>>> 'tylan16' problem from klin -- Wed Feb  8 09:57:48 1989 <<<

When showing 'jimmoon' how to operate TYLAN16, I observed
that the TYCOM temperature readouts don't agree with
the panel readout (600C vs 523C).

Jim will check with Steve as he's going to run experiments
on TYLAN16

Thanks

>>> 'tylan16' problem from voros -- Tue Feb 21 15:07:06 1989 <<<

Oil is splashed outside of pump cabinet causing a safety hazard.
James, pls take care of this ASAP.

>>> 'tylan16' problem from parrish -- Wed Feb 22 08:13:48 1989 <<<

problem:    Oil on the floor

cause:      I suspect the exhaust filter being clogged caused high pressure
            in the case, causing the oil to squirt out at the door and run
            down to the floor.
solution:   I changed the oil filter(which was clogged) also replaced the
            old guage with a new one with a much more accurate reading, 
            also the pump case guage was pegged out, I also changed that
            one. Cleaned up the area and every thing looks good.

>>> 'tylan16' problem from klin -- Tue Mar 14 18:54:05 1989 <<<

From jimmoon@argon Tue Mar 14 18:42:55 1989
Received: by argon (5.57/1.16)
	id AA09182; Tue, 14 Mar 89 18:42:53 PST
Received: by maranatha (5.57/1.16)
	id AA21503; Tue, 14 Mar 89 18:41:48 PST
Received: by argon (5.57/1.16)
	id AA09163; Tue, 14 Mar 89 18:42:47 PST
Date: Tue, 14 Mar 89 18:42:47 PST
From: jimmoon@argon (James Moon)
Message-Id: <8903150242.AA09163@argon>
To: klin@maranatha
Subject: tylan16
Status: R

Hi, KK --

I'm doing a trial run, and the tube is taking forever to
stabilize at 605C.  I did a calibration (SCAL16) today,
then loaded FUPOLY16 and waited one hour with the tube
at the READY step (650C).  I then loaded the  wafer and sent
the tube back in (ACK).  It has been cycling through step
30 ever since (two hours!!).  The load and source zones
have stabilized into the acceptable window around 605C,
but the center zone won't budge above 600C.  Is this unusual?

If the tube still hasn't stabilized by the time I get back
from dinner (~7:30), I'm going to ACK out of the step and get
on with it.

Jim


>>>>>>>>>>>> Spike T/C should settle w/i 40 mins <<<<<<<<<

>>> 'tylan16' problem from jimmoon -- Tue Mar 14 19:53:33 1989 <<<

See problem log (my comments forwarded by klin).  Temperature
would not stabilize.

>>> 'tylan16' problem from klin -- Wed Mar 15 10:34:30 1989 <<<

Temperature disagreement between TYCOM computer (600C) &
furnace's panel status (522C).

Tom: Please reset the DTC board (or whatever) & try your
     new calibration program. Thanks again for your help

>>> 'tylan16' problem from klin -- Thu Mar 16 12:02:01 1989 <<<

Katalin, Tom & Steve:

   Center zone of Tylan16 cannot be stabilized as reported by
Jim Moon yesterday. This means that the center zone is STILL NOT
INTEGRATING with the other 2 zones after Tom did some fixes
before Jim's run yesterday.

   I believe that there's some electronic problems. Please kindly
check for us, as Jiahua & I will start another set of experiments
next week.

   Please fix the center zone problem, as well as the problems
reported above.

Thanks,
KK
----
From moon@cad.Berkeley.EDU Thu Mar 16 11:11:54 1989
Received: by argon (5.57/1.16)
	id AA20376; Thu, 16 Mar 89 11:11:46 PST
Received: by cad.Berkeley.EDU (5.58/1.34)
	id AA16949; Thu, 16 Mar 89 11:11:47 PST
Date: Thu, 16 Mar 89 11:11:47 PST
From: moon@cad.Berkeley.EDU (Jim Moon)
Message-Id: <8903161911.AA16949@cad.Berkeley.EDU>
To: klin@argon
Subject: Re: How was the run?
Status: R

Not really.  It never reached 605C in the center zone.  I made some
fairly extensive comments on the wand.  I went ahead and did my depositions
anyway, and I'm measuring the resulting film thicknesses today.
I will, of course, post the results to the comment log and send you and
Jiahua copies.

