>>> 'tylan8' problem from mats -- Fri Feb 10 16:40:16 1989 <<<

O2 flow meter read 1070 on initial steps of pocl3, when no o2 should
have been flowing (even when the o2 valve was manually closed by Tom).
When O2 was called for in the diffusion step, the meter showed 
reasonable values around 200, but it went to around 570 instead of
to 0 after this step.

>>> 'tylan8' problem from evan -- Tue Feb 14 15:27:17 1989 <<<

problem: erratic O2 MFC readings
cause: MFC out of calibration
solution: the edge connector of the O2 MFC showed signs of corrosion
This was possibly due to TCE contamination.  Cleaned contacts and
recalibrated the MFC.  Testing using ANOXAN8 gave proper readings for
the O2 flow.

Care should be taken when replenishing the TCE for it only takes a small
drop on the wrong place to cause a large failure!

tylan8 is up

>>> 'tylan8' problem from mats -- Wed Feb 15 14:25:56 1989 <<<


The O2 meter is still erratic, and so is the CARRIER meter.
The O2 reading jumped from 6.1 to 918.2 during the ramp up step,
when O2 should be 0, and at the same time CARRIER jumped from
2.9 to 100.0. Both stayed nearly unchanged until the deposition
step (of POCL3), when they went to reasonable values
By the way, what relation is expected between the measured
CARRIER and the output SOURCE?

>>> 'tylan8' problem from evan -- Wed Feb 15 16:08:39 1989 <<<

ran POCL3 with no undesired O2 flow.
I will be keeping my eye on it but it seems to be working.

>>> 'tylan8' problem from denlinge -- Tue Aug  1 19:43:55 1989 <<<

the acknowledge button looks like it is about to fall off
(not much of a problem, but I didn't know if anyone cared or not)

>>> 'tylan8' problem from evan -- Wed Aug  2 13:42:27 1989 <<<

problem:button loose
cause:bad design
solution: the key cap pivots on a shaft held in place by the return
spring. the shaft is too short and eventually slips to one side.
The key cap is easily pried off and the shaft can be recentered. The
key cap should be lightly pressed on until two clicks are heard.
I discovered and repaired several other ROP keys with the same condition.

>>> 'tylan8' problem from martin -- Thu Aug 10 14:00:57 1989 <<<

when removing wafers, smoke is seen emitting from tube.  After total 
boat retraction, a liquid is present in the front of the tube.
identity unknown.  Preceeding precess was ANOXAN8 requesting only
O2 and N2.  No POCl was called for in the program.

>>> 'tylan8' problem from voros -- Thu Aug 10 14:53:41 1989 <<<

The liquid at the end of the tube was condensed phosphoric acid
from a one hour POCl3 run about a month ago. This is normal for a
POCL3 tube. We did not notice it before because we do not run
the doping very often.
The tube is up.
Katalin

>>> 'tylan8' problem from marilyn -- Thu Jan 18 10:55:23 1990 <<<

Problem: Tube 8 screeches when brought out manually.

>>> 'tylan8' problem from field -- Fri Jan 26 21:11:27 1990 <<<


The tube was smoking from some white deposits at the furnace-side of
the quartz plug when the tube was pulled out at the end of the run.
Don't understand this one!!!
