((1 "Misc" "Eaton" "eaton" "Eaton wafer track" 146.13600158691406d0 -1.9509999752044678d0 144.1179962158203d0 -1.9509999752044678d0 144.1179962158203d0 -6.919000148773193d0 146.13600158691406d0 -6.919000148773193d0) (2 "Furnace" "????" "oven" "new lab and old lab ovens" 147.00399780273437d0 -11.824999809265137d0 147.00399780273437d0 -9.156000137329102d0 144.83799743652344d0 -9.156000137329102d0 144.83799743652344d0 -11.824999809265137d0) (3 "Sink" "standard" "sink5" "sink in Y1" 134.6540069580078d0 -0.014000000432133675d0 137.70399475097656d0 -0.014000000432133675d0 137.70399475097656d0 -4.98199987411499d0 134.6540069580078d0 -4.98199987411499d0) (4 "Developer" "MTI" "mti" "MTI omnichuck photoresist developer" 135.3179931640625d0 -5.645999908447266d0 137.06500244140625d0 -5.645999908447266d0 137.06500244140625d0 -8.692999839782715d0 135.3179931640625d0 -8.692999839782715d0) (5 "Stepper" "Canon" "canon" "Canon 4X wafer stepper" 118.32099914550781d0 -3.308000087738037d0 121.00399780273437d0 -3.308000087738037d0 121.00399780273437d0 -6.313000202178955d0 118.32099914550781d0 -6.313000202178955d0) (6 "Misc" "Kasper" "kasper" "Kasper contact aligner" 118.4540023803711d0 -7.788000106811523d0 121.072998046875d0 -7.788000106811523d0 121.072998046875d0 -10.663000106811523d0 118.4540023803711d0 -10.663000106811523d0) (7 "Sink" "standard" "sink4" "sink in Y1" 130.4949951171875d0 -0.007000000216066837d0 127.51399993896484d0 -0.007000000216066837d0 127.51399993896484d0 -4.973999977111816d0 130.4949951171875d0 -4.973999977111816d0) (8 "Spinner" "Headway" "spinner1" "Headway spinner, Y1" 130.3350067138672d0 -5.1479997634887695d0 130.3350067138672d0 -6.488999843597412d0 128.93600463867187d0 -6.488999843597412d0 128.93600463867187d0 -5.1479997634887695d0) (9 "Sputterer" "CPA" "cpa" "CPA three target sputterer" 213.81100463867187d0 -1.1990000009536743d0 210.19700622558594d0 -1.1990000009536743d0 210.19700622558594d0 -14.388999938964844d0 213.81100463867187d0 -14.388999938964844d0) (10 "Stepper" "GCA" "gcaws" "GCA 6200 wafer stepper" 163.8249969482422d0 -16.643999099731445d0 159.69700622558594d0 -16.643999099731445d0 159.69700622558594d0 -4.6479997634887695d0 163.8249969482422d0 -4.6479997634887695d0) (24 "Sink" "standard" "sink6" "sink in V1" 180.49600219726562d0 -0.08500000089406967d0 177.42300415039062d0 -0.08500000089406967d0 177.42300415039062d0 -4.084000110626221d0 180.49600219726562d0 -4.084000110626221d0) (25 "Sink" "standard" "sink7" "left sink in V2" 184.66900634765625d0 -0.08500000089406967d0 187.6959991455078d0 -0.08500000089406967d0 187.6959991455078d0 -4.084000110626221d0 184.66900634765625d0 -4.084000110626221d0) (26 "Sink" "standard" "sink8" "right sink in V2" 197.1649932861328d0 -0.06400000303983688d0 194.06900024414062d0 -0.06400000303983688d0 194.06900024414062d0 -4.086999893188477d0 197.1649932861328d0 -4.086999893188477d0) (27 "Sink" "standard" "sink9" "sink in V3" 201.31500244140625d0 -0.06400000303983688d0 204.38800048828125d0 -0.06400000303983688d0 204.38800048828125d0 -4.086999893188477d0 