>>> 'tylan12' problem from galewski -- Sat Feb 11 14:10:03 1989 <<<

Pump is making a different sound than the others.  Especially when
trying to pump down.  Related to Jim Chungs problems.

>>> 'tylan12' problem from jchung -- Sat Feb 11 15:44:10 1989 <<<

In regards to Carl Galewski's message....
Tube 12 initially had a little trouble pumping down, but
after 2-3 attempts at running the program, it finally
did pump down.  Depostion looked normal.

>>> 'tylan12' problem from evan -- Tue Feb 14 13:57:52 1989 <<<

problem: hard to pump down 
cause: unknown
solution: nothing is being done at this time since several runs have
been made with no pumping problem.
tylan12 is up and running

>>> 'tylan12' problem from eskim -- Fri Mar 17 01:57:52 1989 <<<

Silane does not flow as much as requested.  With request of 90sccm,
it started to flow around 20sccm, and dropped to about 5sccm after
20 min.  Thus my wafers got very thin LTO in stead of expected 3000A.
Also, the boats have a lot of flakes.  The boat near the source zone
is especially bad, and it looks impossible to load wafers in that boat.

>>> 'tylan12' problem from evan -- Fri Mar 17 08:50:44 1989 <<<

problem: low silane flow
cause: overflow sensor tripped
solution: this is now the second time this has happened.  I again reset
the overflow sensor.  The silane cylinder is down to 120 psi (420 full).
I will discuss this problem with bob on Monday.  
It may be time to change the cylinder or to attach an audible sensor to
the line.

tylan11,12 & 16 are up. (watch flow rate closely though)

>>> 'tylan12' problem from carlos -- Sat Mar 25 20:39:03 1989 <<<

I broke the handle of one of the boats; however the boat is 
still (?) usable. SDOLTOD, 4 hrs. The thickness should be ~ 3um

>>> 'tylan12' problem from carlos -- Mon Mar 27 15:01:21 1989 <<<

need more dummies. The SiO2 of the dummies inside tylan12 was so thick 
that the film shattered generating thousands of particles in the boat. 
I roughly cleaned the boat out and got rid of most of the dummies.

>>> 'tylan12' problem from evan -- Thu Mar 30 16:35:34 1989 <<<

The PH3 MFC is not functioning correctly.  In order to change it, the PH3
and SiH4 lines will have to be purged.  A new cylinder of SiH4 has also
been installed.  While it is offline, Steve will be calibrating a pressure
readout of cylinder pressure.  This work will not be completed until sometime
Friday.  All SiH4 and PH3 dependent tubes (tylan11,12 & 16).

>>> 'tylan12' problem from bob -- Fri Mar 31 16:18:28 1989 <<<

User reports doped LTO appears to have less PH3 than it should. Etch
rates confirm this.

Evan Stateler removed, rebuilt and calibrated the SiH4 mfc
and the PH3 mfc. The flow rates have been tested and tylan12
appears to be operating normally. tylan12 is up for use. A
check of the Si/O/P ratio will be done the first of the
week to confirm normal operation.

>>> 'tylan12' problem from jchen -- Sat Apr  1 22:53:50 1989 <<<


The chain of tylan12 is very loose, after the tube been vented, cannot
pull the tube out because the loose chain, I have to PULL out the tube
manually (yes, with my hand). It is very unpleasuent condiering the quite
temperature.

>>> 'tylan12' problem from bob -- Mon Apr  3 07:25:27 1989 <<<

Tension has been increase on slipping boat puller cable. The other 
tylans were checked and also adjusted as needed.

>>> 'tylan12' problem from jchen -- Tue Apr  4 19:59:02 1989 <<<

I did two low deposition rate LTO deposition with SiH4=1 sccm and O2=90 sccm
and both gave me very unreasonable thick films. Since the SiH4 mfc was just
changed, I suspect that it was due to the mfc. I undserstand that the flow
rate I am using is very low (down to limit) but it works fine and repeatable
untill this weekend after the changing of mfc. Even, is it possible to do
another calibration? Thanks!

