>>> 'tylan11' problem from parrish -- Thu Jan 12 07:59:14 1989 <<<

System will be down for pump change, about 3 hours

>>> 'tylan11' problem from parrish -- Thu Jan 12 08:11:29 1989 <<<

pumpdo not have to be changed, system is still up

>>> 'tylan11' problem from evan -- Thu Jan 12 13:19:03 1989 <<<

The PH3 flow controller was removed and checked.  It appeared normal.
The electronics were recalibrated and needed only a slight adjustment.
The controller was reinstalled and is functioning normally.
tylan11 is up.

>>> 'tylan11' problem from aplee -- Sun Jan 29 18:35:19 1989 <<<

for the program sunpolya, the boat does not come out automatically.
In the recipe, it says that it should go to step 20 when acknowledged
at step 15, but it directly jumps to step 25. I finally manually
moved the boat. 

>>> 'tylan11' problem from evan -- Tue Jan 31 13:12:05 1989 <<<

problem: no automatic boat load using SUNPOLYA
cause: poor recipe
solution: user should check with a superuser to find out what recipe is
          should be used for the desired process.  There are old versions
          that are still on the disks that do not meet current specs for
          tylan operation.  All recipies should be reviewed and the obsolete
          ones deleted from the disks.
tylan11 is up

>>> 'tylan11' problem from rnorman -- Mon Feb  6 09:18:46 1989 <<<

Problem: Very loud noise from chase.

Cause: The air pressure line to the hi-vac valves of tube 11 & 12 
       had a hole in it.

Solution: The tube was cut and reattached. The tylan is up.

>>> 'tylan11' problem from galewski -- Tue Feb  7 17:44:29 1989 <<<

Pressure up on gauge of pump exhaust filter.  Does not affect
ability to use tube.

>>> 'tylan11' problem from galewski -- Fri Feb 10 14:25:38 1989 <<<

Still see a pressure rise on oil separator.  Tube is currently doing
a run and maybe will not show it while in standby.  Does not affect 
operation.

>>> 'tylan11' problem from parrish -- Mon Feb 13 07:55:32 1989 <<<

do not use! system down foe repair

>>> 'tylan11' problem from parrish -- Mon Feb 13 08:05:47 1989 <<<

problem:    exhaust filter clogged

cause:      normal time change

solution:   replace oil filter

>>> 'tylan11' problem from evan -- Fri Mar 17 09:14:49 1989 <<<

Users should watch the tycom readout of actual silane flow.  The
overflow sensor has shutoff the flow twice (see problem history).
The problem is being worked on and should not reoccur over the weekend.

>>> 'tylan11' problem from evan -- Wed Mar 22 11:48:01 1989 <<<

Problem: micro reported 50 hrs of use.

Procedure: Removed inline exhaust filter and inspected.  It showed a
small amount of orange-red deposit on the upstream side. The downstream
side looked entirely unblemished.  I decided that the filter was ok and
replaced it.

The door seal is starting to show some wear. It should be replaced sometime
soon.

The pumpdown time is still good; base pressure of 6-10 mTorr (jumpy readout)
and ROR is also low (again, hard to get absolute number because of readout
variations)

tylan11 is still up for use

>>> 'tylan11' problem from hoagland -- Mon Mar 27 18:52:12 1989 <<<

The SIH4 overflow cutoff valve tripped again.  I reset the valve
and normal gas pressure was restored.

>>> 'tylan11' problem from moazzami -- Tue Mar 28 21:39:48 1989 <<<

cover for boat on load end cracked.
I left it on the dish next to the tube.
also, first boat (load end) needs to be replaced: there
is a thick layer of poly on it which has lots of cracks;
flakes of poly were shattering in my face!

>>> 'tylan11' problem from evan -- Wed Mar 29 13:18:49 1989 <<<

Tom has replaced the broken boat cover.
The boats will be cleaned between 8 and noon tomorrow.  This was to be done
today but the reserved user desided to do their run as is.
I have reserved tylan11 for Thursday a.m.

>>> 'tylan11' problem from evan -- Thu Mar 30 11:12:49 1989 <<<

Boats and heat baffles were cleaned and reinstalled.  Tom is running a
coating run.  Tylan11 will be back online around 13:00.

>>> 'tylan11' problem from evan -- Thu Mar 30 16:43:48 1989 <<<

SiH4 and PH3 gases are offline until tomorrow. see Tylan12 problem report.
tylan11 is down.

>>> 'tylan11' problem from bob -- Fri Mar 31 16:15:32 1989 <<<

Silane and PH3 have been restored to this tube. There is a new 3000g
cylinder online of SiH4. tylan11 is up and ready for use.

>>> 'tylan11' problem from bob -- Wed Apr 12 15:52:23 1989 <<<

Maintenance on the SiH4 for the tylan bank has been completed and
tylan11 is up and ready for use.

>>> 'tylan11' problem from bob -- Thu Apr 20 14:29:17 1989 <<<

tylan11 is back online and ready for use after service to the 
SiH4 lines.

>>> 'tylan11' problem from carlos -- Tue May  9 22:10:03 1989 <<<

The pump is not working

>>> 'tylan11' problem from parrish -- Wed May 10 09:03:58 1989 <<<

problem:   pump not working

cause:     At this time the cause is`nt certain. The system is being monitored
           
solution:  restarted pump after installing a pressure switch, which will give
           an indication of high pressure in the pump, which could be reason
           the pump shut off, or an adjustment on the switch. system is running..

