>>> 'tylan9' problem from eskim -- Thu Jan  5 16:10:28 1989 <<<

It is about time to change the mechanical pump oil.

>>> 'tylan9' problem from parrish -- Fri Jan  6 11:16:58 1989 <<<

problem:  Oil need changing

cause:    Two 5 hour runs 

solution:  changed oil

>>> 'tylan9' problem from carlos -- Wed Jan  8 09:13:24 1992 <<<

The NH3 flow shows 1.5 sccm, when it is supposed to be 16 !

>>> 'tylan9' problem from carlos -- Wed Jan  8 09:20:49 1992 <<<

NH3 flow too low. It is supposed to be 16 sccm, but it reads 1.5 sccm

>>> 'tylan9' problem from carlos -- Wed Jan  8 09:38:10 1992 <<<

The deposited material is removed with silicon etchant, so probably
it is poly or amorphous silicon. The interior of the furnace is 
coated with this material,  and it has an unusual color. Fortunately
I had 12 minutes deposition only before I realized of the problem.

>>> 'tylan9' problem from bob -- Mon Jan  9 08:39:15 1989 <<<

James has found the breaker tripped on the mechanical pump. We are 
investigating the reason. It is running again and it should be available
shortly.

>>> 'tylan9' problem from parrish -- Mon Jan  9 15:00:27 1989 <<<

problem:   mech-pump breaker tripped

cause:     chemical reactions in the mech pump from excessive long runs

solution:  replaced oil filters.

>>> 'tylan9' problem from bob -- Mon Jan  9 15:06:31 1989 <<<

tylan9 has been repaired. A crimp connection made by Tylan at the 
time of manufacture was made over a poorly stripped wire making
an intermittent connection. This caused the NH3 mfc to fail
off. It has been repaired.  
A long, pure DCS run was done due to the above problem. This
caused severe fowling of the oil. James Parrish has changed
the oil and replaced the filters.
tylan9 will be ready for use as soon as a test run is
complete.
.

>>> 'tylan9' problem from tom -- Mon Jan  9 16:25:34 1989 <<<

Problem: Oil fowled by pure DCS run and NH3 not flowing.

Cause: Tylan and DCS.

Solution: Reconected MFC and changed oil.  Test run being done by eskim.
          He will report his results and any problems he has.

>>> 'tylan9' problem from hoagland -- Mon Jan  9 16:50:18 1989 <<<

problem:  NH3 CCOUT failed... no gas flow during process.

cause:  NH3 contact; pin 6 in P30 on gas panel, had bad crimp.
        Connection to air solenoid activating NH3 nupro valve 
        was open.

solution:  Recrimp connector pin and solder wire to guarantee
           contact.

>>> 'tylan9' problem from eskim -- Mon Jan  9 18:12:39 1989 <<<

After a test run, the standby program was loaded, and run.
But the mechanical pump does not seem to be operating.

>>> 'tylan9' problem from bob -- Thu Jan 12 17:40:34 1989 <<<

tylan9 has been taken out of service to install a new mechanical pump.
This will be a pump of increased speed. tylan9 should be back in service
by late afternoon.

>>> 'tylan9' problem from bob -- Fri Jan 13 16:04:17 1989 <<<

tylan9 remains down. The mechanical is being changed and in spite of
our best effort this has not been completed. We have to modify the 
manifold as the new pump is a different size (larger) and
welding has to be done. We also had to modify the case of
the new pump. Work will be completed on Tuesday, Jan 17th.
Sorry for the inconvenience.
tylan9 is down.
.

>>> 'tylan9' problem from bob -- Wed Jan 18 15:41:12 1989 <<<

A new pump has been installed in tylan9. It has been phased and is
on and running. The N2 purge for the gas ballast has been adjusted
to 250 sccm. The case purge has been set to 1 slpm and the N2 process
purge has been adjusted to 6 slpm. A preliminary test of the throughput
indicates rates of 50 sccm NH3 = 135 mtorr. Before the sytem is up
for general use we still need to hook on the oil filtration and to
adjust the throughout with an orifice. tylan9 should be up for use
Jan 19th in the afternoon.

>>> 'tylan9' problem from hoagland -- Thu Jan 19 11:15:13 1989 <<<

The new pump for tube9 is installed and working.  Currently a test
run is being conducted to qualify the tube and if all goes well it
should be up for use by 2PM today.  A final notice will be posted this
afternoon when the tube is released for service.

>>> 'tylan9' problem from tom -- Thu Jan 19 16:13:32 1989 <<<

Test run done: SNITC for 10 min.  Tnit=484 A
               Dep. rate=~48 A/min.
Tube is up for use.

>>> 'tylan9' problem from hoagland -- Fri Jan 20 11:43:32 1989 <<<

Oil filters for tube9's vacuum pump have been changed and the tube
is up for service.

>>> 'tylan9' problem from evan -- Tue Jan 24 11:55:39 1989 <<<

Checked pressure with manual 50 sccm of NH3 and DCS.

Base pressure 14 mtorr; ROR 4mtorr/min.

NH3 @ 50sccm   122mtorr
DCS @ 50sccm   158mtorr

Ran SNITC and verified process pressure of 195mtorr.

I will be adding an inverted spring-butterfly valve, modified to
provide restricted oriface sizes.  It will be a hit or miss to find
the right size restriction. Hopefully, tylan9 will be up later today.

>>> 'tylan9' problem from evan -- Tue Jan 24 17:02:21 1989 <<<

I added the choke in the exhaust and checked process pressure using SNITC.
After three attempts at closing the choke down, the last result gave
256mtorr for SNITC.  Since the previous standard was around 300mtorr, it
process pressure improved 50% from the unchoked result of 195mtorr.
Since todays results are still inadequite, tylan9 will remain down until
a better solution can be found.  

>>> 'tylan9' problem from parrish -- Wed Jan 25 07:59:07 1989 <<<

problem:   clogged oil filters

cause:     excessive long depositions

solution:  changed the oil filters

>>> 'tylan9' problem from evan -- Wed Jan 25 09:43:37 1989 <<<

The upper pressure limit switch was set so that the contact closes
approx 5 seconds after strating to hard pump a vented tube.
Since the desired setting is out of the range of the pressure
readout, this approx. method had to be used.

>>> 'tylan9' problem from parrish -- Fri Jan 27 12:41:55 1989 <<<

problem:    clogged oil filters

cause:      6 1/2 hour run

solution:   changed oil in the filters.

>>> 'tylan9' problem from galewski -- Sat Jan 28 16:09:52 1989 <<<

Exhaust oil filter shows increased pressure.  Clogged?  Does not
alter operation of tube.

>>> 'tylan9' problem from bob -- Mon Jan 30 09:42:48 1989 <<<

Replaced the filter in the mechanical pump exhaust as refered to
by Carl as "exhaust oil filter". We are now using a 5 micron
Hytrex to replace the expensive activated alumina filters supplied
with the filter units. 
cost:
Hytrex = $3.50
Act Alumina = $19.50

>>> 'tylan9' problem from evan -- Tue Jan 31 16:38:14 1989 <<<

Vacuumed out the tube and cantalevers using a quartz rod and quartz
vacuum nozzle (cleaned in HF) to loosen the deposits.
Tylan9 is up (running NITSTNBY)

>>> 'tylan9' problem from carlos -- Fri Feb 10 20:02:03 1989 <<<

the deposition pressure is 700 mT. It is twice that it is 
suppossed to be. I left the tube running the STCAL program

>>> 'tylan9' problem from galewski -- Fri Feb 10 20:18:59 1989 <<<

Mechanical pump looks like it has a leak between pump and oil
reservoir sections.  When pumping down there is a cloud of oil
and noxtious smell from pump.  Maybe why Carlos also says he
sees too high a pressure during his process.

>>> 'tylan9' problem from parrish -- Mon Feb 13 09:55:12 1989 <<<

problem:    noxious smell and a cloud from the mech-pump

cause:      clogged bypass valve on the exhaust filter

solution:   removed the filter and cleaned the bypass valve and changed
            the filter.

>>> 'tylan9' problem from rooney -- Mon Feb 13 13:36:53 1989 <<< [No Comment]
>>> 'tylan9' problem from tom -- Mon Feb 13 14:29:28 1989 <<<

No problem, no fix.

>>> 'tylan9' problem from tom -- Mon Feb 13 14:37:42 1989 <<<

Will not pump down.

>>> 'tylan9' problem from evan -- Mon Feb 13 16:55:18 1989 <<<

Problem: Tube not pumping down
Bob replaced the o-ring on the exhaust port.  I reseated the flange clamp
and found that the stainless extension tube was preventing a proper fit.
I loosened the compression fitting and moved the ss tube back a bit.  The
flange clamp then went together properly. The tube pumped down somewhat
slowly but eventually reached a decent base pressure. The ror was also
good.  When the standby recipe was run, the pressure rose off scale as soon
as the standard flow of N2 came on.  Carl and Tom felt that it was likely
that the inline filter was clogged and therefore vacuum pump throughput
is too low.
I decided not to proceed with the filters removal alone after 5:00 and
so tylan9 is down until morning.

>>> 'tylan9' problem from evan -- Tue Feb 14 11:51:03 1989 <<<

problem: low vacuum throughput
cause: clogged butterfly flow restriction
solution: removed and cleaned restrictor and throughput improved.
Replaced the inline filter and found the old one had no packing.
After replacing with a packed housing, the throughput was much lower
than before.  I opened up the flow restrictor and throughput is now
normal.

It appears that the butterfly restrictor solution to too high of
throughput (see January tylan9 equip. problems) was needed to account
for the lack of packing in the filter and not the greater throughput of
the new edwards pump that had been installed.

After noting the large amount of deposited material in the empty housing,
Steve suggested the a water-cooled trap might be used.

SNITCAL is running and process pressure is around 380-400 mTorr.

tylan9 is up.

>>> 'tylan9' problem from carlos -- Tue Feb 14 20:10:49 1989 <<<

temperature stabilization takes too long. I suggest someone 
run the snitcala program.

>>> 'tylan9' problem from carlos -- Wed Feb 15 12:41:23 1989 <<<

my wafers are inside and I can't open the door. There seems to be
some problem with the timer. I load program NITSTNBY and ran it
but it never gets beyond step 5 since the minimum time displayed
is 00:00:01 so it can never reach step 10. Please someone repair 
this tube and take my wafers out (3) which are in the middle of the
first boat. I will leave my box by tylan9. Thanks

>>> 'tylan9' problem from evan -- Wed Feb 15 14:11:57 1989 <<<

problem: long deposition service needed
solution:  replaced oil filters and topped off oil level.
filters did not look too bad.

While tube was down, Steve and I installed the automatic pressure
controller on the exhaust line.  It is fully open and will have to be set
during a process run.

tylan9 is up

>>> 'tylan9' problem from carlos -- Wed Feb 15 15:26:37 1989 <<<

The film deposited during my previous run was very spotty, even on a
blank silicon wafer. I suspect this happens because flakes of nitride 
fall from the walls of the tube and deposit on the wafers, specially
for long runs. I suggest some kind of tube cleaning be made to tylan9

>>> 'tylan9' problem from eminami -- Wed Feb 15 20:44:20 1989 <<<

problem #1:  the load zone of the tube does not stabilize
(at 835 deg. C).  It was off by 3-5 deg. C after 1.5 hours.

problem #2:  the tube is VERY dirty.  The boat, etc. is black,
possibly from thick nitride deposition.  This is not normal...
even after thick deposition, the tube should have a brownish
color (after thick low-stress nitride deposition).  I have never
seen it black before (it was this way before my 3.5 hour deposition).

