize in the automated mode shut
the lamp off. Prior to this, the lamp appeared to be stable 
within the acceptable parameters as spec'd by Omniprize. 
Robert Norman has tightened the temperature band from 165-185 
to 165-175. The Omniprize will now seek the mean value between 
three numbers (170).

We will run the Omniprize again in automatic at the end of the
present bulbs life. This will allow us to test a new set up
and not significantly effect the users. We will also need the 
Omniprize left on and not reset when/if a shutdown occurs.
This preserves the shutdown parameters. In other words please
don't zero out the hours when the lamp is shutoff without checking
with Robert Norman or myself. We can return to normal
shutdowns after this test.

s
,

>>> 'gcaws' problem from marilyn -- Thu Feb  1 08:10:55 1990 <<<

Problem: Last user left the left chamber door open overnight; the
         chamber temperature is now at 21.6.  Set point is 20.5.
         Fine alignment not recommended until temperature
         stabilizes.

>>> 'gcaws' problem from rnorman -- Thu Feb  1 12:26:57 1990 <<<

Problem: Chamber temperature is high at 21.6~C

Cause: The chamber door was open a little.

Solution: The door was closed and waited for the temp
          to stablize to 20.5~C.  It has been 4 hrs, so
          the temp is stable and the gcaws is up for use.

>>> 'gcaws' problem from marilyn -- Tue Feb  6 15:32:42 1990 <<<

Problem: Waste oil is not draining into the waste oil bottle; instead,
it is puddling up into the keys/ways reservoir, and spilling over
onto the flat surfaces surrounding the stage.
Cause: Possible kink in the upper part of tubing.  The lower part
of the tubing looks all right.

>>> 'gcaws' problem from bob -- Tue Feb  6 16:27:56 1990 <<<

The gcaws has oil accumualting on the ways due to a plugged drain
hose. It will be fixed in the morning and doesn't effect the
user or the machine's capability.
The gcaws is up for use.

>>> 'gcaws' problem from marilyn -- Fri Feb  9 07:51:03 1990 <<<

Problem: Omniprise controller shows Error #10:
         Possible leaker; check lamp type/limits.  Replace lamp.
Cause:   Exhaust work.
Solution:Replace lamp.

>>> 'gcaws' problem from rnorman -- Fri Feb  9 12:41:30 1990 <<<

Problem: oil from the ways & means over flowing, not going down
         over fill hole.

Solution: The most of the excess oil was cleaned up; but I could
          not find the "over flow hole", it is located in the
          center of the stage.  The only way to check the hole
          would be to pour acetone in the track and see if
          the over fill bottle fills up.

>>> 'gcaws' problem from rnorman -- Fri Feb  9 12:52:52 1990 <<<

The lamp is not starting. I have just changed the parameter 
limits and will install another lamp.  You will be informed
of progress.
*************DO NOT OPERATE ***********************

>>> 'gcaws' problem from rnorman -- Fri Feb  9 14:08:37 1990 <<<

Problem: Lamp not starting, getting errors 7, 10 & 14.

Cause: Originally the lamp failed due to the air flow being shut down
       to install filters.  Then after that we just could not get
       the lamps to stay on.

Solution: The original lamp was replaced with a new "P" lamp, it would 
          not stay on after starting 3 times. We then installed an
          older lamp that had 10 hours on it that also failed due to
          the same problem, voltage < limit; the lower limit was at
          50 volts.   We then changed the TEMP limits to 180/160 and
          the lower volt limit to 47.  A new USH-350DS, #981271, was
          then installed and stabilized at 61 volt, 5.8 amps with
          a temp of 170.  After watching the lamp for 15 min. it
          looked very stable.  The lamp will be on for 1 hour at 2:50.
          The lamps needs to be on for 24 hours for critical steps,
          but until then it can be use for non-critical masks.  
          The gcaws is up.

>>> 'gcaws' problem from hebert -- Mon Feb 12 11:55:35 1990 <<<

Problem: Mask alignment is extremely difficult. There is "crosstalk"
between: X and theta adjustment; theta and Y adjustment; and
the y adjustment does NOT move the mark equally in both fields.

