>>> 'v401' problem from costello -- Thu Feb  2 13:41:54 1989 <<<

The air gun next to the veeco does not seem to work.

>>> 'v401' problem from bob -- Thu Feb  2 15:07:53 1989 <<<

The v401 vent solenoid has a crack in it. This causes it to leak
N2 at a fair rate. To conserve N2 it has been turned off. This
has also disabled the N2 gun. Until it is fixed v401
users should turn on the N2 valve located on the wall above
the v401 when using the N2 gun or ahen venting the v401. Please 
turn off this valve when it is not needed. It should  be fixed
sometime tomorow (if parts are on hand).
bob

>>> 'v401' problem from liu -- Fri Feb  3 18:36:25 1989 <<<

	The chamber pressure could not lower then 2*(E-6) after 1 hour
pumping, I did not evaprate.

	Liu

>>> 'v401' problem from bob -- Mon Feb  6 15:43:14 1989 <<<

James Parrish removed the mechanical pump to make some simple repairs.
It cannot be reinstalled today as there were some electrical cables
in poor condition which needed service. These have been serviced and
the pump will be reinstalled tomorow AM. The v401 is down for the
evening.

>>> 'v401' problem from bob -- Tue Feb  7 11:18:11 1989 <<<

The shaft seal on the mechanical pump on the v401 has been replaced.
This should help prevent oil from leaking. In addition the bellows
on the vent valve was replaced solving a major N2 leak. The v401 is
up for use. There are additional pm items that need to be done however
the v401 is up.

>>> 'v401' problem from dcarl -- Wed Feb 15 10:30:13 1989 <<<

Well, this is not so much a problem as a complaint.  The "new"
plastic thermos/dewar for LN2 transfer leaks - LN2 on your feet is
no fun.  Where did the "good" metal dewar go?

Otherwise, great evaporation

>>> 'v401' problem from dcarl -- Fri Feb 17 14:16:30 1989 <<< [No Comment]
>>> 'v401' problem from liu -- Fri Feb 24 14:45:55 1989 <<<

	The chamber pressure could not lower then 1*10e-6 after
45 min. pumping.
 
	liu

>>> 'v401' problem from bmartin -- Sun Feb 26 20:46:04 1989 <<<

Could not pump down below 1e-6 torr.

>>> 'v401' problem from cgoss -- Thu Mar  2 18:29:00 1989 <<<

There is a leak such that after about 1.5 h the jar pressure only
reached 2E-6 torr.  The stack pressure was 2-3E-8 Torr so it is 
definitely a Jar leak.  I am pretty sure it is the feedthrough for
electrode 2, if electrode 2 is the one nearest the operator on the 
left side of the baseplate. As I attached my electrode I noticed that
the feedthrough rotated as I tightened the bolt for the electrode, 
indicating that the feedthrough was loose.  Since access to the 
feedthrough involves removing the control panel I did not feel
qualified to tighten the connection myself.

>>> 'v401' problem from bob -- Fri Mar  3 08:04:07 1989 <<<

Phil Guillory has repaired a loose feedthrough on the v401. It is back
up for use.

>>> 'v401' problem from rosal -- Tue Mar  7 17:32:24 1989 <<<

es
comment, not a problem.  The machine was used for 2 evaporations of copper.
The evaporation rate was good (15-25A/sec) at 250 amps.  Vacuum was fine.

>>> 'v401' problem from straub -- Wed May 10 13:57:07 1989 <<<

Electrode posts threads are stripped. I've already shown this to James.

>>> 'v401' problem from parrish -- Mon May 15 13:51:11 1989 <<<

problem:     threads stripped in electrode

cause:       proberly a combination of wear and overtighten

solution:    removed the electrode, drilled and re tapped for a 5/16-18
             heli-coil. system is up.

>>> 'v401' problem from bill -- Mon Jun 19 16:57:12 1989 <<<

Boot gasket sticks to base plate when bell jar is lifted.
I was able tofit the gasket back on and obtain a good base 
pressure - but there is no tape to hold the gasket on one side -
so the gasket sticks each time.