Jian

>>> 'tylan12' problem from bob -- Wed Apr 12 15:53:19 1989 <<<

Maintenance on the SiH4 for tylan12 has been completed. A 0-10 sccm
mfc has been tied to SiH4 for low flow runs however it is not 
flowing correctly. It will be serviced in the morning. tylan12 is
up for use without this controller.

>>> 'tylan12' problem from evan -- Wed Apr 12 16:05:58 1989 <<<

The 0-10 sccm MFC was installed but is not yet operational.
All other functions are normal and standard recipies can still be run.
Work on low SiH4 will continue tomorrow.

>>> 'tylan12' problem from evan -- Wed Apr 19 10:54:20 1989 <<<

tylan12 (and 11 & 16) will be down April 20th all day in order to complete
the installation of the 0-10 sccm SiH4 MFC.

>>> 'tylan12' problem from evan -- Thu Apr 20 14:38:52 1989 <<<

The 0-10 sccm SiH4 MFC is installed and calibrated.  It is interlocked
so that it can only be activated when the 0-300 SiH4 is OFF. 
To select this MFC in a recipe, you must set the variables of O2LOW.
This is due to the fact that we used the MFC that originally controlled
0-10 sccm of O2.

All recipes not requiring low SiH4 flow are unaffected by this modification.

tylan12 is up and in standby.

>>> 'tylan12' problem from moazzami -- Fri Apr 21 17:53:22 1989 <<<

the petri dish sitting next to the cvd tubes cracked when
I was pulling out tube 12 (the dish was sitting way back where the
tube was headed!
Also, one of the tabs on the shroud for the source end boat is missing
so it is difficult to remove that shroud (and no, I didn't do it!).

>>> 'tylan12' problem from martin -- Fri Apr 28 17:37:04 1989 <<<

tylan12 repeatedly fails leak test during LTOSTNBY
however preceeding SDOLTOD run was successful.

>>> 'tylan12' problem from martin -- Fri Apr 28 18:01:39 1989 <<<

addendum to previous comment
Pressure after hard pump step in LTOSTNBY was 38-43 mtorr (high)
considering the ULDISA = 43 mtorr.

>>> 'tylan12' problem from evan -- Mon May  1 14:42:16 1989 <<<

problem: high base pressure
cause: drift in baratron manometer
solution: re-set base pressure readout. checked for good rate of rise of
< 10 mTorr/min.

tylan12 is up.

>>> 'tylan12' problem from jimmoon -- Wed Jun 21 19:40:03 1989 <<<


Looks like we're out of silane.  The SIH4 delivery declined steadily
toward the end of the deposition, down to 8 at the end from 60 most
of the way through.  I can take a hint.  I'm leaving.

>>> 'tylan12' problem from evan -- Thu Jun 22 09:29:13 1989 <<<

problem: silane flow shut off
cause: mal-function of cut-off valve
solution: the cut-off was reset and pressure returned to 150 psi(cylinder).
This happened when the last cylinder got down to <150 psi.  I will call
to see about getting a replacement or if this is normal.  The cut-off is
now in bypass so it will not shut off on it's own.  However this defeats
the safety factor.  It is a dilemma I will discuss further with bob.
tylan12 is up

>>> 'tylan12' problem from tom -- Thu Jun 22 15:18:02 1989 <<<

Problem: Boats very well coated.
Cause:   Normal use.
Solution: Cleaned with HF.  Replaced bottom of source end boat with new 
          one. It was to far gone and was starting to fall apart.

>>> 'tylan12' problem from moazzami -- Tue Jul 11 17:49:01 1989 <<<

Tube stopped firing after the standby program ended.
Tylan10 and 11 have the same problem.  Tom reset the SCR boards
but nothing happened. All three tubes are cooling down to room temperature.

>>> 'tylan12' problem from evan -- Fri Jul 14 08:13:57 1989 <<<

tylan11, tylan12 and tylan16 will be down this morning for a silane cylinder
change.