I spent 25 minutes trying to get good alignment. This is my first
real experience with the GCA since it got converted to an i-line.

With the g-line set-up, the X adjustment was rock solid: no crosstalk
or backlash. There was some theta backlash and some y backlash,
but no crosstalk between theta and Y and X.

As a result of my frustration with this, I gave up trying to
align my mask. This really needs to get fixed!

>>> 'gcaws' problem from bob -- Mon Feb 12 13:53:04 1990 <<<

There is crosstalk between axis when the joystick on the gcaws is moved.
This makes alignments difficult. Our support company has been consulted
and feels it is a problem in the servo circuits. We will not be able to 
service this problem until the morning. Until then, using
the gcaws will be problematic.
.

>>> 'gcaws' problem from hebert -- Mon Feb 12 16:05:25 1990 <<<

The theta, X, and Y backlash and crosstalk problem that I reported
earlier was with reticle alignment. 

Besides this problem, the mask manipulator does NOT always make
contact with the reticle.

After reticle alignment is achieved, the CRT alignment marks are
found to be scewed. This may be due to a misaligned camera.

>>> 'gcaws' problem from marilyn -- Tue Feb 13 08:41:45 1990 <<<

Problem: Theta turn screw not centered
Solution: Adjusted it back to the center of its travel

>>> 'gcaws' problem from bob -- Tue Feb 13 09:41:51 1990 <<<

The problem with the gcaws involves the mechanical plate holder
only. There are no servo or stage motion problems. These were
reported in error due to a communication problem.

The problems currently reported are:

1. Cross talk and play in the theta, x-axis and y-axis mechanical
   adjustments.

2. The plate holder requires assistance in meeting the plate.

3. The exposure times are ~2X longer than the I-line data sheet
   suggests.

All of these problems are a nuisance:however, the gcaws is up and running
with only minor inconvenience to the user. Centering the adjusting screws
prior to installing a plate minimizes crosstalk.

SVA will be requested to service the plate holder at their expense as it
is a new unti installed at the time of the I-line conversion and should
have been better adjusted.

The I-line exposure times will be further characterized upon arrival of
an I-line power probe which has been ordered.

The gcaws is up!

>>> 'gcaws' problem from liew -- Tue Feb 13 22:54:07 1990 <<<

The mask micromanipulator did not reach the mask when spindle lock
is tightened. As a result, X, Y and Theta alignment can not be performed.

>>> 'gcaws' problem from rnorman -- Wed Feb 14 08:30:26 1990 <<<

Problem: Micromanipulator not reaching the mask when spindle lock
         is tightened down.

Cause: An existing intermittent mechanical quark.

Solution: At the expense of SVA, our service reps, the micromanipulator
          will be adjusted at their convenience.  During the mean time,
          this problem can be overcome by: after tightening the spindle
          lock and the manipulator does not reach the mask, lightly
          press the manipulator to the mask.  This has been the fix
          ever since the problem occurred.  The gcaws is operational.

>>> 'gcaws' problem from hebert -- Wed Feb 14 12:58:38 1990 <<<

The wafer cassette elevators are noisier than usual.

The CRT image has a waviness to it. This may be due to a
fluctuation in voltage.

>>> 'gcaws' problem from bob -- Wed Feb 14 16:24:50 1990 <<<

The wafer cassette elevators were checked over. The lead screw,
recirculating ball bearings and the drive gears were lubed. The noise
reported by Dave Hebert is much better. The gcaws will be checked over
in a few days to see if further work is needed.

>>> 'gcaws' problem from hebert -- Fri Feb 16 08:13:40 1990 <<<

The lighting in service chase CV1 is white light. The plexy doors
on the GCAWS environmental cabinet do not seal tightly, leaving
about a 1/4 inch gap for white light to enter the envirn chamber.
The gap in the door is just above the load/unload cassettes. It
would be a good idea to put yellow lights in the service chase
and modify the door in a way that it seals better wnen closed.