201.31500244140625d0 -4.086999893188477d0) (29 "Misc" "Cwikscan" "cssem" "Cwikscan SEM" 146.8249969482422d0 -20.826000213623047d0 137.17100524902344d0 -20.826000213623047d0 137.17100524902344d0 -25.246999740600586d0 146.8249969482422d0 -25.246999740600586d0) (30 "Misc" "Excimer" "excimer" "excimer laser" 117.58000183105469d0 -23.743000030517578d0 121.81999969482422d0 -23.211000442504883d0 121.72599792480469d0 -21.827999114990234d0 117.48600006103516d0 -22.358999252319336d0) (32 "Etcher" "Lam" "lam2" "Lam plasma etcher for SiO2" 197.13699340820312d0 -20.535999298095703d0 197.13699340820312d0 -17.530000686645508d0 193.46600341796875d0 -17.530000686645508d0 193.46600341796875d0 -20.535999298095703d0) (33 "Etcher" "Lam" "lam1" "Lam plasma etcher for poly-Si" 201.30099487304687d0 -20.535999298095703d0 201.30099487304687d0 -17.530000686645508d0 204.97300720214844d0 -17.530000686645508d0 204.97300720214844d0 -20.535999298095703d0) (36 "Etcher" "technics-c" "Technics" "Technics VLSI plasma etch" 168.38299560546875d0 -12.272000312805176d0 170.0570068359375d0 -12.272000312805176d0 170.0570068359375d0 -9.390999794006348d0 168.38299560546875d0 -9.390999794006348d0) (37 "Furnace" "Tylan" "tylan1" "Tylan furnace tube #1" 177.31700134277344d0 -16.243000030517578d0 183.41700744628906d0 -16.243000030517578d0 183.41700744628906d0 -17.90399932861328d0 177.31700134277344d0 -17.90399932861328d0) (38 "Furnace" "Tylan" "tylan2" "Tylan furnace tube #2" 177.31700134277344d0 -17.91699981689453d0 183.41700744628906d0 -17.91699981689453d0 183.41700744628906d0 -19.56399917602539d0 177.31700134277344d0 -19.56399917602539d0) (39 "Furnace" "Tylan" "tylan3" "Tylab furnace tube #3" 177.31700134277344d0 -19.58300018310547d0 183.41700744628906d0 -19.58300018310547d0 183.41700744628906d0 -21.225000381469727d0 177.31700134277344d0 -21.225000381469727d0) (40 "Furnace" "Tylan" "tylan4" "Tylan furnace tube #4" 177.31700134277344d0 -21.25d0 183.41700744628906d0 -21.25d0 183.41700744628906d0 -22.885000228881836d0 177.31700134277344d0 -22.885000228881836d0) (41 "Furnace" "Tylan" "tylan5" "Tylan furnace tube #5" 177.31700134277344d0 -22.91699981689453d0 183.41700744628906d0 -22.91699981689453d0 183.41700744628906d0 -24.576000213623047d0 177.31700134277344d0 -24.576000213623047d0) (42 "Furnace" "Tylan" "tylan6" "Tylan furnace tube #6" 177.31700134277344d0 -24.58300018310547d0 183.41700744628906d0 -24.58300018310547d0 183.41700744628906d0 -26.23699951171875d0 177.31700134277344d0 -26.23699951171875d0) (43 "Furnace" "Tylan" "tylan7" "Tylan furnace tube #7" 177.31700134277344d0 -26.25d0 183.41700744628906d0 -26.25d0 183.41700744628906d0 -27.89699935913086d0 177.31700134277344d0 -27.89699935913086d0) (44 "Furnace" "Tylan" "tylan8" "Tylan furnace tube #8" 177.31700134277344d0 -27.91699981689453d0 183.41700744628906d0 -27.91699981689453d0 183.41700744628906d0 -29.558000564575195d0 177.31700134277344d0 -29.558000564575195d0) (45 "Misc" "????" "dummy" "even newer dummy entry" 195.71499633789062d0 -35.3849983215332d0 191.77499389648437d0 -37.17900085449219d0 