Use tube at your own risk.

>>> 'tylan9' problem from jchen -- Wed Feb 15 23:08:56 1989 <<<


As reported by carlos and eric, the tube was dirty and the color was dark.
When I finished my 22 minutes standard deposition, the color of the tube
is dark blue and the color seems right. The original dark coating was covered
by newly deposied nitride. (I believe)

However, the deposition is not right, 22 minutes standard deposition gives
me only 470 A !! I have to re-do mine.

>>> 'tylan9' problem from evan -- Thu Feb 16 10:32:29 1989 <<<

problem: low deposition rate
cause: setting of automatic pressure controller
solution: the standard setting is being refined.  It was set to 300mTorr during
Robin's test run and the rate will be checked at the end of her production run.
The final setting will be referenced to SNITC process. Users should NOT adjust
the controller for different recipies.  They should report the process pressure
along with the run times and deposition results to help with the adjustment
procedure.

>>> 'tylan9' problem from carlos -- Fri Feb 17 00:14:18 1989 <<<

The deposition pressure is wrong. It should be 300mT but it 
is 700 now !. Please someone show me how to adjust the new 
pressure valve

>>> 'tylan9' problem from evan -- Fri Feb 17 09:32:55 1989 <<<

problem: process pressure
cause: flow rates?
solution: the process pressure was checked using 75 sccm NH3 and 25 sccn DCS
as standard in SNITC.  The process pressure was 290, within expected range.
If other recipies are used with gas flow rates as variables, the process
pressure will vary according to the values entered.  

Desired and actual flow rates of process gases must be reported along
with the resulting pressure when reporting a problem.  There is no record
of these parameters in the equipment history and it is therefore impossible
to recreate the situation creating errors.  

It will also be helpful to know what pressure and flow rates were even if
you are not reporting a problem.

Your help is appriciated.
evan

>>> 'tylan9' problem from rooney -- Fri Feb 17 17:08:18 1989 <<<

major vacuum leak through tube in front where thermocouple rod
is inserted--do not operate

>>> 'tylan9' problem from evan -- Fri Feb 17 17:09:44 1989 <<<

the tube is indeed leaking out the ceramic thermocouple tube.
the entire quartz sheath will have to be replaced.
the tube is in manual mode with 2 slpm of N2 for a purge.

tylan9 is down for all users.

>>> 'tylan9' problem from evan -- Fri Feb 17 17:44:21 1989 <<<

Removed the thermocouple and plugged the end of the tube.
Loaded NITSTNBY and will leave it this way for the weekend.

...
Discovered that tube also leaks at compression fitting end of quartz tube.
This was also sealed but tube will not pump down into baratron range.

It will remain in idle of NITSTBY for the weekend.

tylan9 is still down

>>> 'tylan9' problem from evan -- Tue Feb 21 12:09:08 1989 <<<

The cantelever assembly is being rebuilt today with new quartz sheaths.  It
will be put back in place this afternoon and if leak tests go well, tylan9
should be back up by 5:00.

>>> 'tylan9' problem from evan -- Tue Feb 21 15:26:56 1989 <<<

The cantelever has been reinstalled.  The tube will be  outgassing for awhile
but the initial base pressure, in the 40-45 mTorr range indicated that there
are no major leaks.

A standard deposition run must still be run so the tube should be ready for
use early tomorrow.

>>> 'tylan9' problem from evan -- Tue Feb 21 16:41:58 1989 <<<

New boats were installed and dummy wafers put in place.  Tom will be running
a standard deposition.  When he is through, the tube will be up.

>>> 'tylan9' problem from bill -- Tue Feb 21 22:50:45 1989 <<<

Results of Coating Runs after new cantilever installation :

Run 1 by Carlos - he did not see the run all the way through
and assumed it aborted - may have been successful,

Run 2 by Bill - I didn't even check to see if the boats were
coated - I just ran a second coating run to check all parameters.

Results : SNITC 30 min
          temp stabilized ok
	  passed leak check - pressure return was about 30mtorr/min
			    seems high but good enough to pass
	NH3 flow of 75 gave ~150 mtorr
	DCS flow 25 and NH3 flow 75 gave ~240 mtorr
	Total pressure stabilized at 240 but
		by end of 30 min deposition pressure = 270 mtorr
	( Possibly depositing around pump valve ) 

Will report color as soon as I get the tube to open -
has purged 20 minutes - but still won't open.
Will continue N2 purge.

>>> 'tylan9' problem from bill -- Wed Feb 22 00:04:07 1989 <<<

Tube finally opened after 5 lpm N2 for 30 minutes.
Color on boats and rods is good - a beautiful violet/purple.
Starting some low flow runs, will report all conditions in 
comment log.

>>> 'tylan9' problem from hoagland -- Wed Feb 22 18:03:54 1989 <<<

Tylan9 is currently down for calibration of a new pressure controller.
When this has been accomplished the tube will be temperature calibrated
before it is returned to service.  If all goes well this tube will be
up for use by Thursday night.

>>> 'tylan9' problem from evan -- Thu Feb 23 15:18:33 1989 <<<

While tylan9 was down for pressure controller, a new MFC connector was installedwith a molex connector inline for easier servicing.

>>> 'tylan9' problem from hoagland -- Thu Feb 23 16:53:27 1989 <<<

The new pressure controller is operational.  There seems to be a
longer period required to stabilize the pressure than with
tube16, but after several minutes the setpoint is maintained
successfully.  The pumping speed of tube9 is slow- James
will check out the pump and filters tomorrow morning before we
mark the tube up for general use.  Another possible problem
is apparent leakage across the NH3 shutoff valve, which we will
also look into tomorrow.  Instructions and recipe changes required
to use this tube will be outlined when it is released to users
sometime Friday; nitride should be up for the weekend.

>>> 'tylan9' problem from carlos -- Thu Feb 23 21:10:15 1989 <<<

the pressure meter reads -35 mT before the leak test !

>>> 'tylan9' problem from carlos -- Fri Feb 24 01:24:09 1989 <<<

1) the DCS flow is supposed to be 75 sccm, but the maximum 
it gets is 62 sccm. Please someone check the DCS supply

2) The tube is leaking about 3-5 sccm/min.

>>> 'tylan9' problem from carlos -- Fri Feb 24 03:31:55 1989 <<<

program SNITC, Tdep=20 min. The pressure during deposition
increased from 170 to 230 mT in 20 minutes. Something must be 
wrong with the pump.
The nanospec indicated Tnit=823A. Very uniform

>>> 'tylan9' problem from voros -- Fri Feb 24 08:33:12 1989 <<<

The nitride system is down for the weekend. We were witing for the
pump to go down, which now happened, to start fomblinizing.
This is a long job and will not be finished today. I expect the
system to come up early next week. We will keep you posted.
Thank you for your understanding.
Katalin
From evan Fri Feb 24 13:21:06 1989
Received: by argon (5.57/1.16)
	id AA09260; Fri, 24 Feb 89 13:20:45 PST
From: evan (Evan Stateler)
Message-Id: <8902242120.AA09260@argon>
To: tylan9
Cc: carlos, galewski
Subject: DCS
Date: Fri, 24 Feb 89 13:20:43 PST
Status: R

The DCS scale shows that 6lbs of the 10 lbs has been used.  The pressure is
down from 9 psi to just under 8 psi.  I will be keeping a close watch on the
pressure and weight as the DCS gets used.  A replacement was ordered 1/30/89
but Matheson Gas is again 'awaiting shipment'.  I reached the branch manager
who informed me that he had confirmation that the shipment was leaving from
the east coast.  The delivery should reach the Newark, CA plant by the end of
next week.  They expect to start filling orders by Monday, March 7th.
I plan to continue to be a squeaky wheel until the cylinder is in our hands.

Carlos, as far as your low sccm output, I will have to wait until the pump
has been reinstalled.  I will check it out then.


>>> 'tylan9' problem from evan -- Mon Feb 27 15:54:57 1989 <<<

James Parrish was cleaned and reinstalled the pump.  The entire exhaust system
also needed to be cleaned and reassembled.  This work will be finished tomorrow
morning and pump down and leak testing will begin.  tylan9 should be back onlineby tomorrow evening.

>>> 'tylan9' problem from evan -- Tue Feb 28 16:38:31 1989 <<<

The tylan9 exhaust system was reinstalled and leak tested.  The resulting
base pressure was 8 mTorr with a ROR of 10 mTorr/min.
The DCS flow was tested at 80 sccm and this rate was delivered by the MFC.
The automatic pressure controller test recipe, MTORR9, was run and the
results were good.  Process pressures (flowing 75 sccm NH3) of 200, 300, 400
500,...900, and 1000 mTorr were reached and stable within a minute.

tylan9 is up.

>>> 'tylan9' problem from carlos -- Tue Feb 28 20:58:36 1989 <<<

The pressure meter has a negative reading during pumpdown. There 
is a pressure offset in the reading. Please someone adjust the 
meter reading correctly.

>>> 'tylan9' problem from evan -- Wed Mar  1 08:48:30 1989 <<<

The problem of negitive pressure readings is not a direct problem with the
baratron gauge.  The readings are correct when in manual mode.  The problem
is a result of the automatic pressure controller loading down the baratron
output when in automatic mode.  The voltage drop is slight but the effect
is significant when near the zero adjustment range.  This will be looked into
and corrected.  For the time being, ignor readings below 008 mTorr during
hard pumpdown.  Any readings this low indicate the pressure is at the base
pressure of the pump and the tube is leak tight.
tylan9 is still up.

>>> 'tylan9' problem from hoagland -- Thu Mar  2 16:39:42 1989 <<<

Tube9 is down due to unforseen difficulties "fomblinizing" the pump.
Following a 5 hour run the filters were pulled and inspected.  They
were covered with sludge and had to be replaced.  The tube was returned
to service but at 4:30PM this afternoon the pump started rattling and
shortly thereafter shutoff.  Tube base pressure looks OK but the oil
level in the pump is near the lower limit and the sight glass is 
partly obscured by sludge.  The recovery filter on the pump exhaust
was reading around 2 PSI and showed signs of blowing oil past the top 
seal- oil and sludge are present on the pump cabinet door and interior.
The pump will be inspected tomorrow and returned to service if it is
working normally.

>>> 'tylan9' problem from evan -- Fri Mar  3 16:54:01 1989 <<<

The pump oil was changed back from fomblin to the std. oil.
The inline filter was checked and was clean enough to but back.
The pump inlet screen was found to be clogging and it was removed.
The tube was pumped down to a base pressure of 12 mTorr and ROR
of 6 mTorr/min.

Tylan9 is up.