>>> 'v401' problem from parrish -- Tue Jun 20 07:54:27 1989 <<<

problem:   boot gasket sticking to baseplate

cause:     boot gasket need cleaning and vacuum grease applied

solution:  removed gasket cleaned,greased and replaced, system up.

>>> 'v401' problem from rooney -- Tue Jul  4 10:52:42 1989 <<<

base pressure = 20 microns

diffusion pump not pumping properly--may need an oil change

>>> 'v401' problem from dcarl -- Wed Jul  5 08:18:09 1989 <<<

The wire for the solenoid for the foreline valve is broken, and needs
to be replaced.

V401 down until further notice.

>>> 'v401' problem from parrish -- Wed Jul  5 10:07:27 1989 <<<

problem:   foreline valve in closed position, and won`t open

cause:     soleniod burned up in the foreline valve

solution:  removed burned solenoid, replaced with a used one that works
           system is up with a pressure in the chamber 5x10-7.

>>> 'v401' problem from parrish -- Wed Jul  5 15:32:02 1989 <<<

problem:   N2 vent to high

cause:     replaced solenoid, proberly opened valve wider

solution:  turned N2 down to compensate the differance.

>>> 'v401' problem from rooney -- Tue Jul 11 08:33:27 1989 <<<

base pressure too high--10-5

>>> 'v401' problem from parrish -- Tue Jul 11 10:53:55 1989 <<<

problem:   base pressure in the 5 range

cause:     unknown, I found the system in the 6 range with the high vacuum
           valve open, and no N2 in the trap.

solution:  filled the N2 trap and the system pumped to the low 7 range.
           everything looks good. system up.

>>> 'v401' problem from phillip -- Tue Jul 18 12:44:01 1989 <<<

Installed Watlow type heater controller and 'J' type tc to
feed thru's into chamber for LBL Troy Wilson. The initial
phase of their experiment is now installed and working.
(Troy verbally notified.)

>>> 'v401' problem from rwilliam -- Mon Aug  7 17:21:39 1989 <<<

We're out of boats!  Since Mario put three bottles of 'em
back here before he left, that indicates some pretty
savage hoarding.  Do we REALLY want to create such a
needless problem?

>>> 'v401' problem from kuchta -- Tue Aug  8 12:26:19 1989 <<<

Very minor problem: The bulb and cover for the high vac light
are broken.  The bulb will work if you jiggle it a little though.
Dan

>>> 'v401' problem from bob -- Tue Aug  8 13:56:35 1989 <<<

A new crystal for the hivac indicator lamp is being ordered by
Phillip the the v401. It will take a few days to get so the system
is without one until then.

>>> 'v401' problem from phillip -- Tue Aug  8 14:38:13 1989 <<<

Located lamp crystals in stock.
Replaced broken high vacuum indicator lense . 

>>> 'v401' problem from phillip -- Fri Aug 11 09:39:31 1989 <<<

Installed recently acquired feed-thru in vacuum chamber
for Troy Wilson.

>>> 'v401' problem from wenzel -- Thu Aug 24 13:19:46 1989 <<<

The bell jar doesn't seat with the hoist switch in the "down"
position.  It works fine if you pull down on the belljar cage
when starting the pump cycle.

>>> 'v401' problem from parrish -- Fri Aug 25 07:59:05 1989 <<<

problem:   belljar not seating properly

cause:     out of adjustment

solution:  adjusted piston length. belljar seats properly

>>> 'v401' problem from rosal -- Tue Sep  5 11:04:09 1989 <<<

did not get down to as low a pressure as normal, and it took
very long to pump down.

>>> 'v401' problem from bill -- Tue Sep  5 11:11:33 1989 <<<

After reading the problem from Rosa, I gave the boot
gasket and base plate a good rub down with methanol.
Alot of metal flakes were removed.
I tested the pumpdown and reached the e-7 torr range 
in about 10 minutes.
The veeco looks good now. 

>>> 'v401' problem from bill -- Thu Oct  5 15:07:32 1989 <<<

Pressure goes to about 8 e-6, then creeps back up to
2e-5, then creeps back down etc.

I cleaned the boot gasket with methanol -
and tried to make sure it was seating correctly -
but had the same problem with 2 consecutive pump down attemps.