>>> 'tylan11' problem from carlos -- Sat May 13 18:51:04 1989 <<<

When I walked into the VLSI area, I noticed the tube was vented.
I restarted the standby program, but it aborted because the pump
is not working

>>> 'tylan11' problem from hoagland -- Mon May 22 16:39:26 1989 <<<

problem:  Oil pressure alarm sounding during weekend.  Pump
          shuts off.

cause:  Oil pressure sensors drifting- could be caused by
        vibration.  Exact cause of failure unknown.

solution:  Cycling pump on/off revealed current set point of
           sensors seems reversed; low pressure trips before
           high on descending pressure.  Connectors were reversed
           on sensors so high trips before low.  If problem persists
           alarm circuit will be bypassed.  At first opportunity    
           sensors will be removed from pump anbd recalibrated.
           Tube11 is up for use.
 
        

>>> 'tylan11' problem from bill -- Wed May 24 20:35:30 1989 <<<

The standby program aborted by itself at 7:50 pm.
I tried a number of times to run the standby program
again - but it fails at the first leak check -
no surprise since the tube never pumps down during the 
first 2 minute pump down.
The nasty red and orange lights are on in the back'
telling me ( I think ) that the pump is not running.

This does not seem like enough emergency to bother
any staff at home, if I should call for
this reason in the future - 
please let me know.

>>> 'tylan11' problem from parrish -- Thu May 25 07:48:06 1989 <<<

problem:    mech-pump shut off 

cause:      sensors was added to an alarm, aperently the sensors are out
            of adjustment since the oil pressure is normal(7-15 psi.)

solution:   removed the sensors and shorted out the electrical connections
            restarted the pump and will keep check on the pump.

>>> 'tylan11' problem from hoagland -- Thu May 25 09:36:02 1989 <<<

Following the most recent shutdown of tylan11's vacuum pump the 
oil pressure sensors were removed for inspection and recalibration.
The low pressure sensor, which shuts down the pump, was marked at
4.5 psi.  It's actual trip pressure, measured with N2, was 5 psi.
This suggests that the sensor itself is not responsible for these
intermittent failures.  The sensor bypass jumpers which James 
installed will effectively isolate the balance of wiring harnesses
and connectors as a possible cause- if the system holds up at least
a week the pump itself should be looked at next.

>>> 'tylan11' problem from moazzami -- Sat Jun 10 23:06:38 1989 <<<

Failed leak check: pressure during temp. stabilization > 900mT
                   pressure during pump down = 670mT
running recipe: SDOPOLYG

>>> 'tylan11' problem from evan -- Mon Jun 12 12:11:46 1989 <<<

The first wafer carrier was found off of the cantalever inside the tube.
Suspect that the thermocouple sheath is broken.  This is being replaced
and I will report further details later this afternoon.

>>> 'tylan11' problem from evan -- Mon Jun 12 14:43:10 1989 <<<

Replacing the thermocouple sheath did not solve the problem.  This
means there is a crack in the tube itself.  The heaters have been
shut down and the tube is cooling.  Our spare tube will be installed
today and tomorrow.
tylan11 is down until further notice.

>>> 'tylan11' problem from evan -- Tue Jun 13 17:08:01 1989 <<<

A new process tube and liner have been installed.  Hoagland is 
rebuilding the cantalever assembly.  The thermocouple sheath is
broken and will have to be fixed.  The TC inlet tube has been
plugged and the tube is under vacuum and n2 purge. tylan11 should
be back up for coating runs by tomorrow afternoon.

>>> 'tylan11' problem from evan -- Wed Jun 14 16:43:15 1989 <<<

The installation of the new tube and liner has been completed.
The o-rings and seals in the cantalever assembly have been replaced.
All quartzware has been cleaned.  The heaters have been turned on and
tom will be doing a coating deposition and temp calibration checks.
tylan11 will be up for use when tom is finished.

>>> 'tylan11' problem from tom -- Fri Jun 16 11:41:23 1989 <<<

Tube coated, calibrated and test run done. Tube is up for use.

>>> 'tylan11' problem from moazzami -- Mon Jun 19 17:17:20 1989 <<<

The pressure during deposition (SDOPOLYG) was 375mT.
It should be less than 320mT.

>>> 'tylan11' problem from evan -- Tue Jun 20 13:27:51 1989 <<<

problem:rising process pressure
cause: change of in-line exhaust filter material
status: the in-line filter material was replaced in order to lower
process pressure from reported 375mT.
For the replacement filter material, we are switching over to SS wool.
Since this will be the first use of this material, I have to guess at how
tight to stuff the filter housing.  It appears the I added too much because
the pressure is now at 400mT.  I will remove some of the material and check
it when kim finishes her run this afternoon.

>>> 'tylan11' problem from evan -- Wed Jun 21 16:58:13 1989 <<<

problem: high process pressure
cause: gate valve was not opening all the way
solution: gate valve was removed and serviced.  It looked quite clean.
I found an air leak in the actuator air hose caused from rubbing on vibrating
pump.  It may be that the gate valve was not operating at its full stroke.
The internal linkage was binding at the in & out extremes. I lubed it and it
The process pressure was checked with 120 sccm SiH4 and 1 sccm PH3.  The
pressure was 280 mTorr.
Tom will be doing a coating run this evening.  Parrish will check/change the pump oil in the morning.
tylan11 is up.

