>>> 'topgun' problem from rnorman -- Mon Feb 27 16:43:57 1989 <<<

The mechanical pump on the topgun looks like it has a bad first stage.
It takes about 10 mins to pump from Atms to about 3 torr, after that it
makes a different sound and drops like a rock to 100 mtorr. The ROR
at that point is nil.

>>> 'topgun' problem from hebert -- Thu Mar  2 10:34:22 1989 <<<

Problem: Mech pump has a bad first stage.

I'm confused about this. Last Fall we experienced a delay in
getting this system up because the Alcatel pump had a part that
was sent to the East coast for repair. It was my understanding that
the pump was getting a complete rebuild. Now we find that the
first stage is bad, and that the pump needs to be rebuilt again.
Was only the second stage rebuilt last Fall? Was the entire pump
rebuilt and it didn't go back together properly? Or is it that
the pump never got worked on at all. Please clarify.

DH

>>> 'topgun' problem from rnorman -- Thu Mar  2 11:12:01 1989 <<<

From: bob (Robert M. Hamilton)
To: topgun
Subject: mech pump
Date: Thu, 02 Mar 89 08:05:06 PST

It looks like Robert is right about the mechanical pump not
pumping at higher pressures at its rated speed. It does
however work well once it is in the lower pressure regions.
We should work on this pump however I would like to live
with it for a while well more pressing problems are taken
care of. Let me know if this is a problem.

The schedule to repair it will be about 2 weeks.

bob

>>> 'topgun' problem from hebert -- Thu Mar  2 11:46:11 1989 <<<

It's OK to work on the mech pump in the next two weeks. Do you think
that Robert can leak check the chamber with the s-guns in place 
before we lose the mech pump for rebuild?

>>> 'topgun' problem from rnorman -- Thu Mar  2 16:39:52 1989 <<<

I have connected the hld to the topgun and started leak checking the
chamber. So far I have leak checked the top and sides of the chamber
and the only leak I found was the MKS Pressure Controller Nupro valve
leaks across its seal. I will continue ASAP.

>>> 'topgun' problem from hebert -- Fri Mar  3 14:43:41 1989 <<<

Problem: Mech pump needs to be rebuilt.

I checked the archived joblist for the TOPGUN and it says
that the mech pump was rebuilt and ready to install on 12/20/88.
I read this in James P archived joblist. I know that we talked about
this yesterday, but after reading the joblist I'm confused again.
Please clarify. 

>>> 'topgun' problem from hebert -- Mon Mar  6 17:57:53 1989 <<<

The Advanced Energy power supply should be set-up for 0-800V
at 16 amperes.

>>> 'topgun' problem from hebert -- Tue Mar  7 17:08:19 1989 <<<

I am going to need sputtered SiO2 very soon. We need it for
our final dielectric layer and for defining our junction area.
I realize that it is RNorman's #2 priority, but he doesn't 
seen to be able to get more than 4 or 5 hours per week to work
on the system. Is it possible to make this his #1 priorty and
get the system up once and for all? The quality of the work done so
far is very good, but we're proceeding rather slowly. We don't 
have money to pay him overtime for working weekends. 
From bob Thu Mar  9 09:42:04 1989
Received: by argon (5.57/1.16)
	id AA02358; Thu, 9 Mar 89 09:42:01 PST
From: bob (Robert M. Hamilton)
Message-Id: <8903091742.AA02358@argon>
To: hebert
Cc: phillip, rnorman
Subject: topgun water and power
Date: Thu, 09 Mar 89 09:41:58 PST
Status: R

Phil is running in an ICW line dedicated to the topgun. This
should be capable of handling the target cooling without
dificulty. Robert has pointed to some recirc problems on the
randex and there is some question whether the turbo cooling
can be handled on this system. I feel confident that the
system will handle it and that the randex problems are
local. If not we can look into installing the chiller.
bob


>>> 'topgun' problem from hebert -- Thu Mar 16 12:07:04 1989 <<<

Reminder: The mech pump is supposed to be replaced with a good one
          so that we can power up the turbo and continue to He leak
          check. The schedule calls for the mech pump to be replaced
          this week.

Also: The installation of the water lines to the system, which was 
      started last week, needs to be finished.

>>> 'topgun' problem from phillip -- Wed Mar 22 14:47:17 1989 <<<

The 220Vac / 2 pole / 1 phase  receptacle requested by Robert
Norman has been installed in the proximity of the machine.