>>> 'v401' problem from parrish -- Fri Oct  6 08:25:56 1989 <<<

system down for repair of diffusion-pump, wheather the system will be up
today depends on the condition of the pump after it is pulled, we will
send an update as soon as a timefactor is established.

>>> 'v401' problem from parrish -- Fri Oct  6 10:45:25 1989 <<<

problem:   pressure unstable

cause:     rotorary feedthrough leaking

solution:  removed, cleaned and replaced feedthrough. pressure is stable.

>>> 'v401' problem from bill -- Thu Oct 19 19:10:58 1989 <<<

The veeco "barks" ( farts would be more descriptive )
when backfilling with N2 - partially stuck valve
seems most likely -
since the gasket sticks and the system doesn't quite
reach atmospheric pressure after backfilling.

>>> 'v401' problem from costello -- Mon Oct 23 14:34:00 1989 <<<

O-ring sticks to base plate and pulls part-way off bell jar
when bell jar is raised.  Veeco still pumps down to <10E-7 T
if O-ring is put back in place before lowering bell jar.

>>> 'v401' problem from parrish -- Tue Oct 24 11:31:26 1989 <<<

problem:   boot gasket sticks to base plate.

cause:     dirty boot gasket.

solution:  removed gasket cleaned and reinstalled, 

>>> 'v401' problem from parrish -- Tue Oct 24 11:35:06 1989 <<<

system down for repair of vent valve, should be back up shortly after lunch.

>>> 'v401' problem from parrish -- Tue Oct 24 14:19:32 1989 <<<

problem:    regulator fibulating on the venting of the system

cause:      the diafram in the old style regulator 

solution:   removed old regulator, replaced with a new.

>>> 'v401' problem from liang -- Wed Oct 25 02:21:19 1989 <<<

After my AuGeNi evaporation, I found the film is oxidized.
It seems that the high vaccum valve does not realy open when
the red light indicates the switch-over happenes. The TC gauge 
stay at 70mtorr all the time. The ion gauge is always the reading of
the diffusion pump, even when the rough pump circle switch to
high vaccum circle. 
My three weeks work is gone with this evaporation since I only
checked ion gauge reading and is very satisfied with 3e-8 torr.
liang

>>> 'v401' problem from parrish -- Wed Oct 25 10:35:25 1989 <<<

problem:   high vacuum valve won`t open

cause:     loose connection 

solution:  reconnected high valve connection, system has a wafer inthe chamber
           and I didn`t vent it, am waiting for Liang to remove it.

>>> 'v401' problem from bob -- Thu Oct 26 10:52:06 1989 <<<

The inficon crystal monitor for the v401-nrc is down for repair. Dave
Hebert has kindly let us borrow one from the topgun. The v401 is
useable with this monitor.

>>> 'v401' problem from cgoss -- Thu Oct 26 11:26:32 1989 <<<

two problems:
1.  When I came in this AM I found V401 on HiVac.  The trap was obviously
not frozen since it had been left overnight.  I don't think it is good to 
leave hivac valve open unless LN2 trap is frozen to prevent oil diffusion into  jar.  I put jar on bypass, took out electrodes left by liang, and put them in hood.  
2 Xtal monitor is out.  Borrowed one from TopGun for the moment.  Will test this AM.

>>> 'v401' problem from hoagland -- Thu Oct 26 16:27:44 1989 <<<

The crystal monitor shared between the V401 and NRC has been
removed to the shop for repair.  Until it can be returned to
service a loaner from TVD's group has been installed for users
of these 2 systems.  Both the V401 and NRC are up and available
for use.

>>> 'v401' problem from costello -- Tue Dec  5 18:23:09 1989 <<<

bell jar raises and lowers very slowly and veeco is very noisy
when it is venting.  Otherwise it works fine.

>>> 'v401' problem from parrish -- Wed Dec  6 09:35:20 1989 <<<

problem:  loud noise when venting, and slow movement of the bell jar
          when lowering or raising.

cause:    noise when venting was because the regulator was set at about
          15 psi., which cannot not figure how in that the regulator seem
          to be operating correctly. and simular with the adjustment of the
          pressure of the oil system for lowering and raising the bell jar.

solution: readjusted the N2 pressure to 3 psi., and also adjusted regulating
          valve on the air/over oil system. both systems are working properly.

