>>> 'v775' problem from hebert -- Wed Feb  1 13:05:32 1989 <<<

N2 cryo purge check valve leaks.

Solution: Disconnect N2 purge. I don't use the heated N2 purge
because SS filings from an uncleaned screw thread prevent o-ring
seals in the valve from seating properly after the N2 purge is
used. This results in an N2 leak through the cryo pump.

>>> 'v775' problem from hebert -- Fri Feb  3 11:50:40 1989 <<<

X-tal monitor coax cable at chamber feedthrough needs a new pin
soldered onto it. 

>>> 'v775' problem from hebert -- Fri Feb  3 17:34:06 1989 <<<

Problem: Broken coax cable for x-tal monitor.

Solution: Attached new BNC connector to cable.

The system is up.

>>> 'v775' problem from hebert -- Mon Feb  6 18:09:42 1989 <<<

The system needed a major clean. I disassembled and cleaned.
The parts are baking in the old lab oven. I will reassemble on
2/7/89.

>>> 'v775' problem from hebert -- Tue Feb  7 16:31:17 1989 <<<

Problem: Chamber needed major clean.

Solution: Disassembled chamber and e-gun. Cleaned metal from'
e-gun insulators and electron shield. Cleaned e-gun hearths.
Also cleaned chimney, shutter, and plasma confinment ring.
The "INDIUM ONLY" wafer carrier was cleaned. The shutter,
plasma confinment ring and INDIUM only carrier were coated
with approx 0.3 microns of PECVD SiO2.

The chamber is baking out. So far the vacuum looks good. The
system will be up on 2/8/89 for trilayer dep conditioning.

>>> 'v775' problem from hebert -- Wed Feb  8 19:31:27 1989 <<<

When CO2 oxidizing using previously used pot setting, the 
bias voltage doesn't correspond to the previous voltage.
For example, setting the pot to 2.59 (259 mV) on 6/20/88
resulted in a dc bias of -130V. 

Today, setting the pot to 2.59 results in a voltage of .378mV
and a bias voltage of -90V.

After switching from 10X to 100X, the plasma power increased
significantly (from about 9 W to about 90 W). After returning
to 10 X the bias voltage at 2.59 was -130 V.

What's going on here, Dave (petersen)?

Also, I reported that the INDIUM ONLY fixture was cleaned.
This was in error. The JUNCTIONS ONLY fixture was the one that was
cleaned.

Today I replaced the crucibles (3), cleaned new In shot in HF,
added all new PB shot, and 12 in of Au wire.

>>> 'v775' problem from hebert -- Mon Feb 13 17:47:43 1989 <<<

Problem: Cryo Temp 15 - 16 deg K.

Solution: Regen cryo pump. 

The system is up.

>>> 'v775' problem from hebert -- Thu Feb 16 16:17:20 1989 <<<

Problem: v775 needed P/M.

Solution: Major clean-- included cleaning of e-gun crucibles;
e-gun insulators and Cu shroud; chimney;chimney support;top
plate;plasma confinement ring; "Junctions" only wafer carrier;
e-gun electron deflection shield; e-gun anode shield; and shutter.

Coated shutter, Junc Only wafer carrier, and plasma confinement ring
with approx 1 micron of PECVD oxide.

Replaced carbon crucible liners. New liners cleaned in TCA.

Replaced all metal sources: TCA cleaned Au; and HF dipped In until
oxide was removed. Rinsed In with DI water and then methanol to dry.

Pumped out CO2 gas line to 1x10E-5 Torr and purged.

Coated the Junc Only carrier with Pb trilayer (including RF oxidation)
in all three carrier orientations on the chamber top plate.

>>> 'v775' problem from hebert -- Thu Feb 16 16:24:04 1989 <<<

Cryo was regenerated on 2/14/89.

>>> 'v775' problem from voros -- Fri Feb 24 13:42:16 1989 <<<

Recirc water has been shut off; it was draining the recirc system.
The machine is down for the weekend.