>>> 'topgun' problem from hebert -- Mon Apr  3 15:25:42 1989 <<<

Is the HEPA filter still scheduled to be installed this week?
Also, when will the Ar gas bottle be installed and the mech pump
replaced?

>>> 'topgun' problem from phillip -- Wed Apr  5 14:38:18 1989 <<<

The hepa installation is on track . The unistrut bracing for the 
actual hepa to rest on is now on place. Evan is providing me with 
assistance.

>>> 'topgun' problem from phillip -- Thu Apr  6 14:55:33 1989 <<<

RE: hepa installation  ;    installed conduit and wiring for hepa
   power and hepa lights. Discovered also that 'cutler-hammer'
circuit breakers are not common. Searching now for breakers for
the hepa and lights.
FYI

>>> 'topgun' problem from phillip -- Tue Apr 11 14:56:15 1989 <<<

HEPA installation progress report:
 The hepa now resides in its position above the topgun area.
It needs ac wiring and lamps installed. It should be finished
by tomorrow afternoon.

>>> 'topgun' problem from phillip -- Wed Apr 12 14:45:24 1989 <<<

The hepa is in and running with 2 exceptions:
 1. The light fixtures will be here in 2-3 weeks. I will
    need space in and around the hepa to mount and wire them.
    The system will probably have to be moved to accomplish this.
 2. The forced air transition is now a machine shop job. No
    e.t.a. for this part. This will also require space to install.

>>> 'topgun' problem from hebert -- Wed Apr 12 14:58:40 1989 <<<

Now that the HEPA is in place, I'd like to get the system up
and tested by the end of this week. We need SiO2 badly for our
circuits. We can't use PECVD/or diode sputtered SiO2 (e.g. from
the Randex because of heating will have an adverse effect on our
circuits). 

I'm aware that the system may have to be moved in the next two
to three weeks to install the lights above the system.

The system still needs a mech pump and argon gas bottle, regulator,
and gas line. Other than that, the power cables need to be connected
to the target(s) and water to the targets and turbo. Installing
these things for the next few weeks until the lights are installed
won't take too much time, and disconnecting them to install the 
lights appears to be more of a hassle than anything. The things
that need to be disconnected to install the lights can probably be
disconnected in half an hour.

Thank you for your consideration.

DH

>>> 'topgun' problem from phillip -- Fri Apr 14 10:41:55 1989 <<<

The hepa transition fitting is installed. The hepa is ducted into the
prefiltered lab make-up air supply. 
The side of the hepa has been painted. 

(Are there any of the labels left that were used for newlab hepa identifi-
 cation?)

>>> 'topgun' problem from parrish -- Fri Apr 14 11:04:17 1989 <<<

problem:    mech-pump slow pumping down

cause:      Worn internal parts in the pump, the exact problem can only be
	    determined be visual inspection of the intrenal pump.
solution:   removed original pump and replaced with a spare.
.

>>> 'topgun' problem from parrish -- Wed Apr 19 15:28:28 1989 <<<

the plates for the topgun pump is on my desk, they need new bushings.

>>> 'topgun' problem from phillip -- Mon Apr 24 14:41:51 1989 <<<

update: installation of the lights on the hepa should be complete
        by tomorrow. awaiting conduit connectors from supplier to
        finish job.

>>> 'topgun' problem from phillip -- Fri Apr 28 07:50:59 1989 <<<

The flourescent lights are completely installed above the machine
adjacent to the hepa. My work on the topgun project is now *complete* .

>>> 'topgun' problem from hebert -- Wed May 17 13:45:57 1989 <<<

Problem: Water leak at Mo target.
         Top lid not sealing properly after loading a wafer.

Solution: Tightened swagelok fittings at Mo target and tigtened
           hose clamps.
          Replaced the L-gasket to the top lid with a new gasket.
          The new gaskat is thinner than the old gasket, making it
easier to align the top plate to the chamber seal area.


The chamber won't rough out now. I checked for water in the chamber, adjusted the
boot retaining clamp, and the chamber still doesn't rough out. I have a 
meeting at 2PM this afternoon. Can RNorman get the system into hi vac
before he leaves today? We'll pick up from there in the morning. A wafer
is on the substrate table in case we get far enough along to try depositing
a film.

