>>> 'breact' problem from hebert -- Wed Feb 28 11:33:53 1990 <<<

Using 650 mTorr SF6+O2 to etch, the forward power fluctuates
at times between 200 and 300 W with the power set at 250 W.

>>> 'breact' problem from bob -- Fri Mar 16 14:00:51 1990 <<<

The barrel reactor is experiencing some power fluctuations
which will be investigated. It ise useable in its current state.
The power fluctuations will be looked into when more pressing
problems are out of the way.

>>> 'breact' problem from evan -- Tue Mar 27 13:31:30 1990 <<<

problem: power fluctuates at SF6/O2 650 mTorr at 250 watts.
cause: this point on the rf power control pot had dirty contacts
       causing erratic setting
solution: cleaned contacts by turning control full range several times.
this is a sealed pot so no contact cleaner could be used.  if similar
problem reoccurs, recommend replacement of pot.  hebert confirmed that
breact was now working properly
breact is up