Jim

>>> 'tylan16' problem from tom -- Thu Mar 16 17:04:51 1989 <<<

Problem: Not reaching temp in the center zone.

Cause:   Not integrating the KM value.  Reason unknown.

Solution: Reset boards. TR
			Ran calibration.  Tube is up as soon as 
			calibration is finished. Should be done by 6 PM today.

>>> 'tylan16' problem from evan -- Wed Mar 29 17:49:35 1989 <<<

Problem: boat loader would not come out
Cause: recipe was aborted without reaching vent step
Solution: vented tube with 5slpm N2 in manual mode.

Suggest that recipies have a vent step at the start of the recipe.  Then
one can restart the recipe and vent the tube if first run is aborted.

tylan16 is up

>>> 'tylan16' problem from evan -- Thu Mar 30 16:45:19 1989 <<<

SiH4 and PH3 gases are offline until tomorrow. see tylan12 equipment problem.
tylan16 is down

>>> 'tylan16' problem from bob -- Fri Mar 31 16:16:37 1989 <<<

The silane cylinder has been changed and a new 3000g cylinder is in
place. tylan16 and tylan11 are useable again.

>>> 'tylan16' problem from klin -- Tue Apr 11 11:22:46 1989 <<<

Problem: [1] Unstable TempL (long stablization time) during
             deposition or calibration.
         [2] TempC, TempS, TempL, on the average, are 2-4 C lower
             than specification (@ 605C), according to the 12 pt TC.
             Generally 12 pt TC matches the recipe specification w/i 1.5C.

Cause: Who knows? Sometimes, the furnace just behaves 'wild'.
       Tylan temp control isn't good enough. 
       
       Technicians, please kindly qualify the furnace for temp control
       w/i 1.5 C (using 12 pt TC). Your help is very appreciated.

       Please run another SCAL16 & monitor any abnormalities.

>>> 'tylan16' problem from klin -- Tue Apr 11 12:23:14 1989 <<<

More problem: Load zone is 2-3 C lower than Center & Source zone

(condition was observed during actual vacuum deposition step)

Cause: Probably Load zone is not providing enough heating power.

>>> 'tylan16' problem from bob -- Thu Apr 13 09:44:54 1989 <<<

klin reports good calibration and correlations on tylan16 and would like
to proceed with his experiment. He is considering sending out the 12 pt.
for recalibration as it appears to have erratic behavior.
For the time being he is happy to proceed as is.

>>> 'tylan16' problem from bob -- Thu Apr 20 14:26:43 1989 <<<

The SiH4 has been restored. tylan16 is back online. The SiH4 was 
blown out with high pressure during the shutdown to reduce particle
problems reported by jiahua.
tylan16 is being cal'd by Tom.

>>> 'tylan16' problem from evan -- Fri Jul 14 08:14:43 1989 <<<

tylan16, tylan11, and tylan12 will be down this morning for a silane cylinder change.

>>> 'tylan16' problem from evan -- Fri Jul 14 09:38:15 1989 <<<

A new silane cylinder (3000 g) has been installed.
tylan16 is up

>>> 'tylan16' problem from tom -- Fri Jul 14 16:16:04 1989 <<<

Oil leaks from the pump house. Very dangerous!!
I almost slipped.

>>> 'tylan16' problem from parrish -- Mon Jul 17 09:19:42 1989 <<<

problem:   oil on the floor

cause:     oil line on the Lam2 filtration unit leaking to the floor, and
           running under the oil pan, leaving oil in front of the tylan 16
           door.
solution:  removed the oil line and replaced it with a new one. Hopefully
           there is on other leaks.

>>> 'tylan16' problem from parrish -- Thu Aug  3 14:51:23 1989 <<<

oil filters has been changed

>>> 'tylan16' problem from bob -- Mon Aug  7 13:44:41 1989 <<<

There appears to be a leak around the door area of tylan16.
tylan16 is down for service.