>>> 'tylan12' problem from evan -- Fri Jul 14 09:39:22 1989 <<<

A new silane cylinder has been installed. A reminder to users: The
tylan16 readout on tycom shows percent of silane remaining in cylinder.
This is useful to monitor before any long runs.

>>> 'tylan12' problem from field -- Tue Jul 18 20:50:36 1989 <<<


boat loader doesn't respond to program to unload; needs manual
assist.

>>> 'tylan12' problem from evan -- Thu Jul 20 15:27:15 1989 <<<

problem: not unloading
cause: boat loader thinks it is out when it is not
solution:reset boat loader and run boats all the way out and back.
tylan12 is loading.

>>> 'tylan12' problem from moazzami -- Tue Jul 25 12:31:07 1989 <<<

Pressure during LTO run (low flow silane recipe) was much higher than
normal: pressure was ~340mT during deposition, it used to about 280mT
last month and <240mT last year.  Also, after the deposition, the pressure
during pumpdown was >50mT rather than the usual ~<10mT.
One last thing: Please clean the boats and prepare new dummies.
LTO is flaking off of everything.

>>> 'tylan12' problem from evan -- Wed Aug  2 18:11:32 1989 <<<

problem:high process pressure
cause:build-up of material in exhaust
solution: cleaned exhaust manifold and tube outlet. cleaned boats and
heat baffles. reset baratron readout (was reading 15-20 mTorr too high).
after 40 min n2 purge, Base pressure = 10 mTorr, ROR = 12 mTorr/min (should
get better as last of the h2o outgases)
throughput tests show considerable improvement:
LTOSTNBY idle (step 55) down from 345 mT to 183 mT.
1 SLPM of n2 down from 1710 mT to 1125 mT.

tylan12 is in standby awaiting a coating run (dummies loaded).

>>> 'tylan12' problem from parrish -- Thu Aug  3 09:48:24 1989 <<<

oil filters has been changed

>>> 'tylan12' problem from evan -- Thu Aug  3 14:21:27 1989 <<<

problem: front pressure readout did not agree with rear display
solution: voltage supplied by baratron was checked. This value
agreed with the rear display so I checked the input to the front
voltmeter. This was also correct. I opened the voltmeter unit and
located an adjusting potentiometer.  I made adjustments until the
proper value was displayed and verified at several points 
throughout the range. If further adjustments need to be made, the
adj. screw is accessable by removing the plastic lens cover.  It is
the only other trim besides the two set-point pots.

the error of the reading before was 20 mTorr too low.
tylan12 is still up

>>> 'tylan12' problem from evan -- Mon Aug  7 13:27:39 1989 <<<

There is a leak somewhere around the door. A cracked thermocouple sheath
is suspected.  Tylan16 will be down while the tubes are cleaned and checked.
The boats will be cleaned at this time as well.

>>> 'tylan12' problem from bob -- Mon Aug  7 13:46:25 1989 <<<

A problem for tylan16, a leak around the door area, was
mistakenly reported under tylan12. It has been properly
reported under tylan16. tylan12 is up for use.

>>> 'tylan12' problem from voros -- Thu Aug 10 10:42:03 1989 <<<

Tylan12 will be shut down for complete quartzware change on Monday,
8/14/89. Before that, E.S.Kim has permission to deposit LTO on
wafers which have zinc oxide on them. If you do not care about
possible contamination you may use the tube until we take it down.
Thank you for your cooperation.
Katalin
From moazzami Thu Aug 10 16:19:40 1989
Received: by argon (5.57/1.16)
	id AA28506; Thu, 10 Aug 89 16:19:37 PDT
Date: Thu, 10 Aug 89 16:19:37 PDT
From: moazzami (Reza Moazzami)
Message-Id: <8908102319.AA28506@argon>
To: voros
Subject: tylan12
Cc: bob
Status: R


FYI, the LTO I deposited last week (after the boats were cleaned/dep. pressure
was lowered) are still very poor (about the same as immediately before the
cleaning).  There is a lot of fixed charge/interface states and the films
are very leaky indicating most likely that there are a lot of impurities
present (or the films are very porous even though they were densified at high
temperature).

