>>> 'gcapg' problem from rnorman -- Tue Jan  2 08:32:06 1990 <<<

Problem: APER INIT POS 1A
         FUNCTION TERMINATED

Solution: The pg was rebooted to clear error.

>>> 'gcapg' problem from marilyn -- Fri Jan  5 10:24:11 1990 <<<

Problem: No matter which job/mode is being run, the following error
         crops up:

         LIMIT: H INNER
         REPEAT PLATE

         or:

        LIMIT: A INNER
        REPEAT PLATE
       
        The job is then terminated.

>>> 'gcapg' problem from bob -- Fri Jan  5 14:55:37 1990 <<<

A number of unrelated errors are appearing on the gcapg.
These errors prevent the gcapg from operating. Because the
errors are unrelated the likely cause is the interface
chassis ofr the computer. On Monday morning edge connections 
on the  interface chassis and the computer will be cleaned 
and the machine tested. The gcapg is down.

>>> 'gcapg' problem from bob -- Mon Jan  8 13:56:21 1990 <<<

There remains a problem with the angle motor drive on the gcapg. 
Robert Norman is looking into the problem and is in contact with 
SVA, our support company. Progress will be reported. The gcapg is
down and NOT AVAILABLE FOR USE!

>>> 'gcapg' problem from rnorman -- Mon Jan  8 14:47:00 1990 <<<

We continue to have a problem with the Aperture/angle drive motor.
The motor fluctuates or vibrates even when nothing is being ran.
The Voltage to the AL1 card, driver card for motors, was checked
and no excess ripple was measured. Also, the AL1 card was switch with
one on the other two, but even with a different card the motor still
vibrated.  The problem is very much looking like a bad motor.  Dick
from SVA will contact me in the morning when he arrive at work to
talk further.  The gcapg is still down. ***DO NOT OPERATE***

>>> 'gcapg' problem from rnorman -- Tue Jan  9 14:25:30 1990 <<<

I talked with Dick from SVA and he will be arriving in the 
morning to check out the problem.  The PG iss still down.
**DO NOT OPERATE**

>>> 'gcapg' problem from bob -- Wed Jan 10 13:08:36 1990 <<<

The gcapg has a defective power supply which will be
replaced in the morning. The pg will require readjustment
of the 'pod' ie heigth,width and angle settings. This is
a time consuming problem. The gcapg will not be available
before Monday, Jan 15th.

>>> 'gcapg' problem from bob -- Thu Jan 11 15:25:02 1990 <<<

The gcapg is now operating. A 5V supply (GCA p/n 00159203,
mfg # Lambda MLOS-X-5) in the servo chassis failed with 
resulting vibration of the heigth, width and angle motors. 
This resulted in large numbers of limit errors and the eventual 
failure of the system to boot.

Dick Ziegra of SVA replaced the supply and checked over the
aperatures and condition of the 'pod'. Angles and Alignment
were run and inspected. The gcapg is in excellent condition
according to this test.

In addition Dick has suggested a regular test pm for the
gcapg. Debra and Marilyn are now working on a procedure. In
addition Debra is correcting the manual on the wand and 
putting in the proper workpiece compenstations which have 
not been correctly used in the past. A cap for the chrome
light is being made by Parrish to make capping this light
source easier when not in use.

The gcapg is up and focus tests are being run. It will be
marked off the status board when these are finished by
Marilyn.

>>> 'gcapg' problem from bob -- Thu Jan 11 15:45:28 1990 <<<

The gcapg is repaired and running. A new exposure setting must be
ascertained and a test mask is being run to determine this. The gcapg
will be available to users when Marilyn has finished these
test and marks the machine up.

>>> 'gcapg' problem from marilyn -- Fri Jan 12 16:01:49 1990 <<<

Problem: New focus and exposure needed to be determined for the 
         emulsion room
Solution: Performed f/e L-bars tests
          New focus: 262
          New exposure: 38

>>> 'gcapg' problem from marilyn -- Mon Jan 22 08:26:29 1990 <<<

Problem: This problem is with the tape drive.  The top middle
         tension roller is hung up in the down position.  As a
         result, tapes cannot be loaded.

>>> 'gcapg' problem from evan -- Mon Jan 22 09:03:15 1990 <<<

problem: PERTEC tape drive tension arms are not moving to load position.
cause: Load Limit microswitch not being contacted by supply arm.
sloution: readjusted microswitch position per section 6.6.3 of PERTEC
operating and service manual.  The positioning bracket had indications
of previous position settings. It was found at the extreme end of its
possible motion. The microswitch was removed and the lever was found to
be bent. Straightening the lever allowed the switch to be located in the
middle of the adjustment range.
the pertec drive is up.

>>> 'gcapg' problem from marilyn -- Fri Jan 26 16:04:18 1990 <<<

Problem: Pigtail in lamp housing frayed/needed to be replaced
solution: Replaced by Bob.

>>> 'gcapg' problem from marilyn -- Fri Feb  2 15:28:59 1990 <<<

Problem: Computer halted during a job with the following error
         at the ADDRS DATA: 145256
Cause:   Unknown
Solution: Rebooted computer.  The PG is up.

