((1 "sprinkler") (2 "Oxygen") (6 "Nitrogen") (7 "Compressed Air") (4 "CHWS") (5 "IHW") (8 "vacuum drain") (9 "vacuum") (11 "recirc water (CWS)") (12 "city water (ICW)") (13 "DI water") (16 "110 volts") (17 "208 single phase") (18 "208 three phase") (19 "440 three phase") (20 "240") (21 "480") (22 "Dichlorosilane") (23 "Phosphine") (24 "Silane") (25 "Ammonia") (26 "HCl") (27 "POCl3") (28 "Helium") (29 "Argon"))