Reza


>>> 'tylan12' problem from bob -- Mon Aug 14 17:08:22 1989 <<<

We are 50% finished with a complete glassware change on tylan12.
It should be completed by the end of tomorrow. tylan12 is down until
then.

>>> 'tylan12' problem from evan -- Tue Aug 15 17:14:31 1989 <<<

The new quartzware has been installed. The tube is heating up and running
LTOSTNBY for the night.  If everything checks out ok in the morning, the
tube will be declared up for use.

>>> 'tylan12' problem from evan -- Wed Aug 16 15:22:32 1989 <<<

The calibration of tylan12 has been completed. There is only one boat
cover until a new one arrives. Otherwise tylan12 is up for use.

>>> 'tylan12' problem from moazzami -- Thu Aug 17 12:48:07 1989 <<<

Source Zone temperature not stabilizing:
Initially, right after the 15 min. ramp to 450, all three
zones were at 445. But the source zone temp. started to drop to 437
and even after 90min. of stabilization only went up to 445C.
The tube may need another calibration.

>>> 'tylan12' problem from bob -- Mon Aug 21 10:21:04 1989 <<<

tylan12 remains dwon for testing. An anouncement to users will be 
made when it is available for general use. Send mail to Katalin
if you have any questions or problems.

>>> 'tylan12' problem from evan -- Mon Sep 18 16:20:06 1989 <<<

Cleaned and installed a new boat cover.  There was one missing from the
quartzware change.
tylan12 is still up

>>> 'tylan12' problem from field -- Mon Oct 23 22:40:02 1989 <<<

The cantilever is crooked.  Evan made an adjustment to it so I 
could finish my run and requested that I report the problem
at the end of the run so that it could be fixed.

Loaded and ran the LTOSTNBY program.

>>> 'tylan12' problem from evan -- Tue Oct 24 10:38:25 1989 <<<

problem: cantelever rod had shifted somehow and was hitting tube
cause: earthquake?
solution: removed boats and baffles. readjusted cantelever rods. replaced
boats and baffles.  after 1/2 hour n2 purge, Base pressure < 10 mTorr  ROR 5 mT/min.

tylan12 is up

>>> 'tylan12' problem from evan -- Tue Nov  7 16:29:48 1989 <<<

A solenoid has been installed allowing Ar to replace N2 as the supply gas
for the N2 MFC.  It is energized by turning CCOUT10=ON in your recipe.
This modification was done for hyeh of the sensors group.

There should be no effect when using the standard recipes.
tylan12 is still up.

>>> 'tylan12' problem from evan -- Wed Dec  6 07:56:42 1989 <<<

tylan12 will not be available today during the quartz repair of tylan11.

>>> 'tylan12' problem from evan -- Wed Dec  6 17:00:14 1989 <<<

tylan12 is available now

>>> 'tylan12' problem from tang -- Thu Dec 14 21:42:21 1989 <<<

****** low deposition rate ******

Recipe:  SDOLTOD
Time:    2hr
LTO thickness:  6800A nanospec,   6900A as200,  lam2 etch--45 sec to endpoint

I have repeated the deposition again, same recipe and time, obtain same
result, which is roughly 1/3 of the expected dep. rate. 

I've noticed somewhat higher dep. pressure than usual:

dep. time      pressure
---------      --------
00:02:15       285
00:15:03       289
00:49:07       290
01:02:38       292
01:47:04       300
01:57:07       305

Both times, the tube passed the 1 min leakcheck. I had 9 wafers in the
outer boat (close to the front), facing the back.

I am now trying the third time and will report the result later. But I
think the tube may need cleaning.

Bill

>>> 'tylan12' problem from tang -- Fri Dec 15 01:38:15 1989 <<<


Very low dep. rate--about 3500A per hour. Cloudy substance formed
on wafer surface. Dep pressure too high and rising during deposition.

>>> 'tylan12' problem from debra -- Fri Dec 15 14:32:47 1989 <<<

The dep pressure problem seems to be due to a clogged trap
which has now been cleaned and replaced. It is purging and
needs to be vacuumed and coated before using.