>>> 'tylan11' problem from jimmoon -- Wed Jun 21 17:36:06 1989 <<<

Fails leak check repeatedly, both in the deposition program (SDOPOLYG)
and the standby program.

>>> 'tylan11' problem from evan -- Thu Jun 22 09:26:41 1989 <<<

Gate valve is being switch for one that works consistantly.  Parrish
will still be changing the pump oil.  Tom will have to do a coating run.
tylan11 should be up late this afternoon.

>>> 'tylan11' problem from bob -- Thu Jun 22 14:51:08 1989 <<<

The tail piece of tylan11 is cracked and the tube wil have to be pulled
and repaired. It is cooling down and will be pulled in the morning and
driven to our quartz vendor for repair. We will try and have it back
and running by Monday, June 26th.
bob

>>> 'tylan11' problem from evan -- Fri Jun 23 13:02:38 1989 <<<

The poly tube is being repaired and will return Monday morning.  It will
be installed in the afternoon.

>>> 'tylan11' problem from evan -- Mon Jun 26 09:00:02 1989 <<<

The poly tube crack will require move extensive repair.  It will not be completed until tomorrow. tylan11 will not be up until wednesday at the soonest.

>>> 'tylan11' problem from evan -- Tue Jun 27 16:11:48 1989 <<<

The repaired tube has been installed.  The base pressure is 13mTorr and ROR
is 25mTorr/min.  I will be checking on the high ROR. Tom will be doing a
coating run.  tylan11 should be up in the morning.

>>> 'tylan11' problem from bob -- Wed Jun 28 13:01:08 1989 <<<

Problem: tylan11 has higher than normal ROR
Cause: ??
Solution: So far the problem has not been isolated however
	  canilteever rods have been replaced with open ends
	  precluding a virtual leak from the rods. In
	  addition the seals around these rods were lubed
	  with vacuum grease to allow the door to slide
	  easily and therefore position easily on closing.
	  Additional work is proceeding on the tailpiece of
	  the tube.

>>> 'tylan11' problem from evan -- Wed Jun 28 16:56:29 1989 <<<

The tube outlet connector was modified by parrish and is working now.
bob replaced the door face seal and reset the cantalever seals.  The
base pressure is now 8 mTorr.  The ROR is still about 12 mTorr/min.
Tom is doing a 1/2 hour test run tonight.  The results will be evaluated
first thing in the morning.

>>> 'tylan11' problem from evan -- Thu Jun 29 17:04:43 1989 <<<

tylan11 still having ROR and process pressures that are too high.
It has been returned to operational status for this evening. 
Work will continue tomorrow to try to find the missing leak.
tylan11 is up with above caveats.

>>> 'tylan11' problem from bob -- Thu Jun 29 17:01:34 1989 <<<

Problem: Higher than noraml operating pressure. 330-350 instead of
         280-300 mtorr.
Cause:   To be determined

Solution: So far we have not learned the cause. The deposition rate
          is proportionally higher ie. 44 angstroms/minute instead
          of 30-35 ang/min. The quality of the poly looks good. tylan11
	  is up for use. Users should note the rate.

>>> 'tylan11' problem from evan -- Fri Jun 30 17:00:53 1989 <<<

The tylan11 baratron was replaced with a rebuilt spare.  The old one will be sent out for repair/calibration.
tylan11 is still up for the weekend with noted dep rates.

>>> 'tylan11' problem from tom -- Tue Jul 11 17:45:50 1989 <<<

Heaters not firing. I reset the SCR board several times and still no dice.
I have wafers in there so DON'T RUN ANY NASTY GAS please.
The other boards look ok, they are firing just fine.

>>> 'tylan11' problem from evan -- Wed Jul 12 13:58:04 1989 <<<

problem: tube reported as not firing
cause: unknown
solution: tom had reset breaker but says it was still not firing.
I found the tube firing and temp. stable when I checked at 8:10.
The base pressure seemed high so I checked calibration of baratron
and it had drifted 25 mTorr.  Re-set it back to normal.  ROR seemed to
get worse as several leak tests were run.  I cleaned the door seal and
visually alligned the door a bit.  This corrected the creeping up. After
N2 purge during lunch, the base pressure was < 10 mTorr and ROR at 11mT/min.
A quick SDOPOLYG showed a process pressure at 355 mTorr.

tylan11 is up

>>> 'tylan11' problem from evan -- Fri Jul 14 08:12:26 1989 <<<

tylan11, tylan12, and tylan16 will be down for a silane cylinder change this morning.

>>> 'tylan11' problem from evan -- Fri Jul 14 09:41:53 1989 <<<

A new cylinder of silane has been installed.  A reminder to users: The
tylan16 readout on the tycom shows the percent of silane remaining in the
cylinder.  This is useful to monitor before doing long runs or if flows 
are erratic during a run.  Please report any low readings immediatly
because the excess flow shutoff valve may have tripped.
thank you

>>> 'tylan11' problem from moazzami -- Fri Jul 14 10:25:44 1989 <<<

Failed leak test when running standby program.
Pressure during step 40 (pump down) never went below ~70mT.
Problem with the vacuum pump?

>>> 'tylan11' problem from evan -- Fri Jul 14 16:42:17 1989 <<<

Door seal is failing during long n2 purges. tylan11 is failing leak tests.
tylan11 is down for the weekend.