>>> 'tylan9' problem from carlos -- Mon Mar  6 11:39:02 1989 <<<

One of the temperature zones would not reach 835C even after 3hrs 
of stabilization
From parrish Tue Mar  7 16:17:19 1989
Received: by argon (5.57/1.16)
	id AA27629; Tue, 7 Mar 89 16:16:56 PST
Date: Tue, 7 Mar 89 16:16:56 PST
From: parrish (James Parrish)
Message-Id: <8903080016.AA27629@argon>
To: tylans
Subject: filter change
Status: RO

I changed the oil filters on #9. I think the filtration unit has a problem
in the magnatic head, in order to keep the pump on 9 filtered I changed the units around, the filters in 9 were very clogged, I did not change them back around
because I didn`t want to spend another 1/2 hour primming the unit. both systems in running.


>>> 'tylan9' problem from field -- Fri Mar 10 10:18:39 1989 <<<

never mind

>>> 'tylan9' problem from parrish -- Fri Mar 10 12:34:40 1989 <<<

problem:    clogged oil filters

cause:      5 hour depositions

solution:   replaced the oil filters

>>> 'tylan9' problem from hoagland -- Fri Mar 10 15:55:31 1989 <<<

problem:  Excessive time required to complete calibration process-
          profile TC outputs oscillate.

cause:  Problem stems from thermal latency of cantilever rods.
        The spikes are currently installed precisely on the boundary
        of the guard and flat zones.  Original Tylan specs called 
        for a 34" flat zone which left 1 inch between the spikes and
        internal profile TC's.  Our current calibration TC provides
        for a 32" flat zone, creating a larger 2 inch gap between the two
        sets of TC's.  With the redundant TC software now incorporated
        on the DTC cards this temperature disparity is amplified as
        the 2 sets of TC's alternately take control of the firing
        board.  

solution:  Tystar recommends expanding the KP value to beyond 8X
           the temperature range of oscillation.  This will permit
           the other integration constants to take effect more
           rapidly and reduce control overshoot.  Even a KP value
           as large as 100 would not be unreasonable. 

>>> 'tylan9' problem from moazzami -- Sun Mar 12 14:03:05 1989 <<<

Attempted to run SNITC.V:
Did not pump down at step 40.
VACALM is on.
Reloaded standby program (but tube is at atmospheric pressure).
Tylan 9 is down.

>>> 'tylan9' problem from parrish -- Mon Mar 13 08:27:37 1989 <<<

problem:    tube at atmosphere

cause:      mech-pump circuit-breaker tripped

solution:   reset circuit-breaker and checked the oil filters. every=
            thing looks okey.

>>> 'tylan9' problem from carlos -- Tue Mar 14 01:05:09 1989 <<<

neither the DCS nor the NH3 mass flow controller is responding.

The DCS is supposed to be 70 sccm, but it reads 0, also the 
NH3 is supposed to be 15 but it reads 2.1. The pressure 
should be 300mT, but the meter indicates ~ 23 mT. Please 
fix this ASAP. 

>>> 'tylan9' problem from carlos -- Tue Mar 14 02:26:43 1989 <<<

The problem resides in the flowmeters. Even when the pressure control
valve is set to be fully open, the flowmeters are not stable. When 
the valve is set into auto, the flowmeter and valve seem to oscillate.
The valve goes from fully opened to fully closed position. I think; 
however, the flowmeters are the source of the problem
.

>>> 'tylan9' problem from carlos -- Tue Mar 14 02:48:03 1989 <<<

both NH3 and DCS gas supplies keep oscillating. It seems that 
the flow changes from the specified values to zero as if there 
was a valve chopping the flow. 

>>> 'tylan9' problem from hoagland -- Tue Mar 14 09:26:13 1989 <<<

problem:  Process gasses cycling on and off during run- gas
          shutoff valves being activated.

cause:  N2 pressure interlock on pump ballast.  Apparently when
        pump was removed for service pressure switch was rotated
        to a point where trip point was at N2 pressure.

solution:  Rotate N2 pressure sensor clockwise several click stops
           past normal N2 pressure trip point.  Tube9 is up for
           service.

>>> 'tylan9' problem from parrish -- Thu Mar 16 07:26:32 1989 <<<

Tylan9 will be down for maintainance of the mech-pump for about an hour
the sight glass is obscured with some type of residue, and it must be
cleaned. which means changing the oil in the pump.

>>> 'tylan9' problem from parrish -- Thu Mar 16 10:18:45 1989 <<<

problem:    oil site glass obscured with residue from the oil

cause:      reaction of the oil and the silane

solution:   replaced oil in the pump and changed the filters

>>> 'tylan9' problem from evan -- Thu Mar 16 10:27:19 1989 <<<

While parrish changed the oil, the in-line exhaust filter was also
changed.  The old one was partially plugged with the normal flaky
white powder.  There was no sign of the yellowish gummier substance.

The base pressure was 7-8 mTorr and ROR was 10 mTorr/min.  The ROR should
improve as the new filter stuffing ceases to outgas.

tylan9 is up.

>>> 'tylan9' problem from evan -- Thu Mar 16 16:54:18 1989 <<<

AQ new bottle of DCS has arrived. It will be installed early next week.

>>> 'tylan9' problem from parrish -- Fri Mar 17 10:41:59 1989 <<<

problem:     clogged filters 

cause:       7 hour deposition of silane

solution:    replaced oil filters

>>> 'tylan9' problem from evan -- Tue Mar 21 08:20:29 1989 <<<

The DCS cylinder will be changed today.  The lines will need to be purged
during the morning and the cylinder installed this afternoon.
tylan9 and tylan10 will be back up this evening.

>>> 'tylan9' problem from evan -- Tue Mar 21 14:41:26 1989 <<<

The DCS cylinder has been changed.  A new UNIT UNC-1400 MFC was also
installed at this time.  The old tylan MFC showed no sign of leaking
around the seals.  
The starting weight of the new cylinder and gas is 38.6 lbs.

tylan9 and tylan10 are up.

>>> 'tylan9' problem from tom -- Tue Mar 21 16:08:09 1989 <<<

Tube is out of calibration.  While the DCS was being changed the tube
cooled down to 350C for some unknown reason.  I will calibrate it 
tomorrow.  The TC is being used for tylan16 now.

>>> 'tylan9' problem from carlos -- Wed Mar 22 22:57:27 1989 <<<

It doesn't detect the closing of the door in the NITSTNBY program.
I think the problem maybe caused by the door closed detector switch

>>> 'tylan9' problem from evan -- Thu Mar 23 09:07:14 1989 <<<

Problem: NITSTNBY not detecting door closure.
Cause: Microswitch that detects door is almost closed (and shifts
boat loader to slow speed) was bent and not contacting cantelever
carridge.  
Solution: reworked microswitch lever until it made the correct
contact.  NITSTNBY now passes load step 20.


tylan9 is up and running.

>>> 'tylan9' problem from nam -- Mon Apr  3 18:51:21 1989 <<<

Firing rate at the source zone becomes zero around 834C and
stays zero for the rest of the run which asks for 835C, thus
causing the source zone temperature not stabilized.
The firing rate becomes normal when the program is aborted.

>>> 'tylan9' problem from hoagland -- Wed Apr  5 17:29:35 1989 <<<

The DTC card for tube9 was swapped for the one in tube4 following
several anomalies with the displayed KM value for it's source
zone.  Tube9 is currently running SNITCALA and will be available
for use following it's successful completion- please remember to
disconnect the internal calibration TC's BEFORE opening the door.

>>> 'tylan9' problem from bill -- Thu Apr  6 13:52:58 1989 <<<

Problem with DCS mass flow controller -
I requested 10 sccm - and received about 65 sccm

Tom and I made several manual flow requests of DCS from 
the back of the tube -
65 is the minimum the MFC will deliver,
it does deliver correctly if >65 sccm is requested.

Also the NH3 MFC does not seem very stable,
I requested 30 sccm and received anywhere from 22 - 32 sccm
even after a few minutes to stabilize.

>>> 'tylan9' problem from evan -- Thu Apr  6 16:33:49 1989 <<<

problem:malfunction of MFC; 65sccm minimum
cause: auto-zero on new UNIT MFC not working
solution: returned the original tylan MFC after checking calibration.
The UNIT MFC is being purged on the test stand overnight.  Will contact
vendor about the problem.

NH3 controller seemed stable in manual mode.  I will check it out when
tom runs a test SNITC.V.

tylan9 is up

>>> 'tylan9' problem from hoagland -- Fri Apr  7 11:55:02 1989 <<<

Oil filters have been changed for tube9.  The old gate valve was
also replaced with a new more reliable version.  Tylan9 is up
and available for service.

>>> 'tylan9' problem from voros -- Fri Apr  7 16:29:03 1989 <<<

Pls do not make low stress runs over the weekend. After Nam's run 
is done late this afternoon we will not have time to change the oil.
Standard runs are ok.
Thank you for your cooperation.
Katalin

>>> 'tylan9' problem from nam -- Fri Apr  7 18:22:48 1989 <<<

esThe tube would not vent after 4 hours of deposition of low stress nitride,
and could not move the boat out.  Steve Hoagland thought the problem was
due to the new gate valve, and had to shut down the pump so that the
tube was vented eventually.  Now he put the pump back to operation, but
recommends that nobody uses the tube until the problem is fixed.

>>> 'tylan9' problem from evan -- Mon Apr 10 11:52:02 1989 <<<

The new huntington vacuum valve is not completely sealing due to deposits
on the seating surfaces.  It has been removed and will be disassembled and cleaned.  There was an unusally high amount of the white powder in the valve and
manifold.  The in-line filter might have been packed too loosly for it
didn't seem to be trapping as much as before.  I have installed a tightly 
packed filter. James and I also cleaned out the filter-to-pump sections
of manifold. It will be reassembled this afternoon.
tylan9 is still down.

>>> 'tylan9' problem from evan -- Mon Apr 10 16:11:22 1989 <<<

problem: tube not venting
cause: vacuum valve not closing completely
solution: cleaned and replaced valve, in-line filter and manifold.
The tube would still not vent.  It seems that the spring-loaded
valve is not strong enough.  I reversed the direction of the valve
so it now gets a vacuum assist to seal.  The tube now vents normally.
The problem with this fix is that material is more likely to build up
on the bellows of the valve.  This will have to be inspected if the valve
show trouble opening in the future.

tylan9 is up

>>> 'tylan9' problem from parrish -- Tue Apr 11 11:15:12 1989 <<<

problem:    clogged filters

cause:      4 hr. silcone, nitrite deposition

solution:   changed oil filter elements

>>> 'tylan9' problem from bob -- Thu Apr 13 07:22:38 1989 <<<

tylan9 should not be used for long depositions. It is in need of 
having the filters changed. This will be done this morning by James 
Parrish.
bob

>>> 'tylan9' problem from parrish -- Thu Apr 13 10:11:54 1989 <<<

problem:    clogged oil filters

cause:      6.5 hrs of silcon nitride deposition

solution:   replaced clogged oil filters

>>> 'tylan9' problem from mats -- Mon Apr 17 20:35:19 1989 <<<

When the boat went back in, after I had taken my finished wafers out,
the small metal lever that actuates the 'boat is in' switch (BPIN) caught
on the boat and got bent into an ugly curve. Since the switch now didn't
work, NITSTNBY would hang on the load step. To be able to leave the tube
under vacuum, I straightened the lever with a pair of pliers. It is still
not pretty, though.
  It seems to me like both the boat endpoint switches (BPIN & BPOUT) on
tube 9 are mounted backwards, which is why this could happen.