192.35699462890625d0 -38.73099899291992d0 196.2969970703125d0 -36.9370002746582d0) (46 "Misc" "????" "dummy" "even newer dummy entry" 196.20700073242187d0 -37.034000396728516d0 192.40199279785156d0 -38.77899932861328d0 192.98399353027344d0 -40.28200149536133d0 196.78900146484375d0 -38.5369987487793d0) (47 "Misc" "????" "dummy" "even newer dummy entry" 197.5500030517578d0 -41.97999954223633d0 193.65499877929687d0 -43.483001708984375d0 193.16299438476562d0 -41.930999755859375d0 197.05799865722656d0 -40.428001403808594d0) (48 "Furnace" "Tylan" "tylan9" "Tylan frunace tube #9" 185.281005859375d0 -16.225000381469727d0 191.41700744628906d0 -16.225000381469727d0 190.39100646972656d0 -18.22599983215332d0 185.281005859375d0 -18.22599983215332d0) (49 "Furnace" "Tylan" "tylan10" "Tylan furnace tube #10" 185.281005859375d0 -18.312000274658203d0 191.41700744628906d0 -18.312000274658203d0 190.42999267578125d0 -20.312999725341797d0 185.281005859375d0 -20.312999725341797d0) (50 "Furnace" "Tylan" "tylan11" "Tylan furnace tube #11" 185.281005859375d0 -20.398000717163086d0 191.41700744628906d0 -20.398000717163086d0 190.42999267578125d0 -22.39900016784668d0 185.281005859375d0 -22.39900016784668d0) (51 "Furnace" "Tylan" "tylan12" "Tylan furnace tube #12" 185.281005859375d0 -22.483999252319336d0 191.41700744628906d0 -22.483999252319336d0 190.47000122070312d0 -24.485000610351562d0 185.281005859375d0 -24.485000610351562d0) (52 "Furnace" "Tylan" "tylan13" "Tylan furnace tube #13" 185.281005859375d0 -24.527999877929687d0 191.41700744628906d0 -24.527999877929687d0 190.47000122070312d0 -26.52899932861328d0 185.32000732421875d0 -26.52899932861328d0) (53 "Furnace" "Tylan" "tylan16" "Tylan furnace tube #16" 185.281005859375d0 -26.61400032043457d0 197.5d0 -26.61400032043457d0 196.5240020751953d0 -28.614999771118164d0 185.32000732421875d0 -28.614999771118164d0) (54 "Furnace" "Tylan" "tylan14" "Tylan furnace tube #14" 185.281005859375d0 -28.658000946044922d0 191.41700744628906d0 -28.658000946044922d0 190.42999267578125d0 -30.659000396728516d0 185.281005859375d0 -30.659000396728516d0) (55 "Furnace" "Tylan" "tylan15" "Tylan furnace tube #15" 185.281005859375d0 -30.701000213623047d0 191.41700744628906d0 -30.701000213623047d0 190.47000122070312d0 -32.702999114990234d0 185.281005859375d0 -32.702999114990234d0) (56 "Measuring" "????" "cv" "c-v probe station (AN2)" 162.63499450683594d0 -20.80500030517578d0 160.66900634765625d0 -20.80500030517578d0 160.66900634765625d0 -24.763999938964844d0 162.63499450683594d0 -24.763999938964844d0) (57 "Sputerrer" "D & W" "dw" "Davis & Wilder sputtering system" 104.31199645996094d0 -16.663999557495117d0 104.31199645996094d0 -13.163000106811523d0 101.34100341796875d0 -13.163000106811523d0 101.34100341796875d0 -16.663999557495117d0) (58 "Misc" "GCA" "gcapg" "GCA 3600 pattern generator" 147.11099243164062d0 -54.231998443603516d0 141.66200256347656d0 -55.4109992980957d0 139.9219970703125d0 -45.165000915527344d0 145.3719940185547d0 -43.986000061035156d0) (59 "Misc" "????" "iona" "ion implanter" 