>>> 'gcaws' problem from bob -- Fri Feb 16 08:39:39 1990 <<<

Problems with light leakage from the service chase cv-1 into
the gcaws have not been noticed in the 6 years of operation
of this machine. The bulbs in the service chase will be
changed to yellow to protect users in the event someone turns
them on during an exposure. It is on techjob.

>>> 'gcaws' problem from hebert -- Fri Feb 16 09:20:41 1990 <<<

I taped the environ door closed. The gap is actually about 1/2 inch
and is caused by positive pressure in the chamber.

>>> 'gcaws' problem from hebert -- Fri Feb 16 10:07:39 1990 <<<

Problem: Y-axis stepping error. Our mask set uses an "interchip"
mask to expose between fields. Our mask set is designed to use
a y-axis stepping distance of 10.32 mm. The actual stepping
distance when y-axis step is programmed 10.320 mm is 10.445 mm,
using to Vickers to measure interchip spacing. Changing the
program to 10.230 mm gives a y-axis interchip spacing of 10.320 mm.

>>> 'gcaws' problem from hebert -- Fri Feb 16 11:06:51 1990 <<<

There is NOT a problem with y-axis stepping. After reviewing
Vickers measurements with the circuit layout, we have concluded
that the problem that we are having is due to the i-line field
size.

Our circuit layout was for a 10.00 mm x 10.00 mm field. We are
printing two 5.00 cm x 5.00 cm chips along the y-axis field
center line. We then extend the size of our chip for cryogenic
test purposes using an interchip mask that exposes between fields.
This is necessary as our testing is done in liquid helium using
an alignment jig that aligns chip contact pads with test card probes.
To do this, our chips must be cut to 5.0 x 5.0 sqcm, and our chip
size including scribe lines must be 5.16 cm x 5.16 cm. 

The i-line field is NOT 10.00 mm x 10.00 mm. It is 9.80 mm x 9.80 mm.
This accounts for what appeared to be y-axis stepping error. 

>>> 'gcaws' problem from rnorman -- Fri Feb 16 13:12:26 1990 <<<

Problem: The field is not 10.0 mm x 10.0 mm, but is 9.8 x 9.8 mm.

Solution: The I-line not being 10.0 mm x 10.0 mm is not new this was
          known from the start of the installation.  By test hebert
          has confirmed that the field is 9.8 mm x 9.8 mm.  Please
          make note of this if you have not already. The gcaws is up.

>>> 'gcaws' problem from bob -- Fri Feb 16 15:31:41 1990 <<<

Black deposits on the front of poly boats occur after doped
runs. This doesn't seem to hurt anything. The doped poly on
the wafers is good. It is speculated that the color is
produced by the lack of reflectivity associated with the
crystal shape of this deposit.
tylan11 is up
>>> 'gcaws' problem from hebert -- Thu Feb 22 09:02:10 1990 <<< [No Comment]

>>> 'gcaws' problem from hebert -- Thu Feb 22 09:08:23 1990 <<<

Bad focus at 268. Good focus appears to be 280.

>>> 'gcaws' problem from marilyn -- Thu Feb 22 15:17:59 1990 <<<

Problem: old focus no longer usable/it has drifted
Solution: f/e matrix test new focus: 280  new exposure: 1.5

>>> 'gcaws' problem from hebert -- Wed Feb 28 09:40:42 1990 <<<

The right fiducial is not entirely visable. About 1/3 of the
fiducial is not within view.

>>> 'gcaws' problem from hebert -- Thu Mar  1 08:46:55 1990 <<<

Problem: Only 1/2 of right fiducial is in view.

Solution: I adjusted the mechanical stop so that all of
the right fiducial and all of the left fiducial for mask
alignment to column are in view.

The problem may be cleared from the job list.

>>> 'gcaws' problem from hebert -- Thu Mar  1 09:22:34 1990 <<<

The focus at 280 is not very good for features up to 10 microns
using KTI 820-27 P/R (Eaton Pgm 10). A focus/exposure test needs
to be done.