>>> 'tylan9' problem from evan -- Tue Apr 18 11:44:25 1989 <<<

problem: bent levers on BPIN microswitch.
cause: microswitches mounted backwards due to difference in mounting of
tylan9 cantalever assembly.
solution: new plates have been ordered from the machine shop that will 
allow microswitches to be oriented properly.  These will be installed
as soon as I get them.  In the meantime, they should survive with the
expert emergency bending by mats.
tylan9 is up

>>> 'tylan9' problem from parrish -- Mon Apr 24 15:16:58 1989 <<<

problem:    clogging of the oil filters

cause:      long silcon nitride depositions

solution:   added two prefilters to the oil filtration system. system installed
	    today we will watch the results.            

>>> 'tylan9' problem from bill -- Tue Apr 25 17:59:40 1989 <<<

Previous user did 4 hour deposition -
and reports pressure increase during deposition
( see comment log Carlos 4/25 ) -
I checked base pressure before my run -
reched only 40 mtorr after about 5 minutes of pumping.
From voros Wed Apr 26 10:50:22 1989
To: parrish evan bob
Subject: tylan9
Cc: $ec/tylan9-p

Date: Wed, 26 Apr 89 10:29:21 PDT
From: bill (William Flounders)
To: voros
Subject: Re:  tylan9

No run performed,
after Carlos' comment I wanted to check base pressure
before risking my wafers, so I just pumped down and
decided not to run when I saw the poor base P.



>>> 'tylan9' problem from evan -- Wed Apr 26 16:32:25 1989 <<<

The problem of unstability at 300 mTorr process pressure was due
to the inability of the controller to adjust at extreme end of scale.
Due to clogged exhaust filter and lines, the base pressure of 15:80
NH3:DCS was 289mTorr without the controller on (throttle wide open).
The filter was replaced and the plug at the vacuum throat of the tube
removed.  The 15:80 base pressure without controller was then 215mTorr.
A 15:80  run of SNITC.V was checked at 300 mTorr process pressure and
it stabilized quickly at 310 mTorr on the readout.  I did not do a long
run so I can't say if it would have risen.

The problem of base pressure was also due in part to the clogged filters and lines.  After cleaning, the baratron was calibrated by checking the pressure
at the tee in the exhaust manifold.  The baratron was reading 12-15 mTorr
high. Some of this is due to the pressure differential from the front of`
the tube to the tee location.  The readout also changes when switching
from manual to automatic mode.

These base pressure problems will continue to be worked on.  In the meantime,
tylan9 is passing the leak check steps ok.

tylan9 is up for use.
From bob Thu Apr 27 07:50:42 1989
Received: by argon (5.57/1.16)
	id AA09852; Thu, 27 Apr 89 07:50:39 PDT
From: bob (Robert M. Hamilton)
Message-Id: <8904271450.AA09852@argon>
To: evan, hoagland, parrish
Cc: voros, bob
Subject: tylan9 manifold cleans
Date: Thu, 27 Apr 89 07:50:37 PDT
Status: R

It looks like we can run about 22 hours of deposition
between manifold cleans. This is what the log shows between
April 10th to the report of high pressure. Connecting BLIMP
to the DCS will make these histories easier to calculate. I
would like to work with the following intervals.

every 4 hrs, change the oil filters (downstream activated
aluminas)

every 18 hrs, clean the manifold from the tailpiece to the
pump

The use of this tube has greatly increased. We have used 1.2 kgrams
of DCS in a little over 30 days. Our use rate for the first
3 year was about this amount/year.

bob



>>> 'tylan9' problem from bill -- Thu Apr 27 15:02:19 1989 <<<

Attempted low flow deposition :
NH3 : 30 / DCS : 10 / 800 C / 10 minutes

After about 4 minutes of deposition both gases shut off !
I watched the pressure drop and checked flows on the tycom
( both gases read about zero )
( I forgot to check NH3 on or off at this point )

After about a minute - both gases turned on again
flows returned to requested 30 and 10, and pressure
returned to requested 150 mtorr.

After another 4 minutes the exact same thing happened again
( all gases off and then all gases back on again )

>>> 'tylan9' problem from evan -- Thu Apr 27 17:00:59 1989 <<<

problem: gases shutting off in middle of deposition
cause: the n2 regulator/ flow controller for the pump ballast was incorrectly
set: flow meter at 6, regulator at 0psi.  This caused a low pressure alarm
which shuts off the gases.  It was set off by the DCS 'on' surge arriving
when the pressure controller was in a closed position.  This formed an
unstable feedback loop between the gas valves, pressure contreoller and the
pump ballast detector.  Shutting off the gases caused the pressure to fall...
causing the pressure controller to close down... allowing the pump ballast alarmto reset...opening the gas valves...giving the closed system a blast and raisingthe process pressure very high... ... ... or something like this.
The regulator was opened up to 8psi and the flow returned to 6.  This solved
the immediate cycling problem.. 
Tylan9 is up however the ballast pressure and alarm system needs further adjustment.

tylan9 is up.

>>> 'tylan9' problem from bill -- Thu Apr 27 17:49:08 1989 <<<

Gases shutting off and turning on during deposition again.
I requested 150 mtorr,
when DCS came on it only overshot to about 220mtorr,
then quickly controlled to 165-170 mtorr.
During the DCS turn on there was no trouble -
I did not hear the gases shut off.

the tube ran stable for 3-4 minutes and then the gases shut off.
The tube never stabilized again - the gases came on and off continuously
for 3-4 minutes and I finally aborted.

I suggest that the tube might be ok for standard deposition
and the problem is related to my low flow requests
( even though this has not caused trouble before )

William Tang ( tang ) is planning a standard deposition next -
his results might help isolate the trouble.

Final comment for Evan -
I used a recipe which turned DCS on and pressure control in the same step.

>>> 'tylan9' problem from evan -- Fri Apr 28 11:15:36 1989 <<<

Problem: gases shutting off and on during deposition
Cause: Low pressure detector on pump N2 line activating
Solution: reset all pump N2 flow controls.  Reset pressure detector to operate
at normal setting (detects low pressure and shuts off gases when pressure
lowers to 1-2 psi.).  Ran SNITC.V twice at 30:10 NH3:DCS @ 150 mTorr for
total of 25 min. One 10 min run and one 15 min run.  No errors occured during
either run.

tylan 9 is up.

>>> 'tylan9' problem from tang -- Fri Apr 28 21:22:15 1989 <<<

While running SNITC, the deposition pressure was erratic--
drifting between 0 and 110 mTorr, jumping up and down. Gas
flow was restricted. I aborted the run at 30 min into depostion.
I put the tube back to NITSTNBY.

>>> 'tylan9' problem from evan -- Mon May  1 11:26:06 1989 <<<

problem: erratic gas flow
cause: n2 feed to pump; low pressure alarm tripping
solution: this is the same as fridays problem.  I readjusted the alarm
switch again, this time while running SNITC. Last week I set it while
running SNITC.V with a low process pressure.  bill is going to do
a quick run and we will see if it runs ok with his parameters.

tylan9 is up.

>>> 'tylan9' problem from evan -- Mon May  1 15:57:35 1989 <<<

the pumpdown will not reach base pressure after the tube has been
vented (in less than 20 min) unless it has had at least ten minutes
of a softpump n2 purge.  This condition is usually satisfied during
the temp ramp and stabilization times.  If these steps are 'acked'
through, the tube will most likely fail the leak test.
Using SNITC and allowing purge for 12 min during temp ramp step, hard
pump reached base of 6mTorr quickly (< 1 min) and leak test showed ROR
of 6 mTorr/min.
The 75:25 NH3/DCS flow gave a process pressure of 175-185 mTorr which is
normal.  No sign of gases shutting on/off.

tylan9 is up

>>> 'tylan9' problem from evan -- Fri May  5 14:50:22 1989 <<<

The new brackets for the cantelevor position microswitches were
installed.  The microswitches were remounted with the lever facing
the proper direction.  The bpin microswitch lever was very bent up
and so it was replaced.
tylan9 is still up.

>>> 'tylan9' problem from rooney -- Wed May 10 12:51:40 1989 <<<

tube will not close properly.  Switch engages before door has a chance to seat.

>>> 'tylan9' problem from evan -- Wed May 10 15:16:50 1989 <<<

problem: door not closing
cause:none
solution: the door appears to function normally.  When the microswitch engages,
the cantalever motor switches to a very slow speed.  In manual closing, the
in switch must be held for an additional 10-15 seconds as the door slowly closesall the way.
to rooney, if this is not what happened to you, please send another message.

>>> 'tylan9' problem from carlos -- Sat May 20 11:43:47 1989 <<<

The load zone wouldn't reach 835C. The tube needs to be calibrated

>>> 'tylan9' problem from parrish -- Mon May 22 13:27:10 1989 <<<

problem:     sightglass obscured, and no oil pressure gauge or oil sensors

cause:       oil cloudy, never installed

solution:    changed oil in the pump and cleaned the sightglass, and installed
             a pressure gauge, and the oil sensors. system up 

>>> 'tylan9' problem from hoagland -- Mon May 22 16:49:07 1989 <<<

The vacuum pump for tube9 has been fitted with oil pressure sensors
and connected to the pump alarm system.  The sensors are active and
enabled.

>>> 'tylan9' problem from parrish -- Mon Jul 24 15:30:59 1989 <<<

oil filters has been changed

>>> 'tylan9' problem from evan -- Wed Jul 26 11:52:48 1989 <<<

Inline filter was replaced. The old one was quite full.
The manifold needs to be cleaned out. I will do this when tylan9
is free.

>>> 'tylan9' problem from evan -- Wed Jul 26 15:49:04 1989 <<<

A successful SNITC.V run was made with the process pressure 320 mTorr
(300 mTorr as controller variable).  This is much better than the 385 mTorr
reported before. When I clean the manifold, I will run the MTORR9 controller
check to see if the controller has drifted.

>>> 'tylan9' problem from evan -- Wed Jul 26 17:09:10 1989 <<<

problem:process pressure too high using pressure controller & SNITC.V.
cause:drift in controller/baratron circuit
solution:ran MTORR9 (controller exerciser program)
    adjusted AMP ZERO pot (located by normal/reverse switch on main circuit board) until process pressure agreed with request.
Controller checked at 300,400,500...900,1000 mTorr and resulting process pressure stabilized within +- 2 mTorr.  Controller gave 212 mTorr for a 200 value because valve was wide open at this setting. All testing was with NH3 @ 75 sccm.