173.4709930419922d0 -34.81999969482422d0 173.4709930419922d0 -41.801998138427734d0 186.9550018310547d0 -41.801998138427734d0 186.9550018310547d0 -34.81999969482422d0) (60 "Sputerrer" "Gaertner" "gartek" "Gartek sputterer in GL3" 113.76300048828125d0 -3.990000009536743d0 109.7300033569336d0 -3.990000009536743d0 109.7300033569336d0 -9.961000442504883d0 113.76300048828125d0 -9.961000442504883d0) (61 "Misc" "????" "ionmill" "ion mill" 101.33799743652344d0 -33.762001037597656d0 95.41100311279297d0 -34.95899963378906d0 96.16400146484375d0 -39.31100082397461d0 102.09100341796875d0 -38.11399841308594d0) (62 "Misc" "Plasmatherm" "ptherm2" "Plasmatherm RIE for GaAs" 96.2959976196289d0 -12.501999855041504d0 93.06300354003906d0 -12.501999855041504d0 93.06300354003906d0 -8.628000259399414d0 96.2959976196289d0 -8.628000259399414d0) (63 "Sink" "standard" "sink1" "left sink in V2" 80.51899719238281d0 0.0d0 80.51899719238281d0 -3.999000072479248d0 77.4010009765625d0 -3.999000072479248d0 77.4010009765625d0 0.0d0) (64 "Sink" "standard" "sink2" "right sink in GL1" 80.49600219726562d0 -7.997000217437744d0 80.49600219726562d0 -11.996000289916992d0 77.4010009765625d0 -11.996000289916992d0 77.4010009765625d0 -7.997000217437744d0) (65 "Etcher" "Semigroup" "semi" "Semigroup plasma etcher" 69.41999816894531d0 -16.41699981689453d0 72.08000183105469d0 -16.41699981689453d0 72.08000183105469d0 -12.517999649047852d0 69.41999816894531d0 -12.517999649047852d0) (66 "Sink" "standard" "sink3" "sink in GL2" 84.6500015258789d0 0.023000000044703484d0 84.6500015258789d0 -3.9760000705718994d0 87.74600219726562d0 -3.9760000705718994d0 87.74600219726562d0 0.023000000044703484d0) (67 "Annealer" "Heatpulse" "heatpulse1" "Heatpulse rapid thermal annealer for Si" 86.64700317382812d0 -13.675000190734863d0 84.9729995727539d0 -13.675000190734863d0 84.9729995727539d0 -8.657999992370605d0 86.64700317382812d0 -8.657999992370605d0) (68 "Bonder" "????" "bonder" "bonder" 96.50800323486328d0 -15.984999656677246d0 93.13700103759766d0 -15.984999656677246d0 93.13700103759766d0 -13.550999641418457d0 96.50800323486328d0 -13.550999641418457d0) (69 "Etcher" "Plasmatherm" "ptherm" "Plasmatherm reactive ion etcher" 68.98799896240234d0 -0.023000000044703484d0 71.48600006103516d0 -0.023000000044703484d0 71.48600006103516d0 -7.96999979019165d0 68.98799896240234d0 -7.96999979019165d0) (71 "Sink" "standard" "sink10" "left sink in GL4" 124.54499816894531d0 -33.16400146484375d0 124.82499694824219d0 -36.400001525878906d0 128.84300231933594d0 -36.00199890136719d0 128.56399536132812d0 -32.76599884033203d0) (72 "Stepper" "Ultratech" "ultratech" "Ultratech wafer stepper" 129.92999267578125d0 -24.849000930786133d0 126.38300323486328d0 -25.322999954223633d0 126.71499633789062d0 -28.256000518798828d0 130.26199340820312d0 -27.783000946044922d0) (73 "Vacuum" "Veeco" "v775" "Veeco 775 vacuum system" 102.802001953125d0 -0.9789999723434448d0 102.802001953125d0 -6.258999824523926d0 104.89900207519531d0 -6.258999824523926d0 104.89900207519531d0 -0.9789999723434448d0) (74 "Measuring" "????" "flatgage" "flat gauge (measure flatness)" 151.3560028076172d0 0.007000000216066837d0 154.4969940185547d0 0.007000000216066837d0 154.4969940185547d0 -6.251999855041504d0 151.3560028076172d0 -6.251999855041504d0) (75 "Measuring" "Reichert" "reichert" "Reichert Polylite inspection microscope" 151.3560028076172d0 -6.748000144958496d0 153.46499633789062d0 -6.748000144958496d0 153.46499633789062d0 -9.206999778747559d0 151.3560028076172d0 -9.206999778747559d0) (76 "Etcher" "Technics" "microstrip" "Technics photoresist plasma asher" 168.20199584960937d0 -6.468999862670898d0 169.99099731445312d0 -6.468999862670898d0 169.99099731445312d0 -7.685999870300293d0 168.20199584960937d0 -7.685999870300293d0) (77 "Spinner" "????" "spindryer1" "wafer spin dryer 1, sink 6" 180.24099731445312d0 -5.47599983215332d0 178.13099670410156d0 -5.47599983215332d0 178.13099670410156d0 -6.568999767303467d0 180.24099731445312d0 -6.568999767303467d0) (78 "Spinner" "????" "spindryer2" "wafer spin dryer 2, sink 7" 191.66299438476562d0 0.017000000923871994d0 191.66299438476562d0 -2.311000108718872d0 190.3179931640625d0 -2.311000108718872d0 190.3179931640625d0 0.017000000923871994d0) (79 "Annealer" "Heatpulse" "heatpulse2" "Heatpulse rapid thermal annealer for GaA" 201.7989959716797d0 -5.340000152587891d0 203.24400329589844d0 -5.340000152587891d0 203.24400329589844d0 -8.817000389099121d0 201.7989959716797d0 -8.817000389099121d0) (80 "Misc" "Hitachi" "hitsem" "Hitachi SEM" 151.95700073242187d0 -26.440000534057617d0 153.4949951171875d0 -26.440000534057617d0 153.4949951171875d0 -25.086999893188477d0 151.95700073242187d0 -25.086999893188477d0) (84 "Measuring" "Nanometrics" "nanospec" "Nanospec AFT film thickness measuring sy" 175.44900512695312d0 -23.31800079345703d0 173.2830047607422d0 -23.31800079345703d0 173.2830047607422d0 -25.986000061035156d0 175.44900512695312d0 -25.986000061035156d0) (85 "Misc" "Vickers" "vickers" "Vickers" 175.83399963378906d0 -21.047000885009766d0 175.83399963378906d0 -22.257999420166016d0 173.2830047607422d0 -22.257999420166016d0 173.2830047607422d0 -21.047000885009766d0) (86 "Measuring" "Nanometrics" "nanoline" "Nanometrics line width measuring system" 174.9949951171875d0 -25.986000061035156d0 173.12600708007812d0 -25.986000061035156d0 173.12600708007812d0 -27.992000579833984d0 174.9949951171875d0 -27.992000579833984d0) (88 "Measuring" "????" "iv" "i-v probe station (AN3)" 176.10400390625d0 -32.768001556396484d0 176.10400390625d0 -28.839000701904297d0 174.00100708007812d0 -28.839000701904297d0 174.02499389648437d0 -32.78099822998047d0) (89 "Measuring" "Tencor" "sonogage" "Tencor sonogage resistivity/wafer thickn" 167.32899475097656d0 -21.695999145507812d0 167.32899475097656d0 -23.270999908447266d0 168.69900512695312d0 -23.270999908447266d0 168.69900512695312d0 -21.695999145507812d0) (90 "Measuring" "Alphastep" "as200" "Alphastep 200 automatic profilometer" 167.08900451660156d0 -23.336000442504883d0 169.2030029296875d0 -23.336000442504883d0 169.2030029296875d0 -24.415000915527344d0 167.08900451660156d0 -24.415000915527344d0) (91 "Misc" "Prometrix" "prometrix" "Prometrix resistivity mapper" 167.07699584960937d0 -26.0939998626709d0 169.1790008544922d0 -26.0939998626709d0 169.1790008544922d0 -29.086000442504883d0 167.07699584960937d0 -29.086000442504883d0) (92 "Measuring" "????" "4ptprb" "manual four point probe resistivity meas" 160.70399475097656d0 -25.211000442504883d0 162.19500732421875d0 -25.211000442504883d0 162.19500732421875d0 -26.601999282836914d0 160.70399475097656d0 -26.601999282836914d0) (93 "Measuring" "Gaertner" "ellips" "Gaertner ellipsometer" 154.66099548339844d0 -26.819000244140625d0 160.08399963378906d0 -26.819000244140625d0 160.08399963378906d0 -24.757999420166016d0 154.66099548339844d0 -24.757999420166016d0) (94 "Sink" "standard" "sink12" "sink in R1" 122.6259994506836d0 -40.74100112915039d0 126.71499633789062d0 -40.34199905395508d0 126.97000122070312d0 -43.60100173950195d0 122.88200378417969d0 -44.000999450683594d0) (95 "Developer" "APT" "aptchrome" "APT chrome mask developer" 128.02099609375d0 -43.47800064086914d0 127.76499938964844d0 -40.83399963378906d0 129.58200073242187d0 -40.64899826049805d0 129.83799743652344d0 -43.29399871826172d0) (96 "Developer" "APT" "aptemul" "APT emulsion mask developer" 131.7689971923828d0 -43.10900115966797d0 133.69900512695312d0 -42.92499923706055d0 133.50100708007812d0 -40.249000549316406d0 131.57000732421875d0 -40.433998107910156d0) (97 "Misc" "Redcam" "redcam" "mask reduction system" 126.5989990234375d0 -56.39699935913086d0 130.6179962158203d0 -55.94200134277344d0 129.9010009765625d0 -48.391998291015625d0 125.88300323486328d0 -48.84600067138672d0) (98 "Misc" "Ultratech" "maskcopy" "Ultratech mask copier" 131.0540008544922d0 -55.88600158691406d0 134.81100463867187d0 -55.54499816894531d0 134.58399963378906d0 -52.516998291015625d0 130.82699584960937d0 -52.858001708984375d0) (100 "Evaporator" "NRC" "nrc" "NRC evaporator" 101.22100067138672d0 -56.744998931884766d0 99.86799621582031d0 -52.3489990234375d0 102.5510025024414d0 -51.38100051879883d0 103.90399932861328d0 -55.777000427246094d0) (101 "Vacuum" "Veeco" "v401" "Veeco 401 vacuum system" 99.36399841308594d0 -51.15700149536133d0 98.49199676513672d0 -48.02799987792969d0 101.22100067138672d0 -47.13399887084961d0 102.09300231933594d0 -50.26300048828125d0) (103 "Misc" "????" "breact" "plasma barrel reactor" 106.0530014038086d0 -24.29800033569336d0 106.0530014038086d0 -21.62299919128418d0 109.06300354003906d0 -21.62299919128418d0 109.06300354003906d0 -24.29800033569336d0) (106 "Misc" "????" "hummer" "coater for cssem" 91.65899658203125d0 -36.70100021362305d0 91.93800354003906d0 -39.0099983215332d0 93.86000061035156d0 -38.744998931884766d0 93.58100128173828d0 -36.43600082397461d0) (108 "Misc" "Tempress" "tempress" "Tempress saw" 94.83300018310547d0 -42.57099914550781d0 95.33799743652344d0 -44.391998291015625d0 93.87200164794922d0 -44.861000061035156d0 93.36799621582031d0 -43.03900146484375d0) (110 "Misc" "Technics" "technics-b" "Technics SiO2 deposition system" 80.81099700927734d0 -42.63199996948242d0 