>>> 'tylan12' problem from tom -- Fri Dec 15 16:56:49 1989 <<<

Tube has been cleaned of flakes and a 15 min. coating run is being done.
Presure at begining of run was good at 257 mTorr.
tylan12 is up. (Bill, please report any problems).

>>> 'tylan12' problem from tang -- Sun Dec 17 16:47:40 1989 <<<

After the filter was cleaned, the deposition pressure was back
to 460, which was normal.

However, the deposition rate improved only slightly--now up to
3500A/hr. Also, the cloudy substance still formed on most of the
wafers. out of 15 wafers, only 3 or 4 are acceptable. And only
1 wafer was without spots. All others were very spotty under the
microscope.

My experimental runs showed that wafers were equally affected whether
they faced the back or the front of the furnace, whether they were in
the outer boat or inner boat. The deposition temperatures were within
+/- 2 deg. of 450, and flow rate, according to Tycom, were also normal.

>>> 'tylan12' problem from evan -- Mon Dec 18 14:08:21 1989 <<<

The injectors were replaced.  The old ones were covered with crusty deposits.
An experimental run will show if the deposition rate and quality have improved.

>>> 'tylan12' problem from evan -- Thu Dec 21 12:18:34 1989 <<<

O2 injector feed line has been damaged along with air line to gate valve.
tylan12 is down for the afternoon.

>>> 'tylan12' problem from evan -- Thu Dec 21 14:28:21 1989 <<<

problem: air line (for gate valves) and O2 injector line were crossed and
rubbing do to pump vibration.  Over a period of time, the s.s. tubing
was eroded clear through causing a leak.  Both defective sections were cut
out and replaced.  A plastic tubing spacer block was installed to keep the
lines from touching.
At the time of the failure, tang was running VDOLTOE which appeared to have
failed twice at the leak test step.  It is still loaded but not running.  It
should pass the leak test ok now.
tylan12 is up

>>> 'tylan12' problem from judy -- Mon Jan 15 00:48:18 1990 <<<

The back boat of tylan 12 is full of poly flakes.

>>> 'tylan12' problem from bob -- Tue Jan 16 10:41:12 1990 <<<

The boats on tylan12 will be cleaned by the Process Staff
shortly. tylan12 is up for use until then.

>>> 'tylan12' problem from hyeh -- Wed Jan 17 14:22:42 1990 <<<

The Load zone temperature refuses to stabilize after about 3 hours.

>>> 'tylan12' problem from tom -- Thu Jan 18 09:52:57 1990 <<<

Problem:    User reports difficulty stabilizing load zone. It stayed
            to low for 3 hrs.
Cause:      It is always difficult to run these tubes at 450 C.  Variations
            in glassware position, coating thickness, time for loading, and
            N2 flow can cause it to get stuck on the edge of the KP band.
Solution:   The tube stabilized ok for users on Tuesday. I modified the 
            standard recipes, inching up the KR values slightly and brought
            the KP band from 4 to 5 C. This should help. I also dumped out
            most of the poly flakes in the rear boat and removed a flaky 
            dummy wafer and wiped off the cantilevers.

>>> 'tylan12' problem from bob -- Mon Jan 29 15:53:28 1990 <<<

Debra has redone dummy wafers for tylan12 and I have cleaned the glassware
in HF. One new wafer carrier bottom has been installed. tylan12 has been
cleaned and is ready for use.
It has gone from a spelunkers dream to a vlsi processing tool!
tylan12 is up.

>>> 'tylan12' problem from field -- Mon Jan 29 16:49:27 1990 <<<

Boats were cleaned and rods cleared of flakes. End of tube vaccumed.
tylan12 is up

>>> 'tylan12' problem from carlos -- Wed Feb  7 20:50:25 1990 <<<

The boat will not automatically load and unload. Also it needs a 
temperature calibration since it did not stabilize after 3 hrs.

>>> 'tylan12' problem from evan -- Fri Feb  9 11:30:37 1990 <<<

The alternate gas for n2 has been changed from argon to neon.  It is still
switched in by setting CCOUT10=ON.  This was done at hyeh's request.