>>> 'tylan16' problem from evan -- Mon Aug  7 16:38:46 1989 <<<

problem:massive leak
cause: broken cantalever sheath
solution: both sheaths were replaced. boats and heat plug cleaned.
After reassembly, base pressure was -10 mTorr; ROR 3 mTorr/min.

tylan16 is back online and running 16STNBY

>>> 'tylan16' problem from evan -- Mon Aug  7 16:54:21 1989 <<<

Before using, tylan16 needs a coating run. Also, I forgot to reload the
dummy wafers.

>>> 'tylan16' problem from bob -- Tue Aug  8 09:44:32 1989 <<<

A coating run will not be needed on tylan16. It is ready for use by
qualified users.

>>> 'tylan16' problem from tom -- Wed Aug  9 16:18:11 1989 <<<

Problem:    TC loose during calibration. Threw off the calibration.
Cause:      See above.
Solution:   Fixed TC. Reset DTC board. Ran 1STCAL16 and then SCAL16.
            Should be finished by tomorrow morning, 8/10. Tube is up.

>>> 'tylan16' problem from jimmoon -- Mon Aug 14 07:07:08 1989 <<<

Source zone temperature (as shown on the TYCOM) is bouncing all over
the place.  For example, over the last 20 seconds it jumped from 585
to 615.  Before that it was 641.  Not surprisingly, the calibration
program that I left running over the weekend has not run successfully,
despite having had 58 hours to stabilize.
Actual temperature (as read by 12-point probe) is around 590 in the 
source zone, as opposed to a set point of 600.

>>> 'tylan16' problem from evan -- Mon Aug 14 17:09:20 1989 <<<

problem: failed calibration program-wide fluctuation of source zone.
cause: bad connections in calib. T/C extension cable.  Cable was re-connected
to the plugs.  SCAL16 was run successfully.
tylan16 is up.

>>> 'tylan16' problem from denlinge -- Tue Aug 15 23:33:15 1989 <<<

The door would not shut, not even with the manual boat control.
I had to loosen the cable and push it shut.
(The program I was using was FUPLY16C)

>>> 'tylan16' problem from denlinge -- Wed Aug 16 23:39:54 1989 <<<

The tube won't come up to atm. pressure.  Is it out of N2?
I even ran 16stnby and went through the purge there but no pressure.
I have four wafers in there as of 8/16   23:38.

>>> 'tylan16' problem from evan -- Thu Aug 17 08:22:23 1989 <<<

Problem: n2 interlock alarm preventing venting
Solution: ack'ed alarm and n2 started flowing again.
I will run tube through pump/vent cycles to isolate cause after
denlinge has removed wafers.

>>> 'tylan16' problem from evan -- Thu Aug 17 15:14:17 1989 <<<

N2 flowing normally. However the boat loader is not working in insert mode.
The loader circuit was reset and the cantalever run out to end limit switch
but insert mode still failing.  The end limit switch was checked and found
to be ok. The problem still remains to be fixed.
tylan16 is up but cantalever must be manually inserted.

>>> 'tylan16' problem from galewski -- Fri Aug 18 17:52:14 1989 <<<

MFS 460 alarm on: PRCPR FLT

Pushed alarm ack to silence. Prcpr displayed: 1995-2018

Out of range for MFS 460 defn table?  
Normal to deposit at such high pressure?

			-Carl

>>> 'tylan16' problem from parrish -- Thu Sep  7 08:25:07 1989 <<<

system down for oil change
approx. 1 hour.

>>> 'tylan16' problem from parrish -- Thu Sep  7 09:24:45 1989 <<<


problem:      particulate build up in the filtration unit   

cause:        build up due to extended use

solution:     drain oil from pump, clean out the filtration unit, and reinstall
	      system is back up. Also the exhaust filters were changed.

>>> 'tylan16' problem from evan -- Fri Sep  8 13:26:46 1989 <<<

A new vacuum wand has been added near the old one for bank 4.  The new
one is to be used for tylan13 and tylan14.  The old one will be used
for tylan15 and tylan16 only.
The purpose is to avoid possible metal contamination from the wand.

>>> 'tylan16' problem from bill -- Thu Sep 21 18:04:41 1989 <<<

I found the poly tube in the following state :

standby program loaded, atmospheric pressure, 2 wafers out of rear boat.

