     1,sprinkler           ,     2
     2,Oxygen              ,     3
     6,Nitrogen            ,     4
     7,Compressed Air      ,     5
     4,CHWS                ,     6
     5,IHW                 ,     7
     8,vacuum drain        ,    15
     9,vacuum              ,    16
    11,recirc water (CWS)  ,     9
    12,city water (ICW)    ,    10
    13,DI water            ,    11
    16,110 volts           ,     2
    17,208 single phase    ,     3
    18,208 three phase     ,     4
    19,440 three phase     ,     5
    20,240                 ,     6
    21,480                 ,     7
    22,Dichlorosilane      ,     9
    23,Phosphine           ,    10
    24,Silane              ,    11
    25,Ammonia             ,    12
    26,HCl                 ,    13
    27,POCl3               ,    14
    28,Helium              ,    15
    29,Argon               ,    16