>>> 'gcaws' problem from marilyn -- Thu Mar  1 14:27:03 1990 <<<

Problem: focus shifted
Solution: performed f/e matrix test
          new focus: 275   new exposure: 1.5

>>> 'gcaws' problem from aplee -- Mon Mar  5 02:43:06 1990 <<<

manipulator does not come all the way down after I turn the spindle lock clockwise, that makes it impossible to align the mask. I think the vacuum tube on the
manipulator is pulling on the manipulator.

>>> 'gcaws' problem from rnorman -- Mon Mar  5 14:05:09 1990 <<<

The gcaws lamp, USH-350DP, was installed and has stabilized.  When
it switched into "operate" I switch the omniprise to the "A" mode.
While the lamp was off, failed due to error 2, I changed a AMP
parameter from 7.4-5.0 to 6.4-5.0.  The operating parameters at this time
are: Volt @ 57.0, AMP @ 6.2 and temp @ 170.
The gca is operational.

>>> 'gcaws' problem from rnorman -- Wed Mar  7 11:44:31 1990 <<<

Problem: Newly connected printer not printing data from Omniprise.

Cause: Phil found wires 2&3 crossed in the RS232.

Solution: The wires were switched around.  The printer now
          prints out date from the omniprise.

>>> 'gcaws' problem from hebert -- Wed Mar 14 10:13:34 1990 <<<

On 3/13, focus of 276 and exposure of 1.1 sec worked well for
submicron litho using Olin-Hunt 6512 P/R. Today, focus is poor
for features below 6.0 microns on a side. A focus/exposure test
matrix was run varying focus from 260 to 290 and exposure up
to 2.0 seconds. This was done with both Olin 6512 and KTI 820-27.
No "good" focus was found and long exposure (about 2.0 sec) is
needed to get P/R to clear using std develop cycles.

Lamp has over amped and "Err 2" is flashing on the display. Could
there be a parallel short to the lamp? That might explain the over amp
and possible decreased dosage from lower bulb intensity.

>>> 'gcaws' problem from bob -- Wed Mar 14 11:20:48 1990 <<<

Problem:  gcaws users report exposure times are excessive.
Cause:    currently no cause has been found. Inspection 
          reveals no problems with the lamp.
solution: the lamp has been replaced and is now stabalizing
          and requires 24 hrs prior to a focus/exposure test. Users
          are cautioned to use it only for course alignment.
        

>>> 'gcaws' problem from bob -- Wed Mar 14 14:06:20 1990 <<<

test

>>> 'gcaws' problem from bob -- Wed Mar 14 14:06:47 1990 <<<

The gcaws has a new lamp in it. It is useable for course faetures
only until a focus/exposure matrix is run. This is scheduled for
3-15-90 in the AM.

>>> 'gcaws' problem from bob -- Fri Mar 16 16:40:21 1990 <<<

The lamp power supply is reporting error messages for the lmap.
It is currently operating and it's parameters are within normal
boundries. Further work on the controller will be done next week.

The gcaws is up for use.

>>> 'gcaws' problem from rnorman -- Mon Mar 19 09:55:14 1990 <<<

Looking at the lamp failure diagnostics print out on 3/16 there
was a major power drop from 6.3 amps, 56.0 volts, 171 temp @ 52.548
hrs to 0.6 amps, 20.5 volts, 168 temp at 52.548 hrs. causing lamp
failure. The lamp was re-started.  Talking to Steve Wiseman(omniprise engineer) 
he said the cause could be: 1) power line drop, which we have had on a regular
basis, according to bob. Or 2) a bad connection, like the spider 
connector in the lamp assembly.

When inserting the lamp into the spider there should be the feel
of resistance, a noticeable pressure that the lamp is in the spider
connector.  It looks like our "spider" connector is worn out and
in need of replacement, because you hardly notice the lamp is being
inserted into the spider connector.  A new connector will be ordered
and the power line will be monitored. NOTE: THE GCAWS IS UP AND
OPERATING in the "A" mode until further notice.