>>> 'tylan11' problem from evan -- Tue Jul 18 15:19:21 1989 <<<

Problem: variable ROR
Cause: bad compression joint at outlet tube
solution: checked manifold with hld and found it tight. Inspection of
compression fitting showed a few more small quartz chips.  The manifold
assembly was moved to provide better alignment of the bellows. This should
reduce the strain on the quartz during pumpdown and vent cycles. Replaced
o-ring and reassembled.  The hld showed He appearent leaks but with slow
rise and fall times.  This is possibly due to He leaking through the silicone
and not gross leaks.  The base pressure was 3-5 mTorr and ROR of 6 mTorr/min.
This is normal for this tube so tylan11 is being put back on-line.

>>> 'tylan11' problem from evan -- Wed Jul 19 08:39:24 1989 <<<

Rooney reported a very high process pressure of 540 mTorr. His 
wafer looks fine. A check of throughput using N2 showed nothing unusual.
The base pressure and ROR and good as well. Rooney is doing another
run this morning and I will observe. Perhaps the pressure was noted at
a purge step.

>>> 'tylan11' problem from evan -- Wed Jul 19 17:17:18 1989 <<<

The high process pressure reported was incorrect. 
tylan11 is still up

>>> 'tylan11' problem from bob -- Mon Jul 31 11:52:01 1989 <<<

Problem:  User reports broken top wafer carrier and wafers sticking 
          in boats.

Cause:    ??

Solution: Replaced top of lead wafer carrier. All wafer carriers were
          cleaned and the dummy wafers were dipped by Tom Booth. tylan11
          is in standbye and a ROR will be done after lunch to assure it
          is up for use.

>>> 'tylan11' problem from bob -- Mon Jul 31 15:45:20 1989 <<<

Problem: erratic base pressure

Cause:   qtz chips on tailpiece worked under the o-ring on the 
         ss-qtz transition.

Solution:Disassemble and clean. Used 400 SC sand paper to remove 
         possible scratches is ss. tylan11 is running standye and
         is ready for use. It will be inspected tomorow morning.

>>> 'tylan11' problem from jimmoon -- Tue Aug  1 07:31:18 1989 <<<

tylan11 was in the READY state when I came in.  I attempted
to run PLYSTNBY, but it has failed the leak check twice and
has gone to the backfill step at the end.

>>> 'tylan11' problem from evan -- Tue Aug  1 15:14:23 1989 <<<

problem:failing leak test
cause: bad outlet connection
solution: this is the same compression fitting seal that has caused
alot of trouble.  This time I inserted a 028 o-ring into the bottom
of the fitting to act as a cushion for the quartz tube end. I also
altered the mounting of the exhaust manifold brackets so that there
was more compression of the bellows. I think that the movement of
the sealing o-ring as the bellows expands and contracts(pump/vent cycles)
is one of the reasons for the most recent leak check failures.
After reassembly, I completed 3 full pump/vent cycles & a 15 min n2 purge.
The base pressure was then 12 mTorr and ROR of 6-8 mTorr/min.  
It will only be after the tube has been run a few times that we can see
if this fix will work.
tylan11 is up (please pay close attention to base press/ROR during leak
check. This data helps us to evaluate the tube exhaust system status.)

>>> 'tylan11' problem from parrish -- Thu Aug  3 09:47:47 1989 <<<

oil filters has been changed

>>> 'tylan11' problem from evan -- Mon Aug  7 16:52:25 1989 <<<

ack'ed end of run (step 135) at 16:50.

>>> 'tylan11' problem from seh -- Mon Aug  7 22:02:01 1989 <<<

Leak rate is very high: 22 to 75 mTorr in one minute.
Run aborted.

>>> 'tylan11' problem from evan -- Tue Aug  8 10:52:09 1989 <<<

problem: failed leak check
cause: dislodged cantilever plug
solution: checked the outlet tube fitting (the usual fix) and it
looked good. While checking the door seal I noticed that one of the
plugs had been dislodged. I replaced it with a new one and the tube 
pumped down again. Base pressure (without pressure controller) 15 mTorr
ROR < 8 mTorr/min.
Users are reminded that these plugs are part of the vacuum seal and
should not be disturbed.

tylan11 is back online

>>> 'tylan11' problem from bob -- Mon Aug 14 17:04:29 1989 <<<

tylan11 is running standby and available for users. Work on bank3
did not interfere with this tubes normal operation. tylan11
is up.

>>> 'tylan11' problem from seh -- Tue Aug 15 17:21:01 1989 <<<

Poly is flaking off the cantilever rods at a significant rate

>>> 'tylan11' problem from bob -- Thu Aug 17 12:02:38 1989 <<<

The Process Sup. will be asked to evaluate the poly deposition
on the boats and cantilever rods of tylan11. If it is excessive,
a cleaning will be scheduled. This note is in response to a
complaint from seh re: flaking poly on the cantilever rods.

>>> 'tylan11' problem from parrish -- Thu Aug 24 08:36:38 1989 <<<

update:  system still down for modification of foreline to accommodate
the new valve. (machine shop is having problems with the welder) system
should be up by the afternoon. any questions contact Bob Hamilton.
.

>>> 'tylan11' problem from evan -- Thu Aug 24 16:56:09 1989 <<<

The new gate valve has been installed by parrish.  The inline filter was
also replaced at this time.  The system is back together and running
PLYSTNBY.  Since the tube was at atmosphere for a period of time, it will
take awhile to purge.  The base pressure after 1 hour purge had dropped
to 45-47 mTorr from 70.  If you want to use this tube tonight, check the
leak test using PLYSTNBY to see if the tube has purged long enough. If not,
please leave it running PLYSTNBY. 
tylan11 is up with above conditions.