>>> 'topgun' problem from phillip -- Wed May 17 14:02:39 1989 <<<

The topgun is connected to taurus as of this writing. A feature
needs be selected and connected to the local taurus box by one
of the topgun personnel.

>>> 'topgun' problem from rnorman -- Thu May 18 06:34:07 1989 <<<

The water solenoid valve was connected to the taurus box. When the 
topgun is enabled the Proteus interlocks will be met. 

>>> 'topgun' problem from rnorman -- Thu May 18 06:37:26 1989 <<<

Problem: Topgun not pumping down.

Cause: For some reason the wire to the roughing solenoid was cut
      in half; like it got wedged inbetween something and got cut,
      like it was pinched.

Solution: Reconnected the roughing solenoid wire and rought out
          topgun. The topgun is now up.
      

>>> 'topgun' problem from rnorman -- Thu May 18 07:04:02 1989 <<<

The oil trap is being baked out until about 9AM. DO NOT OPERATE.

>>> 'topgun' problem from rnorman -- Thu May 18 09:53:26 1989 <<<

Problem: I was going to bake out the oil trap.

Solution: There was no fuse in the variac and no
          was done. I will do it late. The topgun is up.

>>> 'topgun' problem from rnorman -- Thu May 18 09:55:48 1989 <<<

Problem: I was going to bake out the oil trap.

Solution: There was no fuse in the variac, which is connected
          the oil trap heater. So, no baking was done. I replaced
          the fuse and will attemped to do another bake out later.
          The topgun is up.

>>> 'topgun' problem from rnorman -- Fri May 19 09:30:15 1989 <<<

The topgun will be down shortly to bake out the oil trap, install
the RF vacuum interlock switch and to install a view port on the
chamber.

>>> 'topgun' problem from rnorman -- Fri May 19 13:57:32 1989 <<<

I noticed the oil in the clear oil chamber is milky white with a
1/4" brown layer on the top, this is not good and will need to be
changed out. It got worse through the day, more milkier; this
could be a H20 leak or it may have always been this way and I
just noticed it.  The turbo was turned off and the oil will need
to be changed before operation.

>>> 'topgun' problem from rnorman -- Mon May 22 11:04:03 1989 <<<

The turbo oil was removed and replaced with some Hydocarbon oil.
Come to find out we do not have a corrosive series turbo pump, but
a standard TURBOVAC 450 pump. We do not have a N2 purge port into
the turbo, necessary for corrosive series, but we do have a corrosive
series turbo manual. So, when I installed the turbo after the rebuild
I put in Fomblin Y06/6 oil, as the manual said, not HE500 Hydocarbon
oil. The Hydocarbon oil for the topgun turbo is on order, HE500 
PN 98198053 @ $70.00/qt, and will be here tomorrow or Wednesday.

>>> 'topgun' problem from rnorman -- Mon May 22 14:46:38 1989 <<<

The turbo oil was replaced with Hydrocarbon oil and flushed 3 times.
A view port was installed and a ion gauge, the other IG was not turning
on. 

The turbo will run for a couple hours and the Dave will turn off the 
turbo controller and close the foreline valve, and tomorrow I will 
check the oil to see if it is cloudy.

>>> 'topgun' problem from hebert -- Tue May 23 13:19:31 1989 <<<

Problem: Turbo oil needs to be changed.

Can JParrish do this since RNorman is out?

>>> 'topgun' problem from bob -- Tue May 23 14:31:27 1989 <<<

I checked on the topgun on the way through the old lab. I found it in
a very bad mode.

Ion gauge          on (off range on log scale)
HiVac              open
Foreline           open
Turbo              off
Turbo supply power on
System switch in automatic

I switched the system to manual
Turned off the ion gauage
Closed the foreline and HiVac valve
Turned off the turbo supply

The oil on the turbo needs changing. James Parrish cannot
assist in this until latter today if at all as he is working
on iona.

Bob

>>> 'topgun' problem from hebert -- Thu May 25 12:40:12 1989 <<<

The substrate table won't rotate with the RF PWR supply ON.
It rotates OK with the RF OFF.

>>> 'topgun' problem from hebert -- Thu May 25 18:45:04 1989 <<<

I'm having trouble getting the top lid to seal well enough for the
chamber to rough out.

>>> 'topgun' problem from parrish -- Fri May 26 09:55:22 1989 <<<

system down for oil change.