>>> 'gcaws' problem from nam -- Mon Mar 26 12:24:34 1990 <<<

Cassette indexing problem; When started, cassettes indexed down and without
                           transfering wafer to the centering chuck, cassettes
                           raised again.  No exposure happened of course.

>>> 'gcaws' problem from ling -- Fri Mar 30 16:04:35 1990 <<<

wafer after exposure does not go to the receiver cassette. 
Problem is solved by jimmon.

>>> 'gcaws' problem from field -- Fri Mar 30 18:03:35 1990 <<<

Wafer stepper didn't load the wafer in the top-most position
of the input cassette.  Worked fine when I put the wafer
in the 3rd slot down and tried again.

>>> 'gcaws' problem from rnorman -- Mon Apr  2 08:19:27 1990 <<<

The gcaws is down for a lamp change and maintenance.  You will be
notified when it is up for use.

>>> 'gcaws' problem from rnorman -- Mon Apr  2 09:48:40 1990 <<<

Scheduled maintenance this morning was to replace the "spider" or the 
anode connection of the lamp, but after looking at the housing it would
be very tricky to remove and meticulous to realign.  The spider pins
do not seem to be making sufficient contact with the anode of the
lamp, so for a temporary fix the pins were adjusted for a firm fit.

A new 350S was installed and the omniprise limits were changed as
follows:
       Amps:  6.5, 5.1
      Volts:  68.5, 54.0
       Temp:  175, 185

When the Lamp is started the light monitor will be installed and the
lamp will be adjusted for max. output light.

>>> 'gcaws' problem from debra -- Mon Apr  2 16:19:33 1990 <<<

gcaws still needs focus/exposure test following lamp change. This
will be done first thing 4/3. 

>>> 'gcaws' problem from bob -- Tue Apr  3 10:16:12 1990 <<<

The wafer stepper is ready for use however a focus/exposure has
not been run. This will be done first thing this am and the results
reported.

>>> 'gcaws' problem from marilyn -- Tue Apr  3 15:57:22 1990 <<<

Problem: Double doors on the side of the wafer stepper facing the
         reichert bulge outwards
Cause: Metal "stop" on floor broke loose; therefore, doors fail to
       catch and hold into place. The "stop" needs to be reattached
       ASAP so the the temperature stability of the gcaws is not
       compromised.

>>> 'gcaws' problem from field -- Wed Apr  4 16:25:00 1990 <<<

awh timed out a couple of times
machine still operable

>>> 'gcaws' problem from judy -- Wed Apr  4 19:11:24 1990 <<<

Tried to use settings for I-line resist (1.1um) of 0.8 sec and focus 268
I was aiming for <2um features - results WAY OVER EXPOSED!!!! It was a
light field mask and the underlying film was polysilicon.  Do you have
any suggestions?  I tried to reduce the exposure time (0.7) but little changed.
I also tried to develop twice, but it didn't seem to help any either.
Yes, I did do a post exposure bake.

I earlier tried a focus/exposure test, but on eaton dummies which weren't
dehydrated so I had horrible adhesion problems.  

Mike

>>> 'gcaws' problem from debra -- Thu Apr  5 15:27:22 1990 <<<

Mike and I have done some focus/exposure test using poly dummies,
and have found that for the 1.1 micron resist, the .80 sec exposure
time with a focus of 268 is good down to .5 microns. It appears that
dummies which are used to do this test must be: acetone stripped of
any previous resist, piranha cleaned, and lightly plasma cleaned in
technics-c at 50Watts, O2, for 5-10 minutes, dehydrated, HMDS, spin-
coated. Failure to do the plasma clean will result in poor adhesion, 
and misinterpretations of the best focus/exposure parameters. Improper
cleaning of device wafers will also lead to photo problems.
 Debra

>>> 'gcaws' fix from evan -- Wed Apr 11 14:33:15 1990 <<<

problem: can't enter new student accounts
cause: too many files
solution: when old user id's are removed using ACNT, they still continue
to exist until all their files are deleted using: DELETE $XX$DX1 * *
The XX should be the old user's id.  Include the *'s to remove all their files.