>>> 'gcapg' problem from hebert -- Fri Feb  9 14:52:07 1990 <<<

Problem: Marilyn ran a focus/exposure test on 5 in chrome masks.
The test mask is a series of vertical and hortizontal lines
of varying L/S. All lines, regardless of width, show a "jog"
in two places along the length. Each line is formed by butting
three flashes. For small line widths, this jog is pronounced
enough that it could cause narrow transmission lines that have
small space between them to become shorted on a circuit.

Marilyn varied focus from 136 (step 1 micron) to and including
139 microns. Each focus was evaluated at 4 different exposures:
.390 s; .400 s; .410 s; and .420 s. 

The best focus and exposure from this test is 139 microns/.420 s.
This focus/exposure is the best for minimizing the impact of the
aforementioned line jog on line continuity in both horizontal and
vertical directions on the mask.

>>> 'gcapg' problem from rnorman -- Wed Feb 14 08:20:09 1990 <<<

Problem reproted that verical and horizontal lines, regardless of
width, shows a "jog"; where each line is formed by "butting" flashes
together.  After discussion with bob, it sounds like the lamp is out of
alignment and will need adjusted to center or max.  We will work on
this solution today.  You may use the PG if this slight misalignment
is not critical for your process until it is fixed.

>>> 'gcapg' problem from rnorman -- Fri Feb 16 13:30:01 1990 <<<

We are in the process of aligning the lamp for maximum intensity at
the stage.  We believe the lamp is slightly out of adjustment as such
we get "jogs" in a line.   We are working to resolve this problem.
The PG is still up.

>>> 'gcapg' problem from bob -- Fri Feb 16 15:28:15 1990 <<<

There remains problems with the gcapg in producing features at the
smallest sizes. These will be further looked into next week. In
the meantime the gcapg remains up for use and few users are
effected by these minumum feature size problems.

>>> 'gcapg' problem from liew -- Sat Feb 17 13:11:28 1990 <<<

One side of the chrome mask (always the same side in the three masks I made)
took longer to etch clear. There is some residue in the mask that remains
after 60sec etch time. One can miss observing this if one does not look
carefully under the microscope. The residue is clearly visible at the
fiducial. I did an additional 30 sec (to the 60 sec in program 91) to
clear the open area. The fact that this appears at one side of my 
layout in all three masks excludes the possibility of non-uniformity in the 
chrome mask (The probability that I had put the bad side of the masks the 
same orientation on the PG stage, I think, was really small). I don't
know what went wrong.

>>> 'gcapg' problem from hebert -- Wed Mar 21 15:35:18 1990 <<<

I had about 16 masks printed in the past few weeks. Two layers
have tight alignment (e.g. 0.5 micron contact to a 1.5 micron 
Josephson junction; 1.0 x 3.0 micron contact to a 2.0 x 4.0 micron
JJ; and 2.0 x 2.0 micron contact to a 4.0 x 4.0 micron JJ).

The contact to JJ electrode mask registration is not good. Last
November a diagnostics test was run on the PG. It was determined
at that time that we had both a focus and registration problem
from layer to layer. The focus problem was fixed: the stage was
tilted by 0.001 inches. The registration error on the mask was about
3 microns in both x and y directions. The mask that I'm having
trouble aligning on the GCAWS has the JJ electrode contact window
about 0.7 microns off target in the y direction and about 0.3 microns
in the x direction on the wafer.

Quartz reticles were used to help minimize thermal drift during
PG. An angles and alignment test should be performed. On my circuit wafer,
the target showed about 0.2 microns misalignment in the x direction
and no shift in y, but the contacts are misplaced on the reticle
in both x and y (more in the y direction).

>>> 'gcapg' problem from marilyn -- Thu Mar 29 08:54:10 1990 <<<

Problem: Taurus light went off; cannot continue with job queue.

>>> 'gcapg' problem from bob -- Mon Apr  2 08:15:12 1990 <<<

The gcapg is up for use. The feature placement on plates is being
checked as Dave Hebert has reported differences of several microns
of small features, accross a plate, in succesive plates. Other than
this, the gcapg is up and wroking well.

>>> 'gcapg' problem from bob -- Wed Apr  4 10:33:00 1990 <<<

Unlocking gcapg.

>>> 'gcapg' fix from phillip -- Thu Apr 12 07:42:40 1990 <<<

Replaced VT100 terminal with a VT220 terminal
at request.
The PG is available for use.

(Debbie, can you please check out the operation of
 the new terminal and apprise? I believe the 'set-up'
 is correct but may need slight modification.     )
>>> 'gcapg' problem from lsfan -- Mon May  7 20:03:37 1990 <<< [No Comment]

>>> 'gcapg' problem from marilyn -- Fri May 11 15:00:47 1990 <<<

Problem: Tape drive does not read tape/tried several times/cleaned
         the tape heads also. It appears that the VT220 and drive
         are not "talking" to aeach other

>>> 'gcapg' problem from evan -- Mon May 14 11:57:17 1990 <<<

The tape drive is broken.  The take-up are tension sensor has failed.  A
replacement part is being ordered.  I am also trying to find one closer by
than Maryland.

I will update when I have more info on when part will arrive.

gcapg is down

>>> 'gcapg' problem from evan -- Tue May 15 08:54:47 1990 <<<

The part needed for repair of the tape drive will arrive via Federal Express
on Thursday.  It should only take an hour or so to install and align.