>>> 'tylan9' problem from evan -- Tue Aug  1 17:00:54 1989 <<<

problem:high base pressure & process pressure
the base pressure readout was recalibrated. it was 25-30 mTorr too high.
this did not improve the high process pressure. I will be cleaning the
oputlet tube and manifold Wednesday morning.
tylan9 is up as is

>>> 'tylan9' problem from evan -- Wed Aug  2 11:59:01 1989 <<<

the manifold and outlet tube have been cleaned. the in-line filter and
choke valve were checked.  the pumpdown looks good but I will have to
leave it in purge mode during lunch to remove remaining h2o. 
tylan9 will be up at 1:30

>>> 'tylan9' problem from evan -- Wed Aug  2 13:11:32 1989 <<<

problem: high process pressure
cause:build-up in tube outlet
solution: cleaned outlet and exhaust manifold
 
after purging, base pressure 7 mTorr  ROR 5 mTorr/min.
process pressure with 75 sccm NH3 reduced from 215mT to 167 mT.
NITSTNBY idle pressure (step 55) reduced from >400 to 320 mTorr.

tylan9 is up and pressures are down!

>>> 'tylan9' problem from parrish -- Thu Aug  3 09:47:07 1989 <<<

oil filters has been changed.

>>> 'tylan9' problem from bill -- Thu Aug  3 21:26:29 1989 <<<

Best base pressure I obtained ~18-20 mtorr,
this is better than the 40 mtorr of last week -\
but not the 3-4 mtorr I heard about.

Load zone takes forever to stabilize -
Tom is familiar with this problem already,
I hope it will bve corrected soon.

>>> 'tylan9' problem from evan -- Fri Aug  4 13:29:21 1989 <<<

problem:base pressure high
This is an effect of the automatic pressure controller. When the controller
is activated, it loads down the baratron output giving a 10 mTorr lower
reading.  I last adjusted the system with the controller active in order
to give the truest results in this mode. The result is that the base pressure
is reading 10 mTorr higher than actual when not using the controller. I
will try to find a solution to the loading problem. 
tylan9 is up (with base pressure of 15 mTorr, ROR 5 mTorr/min.)

>>> 'tylan9' problem from tom -- Wed Aug  9 16:29:27 1989 <<<

Problem:   Heater power breaker off. Tube at ~400 C.
Cause:     Unknown. Was found like this by me at 4:30 today.
           I reset the heater breaker on bank 4 (tylan16) earlier
           today. Maybe that tripped it, as these breakers have
           done before.
Solution:  Reset SCR board. Turned back on breaker. Tylan11 and 12 
           tripped off when I did this but I reset them and they 
           fine. Tube is firing. Tube is up.

>>> 'tylan9' problem from parrish -- Fri Aug 11 15:04:06 1989 <<<

oil filters has been changed .

>>> 'tylan9' problem from bill -- Sun Aug 13 14:27:10 1989 <<<

Best base pressure ~20mtorr ( with pressure control on ).
I don't mean to be splitting hairs - when there is a high base
pressure my films are junk.
The total pressure with low flows is 120mtorr so a 20 mtorr
background is significant.
Possibly this is more baritron magic so I tried a run anyway
and will report the results.

>>> 'tylan9' problem from bob -- Mon Aug 14 17:00:16 1989 <<<

'tylan9 is running a calibration recipe and will not be available
for use until 8/15 apx 10:00 AM.

>>> 'tylan9' problem from evan -- Tue Aug 15 11:59:20 1989 <<<

problem: high base pressure... 20 mTorr
cause: drift in baratron and build-up of material in outlet tube.
solution:cleaned out the outlet tube. replaced the in-line filter.
pumped tube down with GP gauge on exhaust tee. At a base pressure of
6 mTorr on GP, Baratron was reading 19 mTorr.  Adjusted the baratron
to read correctly.

After any venting of this tube, an n2 purge step of at least 10 min is
needed. After high and long DCS runs, a very long purge time is needed
in order to reach this base pressure.
Base pressure 7 mTorr ROR 4 mTorr/min.
NITSTNBY is now running.
tylan9 is up

>>> 'tylan9' problem from evan -- Thu Aug 17 11:15:32 1989 <<<

The heat plug is being pushed towards the door when inserting the
cantalever.   This is due to a build up of deposits. I will vacuum
this out after eskims run.

>>> 'tylan9' problem from parrish -- Fri Aug 18 10:28:45 1989 <<<

oil filters has been changed.

>>> 'tylan9' problem from evan -- Mon Aug 21 09:39:10 1989 <<<

The DCS cylinder will be changed Tuesday Aug 22 in the morning.
tylan9 should be back up after 12:00.

>>> 'tylan9' problem from evan -- Tue Aug 22 16:47:03 1989 <<<

The new DCS cylinder has been installed.  A bad check valve was removed
from the purge panel.  It had been leaking.
tylan9 is up

>>> 'tylan9' problem from evan -- Wed Sep 13 17:30:53 1989 <<<

The pump pre-filters and filters changed. The oil topped off.  The in-line
filter replaced with a kurly kate loaded housing.  The outlet tube and
manifold parts (between tube and inline filter) were cleaned.  
The throughput is very good now.  Baratron was recalibrated using GP gauge
at the tee.  Base pressure <10 mTorr. ROR = 6 mTorr/min.

tylan9 is up

>>> 'tylan9' problem from bob -- Tue Sep 26 09:14:02 1989 <<<

tylan9 is available for standard runs however long runs and low stress
runs should not be made until oil filters have been changed.

>>> 'tylan9' problem from bob -- Fri Sep 29 08:12:04 1989 <<<

James Parrish has checked over the filters on tylan9 and reports they
are in good condition and useable for another low stress run. tylan9 is
up for all types of runs.

>>> 'tylan9' problem from voros -- Fri Sep 29 10:56:55 1989 <<<

test

>>> 'tylan9' problem from nam -- Mon Oct  2 10:28:21 1989 <<<

The boat for tylan9 is very dirty.  Several slots were filled with
broken pieces of wafers as well as debris of deposited film.
I think the boats should be changed.

>>> 'tylan9' problem from tom -- Mon Oct  2 14:45:05 1989 <<<

Problem: User reports excessive deposition on boats.
Cause:   Normal deposition.
Solution: Cleaned new boats and put in 4 clean new dummies.
          Will run coating run. tylan9 should be up by 5 PM today.

>>> 'tylan9' problem from hyeh -- Sat Oct 14 01:00:29 1989 <<<

One of the dummy wafers broke and there are no more dummy wafers in the 
blue box

>>> 'tylan9' problem from bob -- Fri Oct 20 10:38:57 1989 <<<

tylan9 was used for a 10 hour deposition last night and should not be
used for low stress depositions until it a filter change has occured.
We will try and have it ready for the weekend (around 4:00 today) however
the microlab is extremely short staffed today.

>>> 'tylan9' problem from bob -- Fri Oct 20 10:41:35 1989 <<<

tylan9 is up for normal depositions however it is not available for low stress
depositions. It should be up for low stress depositions latter this afternoon.

>>> 'tylan9' problem from bob -- Fri Oct 20 15:43:55 1989 <<<

The oil filtration has been serviced on tylan9. it is up for
all deposition types.

>>> 'tylan9' problem from field -- Mon Oct 23 12:48:53 1989 <<<

Flow rate of DCS is 75 sccm where I am calling for 85 sccm.
My wafers are running now - anything we can do about this 
during the run?  I'll be around the lab.

	Leslie

>>> 'tylan9' problem from field -- Mon Oct 23 12:58:02 1989 <<<

Actually, I'm probably better off if we make no attempt to 
correct the gas flows during this run, as it would, at this
point, lead to a stress gradient in my film which could
cause me even greater problems.

So please let's take no corrective action until my run is over.
I'll be done at about 16:30 or 17:00 this afternoon.

>>> 'tylan9' problem from evan -- Mon Oct 23 16:56:32 1989 <<<

The pressure controller is functioning ok but I think the inline filter
is clogged and this was causing the pressure problem. Process pressure was
above 300 mTorr with the valve full open in manual.

tylan9 has been reserved for tuesday to fix this and to service the DCS MFC.
(tylan10 jobs will be completed monday night and will be in standby tuesday)

>>> 'tylan9' problem from evan -- Tue Oct 24 16:43:34 1989 <<<

The DCS MFC has been replaced. It needs to be purged overnight with n2. 
The DCS will be restored Wednesday a.m.  If the flows are correct, the
tube should be up by noon.

>>> 'tylan9' problem from evan -- Wed Oct 25 11:50:25 1989 <<<

Control signal for n2 is not reaching MFC in auto mode.
A short run will have to be run in manual and then the problem will
be repaired.

>>> 'tylan9' problem from evan -- Wed Oct 25 16:10:21 1989 <<<

problem: no n2 flow during temp. stabilization step
cause: drift in zero setting of n2 MFC
solution: it was determined the the MFC would no longer pass gas at a
request level of 100 sccm but would at 120 sccm.  This is due to these
low flows being inside the noise floor of the MFC control voltage.
tom has adjusted the standard recipies to request 120 sccm of n2.
Other recipies should be changed by tthe owner.

The new DCS MFC performed normally during a run. It was manually tested for
flow up to 100 sccm and worked fine.

There was a period of erratic behavior during the repair with the NH3 solenoid
cycling. This turned out to be caused by a cheap metal holddown clip falling
off of a relay and shorting some contacts.  This was replaced.

tylan9 is up ( check n2 purge flows in recipe)

>>> 'tylan9' problem from evan -- Mon Oct 30 09:30:17 1989 <<<

The gas control panel will not respond when switched into manual mode.
This is needed for regular maintenance.

>>> 'tylan9' problem from bob -- Fri Nov  3 08:25:37 1989 <<<

tylan9 is available for normal nitride deposition. Please refrain from
doing long, low stress depositions until the filters are changed on
Monday, November 6th. 

>>> 'tylan9' problem from bob -- Mon Nov  6 07:49:27 1989 <<<

tylan9 will be inpected for throughput by Evan and serviced as needed.
Please withold long, low stress runs until this problem report is
removed. tylan9 is available for normal runs.

>>> 'tylan9' problem from evan -- Mon Nov  6 11:32:03 1989 <<<

Throughput checked and is good. Base Pressure = <10mTorr; ROR < 5mTorr/min.

tylan9 is up for all processes.

>>> 'tylan9' problem from seh -- Tue Nov  7 13:20:15 1989 <<<

The source zone never did temperature stabilize (always 3-5 degrees high).
The pressure setpoint was 300 mTorr while the actual was 264 mTorr.

>>> 'tylan9' problem from evan -- Wed Nov  8 16:42:52 1989 <<<

problem: pressure controller adjusting to a lower value than what was
         requested.
solution: ran MTORR9 program from technician disk.  found readings 30-40 mTorr
too low.  Adjusted amp trim pot in control unit until proper values achieved.


Problem with source zone running 3-5 degrees high has not reoccured.
Tube is temp stabilizing ok.

Throughput check indicated no need to change in-line filters at this time.

tylan9 is up.

>>> 'tylan9' problem from evan -- Mon Nov 13 16:30:52 1989 <<<

The calibration program has not stabilized after many hours.  

>>> 'tylan9' problem from bob -- Tue Nov 14 07:17:45 1989 <<<

tylan9 is failing to proceed in its calibration program. The reason has
not been determined. A review of the calibration algorithms is in
progress and every effort will be made to get this tube operational
ASAP.