>>> 'topgun' problem from parrish -- Fri May 26 13:05:06 1989 <<<

problem:    oil in the system was not the correct oil

cause:      the manuel gave one type, but the pump was another

solution:   ordered the correct oil(HE=500) and installed it.

>>> 'topgun' problem from hebert -- Fri May 26 14:45:45 1989 <<<

Problem: RF won't ignite plasma. On 5/25 I was able to deposit
SiO2 (10 mTorr Ar; 400 WRF). The dep rate was about 1.2 A/min.
The matching conditions changed throughout the SiO2 deposition.
Today the plasma doesn't ignite and the RF power cable to the
SiO2 target gets hot when trying to tune the power supply.

>>> 'topgun' problem from rnorman -- Wed May 31 15:55:20 1989 <<<

Problem: No Rf plasma.

Cause: The Rf cable to the s-gun was shorted.

Solution: I cut the shorted part of the cable out and replaced the
         connector. Also, the lower part of the chamber, drive motor,
         was grounded with a copper strap. The topgun is up for use.

>>> 'topgun' problem from hebert -- Wed May 31 19:48:08 1989 <<<

I made several attempts at igniting the RF plasma. I increased
the pressure as high as 50 mTorr and I could not get a plasma.
I couldn't manually tune the supply in.

>>> 'topgun' problem from rnorman -- Thu Jun  1 13:13:21 1989 <<<

Problem: Could not ignite a Rf plasma.

Cause: Hard to tune in the plasma with the existing tuner.

Solution: I got a RF plasma, but there was lots of RF interferance
          durring the tuning on the other components; turbo, MKS readout,
          and the Ion Gauge readout was jumping all over.  The topgun
          component cabnet and components will need to be grounded well
          to prevent this; I will begain today.

>>> 'topgun' problem from hebert -- Thu Jun  8 16:50:57 1989 <<<

Problem: High reflected power at RF s-gun.

I high potted the RF s-gun. There is about 20 microamps of
leakage current at the lowest voltage setting when + and -
are at the powered wire (center RF lead) and at ground,
respectively.

The SiO2 target is shorted to ground.

>>> 'topgun' problem from rnorman -- Fri Jun  9 14:44:38 1989 <<<

The RF S-Gun was shorted, so I disassembled it to find the short.
No possitive answer was found; after disassebly and cleaning no
short was measured.  I did not have enough time to finish the
reassembly, so I will finish on monday.  I will finish assembly and
testing at that time.  The topgun was blanked off and pumped down; DC
sputtering is operational, just no RF.

>>> 'topgun' problem from hebert -- Mon Jun 12 19:39:40 1989 <<<

Problem: Short circuit between power in lug connector and ground.

I checked for short between power in and ground at the n-type
feedthrough. A short was found between power in and ground.
I disconnected the power in lead from the target connector and
the power in ground from the target ground. The n-type feedthrough
is OK. The short is as indicated above. Maybe the o-rings that
isolate the power in to the target from ground fail under vacuum.

>>> 'topgun' problem from hebert -- Tue Jun 13 18:00:40 1989 <<<

I couldn't ignite a plasma with the RF power supply. The TUNING
capacitor doesn't seem to have any effect on matching.

>>> 'topgun' problem from hebert -- Wed Jun 14 18:40:58 1989 <<<

RF s-gun intermitently shorts.

I dismantled the gun and found that the teflon insulators are
coated with metal. I am soaking them overnight in acide to remove
the metal.

>>> 'topgun' problem from hebert -- Tue Jun 20 18:30:45 1989 <<<

Problem: RF target (SiO2) shorted.

Solution: I disassembled the gun and cleaned all of the insulators.
          The insulators were coated with metal. I reassembled and
          high potted as I reassembled. The was no short between the
          anode and cathode when the gun was tested on the bench.
          The target now shorts when the chamber pressure gets below
          about 100 Torr. 

          I checked both of the other targets (Mo and Ta-W-Ni), and
          they are both shorted in vacuum. I can't figure this out.
          On the lowest hi pot setting, there is leakage current without
          turning up the voltage when the chamber is under vacuum. Does
          this indicate that the ground shields need to be cleaned?
          Or is leakage normal and used to ignite the plasma? Can 
          RNorman call Varian in the morning and ask them why there is
          a short circuit between the power in lead and the anode, and
          why it might occur under vacuum only?

          I need a connector to that I can connect the RF cable from
          the match network to the RF cable that is connected to the
          SiO2 target.