>>> 'tylan12' problem from evan -- Fri Feb  9 11:45:58 1990 <<<

problem: boat loader not working
solution: reset boat loader and ran boats all the way out and back in

>>> 'tylan12' problem from cjkim -- Sat Feb 17 21:05:15 1990 <<<


VDOLTOC for 2hrs 05min.

>>> 'tylan12' problem from judy -- Mon Feb 19 17:24:32 1990 <<<

VDOLTOC - 2 hr deposition - goal ~2 um - measured 2500 A!?!?!?

Upon reviewing my monitor of the tylan run I noticed that the 
SIH4 flow decresed to 0 throughout the run (see below).
Maybe the SIH4 is out or the injectors are plugged.

----------------------------------------------------------------

TASK COMPLETE
Mon Feb 19 13:33:25 PST 1990

02/19/90   13:35:04
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:16:08     0080    01:55:47     00:04:13  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  452.0  0548  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  449.7  0276  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  451.7  0508  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    452.0        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    449.5        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    452.2        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.4        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = G   59.7        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE
-----------------------------------------------------------------
Mon Feb 19 13:41:01 PST 1990

02/19/90   13:42:40
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:23:44     0080    01:48:11     00:11:49  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  451.0  0548  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  451.2  0276  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  452.2  0463  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    450.7        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    451.0        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    452.5        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.4        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = L    1.5        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE
-----------------------------------------------------------------
Mon Feb 19 13:48:37 PST 1990

02/19/90   13:50:17
           *=DISABLED
   TUBE    STATUS     PROCID        ET       STEP    TIME-TO-GO     STEP ET
    012    RUN       VDOLTOC     01:31:21     0080    01:40:34     00:19:26  

    OUTPUTS         RELAYOUT       RELAYIN       INPUTS              
     N2 =     .0   ULDISA = ON    CCIN1 = OFF   TEMPL = G  450.7  0532  
     O2 =   89.9   LLDISA = OFF   DRCSD = ON    TEMPC = G  451.5  0268  
   SIH4 =   60.0       N2 = OFF  VACALM = OFF   TEMPS = G  451.2  0439  
    PH3 =   10.2       O2 = ON   GPAUTO = ON   CALIBL =    451.0        
  O2LOW =     .0     SIH4 = ON    CCIN5 = OFF  CALIBC =    451.0        
  ANAO6 =     .0      PH3 = ON     BPIN = ON   CALIBS =    451.5        
  ANAO7 =     .0    O2LOW = OFF   BPOUT = OFF                           
   TEMP =  350.0   VACUUM = ON  AUTOTMP = ON                            
  TEMPL =  450.0   N2PUMP = OFF                    N2 = G     .0        
  TEMPC =  450.0  CCOUT10 = OFF                    O2 = G   92.5        
  TEMPS =  450.0  CCOUT11 = OFF                  SIH4 = L     .0        
                  CCOUT12 = OFF                   PH3 = G   10.2        
                  TEMPENA = OFF                 O2LOW = G     .0        
                   DTCENA = ON                                          
                     LOAD = OFF                                         
                   UNLOAD = OFF                                         
TASK COMPLETE

>>> 'tylan12' problem from evan -- Tue Feb 20 09:13:03 1990 <<<

problem: SiH4  stopped flowing during a run
cause: flow shutoff valve tripped
solution:  this is a known problem that has been discussed in past problem
reports.  the shutoff valve has been placed in override position so this should not occur again.  the valve will be replaced with a higher flow model during thenext cylinder change.  the cylinder pressure was 320 psi when this occured.

tylan12 is up 

>>> 'tylan12' problem from hyeh -- Wed Feb 28 18:30:44 1990 <<<

I tried to do LTO.ARG for 2:40.  The tube aborted after 1:30.
I think that the pump efficiency is going down and the pressure went from
1 torr to 2 torr and the alarm tripped.
Can someone clean the pump out (change the oil?)