>>> 'tylan9' problem from evan -- Tue Nov 14 15:39:00 1989 <<<

problem:calibration not stabilizing
cause: oscillation of control variables
solution: tom lowered the KR from 80 to 40 and the KC from 40 to 20 in the
SNITCALB recipe.  This caused the calibration algorithm to work properly.

tylan9 has been recalibrated successfully at 800 and 900 degrees.

NITSTNBY is running and tylan9 is up for use.

>>> 'tylan9' problem from parrish -- Tue Nov 21 08:11:14 1989 <<<

oil filters has been changed.

>>> 'tylan9' problem from evan -- Wed Nov 22 11:53:27 1989 <<<

Throughput and pressure controller checked and found all is in good
shape for the weekend.  Base pressure 10 mTorr...ROR 2 mTorr/min.

tylan9 is up

>>> 'tylan9' problem from ried -- Sat Nov 25 19:16:37 1989 <<<

The first attempted run failed for an unknown reason between
1.5 to 2.5 hours into the deposition.  However, the following
day the remaining 9 hours of the deposition went without a hitch.
Note that the failed run (SNITC.V) was found in step 0000 even
though I have not found anyone who would have been present in
the lab to acknowledge an alarm.  Details of the run are in commments.

>>> 'tylan9' problem from bob -- Tue Nov 28 07:43:11 1989 <<<

No reason for a failed run on tylan9 can be identified. The next
run ran fine. The problem is removed from our problem report without
a satisfactory explanation. tylan9 will be monitored to see if this 
problem repeats.
tylan9 is up.

>>> 'tylan9' problem from kpister -- Thu Nov 30 14:30:53 1989 <<<

door wouldn't open after 7 minutes of 5000 sccm N2 flooding (hah!).
evan is working on it.

>>> 'tylan9' problem from evan -- Thu Nov 30 14:39:40 1989 <<<

Problem reported of tube not venting.  Cause is gate valve not closing.
It will have to be removed and serviced.  Should be back up by 17:00.

>>> 'tylan9' problem from evan -- Thu Nov 30 17:02:22 1989 <<<

The gate valve and pressure control valve were removed, serviced and replaced.
The tube is back together but base pressure is too high to calibrate.  This
is due to the tube being open for so long.  It will have to n2 purge overnight.
I will finish throughput tests and controller check first thing tomorrow.
tylan9 will be up by 10:00.

>>> 'tylan9' problem from evan -- Fri Dec  1 13:11:02 1989 <<<

The automatic pressure control valve electronics are not functioning.
I have removed the valve and replaced it with a short pipe.  Recipes
requiring process pressure control should not be run until this is repaired.
The tube will be up for recipes not using pressure control this afternoon.

>>> 'tylan9' problem from evan -- Fri Dec  1 15:05:46 1989 <<<

Tylan9 is up for recipes which do not require automatic pressure control.
The pressure control is out for repair.  See previous problem report for
details.

>>> 'tylan9' problem from evan -- Mon Dec  4 16:02:46 1989 <<<

The automatic pressure controller has been sent to the factory for repair.
tylan9 will be down for process pressure controlled recipes until it returns.
I should know more about when it will reture in a few days.

>>> 'tylan9' problem from evan -- Fri Dec  8 16:48:04 1989 <<<

The pressure control valve has been reinstalled but still needs to be
recalibrated.  I will do this Monday morning. 

tylan9 now has somewhat higher pressures than reported by leslie field due
to the additional restriction in the exhaust line.

tylan9 is up for non-process pressure controlled runs.  It should be back
to full operation on Monday.

>>> 'tylan9' problem from evan -- Wed Dec 13 14:46:04 1989 <<<

The automatic pressure controller has been reinstalled.
tylan9 is up for all recipes.

>>> 'tylan9' problem from hyeh -- Thu Dec 14 19:28:57 1989 <<<

tyied to run SNITC.V
tried^ OOPS!

reached step 40 and the pump didn't come on som alarm went on and process aborted.

>>> 'tylan9' problem from parrish -- Fri Dec 15 09:07:00 1989 <<<

system down for mech-pump change, if all goes well we should be up by noon.

>>> 'tylan9' problem from evan -- Fri Dec 15 14:50:03 1989 <<<

James replaced the pump with our back-up.  The entire exhaust manifold was
cleaned as well as the outlet tube.  Three Kurly Kates were replaced in the
foreline filter.  The system base pressure is 30mTorr with the backup pump.
The ROR is < 10 mTorr/min.
tylan9 is back online.

>>> 'tylan9' problem from parrish -- Fri Dec 15 14:54:04 1989 <<<

problem:    mech-pump not pumping

cause:      normal wear of time and depositions

solution:   removed pump and replaced with a spare.
            evans is testing the system.

>>> 'tylan9' problem from evan -- Thu Dec 21 12:16:11 1989 <<<

The air line for bank3 will be under repair this afternoon. 
tylan9 will not be available during this operation.

>>> 'tylan9' problem from evan -- Thu Dec 21 14:26:18 1989 <<<

The air line has been repaired.
tylan9 is up

>>> 'tylan9' problem from bob -- Wed Dec 27 14:41:04 1989 <<<

The fault lites on the low/hi oil pressure relays are on. The pump
is running and the Motorguard unit appears fine. I believe James
Parrish told me the oil pressure sensors were off line having not
been reconnected after the pump change. These will need to be 
reimplemented and this problem report will be cc'd to JP for
attention.
.,

>>> 'tylan9' problem from galewski -- Wed Dec 27 16:00:42 1989 <<<

Found that the N2 pressure for ballast and dilution was turned to zero
so no flow.  Assumed it was supposed to flow so I increased pressure to
about 4 psi giving about 5 slpm total flow.  Is this correct?  Maybe 
I should not have touched it?

			Thanks,
			 Carl

>>> 'tylan9' problem from denlinge -- Fri Dec 29 22:46:24 1989 <<<

the back cross bar on the back boat is not attached.  It is just laying
on top of the boat.

>>> 'tylan9' problem from bmartin -- Tue Jan  2 08:15:33 1990 <<<

Aborted run during deposition in order to change gas flow rates, but the
residual DCS in the tube apparently reacted with O2 to form a white powder
of SiO2.  The reaction may also have clogged the gas inlet ports.  I will
help in any cleaning of the tube that may be necessary.

>>> 'tylan9' problem from evan -- Tue Jan  2 10:12:24 1990 <<<

The tube was checked and the flow problems are due to an interlock preventing
the NH3 and DCS solenoids from opening. I will report when I have corrected
the problem.  The gas lines are not clogged and the white deposit around the
door flange is normal.

>>> 'tylan9' problem from evan -- Tue Jan  2 17:02:49 1990 <<<

The n2 pump feeds have been restored and the underpressure interlock is normal.
NH3 and DCS will now flow.  The tube still has a high ROR.  I found that the
exhaust bellows has a large amount of flaming white chunks (trapped DCS).
The ROR is most likely due to outgassing of this crud. It will be removed
tomorrow morning.
tylan9 is down for the evening.

>>> 'tylan9' problem from bob -- Thu Jan  4 07:24:11 1990 <<<

tylan9 is down for a change of oil filters. It should be ready for
use latter this morning.

>>> 'tylan9' problem from evan -- Thu Jan  4 11:18:50 1990 <<<

tylan9 is down for the rest of the day for a change of DCS cylinder.

>>> 'tylan9' problem from evan -- Thu Jan  4 14:24:19 1990 <<<

The new cylinder of DCS has been installed.  All filters have been changed
as needed.
tylan9 is up for anything.

>>> 'tylan9' problem from evan -- Wed Jan 10 16:59:26 1990 <<<

problem: DCS and pressure controller appeared to have not come on
cause: problem not quite repeatable...pressure controller worked,DCS
came on but at wrong value (13.5 sccsm vs. 15 sccm request) when I
tried to rerun same program
solution: reseated connectors on gas panel and tried again. program ran
correctly.  I got a change of DCS on the first test run when I jiggled
cables leading me to suspect a connection.  There has been alot of work
in the pump cabinet today which might have disturbed the connections.
tylan9 is up 

>>> 'tylan9' problem from evan -- Fri Jan 12 15:51:14 1990 <<<

the inline filter, manifold and outlet tube have been cleaned. parrish
has changed the oil filters.
leaktest and throughputtest are good.
tylan9 is up for all types of runs.

>>> 'tylan9' problem from rolfe -- Wed Jan 17 13:39:22 1990 <<<

Found bank-3 vacuum wand on the floor.
Also, the wand paddle is loose.

>>> 'tylan9' problem from tom -- Thu Jan 18 13:12:35 1990 <<<

Checked oil pressure after 3 hr. run. Reads 20.5 psi. OK to use.
I think Marilyn changed the vacuum wand tip.

>>> 'tylan9' problem from evan -- Fri Jan 19 10:25:44 1990 <<<

A new (factory recalibrated) MKS baratron has been installed on tylan9.
I will be closely checking it's calibration to see the effect of deposits
on it's plate.  The one that was removed had white powder all around the
fitting so material is getting through the feed tube from the process
chamber.  The throughputs looked good so no manifold cleaning was done
at this time.
tylan9 is up

>>> 'tylan9' problem from evan -- Sat Jan 20 21:10:04 1990 <<<

On restart of NITSTNBY after the power shutdown, the n2 flow was too low
during the idle steps. N2=120 resulted in only a trace of flow( pressure 
below 50 mTorr). I reedited NITSTNBY to N2=180 and flows gave a pressure around
300 mTorr.  This is the second time that the N2 flow has had to be raised.
It is still in the 'noise' level of the MFC.  Old age drift might be the cause
but it is not a problem.  Monitor information only.
tylan9 is up.

>>> 'tylan9' problem from carlos -- Sun Jan 21 17:29:49 1990 <<<

There is no nitrogen flow during the stabilization period

>>> 'tylan9' problem from carlos -- Sun Jan 21 18:06:15 1990 <<<

during the step in which the NH3 alone is turned on, the pressure 
did not increase and stay > 1 mT. The flowmeter may be damaged.
This could also explain the fact that some people has found 
compressive stress in their samples.

>>> 'tylan9' problem from evan -- Mon Jan 22 11:57:04 1990 <<<

problem: low NH3 flow
solution: Found that the new baratron had the zero drift to below -8 mTorr
for base pressure. Reset Zero.
Found that turning on NH3 in manual, the pressure rose too slowly. I found 
that the access hole for the pressure gauge on the door flange was very
clogged. I reamed this out. NH3 now comes right up to expected pressure.
(145 mTorr at 75sccm).  I changed the inline filter and cleaned the outlet
and manifold.  Throughputs look good.
It looks fine now.  It is possible that the incorrect base pressure and slow
responce could have given the results reported by carlos.

tylan9 is up (but watch flows carefully).

>>> 'tylan9' problem from evan -- Mon Jan 22 13:19:20 1990 <<<

The n2 flow during purge and temp stabilizations needs to be N2=180 for
a pressure of around 300 mTorr.  After the power shutdown, NITSTNBY would
not turn on low flow of n2 at N2=120. This drift problem has occurred before.
I remember that originally, N2=100 was used for these steps.  I am not
sure why a power shutdown would alter the MFC but 100 sccm is 2% of full
scale and beyond the noise spec of these MFCs.