>>> 'topgun' problem from hebert -- Wed Jun 21 18:40:22 1989 <<<


I haven't determined why we're having RF ignition problems.

The resistance between the anode and cathode is about 900K ohms.
The other two targets have the same resistance between these two points.

Is there a chance that we're having problems because the SiO2 target
isn't bonded? If so, is there a chance that we can run it thru the
CPA to coat the backside with aluminum?

>>> 'topgun' problem from hebert -- Thu Jun 22 17:50:08 1989 <<<


After removing the SiO2 gun I blanked off the chamber and the
chamber wouldn't rough out. This was BEFORE the other guns
were removed to check the type of ground shielding on each gun.

I cleaned the ground shield to the SiO2 gun and I'm ready to 
install it. I need to get the vacuum problem fixed so that I can
try the RF gun again.

>>> 'topgun' problem from bob -- Mon Jun 26 08:21:26 1989 <<<

Dave reports the topgun will nor rough down. James Parrish inspected
the system and a problem in the lower boot gasket was found. Reseating
the boot gasket solved the leak. The topgun is not pumping normally.

>>> 'topgun' problem from hebert -- Tue Jun 27 20:52:04 1989 <<<

Problem: Substrate rotation problems.

        1) The substrate table won't rotate if the RF power
           is above 150W. It will rotate at higher RF power
           levels if one touches the top flange of the motor
           with a strip of metal. This indicates that the
           motor needs an additional ground. For some reason
           if the ground is made to the existing earth ground,
           the table won't rotate.

        2) After sputtering for about 15 minutes, the motor was
           rotating, but the substrate table wasn't. I think that
           the set screw holding the table shaft to the motor shaft
           needs to be tightened.

The matching problem seems to have been solved by placing the matching
network on the top plate and shortening the RF power cable. I get
almost no reflected power when using up to 400 W RF. The cables don't
seem to get warm at this power, either. The plasma ignites easily
without an ignitor if the Ar pressure is greater than 30 mTorr. I wasn't
able to measure the SiO2 dep rate because the wafer flew off of the
table when I was trying different ground configurations to the substrate
rotation motor: the table suddenly increased in speed upon doing this.

>>> 'topgun' problem from rnorman -- Wed Jun 28 08:54:37 1989 <<<

The topgun oil trap is being baked out starting at this time and
will be done in 2 hours, about 11am.

>>> 'topgun' problem from rnorman -- Tue Jul 18 09:12:40 1989 <<<

The topgun oil trap is being baked out; it will be up at 11am.

>>> 'topgun' problem from rnorman -- Tue Jul 18 14:26:30 1989 <<<

The oil trap is done baking out and the TG is up for use.

>>> 'topgun' problem from rnorman -- Tue Jul 18 15:33:16 1989 <<<

Problem: Substraight plate not turning.

Cause: The lower set-screw on the feedthru was loose.

Solution: Tightened down set-screw and tested. I also noticed
          the ion gauge tube doesn't light; most likly it needs
          replaced. And the upper flange "L"-gasket was not on
          properly; causing a major leak. Please be careful when
          closing the top flange, make sure the gasket is not turned
          up; they cost $60 each. I will need to install a new IG.

>>> 'topgun' problem from rnorman -- Tue Jul 18 16:33:07 1989 <<<

The ion gauge tube on the topgun was replaced with no avail. When
I installed the new tube it stayed on for about 1 sec. and then turned
off, and I was not able to turn it back on.  Either we are burning out IG's
or the tube just are not turning on due to the cable or the controller.
I will continue this round robin tomorrow, or when I get some time.

>>> 'topgun' problem from mikeb -- Tue Jul 18 17:45:31 1989 <<<

Robert, could you install proper ground straps to the chamber body,
top and bottom, in order to minimize rf leakage.

Thanks!

>>> 'topgun' problem from rnorman -- Fri Jul 21 16:10:41 1989 <<<


Problem: RFI leakage affecting substrate rotation motor.

Cause: Not grounded properly.

Solution: I took a 1" copper strap and grounded the motor to
          earth ground and also grounded the chamber/frame to
          the same point.  I ran out of strap at that time;
          so lets see how this does before we get some more.
          We have the following components grounded:
          --the Rf matching network
          --the Rf S-Gun
          --the Substrate motor
          --the Chamber/frame

          All are connected to the same point at earth ground.