The list of all files using LISTF should be checked and the id's of former
users noted.  These files should be deleted using the above method.

I did this for an old ES file of my own.  I was able to add a dummy new user id
ok.
This should free up alot of disk space.
gcaws is up
From bob Thu Apr 12 15:26:08 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA19546; Thu, 12 Apr 90 15:26:05 PDT
Date: Thu, 12 Apr 90 15:26:05 PDT
From: bob (Robert M. Hamilton)
Message-Id: <9004122226.AA19546@argon.berkeley.edu.>
To: debra, evan, rnorman, voros
Subject: GCA
Cc: bob
Status: R

SVA has been contacted and an appointment set up for GCA service
on April 24th. This is close to the 600 hours on the current
lamp.

Dick Ziegra will be here to:
install a new maximus lamp connection (spider)
replace the maximus dichroic mirrors
align the fibre optic bundle

Parking will be arranged by Susan the day before.

I have also scheduled a shutdown of the new lab exhaust with
DOFM at 7:00 am. The lamp should be shut off and not restarted 
until this work and Dick Ziegra are finished.

I'll reserve the gcaws from 7:00am-12:00.

Bob



>>> 'gcaws' problem from field -- Thu Apr 12 16:34:53 1990 <<<

AWH timed out on my second wafer.  When I reran it, it
was OK.

>>> 'gcaws' problem from field -- Mon Apr 23 13:13:32 1990 <<<

AWH timed out on me three times.  Eventually was able to run my
wafers.

>>> 'gcaws' fix from marilyn -- Mon Apr 23 14:47:15 1990 <<<

Problem: user experienced AWH "time-outs"
Solution: should not have been reported as a problem/this happens
          sporadically

>>> 'gcaws' problem from bob -- Tue Apr 24 10:22:47 1990 <<<

The gcaws is down for a lamp change and lamp parameter set up.

>>> 'gcaws' fix from bob -- Tue Apr 24 16:00:15 1990 <<<

A new lamp has been installed on the gcaws. New focus/exposure fiqures
are posted on the machine. The lamp power supply is periodically alarming
as we have installed a new style lamp who's parameters have not yet
been established. These alarms can be ignored and do not effect the user.
Current lamp is a Ushio 350DP.
The gcaws is up and ready for use.

>>> 'gcaws' problem from hebert -- Wed Apr 25 10:13:07 1990 <<<

Unstable lamp temp. The lamp reached 181 deg C during my reservation.

Error 10 on Omniprise: "Volt<min  -  possible leaker. Check lamp type/limits.
                        Replace lamp."

Olin Hunt 6512 best focus: 0.8 sec and 268. Posted as 0.8 sec and 266 on 4/24.

G-line resist focus also higher than on 4/24: 270 vs 266. 

The change in focus may be related to lamp problem.

>>> 'gcaws' problem from hebert -- Thu Apr 26 10:46:32 1990 <<<

I tried to rework the litho that didn't turn out good on my wafer
on 4/25. I used the Olin-Hunt i-line P/R and ran a focus/expos test
on a thermally oxidized silicon wafer. Today the best F/E was at
268 and 1.2 seconds (dark field mask). On 4/25 it was 268 and 0.8 sec
for the same mask.

On my wafer, the contact vias did not clear after 2.5 develop cycles.
As reported on 4/25, 5 x 5 micron features do not look as good as they
did before the lamp change on 4/24. Two micron features look somewhat
square. 

There may be a problem with lamp intensity: on 4/25 an exposure time
of 0.8 seconds allowed features to clear upon developing. Today, 1.2 seconds
is not enough to get the same features to clear (i.e. same P/R with
post expos bake and same mask as used on 4/25).