>>> 'tylan12' problem from evan -- Thu Mar  1 10:50:10 1990 <<<

problem: process pressure too high
solution: changed KK's in the inline filter.
throughput rates back to normal.
tylan12 is up

>>> 'tylan12' problem from hhsu -- Fri Mar  2 21:59:36 1990 <<<

I replaced 9 test wafers, they are in very bad shape.  I also noticed
a crack line on the outer boat of tylan12, please replace it as
soon as possible.

>>> 'tylan12' problem from jimmoon -- Thu Mar  8 13:06:53 1990 <<<

Low-flow silane controller is behaving abnormally.
I have asked for a level of 6 in five depositions now
and the rate of deposition has steadily declined
from 17A/min to 11A/min.  Readout on the TYCOM for
the latest run was 3.4 instead of 6.

>>> 'tylan12' problem from evan -- Fri Mar  9 14:44:00 1990 <<<

Confirmed that 1-10 sccm SiH4 MFC is not functioning.  The regular SiH4
is operating correctly.  MFC will have to be pulled and serviced.
tylan12 is up except for low-flow silane.

>>> 'tylan12' problem from evan -- Tue Mar 13 14:06:41 1990 <<<

problem: low-flow SiH4 MFC not delivering requested flow.
cause: blocked valve/sensor
solution: removed and cleaned MFC. recalibrated and reinstalled. tested
and got full flow.

low-flow SiH4 is back up

>>> 'tylan12' problem from evan -- Tue Mar 13 14:11:48 1990 <<<

tylan11 and tylan12 are down for a change from PH3 to a 50/50 mix of
PH3 and SiH4.  The lines are being pumped out overnight.  The new MFC's
and gas cylinder will be installed Wednesday a.m.

>>> 'tylan12' problem from evan -- Wed Mar 14 14:51:56 1990 <<<

Installation of new MFC and gas cylinder for PH3/SiH4 mix has been completed.
tylan12 is up

>>> 'tylan12' problem from evan -- Tue Apr  3 17:32:43 1990 <<<

The Ph3 and SiH4 lines are pumping down to the bottle overnight.

>>> 'tylan12' problem from evan -- Wed Apr  4 16:51:52 1990 <<<

The PH3/SiH4 MFC does not close down below 5-6 sccm when requesting a
lower ammount.  Since most recipes call for 10 sccm or greater, this
is not a major problem.  Replacement MFC will be obtained.

>>> 'tylan12' problem from evan -- Wed Apr  4 17:02:15 1990 <<<

see previous report for PH3 flow problem.
tylan12 is up

>>> 'tylan12' fix from evan -- Fri Apr  6 11:47:22 1990 <<<

The erratic base pressure reading is due to the loading problem caused
when control is switched from AUTO to MAN mode.  A 10 mTorr reading in
AUTO jumps to 70 mTorr when switched to MAN.  The +15 on the baratron
head drops 0.03v during this switch.  At the zero setting range, this is
significant.  The loading is caused when the relays are energized in AUTO
mode.  tylan12 has the most relays switching of all the LPCVD tubes.
A larger capacity power supply might be needed to relieve this problem.

>>> 'tylan12' problem from evan -- Tue Apr 10 16:08:25 1990 <<<

The CALIBL temp shows 350 degrees when TEMPL = 450.  Suspect that
tc cable is shorted.  This plug has been pulled from amp board so
CALIBL will read 1373 and therefore be ignored.  tylan12 can still
be operated in this mode.

>>> 'tylan12' problem from jimmoon -- Thu Apr 12 09:15:54 1990 <<<

Thermocouple problem, as detailed by Evan on 4/10.
Also, load zone firing rate would not adjust itself
to bring the temperature up into the desired range;
hence the tube sat for nearly 12 hours without 
stabilizing.  Acknowledged past the stabilization
step and deposition proceeded normally.
Thicknesses were 50% different from front to back
of the front boat.

>>> 'tylan12' problem from evan -- Fri Apr 13 14:23:22 1990 <<<

CALIBL readout error cause has not been found yet.  Since tube is usable
as is, I will continue on Monday.

