>>> 'cpa' problem from rnorman -- Mon Jan  8 14:56:05 1990 <<<

The left L/L feedthru has arrived and will be installed tomorrow
morning.  Please do not use the left load lock.  The right L/L
is still operational.

>>> 'cpa' problem from rnorman -- Thu Jan 11 14:54:22 1990 <<<

Problem: Leak in left L/L feedthru.

Solution: Received a free feedthru from HVS and installed.
          The left load lock was tested and works well.
          The cpa is up for use.

>>> 'cpa' problem from parrish -- Tue Jan 16 15:15:50 1990 <<<

problem:   oil on the floor by load lock

cause;     the exhaust hose was coupled together at the floor and was leaking

solution:  removed the two piece hose and replkaced with a single one.

>>> 'cpa' problem from parrish -- Tue Jan 16 15:18:57 1990 <<<

problem:   foreline pressure at 40 microns

cause:     pump operating at high pressure

solution:  changed the oil, and inline filter, pressure still at 22 microns
           system is up. pressure has to be monitored for rising pressures
           if pressure continue to rise we will have to pull the pump.

>>> 'cpa' problem from rolfe -- Fri Jan 26 11:49:11 1990 <<<

Three pallets left outside right LL.
Key lock on power supply #1 left on.

>>> 'cpa' problem from bob -- Fri Jan 26 12:06:12 1990 <<<

New pallets were left of weijie. The power supply switch
does not require turning off. 
The cpa is up.

>>> 'cpa' problem from rnorman -- Tue Jan 30 09:55:09 1990 <<<

The cpa up under a chamber clean and is NOT UP for use.  Parrish
at this time is modifying some new shielding to be installed.  When
he returns the shielding will be cleaned and installed and will be up
for use.

>>> 'cpa' problem from rnorman -- Tue Jan 30 13:51:42 1990 <<<

Problem: Chamber dirty

Solution: All the shielding was replaced.  The window glass
          were replaced. Also, the rail bias ceramics were
          replaced.  The chamber was thoroughly vacuumed out.
          All the targets were burned in and the cpa is
          pumping down.  The vacuum at this time is 3x10-6;
          it will be down at base pressure of 3x10-7 by tonight
          or tomorrow morning.  The cpa is up for use.

>>> 'cpa' problem from bailey -- Wed Feb  7 13:34:36 1990 <<<

left chain in right load lock derailed; I was able to replace it.  The chain
tensioners need to be improved.

>>> 'cpa' problem from bailey -- Fri Feb  9 00:23:12 1990 <<<

this time, the drive gears for the right track derailed in the right load
lock.  the gears are not aligned properly. I was able to pop the chain back
on, but this will happen again unless the gears are aligned.

>>> 'cpa' problem from rnorman -- Fri Feb  9 07:29:42 1990 <<<

The cpa will be down shortly to repair the chain drive in the Lt.
load lock.  DO NOT OPERATE.

>>> 'cpa' problem from rnorman -- Fri Feb  9 09:11:16 1990 <<<

Problem: Left load lock chains were poping off the track.

Cause: The chains were loose.

Solution: One link from each chain was removed to tighten the tension.
          The track was tested and is up.

>>> 'cpa' problem from phillip -- Tue Feb 27 06:35:23 1990 <<<

The cpa is in the audible 'alarm' mode as of this writing.

>>> 'cpa' problem from rnorman -- Tue Feb 27 06:52:08 1990 <<<

Problem: Error alarm.

Cause: House air pressure at 40 psi.

Solution: Phil when down to check out the compressor.
          The cpa will  be up when the flashing red
          light, low air pressure alarm, goes off.

>>> 'cpa' problem from rnorman -- Mon Mar  5 13:45:07 1990 <<<

There is no H2O supply to the cpa due to phil working on a 
water main.  When he gets done the cpa will be up for use.

>>> 'cpa' problem from rnorman -- Mon Mar  5 14:16:33 1990 <<<

Phil has finished his water line repairs  and the cpa is up.

>>> 'cpa' problem from phillip -- Tue Mar  6 11:09:24 1990 <<<

Replaced expired visual illuminator on local taurus controller

>>> 'cpa' problem from denlinge -- Sun Mar 25 00:56:28 1990 <<<

I was watching the plasma as the wafers were heading toward the W target
and I saw stuff falling off the target.  Chunks were flaking off and some
were glowing red.  I never watched a target before so I don't know if it 
is unusual or not.

>>> 'cpa' problem from rnorman -- Thu Mar 29 13:35:29 1990 <<<

Problem: W target dropping "things" when sputtering.

Cause: Target was most likely contaminated by the other targets and
       trapped Water vapor or native oxide.

Solution: The cpa was vented and the W was looked at, no problem
         was observed.  The cpa is up for use.

>>> 'cpa' problem from parrish -- Thu Mar 29 13:43:05 1990 <<<

oil level was checked

>>> 'cpa' problem from denlinge -- Thu Mar 29 17:33:25 1990 <<<

The exterior drive chain near right LL started making more noise than normal.

>>> 'cpa' problem from rnorman -- Mon Apr  2 11:59:19 1990 <<<

Problem: Exterior drive chain making noise.

