    63,Sink        ,standard    ,sink1       ,left sink in V2                         
    64,Sink        ,standard    ,sink2       ,right sink in GL1                       
    66,Sink        ,standard    ,sink3       ,sink in GL2                             
     7,Sink        ,standard    ,sink4       ,sink in Y1                              
     3,Sink        ,standard    ,sink5       ,sink in Y1                              
    24,Sink        ,standard    ,sink6       ,sink in V1                              
    25,Sink        ,standard    ,sink7       ,left sink in V2                         
    26,Sink        ,standard    ,sink8       ,right sink in V2                        
    27,Sink        ,standard    ,sink9       ,sink in V3                              
    71,Sink        ,standard    ,sink10      ,left sink in GL4                        
   140,Sink        ,standard    ,sink11      ,right sink in GL4                       
    94,Sink        ,standard    ,sink12      ,sink in R1                              
    96,Developer   ,APT         ,aptemul     ,APT emulsion mask developer             
    58,Misc        ,GCA         ,gcapg       ,GCA 3600 pattern generator              
    10,Stepper     ,GCA         ,gcaws       ,GCA 6200 wafer stepper                  
   119,Sputerrer   ,MRC         ,mrc         ,MRC sputtering system (ZnO)             
     4,Developer   ,MTI         ,mti         ,MTI omnichuck photoresist developer     
   116,Measuring   ,AlphaStep   ,alphastep   ,alphastep profilometer                  
    68,Bonder      ,????        ,bonder      ,bonder                                  
     5,Stepper     ,Canon       ,canon       ,Canon 4X wafer stepper                  
    97,Misc        ,Redcam      ,redcam      ,mask reduction system                   
    29,Misc        ,Cwikscan    ,cssem       ,Cwikscan SEM                            
    57,Sputerrer   ,D & W       ,dw          ,Davis & Wilder sputtering system        
     1,Misc        ,Eaton       ,eaton       ,Eaton wafer track                       
    93,Measuring   ,Gaertner    ,ellips      ,Gaertner ellipsometer                   
    60,Sputerrer   ,Gaertner    ,gartek      ,Gartek sputterer in GL3                 
    80,Misc        ,Hitachi     ,hitsem      ,Hitachi SEM                             
    61,Misc        ,????        ,ionmill     ,ion mill                                
    59,Misc        ,????        ,iona        ,ion implanter                           
     6,Misc        ,Kasper      ,kasper      ,Kasper contact aligner                  
    33,Etcher      ,Lam         ,lam1        ,Lam plasma etcher for poly-Si           
   114,Misc        ,????        ,lpe1        ,liquid phase epi at wall                
    86,Measuring   ,Nanometrics ,nanoline    ,Nanometrics line width measuring system 
    84,Measuring   ,Nanometrics ,nanospec    ,Nanospec AFT film thickness measuring sy
    69,Etcher      ,Plasmatherm ,ptherm      ,Plasmatherm reactive ion etcher         
    92,Measuring   ,????        ,4ptprb      ,manual four point probe resistivity meas
   120,Sputerrer   ,Randex      ,randex      ,Randex sputtering system                
    89,Measuring   ,Tencor      ,sonogage    ,Tencor sonogage resistivity/wafer thickn
   108,Misc        ,Tempress    ,tempress    ,Tempress saw                            
    37,Furnace     ,Tylan       ,tylan1      ,Tylan furnace tube #1                   
    38,Furnace     ,Tylan       ,tylan2      ,Tylan furnace tube #2                   
    39,Furnace     ,Tylan       ,tylan3      ,Tylab furnace tube #3                   
    40,Furnace     ,Tylan       ,tylan4      ,Tylan furnace tube #4                   
    41,Furnace     ,Tylan       ,tylan5      ,Tylan furnace tube #5                   
    42,Furnace     ,Tylan       ,tylan6      ,Tylan furnace tube #6                   
    43,Furnace     ,Tylan       ,tylan7      ,Tylan furnace tube #7                   
    44,Furnace     ,Tylan       ,tylan8      ,Tylan furnace tube #8                   
    48,Furnace     ,Tylan       ,tylan9      ,Tylan frunace tube #9                   
    49,Furnace     ,Tylan       ,tylan10     ,Tylan furnace tube #10                  
    50,Furnace     ,Tylan       ,tylan11     ,Tylan furnace tube #11                  
    51,Furnace     ,Tylan       ,tylan12     ,Tylan furnace tube #12                  
    52,Furnace     ,Tylan       ,tylan13     ,Tylan furnace tube #13                  
    54,Furnace     ,Tylan       ,tylan14     ,Tylan furnace tube #14                  
    55,Furnace     ,Tylan       ,tylan15     ,Tylan furnace tube #15                  
    53,Furnace     ,Tylan       ,tylan16     ,Tylan furnace tube #16                  
    98,Misc        ,Ultratech   ,maskcopy    ,Ultratech mask copier                   
    72,Stepper     ,Ultratech   ,ultratech   ,Ultratech wafer stepper                 
   101,Vacuum      ,Veeco       ,v401        ,Veeco 401 vacuum system                 
    73,Vacuum      ,Veeco       ,v775        ,Veeco 775 vacuum system                 