>>> 'tylan11' problem from moazzami -- Fri Aug 25 09:30:38 1989 <<<

I checked the leak test during the standby program.
ROR > 40mT/min.
also, the base pressure is >20mT

>>> 'tylan11' problem from evan -- Fri Aug 25 15:40:54 1989 <<<

Exhaust manifold was checked for leaks and all connections were cleaned
and remade.  The leak is gone. Base pressure is < 10 mTorr; ROR < 6 mTorr/min.

tylan11 is up.

>>> 'tylan11' problem from moazzami -- Mon Aug 28 22:09:45 1989 <<<

After about 20 min. of deposition, silane flow stopped.
I wasn't there at the time to abort the run. So, there is a lot
of phosphorus covering the tube, primarily my wafers and
the entrance of the tube.
(Recipe: SDOPOLYG, 90 min. deposition)

>>> 'tylan11' problem from evan -- Tue Aug 29 11:35:46 1989 <<<

problem:silane shut-off
cause:excess flow valve tripped at 240 psi
solution: valve trips due to pulsing of the regulator. A higher value excess
flow valve is being ordered.
The pumpdown was bad due to phosphorus compunds built up near front of tube.
I moved the heat baffles to the front of the tube and ran SUNPOLYA for 12 min.
to coat the tube near the front.  I returned the heat baffles to their former
position.  PLYSTNBY leak test showed a base pressure of 10 mTorr and ROR of
6 mTorr/min.

tylan11 is up for use

>>> 'tylan11' problem from rolfe -- Tue Sep 19 22:17:09 1989 <<<

The load-end shroud looks dark ... a part of the top
piece broke off as I lifted it! (discarded).
This shroud should be replaced.

>>> 'tylan11' problem from bob -- Fri Sep 22 15:58:37 1989 <<<

TThe poly boats were removed and stripped of poly. They are back
in the furnace and the dummy wafers have been reloaded. tylan11
is running standbye and ready for use.

>>> 'tylan11' problem from carlos -- Mon Oct  9 16:02:58 1989 <<<

It can't pass the leak test (even after running the program twice)
(sdopolyg). Please fix it ASAP.


						carlos
.\

>>> 'tylan11' problem from carlos -- Mon Oct  9 17:14:37 1989 <<<

There is a leak in the door. The base presure is 1100 mT.


						Carlos

>>> 'tylan11' problem from bob -- Tue Oct 10 07:07:06 1989 <<<

tylan11 is now passing leak test after the door seal was wiped off.
It appears to be up and running however the 400 mtorr operating
pressure seems high and it is likely time to service the in-line
filter. This will be added to Evans techjob list. Service on the
in-line filter will require extra precaution as the tailpiece
fitting is problematic due to a chip in the quartzware.

>>> 'tylan11' problem from evan -- Mon Oct 16 17:00:58 1989 <<<

Adjusted large door screw to allow top of door to seal better.
Replaced corks.
Replaced ss wool in inline filter with kurly kates.
The throughput improved 100 mTorr.
The base pressure and ROR are still too high but this is most likely due
to having tube at atmosphere a long time and to new filter. I will check it
in the morning after purging in PLSTNBY overnight.
tylan11 should be up by 10:00 tuesday.

>>> 'tylan11' problem from evan -- Tue Oct 17 08:42:16 1989 <<<

tylan11 has had filter servicing and purge completed.
base pressure = 10 mTorr  ROR = 4 mTorr/min.
throughput is good
tylan11 is up and ready to use

>>> 'tylan11' problem from seh -- Thu Oct 19 17:16:41 1989 <<<

The deposition pressure is a little high (355 mTorr).  One of the boats
apparently fell off the cantilever and is sitting in the tube.  I couldn't
retrieve it as it is too far into the tube.  I pushed the cantilever in
as far as possible.  Attempts to reach staff members at home were
unsuccessful.

>>> 'tylan11' problem from bill -- Thu Oct 19 18:54:18 1989 <<<

Found tylan11 open, saw Steve's message so I
HF cleaned one of the long quartz rods from the lindberghs,
retrieved the lost boat to the edge, removed it with the
metal pliers, and replaced it to the cantilever rods -
I left a good inch or two to prevent the problem recurring.

Vacuumed up the poly chips, especially from around the gasket,
loaded and ran the standby program - no problems.

I was running tylan12 during the earthquake - and had the 
same thing happen to one of the LTO boats - it bounced off the 
cantilever rod - but luckily remained hanging on the rod -
so it was no trouble to remove.

Users are cautioned to carefully inspect the position of any of the 
tylan boats - since they may also have been shifted by the quake.

>>> 'tylan11' problem from bob -- Fri Oct 20 09:47:20 1989 <<<

the boat ob tylan11 has been replaced on the cantileever. Tom Booth checked
over the system and it is up and running.

>>> 'tylan11' problem from evan -- Wed Oct 25 11:48:12 1989 <<<

A new cylinder of electronics grade silane has been installed.

>>> 'tylan11' problem from seh -- Fri Oct 27 10:03:55 1989 <<<

The process pressure is high (360 mTorr for SDOPOLYG)

>>> 'tylan11' problem from evan -- Fri Oct 27 14:32:23 1989 <<<

Problem: process pressure reported at 360 mTorr.
Cause: clogging of in-line filter
Solution: replaced Kurly Kate filter elements.
Ran SDOPOLYG and got a process pressure of 343 mTorr after 8 minutes.