I didn't complain, loaded my wafers, and loaded SUPOLY16 and tried
to run it.

The tube unloads fine - but would not load no matter what I tried.

I finally pushed the tube in manually - to avoid poly flaking
( and the wrath of Jim Moon ). 
I reloaded the standby program but the tube will not pump down,
There is plenty of N2 running.
( I left my wafers in the tube - I will remove them if any 
process gases are going to be turned on during correction of the
problem )

It's probably a simple fix - boatloader hangup, bpin trouble etc -
but what's infuriating is that the problem was obviously discovered 
by someone else - who didn't bother to report it.

>>> 'tylan16' problem from evan -- Fri Sep 22 11:31:50 1989 <<<

The boat loader has failed in the insert mode.  It is out and being repaired.
STNBY16 was run by holding the door closed manually until the gate valve
opened.

>>> 'tylan16' problem from evan -- Fri Sep 22 15:55:31 1989 <<<

problem: boat loader not inserting
solution: removed boat loader and bench tested. It worked fine. It was reinstalled and now is working fine.  Might have been another bad connector.
tylan 16 is up

>>> 'tylan16' problem from evan -- Tue Sep 26 14:33:20 1989 <<<

problem: alarm beeping for a very long time whenever a key is pushed.
cause:failure of component on cpu board
solution: replaced C-13 (6.8mF) and U-48 (LS221) of the beep timing circuit.

beeper is now functioning better
tylan16 is up

>>> 'tylan16' problem from tom -- Tue Oct  3 13:39:24 1989 <<<

I found the tube to be very far out of calibrtation, 20-30 C. 
I am running SCAL16 now. Tube should be up tomorrow morning.

>>> 'tylan16' problem from klin -- Thu Oct  5 12:07:38 1989 <<<

the boats didn't move completely out.

>>> 'tylan16' problem from bob -- Mon Nov 13 10:54:58 1989 <<<

The cantileever jammed in the most outward position for unknown reasons.
It has been restored to operation however the limit switch should be checked
when time permits.

>>> 'tylan16' problem from jiahua -- Mon Nov 13 17:17:45 1989 <<<

[1] After boats ccame out, the boat moving system stuck and is hard to 
    let it in.
[2] The pressure controller is out of control, the pressure went up 380 
    mtorr when I set it at 300 mtorr.
[3] The reading from 12 point TC (568.5C) is very different from 3 point TC
    (582C), and differernt from display on the computer (595C).

>>> 'tylan16' problem from evan -- Wed Nov 15 14:32:24 1989 <<<

The BPOUT microswitch was relocated so boat assembly would stop before
hitting cabinet.

The in-line filter was checked and found to be quite clogged.  The exhaust
manifold from the bellows to the filter housing was removed and cleaned.
The filter housing was reloaded with three cleaned Kurly Kates and leak
checked.
There is still some work remaining on the pump pressure shutdown system.
tylan16 is still down for repair.

>>> 'tylan16' problem from evan -- Thu Nov 16 16:57:02 1989 <<<

tylan16 was helium leaked checked. it was leaking around the ultratorr
fitting at the outlet tube.  this was tightened and the leak was stopped.
the ROR was then < 2 mTorr/min.  
the only remaining problem is throughput. process pressure was 298 mTorr
while running 100 sccm SiH4.  I will investigate more tomorrow.

>>> 'tylan16' problem from evan -- Fri Nov 17 15:01:55 1989 <<<

One of the Kurly Kates was removed from the filter housing. Pressure was
440 mTorr for a 250sccm SiH4 flow.  This is close to the 430 mTorr/ 250sccm
reported by steve at last filter change.
There are major problems with the 460 controller.  The 16STNBY program aborts
on process pressure interlock and/or VNTRLK (whatever this is?).  The front panel
display characters are blinking out, possibly due to a bad connection disturbed
by hours of manual button pushing.
tylan16 is still down.

>>> 'tylan16' problem from evan -- Tue Nov 21 10:41:03 1989 <<<

1) The led display was replaced in the 460 controller and it now is working fine
2) The baratron readout was rezeroed.
3) Throughput was checked as follows:
	
	SiH4-sccm	Process pressure-mTorr
	  100		   265
	  150	  	   320
	  200		   377
	  250		   433
	  300		   490

   These values are somewhat better than those repported by klin on 9-26-88:
	
	    90		   277
	   150		   365
	   210		   449

   There is also agreement with the 250sccm-430mTorr reported by hoagland 
     on 12-5-88 at the last noted inline filter change.