    85,Misc        ,Vickers     ,vickers     ,Vickers                                 
   130,Furnace     ,Lindberg    ,lberg1      ,lindberg furnace #1                     
   131,Furnace     ,Lindberg    ,lberg2      ,lindberg furnace #2                     
   132,Furnace     ,Lindberg    ,lberg3      ,lindberg furnace #3                     
   133,Furnace     ,Lindberg    ,lberg4      ,lindberg furnace #4                     
   134,Furnace     ,Lindberg    ,lberg5      ,lindberg furnace #5                     
   135,Furnace     ,Lindberg    ,lberg6      ,lindberg furnace #6                     
   136,Furnace     ,Lindberg    ,lberg7      ,lindberg furnace #7                     
   137,Furnace     ,Lindberg    ,lberg8      ,lindberg furnace #8                     
   138,Furnace     ,Lindberg    ,lberg9      ,lindberg furnace #9, cvd nitride, GaAs  
   106,Misc        ,????        ,hummer      ,coater for cssem                        
   103,Misc        ,????        ,breact      ,plasma barrel reactor                   
   112,Misc        ,Technics    ,technics-a  ,Technics III-V deposition system        
   110,Misc        ,Technics    ,technics-b  ,Technics SiO2 deposition system         
    36,Etcher      ,technics-c  ,Technics    ,Technics VLSI plasma etch               
    95,Developer   ,APT         ,aptchrome   ,APT chrome mask developer               
   100,Evaporator  ,NRC         ,nrc         ,NRC evaporator                          
    67,Annealer    ,Heatpulse   ,heatpulse1  ,Heatpulse rapid thermal annealer for Si 
     8,Spinner     ,Headway     ,spinner1    ,Headway spinner, Y1                     
    74,Measuring   ,????        ,flatgage    ,flat gauge (measure flatness)           
    91,Misc        ,Prometrix   ,prometrix   ,Prometrix resistivity mapper            
   139,Misc        ,????        ,rodi        ,reverse osmosis deionized water system  
    88,Measuring   ,????        ,iv          ,i-v probe station (AN3)                 
    56,Measuring   ,????        ,cv          ,c-v probe station (AN2)                 
   115,Misc        ,????        ,lpe2        ,liquid phase epitaxy 2                  
    77,Spinner     ,????        ,spindryer1  ,wafer spin dryer 1, sink 6              
    78,Spinner     ,????        ,spindryer2  ,wafer spin dryer 2, sink 7              
   117,Misc        ,????        ,drm         ,photoresist development rate monitor    
     9,Sputterer   ,CPA         ,cpa         ,CPA three target sputterer              
    32,Etcher      ,Lam         ,lam2        ,Lam plasma etcher for SiO2              
    45,Misc        ,????        ,dummy       ,even newer dummy entry                  
    46,Misc        ,????        ,dummy       ,even newer dummy entry                  
    47,Misc        ,????        ,dummy       ,even newer dummy entry                  
     2,Furnace     ,????        ,oven        ,new lab and old lab ovens               
    65,Etcher      ,Semigroup   ,semi        ,Semigroup plasma etcher                 
   142,Misc        ,????        ,hld         ,helium leak detector                    
    90,Measuring   ,Alphastep   ,as200       ,Alphastep 200 automatic profilometer    
   127,Misc        ,????        ,dcl         ,device characterization lab (407)       
    76,Etcher      ,Technics    ,microstrip  ,Technics photoresist plasma asher       
   118,Spinner     ,Headway     ,spinner2    ,Headway spinner #2, GL4                 
   113,Evaporator  ,????        ,ultek       ,ionpumped evaporator                    
   111,Sink        ,Technics    ,hfsink      ,hood and sink in technics rm/oldlab     
    30,Misc        ,Excimer     ,excimer     ,excimer laser                           
    62,Misc        ,Plasmatherm ,ptherm2     ,Plasmatherm RIE for GaAs                
    75,Measuring   ,Reichert    ,reichert    ,Reichert Polylite inspection microscope 
   125,Sputterer   ,Briggs-Gallo,bgg         ,Briggs-Gallo Group sputterer (ZnO)      
    79,Annealer    ,Heatpulse   ,heatpulse2  ,Heatpulse rapid thermal annealer for GaA
   141,Furnace     ,Lindberg    ,sinter      ,lindberg clam shell furnace             
   148,Furnace     ,Lindberg    ,sinter      ,lindberg clam shell furnace             
   124,Misc        ,????        ,vacdrain    ,vacuum drain (sink1-12)                 
   128,Misc        ,????        ,fancoil     ,fan coil units inside lab               
   129,Misc        ,????        ,hepa        ,high efficiency purified air filter     
   123,Sink        ,????        ,oldlab-sinks,oldlab-sinks                            
   144,Misc        ,????        ,sily        ,silylation apparatus                    
   145,Sputterer   ,????        ,topgun      ,s-gun sputtering system                 
   143,Spinner     ,Headway     ,isodry      ,Headway spinner for wafer cleaning      
   126,Vacuum      ,Busch       ,cleanvac    ,Busch vacuum pump for vacuum chucks     
   146,Vacuum      ,Spenser     ,vacleaner   ,Spencer vacuum cleaner                  
   147,Measuring   ,Nanospec    ,nanoduv     ,Nanospec/DUV Microspectrophotometer     
   149,Furnace     ,????        ,sintergold  ,Gold Sintering Furnace                  