A review of comment and problem logs shows that process pressures for
SDOPOLYG going back a year have ranged from 332 mTorr at the lowest (April 28)
with most runs around 350 mTorr.  The only case reported of a pressure of
300 mTorr was for UNDOPED Poly in June 88.  

I think the tylan11 activation message should be changed to reflect a more
reasonable expectation of process pressure.  Also, that > 360 mTorr should be
reported as a problem to indicate the need for a filter change.

tylan11 is up

>>> 'tylan11' problem from bill -- Thu Nov 16 20:15:59 1989 <<<

Filters might need some attention,
pressure at beginning of deposition : ~370 mtorr
pressure at end of 15min deposition : ~350 mtorr

Typical long temperature stabilization - no trouble with run.

>>> 'tylan11' problem from evan -- Tue Nov 21 11:39:55 1989 <<<

problem: reported high process pressure
solution: did a standard throughput check and everything was fine.
checked base pressure and found baratron readout had drifted high.
reset the baratron zero
ran SDOPOLYG...base pressure <10 mTorr...ROR 3mTorr/min. ... process pressure
345mTorr at start.  everything looked good so run was aborted after 5 min.

tylan11 is up

>>> 'tylan11' problem from evan -- Tue Dec  5 11:57:35 1989 <<<

Tube was found cold.  Loaded PLYSTNBY and will check it after lunch.

>>> 'tylan11' problem from evan -- Tue Dec  5 14:49:36 1989 <<<

tylan11 was discovered to be not firing.  It was checked and suffered major
damage.  The cantelevers are snapped off and the liner in many pieces.
tylan11 will be down for a couple days for a rebuild.

>>> 'tylan11' problem from evan -- Wed Dec  6 16:55:30 1989 <<<

The new tube, liner and thermocouple sheath have been installed.  The tube is
under vacuum using the test door plate.  The cantelever parts are due to
arrive Friday. Tomorrow, the boats and baffles will be cleaned and ready to go
in.  

>>> 'tylan11' problem from evan -- Fri Dec  8 12:48:02 1989 <<<

tylan11 is back together. It has new cantelever rods, liner, tube, 1 heat
baffle and 1 boat cover.  The flange and door o-rings and gasket were also
replaced.  It is now running PLYSTNBY and is heating up well.
If it temp stabilizes ok, tom will do a coating run.  If the temp does not
stabilize, he will have to run the calibration program first.
tylan11 should be back up soon.

>>> 'tylan11' problem from tom -- Fri Dec  8 15:45:52 1989 <<<

Rebuilt poly tube stabilized fine. 45 min. coating run went well.
Starting presure was 317 mTorr, ending presure was 311 mTorr.
The program was SDOPOLYG. Tube is up.

>>> 'tylan11' problem from hyeh -- Sat Dec  9 22:55:40 1989 <<<

There are streaks on the wafers and on the boat covers.
We had trouble with the N2 flow.
The vacuum did not work the first time we ran the tube.

>>> 'tylan11' problem from debra -- Wed Dec 13 13:39:46 1989 <<<

When depositing poly in tylan11 the wafers must face the rear
of the tube, otherwise the poly deposited will be streaky and
cloudy.

>>> 'tylan11' problem from evan -- Thu Dec 21 12:17:35 1989 <<<

bank3 will be down for repair of the air line this afternoon.
tylan11 will not be available during this operation.

>>> 'tylan11' problem from evan -- Thu Dec 21 14:27:50 1989 <<<

The air line has been repaired.
tylan11 is up

>>> 'tylan11' problem from evan -- Thu Jan  4 09:56:05 1990 <<<

The pump has failed.  tylan11 will be down until parrish returns (he will returnon monday.

>>> 'tylan11' problem from bob -- Thu Jan  4 11:22:18 1990 <<<

The mechanical pump on tylan11 has failed and will require replacing.
tylan11 will be out of service until Wed. Jan 10th due to this problem.

>>> 'tylan11' problem from bob -- Wed Jan 10 15:32:03 1990 <<<

A rebuilt pump was installed in tylan11 and failed to
produce a good vacuum. The reason will be investigated 1st
thing in the morning. tylan11 remains down
*Do Not Operate*

>>> 'tylan11' problem from parrish -- Thu Jan 11 11:54:54 1990 <<<

problem:   roughing-pump making loud noises

cause:     oil filter clogged in the pump

solution:  removed the pump and cleaned inside module, case and oil
           screen. reinstalled pump system is up .

>>> 'tylan11' problem from evan -- Thu Jan 11 12:13:42 1990 <<<

Tylan11 is back together and running an n2 purge. I will check throughputs
at 13:00. It looks very good right now so I expect it to be up at 13:30.

>>> 'tylan11' problem from evan -- Thu Jan 11 13:50:26 1990 <<<

The pump repair has been completed.
Throughput figures are good. Roughly same as pre-pump failure.
Base pressure = 10 mTorr   ROR = 4 mTorr/min.

tylan11 is up

>>> 'tylan11' problem from weijie -- Thu Jan 25 14:50:50 1990 <<<

SDOPOLYG for 2 hr.  The front end of the boat was darken after
the deposition.

>>> 'tylan11' problem from debra -- Thu Jan 25 16:05:12 1990 <<<

The "dark" deposits are common after running SDOPOLYG.