   The current values are the min. pressure obtainable with the given flows
     at 600 degree C.  Refer to klin tylan16 comments of 9-26-88 for info on
     effects of running at different temperatures.

4) Automatic controller was checked with FUPLY16C running 100sccm at 300 mTorr.
   It functioned correctly.

5) Base pressure at 5 mTorr.  ROR - 3 mTorr/min.

   tylan16 is up

>>> 'tylan16' problem from hoagland -- Fri Dec  1 17:03:24 1989 <<<

The pump breaker for tube16 has been rewired properly and now
the tube is 100% pump compatible with bank3 tubes.  The 
START/STOP buttons work normally as does the pump interlock
on processing(previously shorted out).  The oil pressure circuit
is also complete and will be functioning normally when additional
parts(already ordered) arrive next week.

>>> 'tylan16' problem from evan -- Wed Dec 20 11:27:59 1989 <<<

The boat loader is not working in the 'IN' mode.  I will pull it out

this afternoon.

>>> 'tylan16' problem from evan -- Wed Dec 20 16:30:14 1989 <<<

The boat loader has been replaced with the one from tylan14.
When the broken one is fixed, it will go into tylan14.
tylan16 is up.

>>> 'tylan16' problem from hcc -- Mon Jan 22 14:40:04 1990 <<<

T-C-open problem on tylan16 from hcc (22-jan-1990 14:38)

User Comments:
This is a test.

>>> 'tylan16' problem from evan -- Tue Jan 23 08:56:37 1990 <<<

clearing test message

>>> 'tylan16' problem from bob -- Fri Jan 26 13:39:46 1990 <<<

James Parrish reports a flow fault alarm on tylan16. Evan will
look into this when he returns for the dentist.

>>> 'tylan16' problem from bob -- Fri Jan 26 16:39:42 1990 <<<

tylan16 is operational however it has a problem at high
throughputs maintaing a low set pressure. It's inline
filter will be checked on Monday.

>>> 'tylan16' problem from evan -- Mon Jan 29 09:14:49 1990 <<<

problem: high process pressure alarm
cause: insufficient data
solution: throughputs were checked and were slightly better than just after
the last inline filter change 11/21/89.
I suspect that a process pressure was requested that was too low for the
ammount of SiH4 requested.  The limit for control @ 300 mT. is 100 sccm of SiH4.
A flow of 200 sccm SiH4 will result in a process pressure around 380 with
the throttle wide open.
No other action was taken.
tylan16 is up.

>>> 'tylan16' problem from jiahua -- Thu Feb 15 14:28:19 1990 <<<

tylan16 had high oxygen content reported by Charles Evans, but it hasn't
been tested yet after repairing for a leaking rear connection. Katalin
and Prof. Howe agreed to sand out a sample to test the oxggen contest, so
the boat has to be cleaned to get a typical sample for testing.

>>> 'tylan16' problem from evan -- Thu Feb 15 17:02:51 1990 <<<

the boats have been cleaned.  there are dummy wafers in boxes in front.
tylan16 has not yet been helium leak tested due to hld problems.

>>> 'tylan16' problem from evan -- Fri Feb 16 12:00:59 1990 <<<

The manifold, cantelever, and door have been leaked checked.  the
results were very good.  
tylan16 is ready for the O2 content test runs.

>>> 'tylan16' problem from hcc -- Tue Apr  3 15:40:51 1990 <<<

TYCOM problem on tylan16 from hcc (03-apr-1990 15:24:02)

User Comments:
Tycom doesn't work.

Diagnosed as MCB (microcomputer board) by hcc (03-apr-1990 15:35:58)

Comments from hcc at 03-apr-1990 15:36:42 :
Faulty component in the microcomputer board.
We are ordering the component now.

Comments from hcc at 03-apr-1990 15:39:39 :
We have replaced the faulty component in the board.
TYCOM is working now.
The equipment is up.