>>> 'topgun' problem from hebert -- Tue Jul 25 12:51:55 1989 <<<

The chamber won't rough out. The top and bottom plates appear
to be sealed properly.

>>> 'topgun' problem from hebert -- Tue Jul 25 16:53:38 1989 <<<

Problem:
         Chamber won't rough.


Solution: Adjusted top plate boot. System now roughs out.

>>> 'topgun' problem from rnorman -- Wed Jul 26 08:56:05 1989 <<<

The ion gauge controller is not turning on the IG tube; I alreadly
switched the IG and would like to switch the cable to see if that is
the problem.  If neither is the problem the IG controller will need
to be shipped back to Varian for warranty repair.
>>> 'topgun' problem from hebert -- Thu Jul 27 17:28:51 1989 <<< [No Comment]

>>> 'topgun' problem from rnorman -- Fri Jul 28 07:46:04 1989 <<<

No problem reported, it was a [no comment].

>>> 'topgun' problem from rnorman -- Mon Jul 31 16:43:58 1989 <<<

The Ion Gauge Controller is acting real funny.  It would not turn on the 
IG on the topgun, but would turn on the IG on the ultek; and it turned it
on automaticly and I could not turn th gauge off with out turning off power.
This is a new gauge on the topgun so it is not bad.  I switched out the 
IG Controller with the Varian RTA in VLSI, whitch works well on the topgun.
I will have to sent the 843 IG Controller back to Varian for warrenty repair.

>>> 'topgun' problem from hebert -- Tue Aug  1 10:22:33 1989 <<<

Problem: The ionization gauge controller and cable works OK on the
TOPGUN works OK on the SEMI. There must be a vacuum leak in the TOPGUN that
permits the chamber to be pumped out to only the low 10E-3 high 10E-4 Torr
range.

The TOPGUN needs to be leak checked.

>>> 'topgun' problem from rnorman -- Tue Aug  1 14:45:52 1989 <<<

After every type of test on the controller and leak checking the 
topgun it looks like the problem is heat related.  The controller
keeps on turning off IG tubes in the rack, so I pulled it out and
tested it in the open air; the controller looks to be operating fine
in the open air but when it the rack it is not.  I have the IG
controller on a stool in front of the topgun with the IG tube on;
I will test it over night and see what happens.

>>> 'topgun' problem from rnorman -- Wed Aug  2 09:08:35 1989 <<<

After testing the IG controller in the open air over night it works
good.  The problem was heat related while in the cabnet. So, I will
either rearrange the cabet or install a fan to keep the controller cool.

>>> 'topgun' problem from rnorman -- Fri Aug  4 14:59:54 1989 <<<

Problem: IG controller turning off in cabinet.

Solution: I set it out and let it run overnight with no problem;
          so I re-installed it in the cabinet with it pluged in
          another location and using another IG cable. The IG
          controller runs fine.  It may have got feedback on
          the AC or IG cable.   The oil was low in the turbo
          so I filled it. The topgun is up.

>>> 'topgun' problem from rnorman -- Wed Aug  9 09:24:10 1989 <<<

Problem: IG controller turning off after 5 sec.

Cause: After testing out and in the cabinet it was found that because
       the unit was plug into the cabinet outlets, the controller failed.

Solution: The controller was tested by using a different IG cable, another
           IG, out of the cabinet and in the cabinet.  The problem was
           fixed by  using the wall outlet to power the IG controller.
           The controller works well and is up.

>>> 'topgun' problem from hebert -- Wed Aug  9 17:15:09 1989 <<<

The Taurus box intermitently turns OFF. This causes the water to
stop flowing thru the targets when sputtering.

>>> 'topgun' problem from phillip -- Thu Aug 10 07:47:41 1989 <<<

Replaced taurus box per Dave's report.

>>> 'topgun' problem from rnorman -- Thu Aug 31 07:38:50 1989 <<<

The TG will be down until 10am to bake the oil trap.

>>> 'topgun' problem from rnorman -- Fri Sep  1 06:46:15 1989 <<<

Problem: TG down for baking the oil trap.

Solution: The oil trap was baked for 4 hrs and is up for use.

>>> 'topgun' problem from hebert -- Tue Sep 19 14:52:48 1989 <<<

Problem: Base pressure elevated. B/P = 2.0 x 10E-6 Torr. The base
         pressure has been as low as 6.0 x 10E-7 Torr. S-gun mounting
         effects base pressure.