RECIPES will need to be edited for N2=180 in order to get the low n2 flow.
I will look into recalibrating the zero of the MFC.

>>> 'tylan9' problem from bob -- Tue Jan 23 14:37:01 1990 <<<

After hyeh makes a 5 hr run on tylan9 this pm, the tube will be
considered down for additional low stress runs until it's
filter are changed in the morning.
tylan9 will remain up for normal runs.

>>> 'tylan9' problem from bob -- Wed Jan 24 11:12:59 1990 <<<

tylan9 is available for low stress runs today and the
filters will be changed at the end of today so low
stress runs can continue. tylan9 is up.

>>> 'tylan9' problem from evan -- Thu Jan 25 09:05:40 1990 <<<

I am changing the oil filters. I am also checking the pressure controller.
It is acting up and may have to be pulled and cleaned.

>>> 'tylan9' problem from evan -- Thu Jan 25 12:00:03 1990 <<<

The oil filters have been changed and the level topped off.
The controller has been checked with MTORR9 and is functioning well.
The throughputs are good.
Tylan9 is up for all recipies.

>>> 'tylan9' problem from bill -- Thu Jan 25 18:49:33 1990 <<<

Pressure alarm sounded during deposition step
( this was clear since the program moved to the predep
  purge, rather than to the backfill )

I notified user ( Bob Ried ) and tried to run the standby
program - but the tube won't pump down at all.

Left tube in ready state, idling at 750 C and atmosphere.

In future, should I try pump restart, rather than leaving at atmosphere ?

>>> 'tylan9' problem from evan -- Thu Jan 25 21:11:57 1990 <<<

Process failed with overtemp alarm. (see previous problem report)
Called into lab and confirmed that tube was flowing n2 and temps were
normal. This will be looked into first thing Friday morning.
tylan9 is down

>>> 'tylan9' problem from ried -- Thu Jan 25 22:18:25 1990 <<<

Tylan9 failed again in the middle of the run.

>>> 'tylan9' problem from ried -- Thu Jan 25 22:38:47 1990 <<<

My previous comment reports the same condition that Bill found.
I noticed in the run that nitrogen did not flow prior to deposition
(the pressure was too low), and that during the run nitrogen flow
was reported even though the nitrogen was supposed to be turned off.

>>> 'tylan9' problem from evan -- Fri Jan 26 16:28:27 1990 <<<

Installed new inline filter elements, cleaned outlet tube and bellows.
Recalibratred N2 MFC.
Recalibrated pressure gauge.
The oil is fresh.
ried's process halted due to low oil pressure in pump. 

tylan9 is up for all processes.

>>> 'tylan9' problem from evan -- Fri Jan 26 17:00:06 1990 <<<

The recipe SNITC.V will not run n2 during temp stab. steps.  The pressure
will stay very low.  I tried to edit the recipe to N2=180 but the tycom
says that the disc is full and aborts the edit session.  It is ok to
run this program.
tylan9 is up for the weekend.

>>> 'tylan9' problem from field -- Fri Jan 26 19:57:33 1990 <<<

Bob Ried's SNITC.V low stress run went into pressure alarm at 19:30.
Mike Judy sent him some e-mail to let him know and I loaded the 
NITSTNBY program and tried to run it - it has aborted itself 
twice now.

>>> 'tylan9' problem from ried -- Fri Jan 26 22:24:36 1990 <<<

Evan, I hope you had a good weekend.  Tylan9 died after roughly 1 hour
of low-stress deposition and needs to be fixed again.

>>> 'tylan9' problem from evan -- Mon Jan 29 09:23:04 1990 <<<

The pump was found off. It was restarted by parrish and is running. 
A set of oil pressure sensors will be added this morning.  Tests will
be performed to determine what is causing the recipe to abort.
.

>>> 'tylan9' problem from parrish -- Mon Jan 29 09:30:06 1990 <<<

update:  the pump was restarted, but the current draw and the insulation
of the sensors will have to preceed the final check out of the system.
system is still down, we will keep everyone informed.

>>> 'tylan9' problem from evan -- Mon Jan 29 11:53:49 1990 <<<

The oil pressure sensors have been installed.  The motor current was checked
and was 3.2 A on legs 1&3, and 3.5 A on leg 2.  This is the same as tylan10
and very close to tylan11 and tylan12 which had readings 0.2 A lower on each
leg.
A test run will be made to see what happens during the SNITC.V process.
tylan9 still down for testing.
>>> 'tylan9' problem from ried -- Mon Jan 29 13:11:20 1990 <<< [No Comment]

>>> 'tylan9' problem from evan -- Mon Jan 29 14:53:54 1990 <<<

NITSTNBY ran over lunch with no problem. I loaded and ran SNITC.V with
18/63 NH3/SiH4 @ 835deg and 300 mTorr.  It temp. stabilized in 45 min and
the process was run for 30 min.  Everything looked very good.  No varience
in oil pressure.  I aborted the program and tylan9 is running NITSTNBY.
Motor current was checked again during the process and was the same.
I can find nothing that might have caused the pump to shut itself off.

The pump failure alarm (located high on the wall between bank2 and bank3,
above galewski's readouts) is active for tylan9 and tylan12.  If it sounds,
please report as a tylans problem immediately and call office if it occurs
during staff hours.

tylan9 is up (watch closely for anything odd and report it)

>>> 'tylan9' problem from field -- Mon Jan 29 23:19:35 1990 <<<

Pressure control doesn't seem to be working quite right.  Asked
for 300 mTorr and got the following:

1 minute into dep                303 mTorr
3 hrs 26 minutes into dep        395-397 mTorr
3 hrs 41 minutes into dep        332-334 mTorr

>>> 'tylan9' problem from evan -- Tue Jan 30 10:01:00 1990 <<<

The pressure control was checked with MTORR9 and worked fine over an hour.
The problem with field's run might be something due to the long DCS flows.
Please report variations during the next runs. Call me immediately if this
occurs during staff hours.

>>> 'tylan9' problem from ried -- Tue Jan 30 12:36:39 1990 <<<

Tylan 9 failed in hard pump of snitc.v (step 65) - no hard pump 
took place.  Pressure was running higher then normal during 
temperature stabilization - around 600 mtorr.
At end of step 65, program jumped to step 105.

>>> 'tylan9' problem from ried -- Tue Jan 30 12:54:44 1990 <<<

After hard pump failure above, load standby without incident.

>>> 'tylan9' problem from evan -- Tue Jan 30 13:36:37 1990 <<<

problem: pressure too high, > 600 mTorr, during temp stbl step.
         no hard pump and failed leak check
cause: ammonium chloride flake on door o-ring
solution: vacumed loose material off door and around inside of tube.
Top layer was a very light fluffy flake layer instead of the usual
hard crust. Possibly a result of long NH3 flow while running MTORR9
this morning.

Re-ran NITSTNBY and pressures were normal. Leak check passed with no
problems.

tylan9 is up

>>> 'tylan9' problem from ried -- Tue Jan 30 22:22:36 1990 <<<

oil should be checked after 13.5 hour total snitc.v

>>> 'tylan9' problem from parrish -- Thu Feb  1 07:26:45 1990 <<<

system down for moderfication of oil filtration system, should be finished
by noon today. all questions should go through bob hamiltom.

>>> 'tylan9' problem from parrish -- Thu Feb  1 12:23:35 1990 <<<

problem:    fluorocarbon coating peeling off inside the prefilter
            canisters.

cause:      reaction of the gases pumped through the pump with the
            fluorocarbon coating.
            prefilter canisters cafiltration

solution:   removed fluorocarbon canisters and replaced with stain-
            less steel canisters. system up as far as the
            modification.            

>>> 'tylan9' problem from evan -- Thu Feb  1 13:45:47 1990 <<<

Basic service performed.  New inline filter, cleaned manifold.
Cleaned the throttle valve.  Performed throughput tests.
tylan9 is up.

>>> 'tylan9' problem from parrish -- Thu Feb  8 11:12:24 1990 <<<

I have checked the oil filtration pressure, and the pressure is 23 psi.
and do not need changing.

>>> 'tylan9' problem from cjkim -- Fri Feb  9 02:33:40 1990 <<<

SNITC 35min.  nanospec 1385A.  No problem.

>>> 'tylan9' problem from evan -- Wed Feb 14 09:47:04 1990 <<<

Problem: no N2 flow during temp stab. step
Solution: edited SNITC.V and changed N2=120 to N2=180.  This fix was delayed due to a full disk.  See previous problem reports for more info.
tylan9 is up and running SNITC.V correctly.

>>> 'tylan9' problem from evan -- Fri Feb 16 09:41:13 1990 <<<

The inline filter has been changed.  Throughputs and leak rate are good.
James has serviced the pump.
tylan9 is up for all processes.

>>> 'tylan9' problem from cjkim -- Sat Feb 17 21:09:02 1990 <<<


SNITC for 38min.  Nanospec reads 1560A.
There was no dummy wafer in the second boat.  I added a couple of
dummies in the second boat.

>>> 'tylan9' problem from galewski -- Tue Feb 20 18:59:30 1990 <<<

Pump shut off at 18:48 during SNITC.V running, enabled by Marilyn.
Notice it had shut off by the pump off alarm sounding.  In back
both yellow and red lights lit.  The filtration unit pressure
gauge is reading 21 - 22 psi.  Do not know if I should restart
and put into standby or not.  Afraid of dagamging the pump so I
will not do anything.  System vented and sitting in idle step.

			-Carl

>>> 'tylan9' problem from parrish -- Wed Feb 21 07:08:10 1990 <<<

problem: pump shut off

cause:   this has happened two or three times, and no evidence of
         any cause has been determined, pump is drawing 3-3.5 amps.
         alone with the other pumps in the system, oil pressure is
         also correct.
solution:restarted the pump, prehaps we could double check the sensors
         the system is up as far as the pump.

>>> 'tylan9' problem from debra -- Wed Feb 21 08:03:07 1990 <<<

Pump stopped during deposition of low stress nitride. Pump has been
checked and restarted.

>>> 'tylan9' problem from evan -- Wed Feb 21 11:47:46 1990 <<<

problem: pump stopped 
cause: unknown.. has happened a few times. the oil level was fine.
solution: replaced the heater coils in the pump motor breaker.  this has
been a source of trouble in the past.
throughputs were checked and found to be ok

tylan9 is up

>>> 'tylan9' problem from tang -- Mon Mar  5 16:10:01 1990 <<<

SNITC for 50 min, target thickness is 1800A.
Deposition pressure was higher than normal, 194 instead of the expected
177. N2 flow was slightly lower, but consistent.

Pressure may need to be looked at.

>>> 'tylan9' problem from evan -- Mon Mar  5 16:45:46 1990 <<<

Changed the KK's in the inline filter.  The oilfilter pressure was 26 psi.

tylan9 is up

>>> 'tylan9' problem from tang -- Tue Mar  6 16:29:39 1990 <<<

Process: SNTIC   dep time requested: 50 min
The Load zone temp. never rises above 795C. It sits at step 55 (temp check)
for over an hour. C & S temps are good, though.