Cause: The chain was loose.

Solution: The exterior chain was tightened.  The cpa is up.

>>> 'cpa' problem from wenzel -- Sat Apr 21 14:40:14 1990 <<<

The cpa wouldn't pump down below 1e-7 torr after 1 hour.
Target arced some (Al/Si).
There was a grinding noise behind the machine when the track was on.

>>> 'cpa' problem from rnorman -- Mon Apr 23 07:20:18 1990 <<<

The ROR was tested and it does seam high.  The base pressure this
morning was 6x10-7 after the ROR it was 2x10-6 and TRYING to pump
back down.  I will start up the hld and leak check the cpa.  The cpa
is down.  DO NOT OPERATE.

>>> 'cpa' problem from rnorman -- Mon Apr 23 13:10:53 1990 <<<

The cpa was leak checked and a leak seems to be located in the RF
etch station at the lower hoist assembly area.  This is one of the 
worst locations for a leak, because it is not easy to remove and
replace this hoist assembly.  Fixing this leak may take a day or two.
The base pressure at this time with  both load locks closed is
5x10-6.  DO NOT OPERATE until further notice.

>>> 'cpa' problem from rnorman -- Wed Apr 25 09:58:58 1990 <<<

My plan at this time is to remove the lower RF assembly and then blank off
that part of the cpa so the system may be used.  I will then replace the 
bellows in the RF assembly and then re-install it at an other time.  I need
to get a blank off made at the mech. shop; the cpa being up is contingent
of when the plate is done, hopefully today.

>>> 'cpa' problem from rnorman -- Wed Apr 25 13:35:55 1990 <<<

I have the lower RF assembly removed.  I am waiting for the mech.shop
to finish the blank-off plate, they said sometime before noon tomorrow.
The cpa is down until the plate is done.

>>> 'cpa' problem from bob -- Thu Apr 26 17:16:23 1990 <<<

A dummy plate has been installed on the cpa and the main chamber and
the load locks are pumping. The current pressure is 3X10-6 after 1/2
hour of pumping. The machine has been open all day so this is a 
reasonable pressure. Robert Norman will inspect and condition the
targets tomorow. The cpa is down until checked out by Robert.

>>> 'cpa' fix from rnorman -- Fri Apr 27 08:37:34 1990 <<<

Problem: insufficient vacuum; low 10-6 range.

Cause: There was a vacuum leak in the Lower RF assembly, most likely
      located in the bellows.

Solution: The lower RF assembly was removed and the  station was blanked
         off with a plate.  At this time the targets are being burning in.
         THERE IS NO RF ETCH until further notice.  The cpa is up.
      

>>> 'cpa' problem from rnorman -- Fri Apr 27 14:45:34 1990 <<<

The base pressure of the cpa cryo is higher then normal.  This
will result in a higher pressure of the chamber; at this time it is
1x10-6.  It looks like the cryo needs regeneration, which I will do
on Monday.  If you wish to use the cpa and you CAN NOT wait until Monday
after noon, I recommend a dummy run fist then if the films are not
cloudy proceed with your process wafers.  Use according to your judgement.

>>> 'cpa' problem from davor -- Fri Apr 27 14:55:13 1990 <<<

ccryo needs regeneration. I spoke to Robert Norman already.

>>> 'cpa' problem from rnorman -- Mon Apr 30 07:05:11 1990 <<<

The cpa will be down for a cryo regeneration; it should be ready for use
by noon.

>>> 'cpa' fix from rnorman -- Mon Apr 30 10:28:45 1990 <<<

Problem: Base pressure of the cryo equals pressure of chamber, 1x10-6.

Cause: Cryo needs regeneration

Solution: the cryo was regenerated and is now chilling down.  The cpa will be
       up for use when the cryo is cold, which will be about noon today.
       Do not operate until noon.

>>> 'cpa' problem from tom -- Mon Apr 30 15:38:09 1990 <<<

Chain rattles a lot when going in the "forward" direction (toward the 
right load lock). System is usable but makes a lot of noise. Chain
needs to be tightened up.

>>> 'cpa' problem from davor -- Tue May  1 12:15:43 1990 <<<

ThThe chain is still a little loose, it  rattles.

>>> 'cpa' problem from bob -- Wed May  2 08:50:43 1990 <<<

The chain drive on the cpa is making noise. It does not effect it's
use. It will be adjusted when Robert Norman returns tomorow.

>>> 'cpa' fix from rnorman -- Thu May  3 11:42:09 1990 <<<

Problem: Chain making noise.

Cause: It was loose.

Solution: The chain drive was tightened down and tested.  The cpa is up.

>>> 'cpa' fix from rnorman -- Tue May  8 12:42:24 1990 <<<

Problem: RF Power Supply looked to be causing a voltage feedback onto
        main power distribution panel via the return line or white wire.

Solution: After Phil and I rechecked the RF supply no problem was
         found.  This power problem occurred when we were having 
         transformer problems, and looks like the problem 
         disappeared when the transformer problem corrected itself.
         After checking and testing the RF power supply is working.
         We are still in the process of repairing the lower
         RF assembly, as such, the RF Etch station is inoperative
         until further notice.