>>> 'v775' problem from hebert -- Wed Mar  1 13:51:30 1989 <<<

I need a new ionization gage for the v775. It's an O-75-K. I'll
install it.

>>> 'v775' problem from vallath -- Wed Mar  1 20:59:57 1989 <<<

I came in tonight, and the water was off.  It was shut off 
several days ago, and I don't believe it has been fixed yet.
Could we have it fixed asap - I need it badly.
Also, if a problem has not been fixed, please don't
remove it from the summary.  That way we will know if
a piece of equipment is up or down before we come in.
Vallath

>>> 'v775' problem from phillip -- Thu Mar  2 13:08:59 1989 <<<

P: Recirc water plumbing to machine is incorrect.
S: Replumbed recirc water. The water now returns to the loop
   instead of spilling into the drain. The machine is up.

>>> 'v775' problem from hebert -- Thu Mar  2 15:49:18 1989 <<<

I replaced the bad ionization gage tube this afternoon.

>>> 'v775' problem from hebert -- Mon Mar  6 17:52:30 1989 <<<

Problem: Elevated cryo T (17 deg K).

Solution: I regenerated the cryo pump.

>>> 'v775' problem from hebert -- Thu Apr 13 11:07:20 1989 <<<

Problem: Overloaded power strip is causing circuit breaker to 
         open circuit. Effects power outlets to v775 side wall of GL3.

         RF feedthrough for x-tal monitor needs connector repair
         at v775 chamber.

>>> 'v775' problem from evan -- Thu Apr 13 14:45:18 1989 <<<

problem: BNC connector for x-tal monitor disconnected
solution: cable too short to add new BNC. A 16" BNC male terminated cable
was spliced on and strain relieved to the column.

>>> 'v775' problem from hebert -- Fri Apr 14 12:27:14 1989 <<<

Problem: Circuit breaker blows due to overload from mech pump.
         The v775 mech pump appears to be seizing up.

Can we get a replacemnet mech pump this afternoon?

>>> 'v775' problem from parrish -- Fri Apr 14 14:17:28 1989 <<<

problem:   mech-pump tripping breaker

cause:     pump or the motor frozen

solution:  removed original pump and replaced with a spare. Pumped down system
           and it looks good at 600 mT.

>>> 'v775' problem from vallath -- Sat May  6 00:15:14 1989 <<<

The folm dep controller flaked out (the electronics have some
intermittent problem). I got a loaner from temescal, and exchanged the
discrete I/O boards temporarily.
Monday we will decide what to do with this controller.
VN

>>> 'v775' problem from vallath -- Mon May  8 13:41:47 1989 <<<

I talked to temescal.  they said that the price for a new fdc 8000 is
$6550, and for an inficon 6000 is $5650.  they also said that
the inficon is not necessarily better.  i think we should either get
a new fdc 8000, or get ours repaired (ours is over 8 years old, i think).
i shall talk this over with prof. van duzer and dave hebert.
if bob or anyone else has any opinion, please tell us.
vallath

>>> 'v775' problem from parrish -- Wed Jul  5 11:58:18 1989 <<<

system down, the water lines that`s going the DW is also suppling this
system and there is a leak in the water line.

>>> 'v775' problem from parrish -- Wed Jul  5 15:31:14 1989 <<<

water turned on system up.

>>> 'v775' problem from parrish -- Wed Dec  6 09:58:32 1989 <<<

system down for installing valves in the water lines

>>> 'v775' problem from parrish -- Wed Dec  6 14:22:09 1989 <<<

system has the water lines marked no need for adding valves. system is up.

>>> 'v775' problem from hebert -- Thu Mar 29 16:12:34 1990 <<<

A 0.25 in dia poly water line developed a pinhole, and water sprayed
all over the floor. I used vise grip pliers to pinch off the water
flow. I then cut the tubing and installed a Jaco coupling. There
is a little water on the floor. It shoulkd evaporate quickly.
Evan did a great job "mopping up" the mess.