>>> 'tylan11' problem from field -- Fri Jan 26 11:38:28 1990 <<<

The load-end boat has a cracked rail that extends for 4 or 5 wafers
long and the source-end boat has the final few slots (the closest
to the furnace) inaccessible because of the position of the boats
and the shape of the current wand.

I went ahead with my run but maybe one boat needs replacing and
the boats need repositioning and/or the wand needs to be bent.

>>> 'tylan11' problem from carlos -- Fri Jan 26 22:33:19 1990 <<<

The central glass rod that has the slots for the wafers inside 
the source boat is broken. Both boats have too much poly.

>>> 'tylan11' problem from evan -- Tue Jan 30 11:58:32 1990 <<<

Oil pressure sensors have been installed on the tylan11 motor.  The
low oil pressure alarm is now functional.  
In addition, throughput tests were performed and found to be good.
tylan11 is up

>>> 'tylan11' problem from evan -- Tue Jan 30 12:00:18 1990 <<<

Re-entering problem from carlos.  Boat has broken slot piece.

>>> 'tylan11' problem from bill -- Tue Feb  6 23:50:56 1990 <<<

Loaded SUNPOLYA ( had already done a coating run no problem )
loaded my wafers, closed up tube - and then noticed
the firing lights were not firing.

Checked circuit breaker in the back - it had tripped off.
Tried to reset - no problem - breaker reset and remained in on
position, but still no heaters firing.

Called Bob at home ( I hate waking people up ) who suggested
resetting the DTC card.

I tried this, and then reloaded the PLYSTNBY program - 
but still no firing. Switched circuit breaker on/off a few times -
but still dead.

I unloaded my wafers, and left the tube with N2 flowing, in ready mode
( so no pumping ).

Hope the tube survives...

>>> 'tylan11' problem from evan -- Wed Feb  7 14:00:27 1990 <<<

Problem of not firing related to bad amp board in tylan10.
see tylans problems for details.
tylan11 is up

>>> 'tylan11' problem from cjkim -- Fri Feb  9 09:40:20 1990 <<<

SDOPOLYG for 2hr 30min.  Thickness will be reported later.
We are still short of one dummy wafer in second boat.

>>> 'tylan11' problem from judy -- Fri Feb 16 00:04:31 1990 <<<

Is black deposits on the front of the boat normal?  It looks like there
is a lot to me.

>>> 'tylan11' problem from cjkim -- Sun Feb 18 01:10:01 1990 <<<


SDOPOLYG for 2hrs30min.  Pressure was OK.
Nanopec reads 4200A.

>>> 'tylan11' problem from tang -- Mon Feb 26 11:05:38 1990 <<<

The boats and shrouds are in bad shape. 
There is a  lot of black stuff deposited on
the outside of the outer boat and shroud. The slotted rails
in the boat are broken. 

The inner boat is in a better shape, but not a whole lot better.
Users can still use the inner boat. The outer boat and shroud
must be replaced soon.

>>> 'tylan11' problem from tang -- Mon Feb 26 13:57:18 1990 <<<

After a run of SDOPOLYG for 1hr 15min, the boats get dirtier--more
black stuff deposited on the boats and shrouds--not a pretty sight.

>>> 'tylan11' problem from evan -- Mon Feb 26 16:24:08 1990 <<<

Two sets of new boats have been cleaned and installed.  They need to have
a coating run.  Also, three dummy wafers were too thick to fit into the slots
and should be replaced.  Otherwise...
tylan11 is up

>>> 'tylan11' problem from aplee -- Thu Mar  1 23:47:50 1990 <<<

First boat turns partially black after initial coating run, even worse
after my poly1 deposition. Is this normal?

>>> 'tylan11' problem from bob -- Fri Mar  2 09:35:38 1990 <<<

The front of the wafer carriers on tylan11 show a black deposit
after a doped poly run. The reason for this is not fully understood.
It has never caused a problem in the past and the doped poly comes
out excellent in spite of this.
The condition is normal, tylan11 is up.

>>> 'tylan11' problem from tang -- Tue Mar  6 11:50:09 1990 <<<

SUNPOLYA for 3 hr. thickness was 1.8 um, dep pressure was a bit high--333
instead of 310 expected. The resulting film was very cloudy.

[I earlier misinterpreted that the cloudiness was on my PSG. But cloudiness
remains even after stripping PSG.]

Perhaps injector for tylan11 needs to be look at.

>>> 'tylan11' problem from bob -- Tue Mar  6 15:07:44 1990 <<<

recent poly runs show a granular quality. The tube was last replaced
Dec 6th, 1989 and therefore should be in good condition. We will
He leak check the poly tube and clean the boats and baffles tomorow
and report the results.

>>> 'tylan11' problem from debra -- Wed Mar  7 14:17:44 1990 <<<

My doped poly run done on 1000A oxide test wafers came out
cloudy. I'm not sure at this point if it is the poly or
the surface of the test wafers which caused this. I'll
investigate this and report back.

>>> 'tylan11' problem from debra -- Mon Mar 12 13:22:06 1990 <<<

I feel that the cause of the cloudy poly can mostly be attributed
to the surface of my test wafers. Other users have had better
results than I, but still noticed some haze. Let's keep an eye
on it, but in the meantime the furnace is up.

