>>> 'excimer' problem from partlo -- Wed Jan  3 10:56:16 1990 <<<

The N2 tank for purge on the Cymer is empty.

>>> 'excimer' problem from evan -- Wed Jan  3 11:57:32 1990 <<<

A new 3500 psi cylinder of n2 has been installed.

>>> 'excimer' problem from ferguson -- Tue Feb 20 10:33:45 1990 <<<

The nitrogen tank for the laser needs to be changed.

>>> 'excimer' problem from evan -- Tue Feb 20 11:54:33 1990 <<<

A new cylinder of N2 has been installed.

>>> 'excimer' problem from evan -- Fri Feb 23 14:49:49 1990 <<<

A display box that parallels LED indicators with those on the front of the
laser has been installed by the door to GL4.  The status of LASER ON and
STANDBY are indicated.  It has been noticed that the STANDBY lamp stays on
when the LASER ON lights.  This is a 'feature' of the excimer design and is
normal.

>>> 'excimer' problem from evan -- Thu Mar  1 16:29:30 1990 <<<

There is a lasergas cylinder which appeared in the gas storage area.
Is this a new cylinder for your laser or is this an empty?  There are
no UC storehouse tag on this.

>>> 'excimer' problem from richard -- Thu Mar  8 16:59:32 1990 <<<

N2 on the excimer is below 100psi

>>> 'excimer' problem from evan -- Fri Mar  9 09:39:53 1990 <<<

replaced n2 cylinder. excimer is up
>>> 'excimer' problem from callicot -- Mon Mar 19 13:44:12 1990 <<< [No Comment]

>>> 'excimer' problem from callicot -- Mon Mar 19 20:45:11 1990 <<<

Nitrogen Out!

>>> 'excimer' problem from richard -- Tue Mar 20 09:23:56 1990 <<<

N2 bottle is out.

>>> 'excimer' problem from evan -- Tue Mar 20 14:11:50 1990 <<<

A new cylinder of n2 was installed.  All fittings from cylinder to house n2
check valve were leak checked; no leaks found.  I found the regulators had been
altered; the intermediate regulator had been screwed all the way IN.  These
regulators are not to be changed by anyone but lab staff.  If the n2 cylinder
is low, screwing in the valve will not get you more pressure.  The setting of
the precision regulator is very critical. It has been set to deliver 66 psi
to the laser, as read by the control box, when house n2 falls.  By setting this
higher, too much cylinder n2 is used.  
Please report if the laser cuts out on low n2 error but do not touch regulators.

>>> 'excimer' problem from callicot -- Thu Apr 19 16:45:20 1990 <<<

New gas fill
shot count 281.7M

KrF Pres. 120 psi
N2 Pres. 110 psi

>>> 'excimer' problem from callicot -- Mon Apr 23 21:53:09 1990 <<<


New gas fill
Kr pressure 120 psi
N2 pressure 85 psi
Shots 282.9M
------ N2 is almost out !!! ------
------ Low shot power???    ------

>>> 'excimer' fix from evan -- Tue May  1 16:53:54 1990 <<<

New n2 cylinder, #688, installed.  The cylinder cap and outlet plug were
gone from the chase.  Did one of you move it somewhere?