>>> 'tylan12' problem from evan -- Mon Apr 16 10:33:49 1990 <<<

The CALIBL error has been joined by TEMPL reading too high.
tylan12 is down till this is fixed.

>>> 'tylan12' problem from evan -- Tue Apr 17 09:16:02 1990 <<<

tylan12 is down through Wednesday for repair of t/c readouts.

>>> 'tylan12' problem from evan -- Wed Apr 18 16:49:40 1990 <<<

So solution found for CALIBL reading incorrectly.  A call will go in
to tylan for more information.
tylan 12 is usuable as is.

>>> 'tylan12' fix from evan -- Thu Apr 19 13:27:25 1990 <<<

problem: false readings from CALIBL t/c
cause: unknown
solution: since tylan12 can't be calibrated by normal means, a new recipe
LTOKMSET has been written to force the best known KM values into memory.
This is to be used after the control circuit boards have been reset during
work on the bank.  tylan12 should temp stabilize in a normal amount of time.

Repair of CALIBL is awaiting advise from Tystar and/or heavenly intervention.

tylan12 is up

>>> 'tylan12' problem from tang -- Thu Apr 19 21:24:40 1990 <<<


The tycom reported that the load zone temp was at 1322.2 C.
The "front" indicator light on the control panel was not
flashing (no firing at the load zone).  I suspect a bad
thermal couple on the load zone.

I have aborted my run, with my wafers still in tylan12.  I've
tried to run ltostnby, but I'm not sure if it will pass the temp
check step. Probably not.

I was running sdoltod from the standard diskette.

>>> 'tylan12' fix from tom -- Fri Apr 20 09:57:10 1990 <<<

Problem:    User reports that load zone is way high (~1300 C)
Cause:      Calibrate step in SDOLTOD recipe.
Solution:   Reset boards to get rid of offset caused by calibrate step.
            Ran LTOKMSET. Ran LTOSTNBY. Tylan12 is up.

>>> 'tylan12' problem from alley -- Wed Apr 25 16:19:38 1990 <<<

21 "run" wafers and 3 deposition monitors.  SDOLTOD for 01:50:00,
target 2um of doped PSG based on the results of Bill Tang's recent
attempt at the same thickness.
Yes, I have some problems to report.  I didn't pass leak check
the first time through.  I restarted the deposition (SDOLTOD,
01:50:00, target 2um of doped PSG based on the results of 
Bill Tang's recent attempt at a similar thickness) and watched
the tube step through the recipe.  During
temperature equilibration, the source zone stuck ~441.5 C and
stayed there; after a while, I acknowledged it.  A few minutes
into the actual deposition, all three zones were at 450 C, so
this was probably the right thing to do.
The deposition ran through, I unloaded the wafers, and found the
third problem:  the deposited PSG  was very hazy.  The haziness
was worse going from the load end to the source:  the front wafer
had mild haze mostly apparent at the 3 through 6 o'clock quarter,
the last wafer had really bad, uniform haze.  Debra and I looked
at one of the deposition monitors under UV:  it had lots of
large particulates.   Monitor thicknesses were:

         center of source boat:  26125, very uniform (I have more data)
         front of source boat:  24997, but very nonuniform (I was told
                                not to use this position, but I wanted
                                to find out how bad it was; I won't bother
                                again)
         center of load boat:   21625, very uniform

Debra has talked to me about this problem.  The wafers were very clean
going into the furnace, and I checked the boat covers for signs of spalling
(what I thought had happened).  I suppose it's due to the gas phase nucleation
she mentioned.  I'm sorry to say that I wasn't present for the whole deposition.
The two times I checked in, the pressure (and other conditions) were stable, 
but then, it was a long deposition.  Bill Tang is aware of the problem I had
but will be attempting a thinner deposition anyway.  If his results are okay,
I'll strip my wafers and try again.  I will try to watch my processes more 
closely in the future so that I can at least be more certain of what happened.
If this was due to pressure fluctuation, please see what can be done to elim-
inate these.

RLA

>>> 'tylan12' fix from parrish -- Fri May 11 13:33:25 1990 <<<

the oil filter elements has been changed