>>> 'tylan11' problem from evan -- Tue Mar 13 14:09:28 1990 <<<

tylan11 and tylan12 are down for a conversion of PH3 to a 50/50 mix
of SiH4 and PH3.  The lines are being pumped out overnight.  Installation
of the new MFC's and gas cylinder will occur Wednesday a.m.

>>> 'tylan11' problem from evan -- Wed Mar 14 14:50:27 1990 <<<

Installation of MFC and cylinder for PH3/SiH4 mix has been completed.
Dabra will be running another test.
tylan11 is up
From voros Fri Mar 16 10:20:07 1990
Return-Path: <voros>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA21056; Fri, 16 Mar 90 10:19:34 PST
Date: Fri, 16 Mar 90 10:19:34 PST
From: voros (Katalin Voros)
Message-Id: <9003161819.AA21056@argon.berkeley.edu.>
To: tylan11
Subject: poly test
Status: R

From: debra@rubidium.berkeley.edu (Debra Hebert)
To: voros@argon
Subject: Doped poly test
Date: Fri, 16 Mar 90 10:00:26 PST

   Katalin, I measured the test wafers done yesterday in
   tylan11 for sheet rho and thickness.I measured the sheet
   resistance on the manual 4 point probe, and the thickness
   on the nanospec (which is not always repeatable for doped
   poly). The results are as follows:

	 Load end:                   Source end:
    sheet rho = 15.2 ohms/sq       sheet rho = 15.8 ohms/sq
    (average of five readings)     (average of five readings)

     thickness = 4813 A            thickness = 4625 A
     (average of five readings)    (average of five readings)
     thickness uniformity =0.4%    thickness uniformity = 0.8%
--------
I have seen the good looking, shiny poly films.
These are excellent results: ~0.7 milliohm-cm, which is standard.

The poly tube is up.
			Katalin


>>> 'tylan11' problem from voros -- Fri Mar 23 10:03:15 1990 <<<

Please avoid using metal tweezers to load wafers into the poly
boats at all times. Metal residues will invariable be left on the
wafers and cause defects in the grown film.

Use the vacuum wands to load wafers into any furnace.

Thank you for your cooperation.

Katalin

>>> 'tylan11' problem from evan -- Mon Apr  2 16:24:58 1990 <<<

The SiH4 is getting very low.  Our new cylinder is due any day.  When
the change takes place, a new size excess flow shutoff valve will be
installed on the SiH4 and SiH4/Ph3 mix lines.  The tube will be down
for overnight pumping and full day of purge/installation of parts.
Shutdown time will be announced later this week.

>>> 'tylan11' problem from evan -- Tue Apr  3 16:57:36 1990 <<<

tylan11,12 and 16 are out of service until 17:00 wednesday for a change
of SiH4 and addition of excess flow valves on SiH4 and Ph3 lines.

>>> 'tylan11' problem from evan -- Wed Apr  4 16:55:24 1990 <<<

New silane was installed.  The baratron readout was very high...90mTorr
for base pressure.  A check with another gauge showed the tube was actually
at it's normal 10mTorr base pressure.  Baratron was reset and voltages
to gauge recorded.  the +15 supply was at +14.14vdc which might be the
cause of the big drift.  This will be checked if the gauge jumps again.
tylan11 is up

>>> 'tylan11' problem from carlos -- Thu Apr 12 11:32:33 1990 <<<

SDOPOLYG, Tdep = 4hrs, 30 min. The nanospec indicates ~0.98um.
I had to run this program 4 times. The first 3 times it asborted 
because it could not pass the leak test. In the last one, I cleaned 
the O-ring with a paper towel, and it finally passed the leak ckeck.
Most likely, it needs a more thorough clean. 
Also, I noticed during pumpdown, the pressure reaches  -50mT ????

>>> 'tylan11' fix from evan -- Thu Apr 12 15:59:04 1990 <<<

problem: erratic base pressure
cause: bulb in auto/manual switch
solution: I recently added new lamps to the gas panel switches.
For some unknown reason, the lighting of this lamp alters the voltages
to the baratron and shifts the reading by 50-60 mTorr.  I removed the
lamp and everything works fine.

I took this oppurtunity to calibrate the n2 MFC.

base pressure, ROR, and throughput are all good.
tylan11 is up

>>> 'tylan11' problem from evan -- Tue Apr 17 08:54:03 1990 <<<

tylan11 will be down all day Thursday for a bank3 repair.

>>> 'tylan11' problem from evan -- Tue Apr 17 09:14:25 1990 <<<

tylan11 will be down all day Wednesday (not Thursday) for a bank3 repair.

>>> 'tylan11' fix from evan -- Wed Apr 18 16:53:22 1990 <<<

work on bank3 complete for now
tylan11 is up

>>> 'tylan11' problem from nam -- Thu May  3 13:16:50 1990 <<<

Deposition pressure is a little bit higher than recommended by the
activation message, it was 367 mtorr.
 
Ran SDOPOLYG with 1 hr deposition time.

>>> 'tylan11' fix from evan -- Tue May  8 09:48:46 1990 <<<

problem: SDOPOLYG process pressure at 367 mTorr
solution: replaced KK's in inline filter (normal maintenance).
throughput is improved by 30 mTorr.

tylan11 is up

>>> 'tylan11' problem from aplee -- Wed May  9 21:40:11 1990 <<<

Poly particles keep sparking all over the place, including the clean
wafers that were about to go in and my clean room gown. This will
contaminate and ruin the poly layers deposited, I think. My guess
is the poly layer on the tube is too thick and needs to be cleaned.