>>> 'gcaws' problem from marilyn -- Fri Apr 27 10:50:18 1990 <<<

Problem: Excessive AWH "time-outs" from which the system does not
         recover.  Wafers stack on top of each other; they must
         then be manually removed and the jog terminated/restarted

>>> 'gcaws' problem from jiahua -- Fri Apr 27 11:03:56 1990 <<<

Sometimes the wafers couldn't be moved to the reciever.

>>> 'gcaws' fix from marilyn -- Fri Apr 27 11:13:46 1990 <<<

Problem: Excessive AWH "time-outs" from which the system does not
          recover. Wafer stack at the chuck; job must then be
         terminated/restarted
(Temporary) solution: aborting job/resetting the elevators/then
         restarting the job provides a temporary fix.

>>> 'gcaws' problem from rnorman -- Fri Apr 27 12:51:09 1990 <<<

The gcaws will be down for a lamp change, to fix the exhaust hose and to change
some omniprise parameters.  You will be informed when it is up for use.

>>> 'gcaws' fix from rnorman -- Fri Apr 27 14:00:33 1990 <<<

The DP lamp was replaced with a new 350-DS, #9Y0175, and has been started.
The Omniprise printer in also on printing data.  The hole in the exhaust hose
was removed and the hose reconnected.  I did not change any parameters since
the ones at this time were originally set-up for a DS lamp; though the orifice
may need adjusted to get minimum lamp temperature fluctuation.  Debra will
connect the "light probe" and adjust for max. output in one hour; she will
inform you after that point of the status.

>>> 'gcaws' fix from bob -- Mon Apr 30 08:52:06 1990 <<<

Dick Ziegra of SVA will be here first thing, May 3rd. to service
the Maximus1000 light source. He will replace dicrhoic mirrors and
align the source. This should increase the energy output. The
gcaws is reserved for this service from 8:00-16:00.

>>> 'gcaws' problem from nam -- Mon Apr 30 13:04:28 1990 <<<

I had several "AWH time out".  I had to reset the job to unjam it.
For last 9 wafers, it worked fine without time out.

>>> 'gcaws' fix from marilyn -- Mon Apr 30 13:25:44 1990 <<<

Problem: AWH "time-out"
Cause: Receive cassette was not seated on the platform correctly
Solution: Reseated cassette; the gcaws is UP

>>> 'gcaws' fix from rnorman -- Fri May  4 14:04:29 1990 <<<

The lamp was still not operating in the "I-line" region well enough, so
the lamp temperature limit was raised to 190-200; operating at 195~.
The operation parameters are now at 6.0-6.1 amps, 57.5-58.5 volts.
After increasing the operating temp from 185 to 195 we had an increase in 
peak intensity by about 20%; as monitored by D.Hebert and CO.  Debra is now 
testing the lamp and will inform you of progress. The omniprise is controlling
the lamp temp. by fluctuating the damper between 25% to 65% of full open.
The gcaws will be up for use after Debra's tests.

>>> 'gcaws' problem from hebert -- Tue May  8 10:40:04 1990 <<<

The lamp temp fluctuates between 194 and 196 deg C. Focus of 
2.0 micron x 2.0 micron features using -DP lamp at higher operating
temp is slightly better than when the lamp was being operated at 184 
deg C. Focus of these features is still not as godd as with the -DS
lamp. Maybe further increase of lamp temp would help.

The GCAWS needs baseline correction. 

>>> 'gcaws' fix from rnorman -- Tue May  8 12:59:34 1990 <<<

Problem: Focus of 2.0 micron features better but still not as good
         as the "DS" lamps even with the increase of lamp temperature
         from 185 to 195.

Solution: During the next lamp change we will increase the lamp
temperature to operate at 200~C.  This is the maximum lamp temperature
that we can operate safely.  According to Steve Wiseman, the Engineer of the
Omniprise, there will be a temp. point where the "I-line" will spread out
and not be sharp, which we do not want.  Steve said we may be at that
point or approaching it.  If all else fails we may have to use the "DS"
lamps.  Please have patience with our lamp problems, we are trying to
resolve them as fast as we can.  We do appreciate your comments and
input.