>>> 'v401' problem from hoagland -- Thu Dec 14 16:07:16 1989 <<<

The inficon crystal monitor has been repaired and reassembled.
It now passes all internal diagnostics and is ready for testing
in a sputtering system.  As soon monitor operation is verified
with real films, it will be reconnected to the V401 and NRC.

>>> 'v401' problem from bmartin -- Thu Dec 21 13:54:33 1989 <<<

The v401 start button seems flaky.  In order to pump down after
my deposition, I had to disable, and then re-enable, the v401 in
order for the start button to activate the pumpdown cycle.

>>> 'v401' problem from parrish -- Fri Dec 22 07:36:08 1989 <<<

problem:   reported flaky start botton

cause:    unknown

solution: vented the system and pumped it down using the start botton
          twice and had no problem. system is up 

>>> 'v401' problem from costello -- Mon Jan 22 11:55:24 1990 <<<

veeco hums when it is venting.  Other than that it worked fine.

>>> 'v401' problem from bob -- Mon Jan 22 12:01:08 1990 <<<

The humming associated with the venting of the v401 is due to
a faulty pressure regulator. The regulator is functioning 
in spite of this noise and the v401 can be used without any
problems for the user. The v401 is up.

>>> 'v401' problem from bob -- Fri Jan 26 13:50:06 1990 <<<

The belts on the mechanical pump for the v401 are new and there is no
problem with their tension. The v401 is up.

>>> 'v401' problem from costello -- Wed Feb 21 20:43:02 1990 <<<

Veeco will not vent to atmosphere in one vent cycle.
Pressure is still about 400 torr when vent cycle ends.

>>> 'v401' problem from parrish -- Thu Feb 22 07:17:59 1990 <<<

system down for maintainance of vent valve.

>>> 'v401' problem from parrish -- Thu Feb 22 08:11:57 1990 <<<

problem:    chamber still under pressure after venting cycle

cause:      inline regulator, and pressure of N2,( at 5psi.N2 pressure the
            reported venting noise occur, maybe the angle of the incoming force
            of the N2) and at 2 psi. the timer runs out.

solution:   checked the vent valve, and readjusted the regulator for 3 psi.
            and reinstalled. system is up.

>>> 'v401' problem from troy -- Sun Mar  4 13:28:13 1990 <<<

After evaporating Cr/Au on Si(111), I went to remove my chimney from
the 401 and I knocked the crystal film monitor assembly out.  It fell
and landed on the glass plate. The membrane is intact, but the ceramic
ring on the back is chipped.  I didn't find any chips in the 401 so I
don't know if it was chipped already or if the damage is new.  I put it
into the v401, and it fit as it always has.  Left 401 as I normally would.

2) On another note, does the MF lab have any more 0075 Chromium crystallites?

We seem to be running low. Is this the responsibility of the users?

>>> 'v401' problem from phillip -- Wed Mar  7 07:43:11 1990 <<<


P: No crystals or crystal holder available
   for users.
S: Some need be ordered.

Susan, please order from 'Leybold Inficon'
a suitable amount of gold coated crystals
p/n 008-010 @ 6 Mhz (5 to a pack).
Also procure a couple of crystal holders.

>>> 'v401' problem from dcarl -- Tue Mar 20 17:37:23 1990 <<<

I tried to do another al evap after 2 earlier o.k. runs and couldn't
get any current out of the transformer.  I did not move the electrodes
so I know I didn't pull a bone-head complete the circuit problem.

Could the breaker on the supply be out?  Did a fuse blow?  
Enquiring minds want to know.  

The v401 is certainly down.

Dan Carl

>>> 'v401' problem from khacha -- Wed Apr  4 16:30:26 1990 <<<

the ion gage reading fluctuated up to 30%

>>> 'v401' problem from parrish -- Thu Apr  5 07:20:00 1990 <<<

problem:    It was reported the ion gauge is fluctuating

cause:      undetermined, I find the ion gauge to be working properly.