81.24800109863281d0 -44.183998107910156d0 83.23899841308594d0 -43.54100036621094d0 82.8030014038086d0 -41.98899841308594d0) (111 "Sink" "Technics" "hfsink" "hood and sink in technics rm/oldlab" 81.66699981689453d0 -52.5099983215332d0 80.89800262451172d0 -49.80400085449219d0 85.09100341796875d0 -48.40399932861328d0 85.86000061035156d0 -51.11000061035156d0) (112 "Misc" "Technics" "technics-a" "Technics III-V deposition system" 81.84200286865234d0 -46.85200119018555d0 83.85099792480469d0 -46.20899963378906d0 83.4489974975586d0 -44.733001708984375d0 81.44000244140625d0 -45.375999450683594d0) (113 "Evaporator" "????" "ultek" "ionpumped evaporator" 88.2229995727539d0 -33.26900100708008d0 86.56300354003906d0 -27.288999557495117d0 88.7300033569336d0 -26.589000701904297d0 90.38999938964844d0 -32.569000244140625d0) (114 "Misc" "????" "lpe1" "liquid phase epi at wall" 116.072998046875d0 -36.54199981689453d0 118.45800018310547d0 -35.74700164794922d0 116.02799987792969d0 -27.17799949645996d0 113.64299774169922d0 -27.972999572753906d0) (115 "Misc" "????" "lpe2" "liquid phase epitaxy 2" 108.0530014038086d0 -30.16900062561035d0 110.16200256347656d0 -29.423999786376953d0 112.36399841308594d0 -36.750999450683594d0 110.25399780273437d0 -37.49599838256836d0) (116 "Measuring" "AlphaStep" "alphastep" "alphastep profilometer" 91.17400360107422d0 -23.95800018310547d0 91.17400360107422d0 -21.92099952697754d0 94.13200378417969d0 -21.92099952697754d0 94.13200378417969d0 -23.95800018310547d0) (117 "Misc" "????" "drm" "photoresist development rate monitor" 136.4709930419922d0 -32.525001525878906d0 136.74600219726562d0 -35.18299865722656d0 133.64999389648437d0 -35.55500030517578d0 133.375d0 -32.89799880981445d0) (118 "Spinner" "Headway" "spinner2" "Headway spinner #2, GL4" 132.50399780273437d0 -33.56800079345703d0 132.64100646972656d0 -35.630001068115234d0 130.78399658203125d0 -35.75400161743164d0 130.64599609375d0 -33.69200134277344d0) (119 "Sputerrer" "MRC" "mrc" "MRC sputtering system (ZnO)" 103.95600128173828d0 -45.90700149536133d0 102.80899810791016d0 -41.93299865722656d0 96.34200286865234d0 -44.11899948120117d0 97.48899841308594d0 -48.09299850463867d0) (120 "Sputerrer" "Randex" "randex" "Randex sputtering system" 101.93800354003906d0 -39.00299835205078d0 102.78600311279297d0 -41.909000396728516d0 96.36499786376953d0 -44.09400177001953d0 95.51699829101562d0 -41.1879997253418d0) (123 "Sink" "????" "oldlab-sinks" "oldlab-sinks" 82.49800109863281d0 -55.058998107910156d0 84.12200164794922d0 -60.902000427246094d0 86.75900268554687d0 -59.98500061035156d0 85.13600158691406d0 -54.141998291015625d0) (123 "Sink" "????" "oldlab-sinks" "oldlab-sinks" 118.24400329589844d0 -37.5620002746582d0 110.78399658203125d0 -38.6879997253418d0 111.1510009765625d0 -41.73500061035156d0 118.61100006103516d0 -40.60900115966797d0) (124 "Misc" "????" "vacdrain" "vacuum drain (sink1-12)" 215.3260040283203d0 -28.06100082397461d0 210.0500030517578d0 -28.520000457763672d0 209.94900512695312d0 -26.22800064086914d0 215.22500610351562d0 -25.770000457763672d0))