This happened right after the power to bank 3 was shut down this afternoon.

>>> 'tylan9' problem from tang -- Tue Mar  6 17:28:24 1990 <<<

This is a followup to the previous problem report.

I ack'ed tylan9 to the deposition step and recorded the following:

Time	Temp-L	N2	SiH2Cl2	NH3  	Pressure
5min	794.7	28.0	23.2	74.7	185
10min	795.7	28.0	25.2	74.6	191
15min	795.2	30.5	25.2	74.7	193
20min	794.7	29.3	25.2	74.7	195
25min	793.7	28.0	25.2	74.7	197
30min	795.7	28.0	25.2	74.7	198
35min	794.2	29.3	25.2	74.7	199
40min	795.0	29.3	25.2	74.7	199
45min	794.7	29.3	25.2	74.6	200

Temp-C and Temp-S are consistently 800 +/- 0.5C

In addition to Temp-L problem, ror is another problem.

>>> 'tylan9' problem from evan -- Wed Mar  7 09:53:20 1990 <<<

problem: load zone will not reach setpoint
cause: heat plug too close to door
solution: the heat plug was pushed towards the door because it was draging
on the teflon ring at the front of the tube.
The cantelever assy. was raised 1/16" and the cantelever rods were angled
slightly down to bring them to their former position.  The area around
the front flange was scraped clean of Ammonium Chloride deposits so the
o-ring would seat properly in it's new raised position.

tylan9 is up

>>> 'tylan9' problem from evan -- Wed Mar  7 16:54:14 1990 <<<

Pump shut itself off near the end of a long run.  Tom restarted but I will
check the eutectic alloy thermal fuses tomorrow.  The inline filter and
exhaust tube need to be serviced as well.
tylan9 is down for service till noon thurs.

>>> 'tylan9' problem from evan -- Thu Mar  8 12:45:21 1990 <<<

problem: pump shuts off for no known reason
solution: replaced contacts in the pump breaker.  the old ones looked pitted
and burnt.
     cleaned outlet tube and manifold, checked inline filter.
     throughput is good. base pressure = 14 mTorr  ROR = 6 mTorr/min

tylan9 is up

>>> 'tylan9' problem from evan -- Tue Mar 13 14:13:40 1990 <<<

A modification has been added to the n2 MFC of tylan9.  The source gas
can be changed to a optional second gas by setting CCOUT7=ON in the
recipe.  The input is currently attached to AR.  It will be switched to
NEON when a cylinder arrives.  This set-up is for hyeh's experiments.

>>> 'tylan9' problem from debra -- Fri Mar 16 15:54:40 1990 <<<

Tube was accidently vented to atmosphere after reassembly
of bellows and caused the tube to be "dusted" with glass
powder. Cantilevers were vacuumed, and boats replaced.
Two short coating runs were done to "glue" down any
remaining particles. Tylan9 is up.

>>> 'tylan9' problem from weijie -- Sun Mar 18 20:55:42 1990 <<<


SNITC.V is used to deposite low stress nitride. With NH3=16sccm,
DCS=64sccm, and pressure=300mTorr,  a 35 min. deposition should give
1200A nitride.  But measurement from Nanospec prog. 2  gave only
600-700A of nitride.   Something must be wrong, either tylan9 or
nanospec.

>>> 'tylan9' problem from evan -- Tue Mar 20 14:20:38 1990 <<<

The problem is due to different index of refraction of low stress nitride
causing false reading on nanospec.

>>> 'tylan9' problem from debra -- Tue Mar 20 15:26:35 1990 <<<

Last three runs have had gross nonuniformities of film thicknesses
and composition (low stress nitride) within each wafer. Tylan9 is
down until tomorrow when we can investigate this problem.

>>> 'tylan9' problem from evan -- Wed Mar 21 11:26:29 1990 <<<

Vac alarm sounded while SNITCALA was ramping from 800 to 900 C.
It had just completed 800 calibration and had been running fine for 1.5hr.
A crack noise was heard by tom and myself just before the vac alarm.
White smoke was coming out of the cantelever rod containing the tc.

Looks like a broken cantelever.  The tube will be opened after a little
purging to assess the damage.
tylan9 is further down

>>> 'tylan9' problem from evan -- Wed Mar 21 11:43:45 1990 <<<

tylan9 will be down for a complete change of quartzware. 

>>> 'tylan9' problem from evan -- Thu Mar 22 16:54:16 1990 <<<

The quartzware change is progressing.  Tube should be ready for test pump
tomorrow a.m. .If all goes well, tylan9 should be up for the weekend.

>>> 'tylan9' problem from evan -- Fri Mar 23 11:37:06 1990 <<<

The new quartzware has been installed.  Cantelever has been rebuilt, installed
and alligned.  A new drive cable was installed. The exhaust manifold was cleanedand new kurly kates installed.  The tube is firing and under purge. tom
will be checking the calibration. A coating run will be done when cal is 
verified.
tylan9 should be up for the weekend. 

>>> 'tylan9' problem from debra -- Fri Mar 23 16:27:06 1990 <<<

Tylan9 has been coated and is currently being temp. calibrated.
This program may take several hours to finish. When the tube has
been calibrated, the thermocouple must be unplugged before opening
the tube. A test run should be done before actual processing to
determine deposition rate. tylan9 is up for testing. Please
report any test results on the wand.

>>> 'tylan9' problem from judy -- Fri Mar 23 19:48:19 1990 <<<

I inadvertently acked tylan 9 during the calibration run (~7pm).  Upon asking
a few people what to do I aborted the run and reran it.  But, the tube
kept failing the leak test!?  On the fourth try the tube successfully
made it through the leak test and is currently in step 45.  I am sorry
if this completely screws up the calibration run.  I only hope that
simply restarting the program will be adequate.

Sincere Regrets,

Mike 

>>> 'tylan9' problem from mwei -- Sat Mar 24 17:42:05 1990 <<<


Three runs of SNITC.V (low stress nitride, T=835 C, DCS=64, NH3=16)
each failed to pass leak test at step 70 of SNITC.V.

>>> 'tylan9' problem from denlinge -- Sun Mar 25 00:48:02 1990 <<<

It fails the leak test on snitc.v
The pressure gets down to 42mT in step 65 but in step 70 (leak test)
it quickly shot up.

>>> 'tylan9' problem from evan -- Sun Mar 25 11:14:15 1990 <<<

tube will not pump below 35 mTorr and ROR is high.
A check of manifold connections, replacement of outlet tube o-ring,
and tightening cantelever seals had no effect.  It looks like
its in one of the door-cantelever bellows assemblys or tube flange
seals.  I have turned off the heaters so it will be cool for resuming
repair on Monday a.m.

>>> 'tylan9' problem from evan -- Mon Mar 26 16:12:38 1990 <<<

leak in tylan9 was traced to the outlet tube/bellows area and was
repaired.
base pressure is 10 mTorr; ROR < 4 mTorr/min
Quartzware change is now complete.
a 1hr coating run is in progress.

tylan9 is up

>>> 'tylan9' fix from evan -- Fri Apr  6 11:43:19 1990 <<<

The new cylinder of DCS has been installed.
The outlet tube and manifold were cleaned. New KK's were installed in the
inline filter.  The throttle valve was cleaned.
Base pressure = 10 mTorr  ROR = 2 mTorr min.
tylan9 is up

>>> 'tylan9' problem from nam -- Mon Apr  9 11:18:26 1990 <<<

Pressure raised with ~1 mtorr/sec rate.  Aborted my run and loaded 
NITSTNBY and run.  My wafers are still in the tube.  I was afraid
of opening tube without purging the tube.

>>> 'tylan9' problem from nam -- Mon Apr  9 11:57:07 1990 <<<

James checked oil and filter and didn't find any problem.
I restarted my run again with 3 hours and 40 min. deposition time.

>>> 'tylan9' problem from nam -- Mon Apr  9 16:21:52 1990 <<<

Pressure was fluctuating during deposition.

>>> 'tylan9' fix from evan -- Tue Apr 10 11:06:39 1990 <<<

problem: pressure fluctuation
solution: pressure controller was checked with MTORR9 and manually.
Everything looks good.  63/16 DCS/NH3 with throttle open had process
pressure of 185 mTorr.
During base pressure check found jumpy readings.  When relay #1 was
wiggled, pressure jumped erratically.  Removed relay and found signs
of coil overheated.  Replaced relay and pressure readings were much more
stable.
This failing relay could have been cause of erratic pressure readings.

Base pressure, ROR and throughput are all good.

tylan9 is up

>>> 'tylan9' fix from evan -- Thu Apr 12 16:49:10 1990 <<<

Inline filter elements, KK's, were replaced.  Throughput, base pressure, and
ROR are good.
tylan9 is up

>>> 'tylan9' problem from evan -- Fri Apr 13 13:50:22 1990 <<<

Calibration was lost during work on bank3.  SNITCALB was loaded and is
running.  tylan9 can be used when calibration is finished.  Be sure to
remove t/c cables before opening door.

>>> 'tylan9' fix from evan -- Fri Apr 13 16:30:59 1990 <<<

Calibration has been completed.
tylan9 is up

>>> 'tylan9' problem from evan -- Tue Apr 17 08:53:09 1990 <<<

tylan9 will be down all day Thursday for a bank3 repair.

>>> 'tylan9' problem from evan -- Tue Apr 17 09:13:11 1990 <<<

tylan9 will be down all day Wednesday ( not Thursday) for bank3 repair.

>>> 'tylan9' fix from evan -- Wed Apr 18 16:55:49 1990 <<<

work on bank complete for now
tylan9 is up

>>> 'tylan9' fix from evan -- Tue Apr 24 11:52:24 1990 <<<

General maintenance performed.  New bellows/exhaust manifold installed.
New KK's in inline filter.  Outlet tube cleaned.  Oil filters replaced.
Throughput good.  Base pressure 10 mTorr.  ROR = 2 mTorr/min.
tylan9 is up

>>> 'tylan9' fix from tom -- Mon Apr 30 15:34:40 1990 <<<

Calibrated tylan9. It was off a bit from when Evan was working on
the electronics in bank 3.

>>> 'tylan9' fix from evan -- Tue May  1 14:03:00 1990 <<<

A new feature has been added.  When using pressure control (CCOUT6=ON),
the pressure can be read on the TYCOM display in the N2 flow location
in lower right of screen.  The number displayed is 16 mTorr higher than
actual tube pressure.  You must subtract 16 from the readout to get true
pressure. 
The readout still reads N2 flow at all other times.
This is a temporary hookup until a new DEF table is installed which will
have a fulltime pressure channel.

Throughput, base pressure and ROR are all good.

tylan9 is up

>>> 'tylan9' fix from evan -- Thu May  3 15:59:01 1990 <<<

Testing fix header file.  It didn't work.

>>> 'tylan9' fix from evan -- Thu May  3 16:59:15 1990 <<<

2.5hr of SNITC.V, 16/64 at 835deg.  Testing ROR of process pressure.

>>> 'tylan9' fix from parrish -- Fri May 11 13:28:38 1990 <<<

the oil filter elements(prefilter & alumina) has been changed
