>>> 'tylan4' problem from galewski -- Mon Jan 30 12:39:42 1989 <<<

Overtemp alarm on tylan 4 tripped during SCAL at 1000 degC.  Should
do that since overtemp pot set at 700 which should trip alarm at
about 1000 and turn it off at 1050.  Any reason it is set so low?
Do not want to adjust it unless I know it is ok to turn it up.

				-Carl

>>> 'tylan4' problem from hoagland -- Wed Mar  8 08:49:52 1989 <<<

There seems to be some confusion regarding the ROP panel for this
tube.  The ACK button works fine.  The panel works fine.  The only
problem is a bad CPU card which causes the ROP panel alarm to
intermittently go ON and remain stuck in that condition for long
periods.  Repair of this failure will be greatly expedited by use
of tube17, when it's available, and it was my understanding this
is the current repair stategy.

>>> 'tylan4' problem from hoagland -- Wed Apr  5 17:34:40 1989 <<<

The DTC card for tube4 is currently removed from it's slave CPU cage
for repairs on tube9.  Another card will be installed in it's
place tomorrow so tube4 can be restored to service ASAP, hopefully
by tomorrow afternoon.

>>> 'tylan4' problem from hoagland -- Fri Apr  7 18:16:08 1989 <<<

The untested swap DTC card s/n 201 has been installed in tube4.
It is currently running STNBY4LT and if no anomalous problems
appear over the weekend, it will be marked up for service on Monday.

>>> 'tylan4' problem from hoagland -- Mon Apr 10 09:48:45 1989 <<<

Tube4 status:  following a 48 hour stabilizing period, temperature
               readouts for a setpoint of 400C in all zones was
               401C +/- 1C.  Using TC calibrator to measure direct
               profile TC outputs produced the following values;  
               load zone: 393C, center zone: 413C, and source
               zone: 330C.  Tube4 temperature control is not working
               and the tube is down- it will be repaired ASAP and 
               progress posted as information is available.

>>> 'tylan4' problem from hoagland -- Wed Apr 12 16:41:43 1989 <<<

problem:  Temperature readouts for all zones do not correspond
          with actual temperatures as measured by profile TC's.

cause:  Bad DTC card.

solution:  Replace DTC card with swap unit, S/N 203.  To repair
           swap unit prior to use U15 was replaced: corrosion on
           leads- bad solder joints on PCB.  Z80 CPU was removed    
           and corrosion on leads removed.  PCB edge connector
           was cleaned to remove excess oxidization.  RAM IC's-
           2114's, were replaced with new parts.
           
           A new LOWSCAL recipe was written to calibrate tube
           at low temperatures- 400 to 700C.  Excess N2 flow 
           was traced to bad N2 MFC- unit partially burned.
           Similar 10 SLPM MFC was swapped out for failed unit.

           Tube4 is currently running a calilbration recipe.  When
           that has successfully concluded the profile TC's will again
           be checked against tycom temperature readout and if they
           match, the tube will be released for service.

>>> 'tylan4' problem from hoagland -- Thu Apr 13 09:31:04 1989 <<<

Tube4 is up for use.  LOWSCAL ran without a hitch and all zones
are within 5C(actual temperature) of tycom setpoints.  The swap N2
MFC is working fine.

>>> 'tylan4' problem from dianeh -- Thu Aug 10 14:24:49 1989 <<<

I have been attempting to anneal copper in tylan 4 and have been getting
poor results.  I placed a wafer, Si/Ox/Ti(100A)/Cu(500A), in the furnace
and ran the cusint2 program (on Don Lyon's disc).  The anneal was a 
20 min anneal @ 400.  I tried this twice and both times, the result was
a wafer with a film on it of thickness between 2000A-4000A.  The film
was dull and dark grey in color.  I place a wafer with Si/Ox/Ti(500A) in
the furnace and had a slight growth in the film which ended up to be
about 600-700A.  (This may not have even been a growth, but the Ti 
may have been that thick to start with).  The film was slightly 
discolored.  Tom Booth wrote an updated program, cusint3, in which
the tylan was only opened when the furnace was at room temperature.
I placed two wafers in the furnace, at different times: 
1 Si/Ox(1u)/Ti(100A)/Cu(500A)    2 Si/Cu(500A).
Both wafers ended up with a discolored, grey film which was between
2000-4000A thick.  
When the furnace is heating up, only N2 should be flowing, and a forming
gas should be flowing for the 20 min anneal.
I have the anneal wafers if you would like to see them.
Thanks.
Diane

>>> 'tylan4' problem from evan -- Fri Aug 11 16:26:16 1989 <<<

The N2 MFC which doubles as an H2/N2 MFC has been adjusted to provide
0 to 10 SLPM.  This will allow the recipe to flood the tube with
forming gas in half the time. Recipies should be updated if you
desire this higher flow rate.

>>> 'tylan4' problem from evan -- Wed Sep 20 14:31:45 1989 <<<

bank one down for tylan3 repair only

>>> 'tylan4' problem from evan -- Sat Jan 20 21:06:37 1990 <<<

The firing board failed on power restart after the building power was restored.
The center zone power resistor was burnt out. The board will be replaced on
Monday Jan 22.
tylan4 is down for the weekend.

>>> 'tylan4' problem from evan -- Tue Jan 23 15:48:54 1990 <<<

The burnt firing board was replaced with our spare but the center zone did
not start firing.  I will have to check out the scrs. tylan4 still down.

>>> 'tylan4' problem from evan -- Wed Mar  7 14:27:52 1990 <<<

replaced scr firing board. tube now fires in all zones.  no temp readout to
tycom (see tylan3 problem). repair will continue tomorrow.

>>> 'tylan4' problem from evan -- Fri Mar  9 09:38:02 1990 <<<

tylan4 is operating correctly after resetting everything. temp problem due
to work performed on tylan1 and bank1
tylan4 is up

>>> 'tylan4' problem from evan -- Wed Mar 14 09:32:42 1990 <<<

Removed the SCR assy for use in tylan1. 
tylan4 is down

>>> 'tylan4' problem from bob -- Thu Mar 22 13:35:05 1990 <<<

tylan4 is down for repair of it's power package. It will be down 
for several days while a new insulator is made.

>>> 'tylan4' fix from evan -- Thu Apr 12 13:11:45 1990 <<<

The rebuilt scr/transformer module has been reinstalled.
tylan4 is firing and temp stabilizing.

tylan4 is up

>>> 'tylan4' problem from evan -- Wed Apr 18 17:00:57 1990 <<<

I had to borrow the amp board to try in bank3.  It will be returned on
Thursday.
tylan4 is down until then.

>>> 'tylan4' fix from evan -- Thu Apr 19 09:31:45 1990 <<<

Amp board replaced in system.
tylan4 is up

>>> 'tylan4' fix from bob -- Wed May  9 13:55:19 1990 <<<

tylan4 has been reset and is running a calibration. It should be
complete by tomorow am.

>>> 'tylan4' problem from bob -- Fri May 11 09:37:34 1990 <<<

tylan4 is down until further notice. It has a problem with it's
slave cpu. Evan will investigate next week.

>>> 'tylan4' fix from evan -- Mon May 14 11:54:42 1990 <<<

problem: tube not loading recipe correctly after bank power failure.
solution: reseated CPU card. (this is the card that is very hard to insert).
         reset boards and tycom (to clear i/o error lockout) and loaded
         START4.  Tube is now firing correctly.

tylan4 is up