Solution: I replaced the o-rings between the S-gun and the chamber for
         the SiO2 target and the Mo target. There weren't enough
         2-175 o-rings in the lab to replace the o-rings to all three
         s-guns. I cleaned the o-ring groove at the Ta-W-Ni target,
         and installed the "best" of the 3 old o-rings at this S-gun.


The system is up.

>>> 'topgun' problem from hebert -- Tue Sep 19 18:35:49 1989 <<<


The ionization gage doesn't stay on. Maybe the IG controller is
getting too hot in the equiupment rack.

>>> 'topgun' problem from rnorman -- Wed Sep 20 07:44:11 1989 <<<

Problem: IG doesn't stay on.

Cause: Possibly insuffientent vacuum to keep gauge on; could
       not duplicate the problem.

Solution: The IG was turned on with no problem after which the
          tube was degassed.  The base pressure at this time is
          about 8x10-7, the IG may still need to cool down from
          degassing.  

>>> 'topgun' problem from rnorman -- Wed Sep 20 07:48:06 1989 <<<

The foreline pressure to the turbo was at 20mt, which seems a
little high.  The oil trap is being baked out until further
notic or the system is needed.

>>> 'topgun' problem from rnorman -- Wed Sep 20 15:00:31 1989 <<<

Problem: Foreline pressure at 20mt, I thought was a little high.

Solution: Baked out the oil trap for 4 hrs. and the pressure is
          still at 20 mt.  The topgun is up.
>>> 'topgun' problem from hebert -- Wed Sep 20 21:17:20 1989 <<< [No Comment]

>>> 'topgun' problem from rnorman -- Tue Oct  3 07:14:24 1989 <<<

The pressure in the mech pump foreline was very high over 100 mt.
It is normally at or bellow 10mt.  The oil trap will be baked out for
the rest of the day. Also, the mech pump oil is brown and a little
low; aren't we using "white" oil?

>>> 'topgun' problem from parrish -- Mon Oct 16 08:28:40 1989 <<<

mech-pump leaking oil, pump below low oil level, system down

>>> 'topgun' problem from rnorman -- Mon Oct 23 09:44:25 1989 <<<

The turbo was on without the backing pump, and was making a loud high
pitch tone.  I turned off the turbo, which should not have been on for
an extended time without a backing pump.  The turbo should not be started
until the mech pump is installed.

>>> 'topgun' problem from rnorman -- Mon Oct 30 08:55:21 1989 <<<

Problem:  Topgun not roughing down.

Cause: When the mech pump was removed for replacement of
       some seals, some wires were accidently pulled from
       the valve connection. (the pump was very low on oil
       to the point of smelling up the old lab, and needed
       fixed)

Solution: James Parrish removed the pump and replaced some seals.
          After the pump was reinstalled I tested the topgun and
          found the wires disconnected.  The wires to the rough
          valve was reconnected and is up for use.
.

>>> 'topgun' problem from hebert -- Wed Nov  1 09:05:26 1989 <<<

Problem: Bad o-ring at Ta-W-Ni target.

Solution: I replaced the o-ring with a 2-174 Viton o-ring.

>>> 'topgun' problem from hebert -- Mon Nov  6 08:07:40 1989 <<<

Problem: Elevated base pressure.

Please He leak check the system when you get a chance. The base
[ressure is in the low 10 E-6 to high 10 E-7 Torr range. I think that
the system is capable of reaching the low 10E-7 Torr range. Harold Levie
claims that the chamber at one time at a base pressure of 10E-9 Torr.

>>> 'topgun' problem from rnorman -- Tue Nov  7 14:23:36 1989 <<<

Problem: Elevated base pressure, at low 10-6.

Cause: Vaccum leak at target 3, SiO2, o-ring seal to lid.

Solution: The whole system was leak checked after cleaning target
          o-ring and not other leak was found.  The base pressure
          at this time is now 3.5x10-7.  The topgun is up.

>>> 'topgun' problem from hebert -- Thu Nov 16 11:04:47 1989 <<<

Using the substrate rotation table causes a leak to the chamber.
The leak increases with rotation speed. The table is grossly out
of balance when the SPEED exceeds 2.0 on the motor control pot.

>>> 'topgun' problem from hebert -- Thu Nov 16 16:04:27 1989 <<<

Problem: Out of balance substrate rotation table causes chamber leak.

Solution: I pulled the table. One screw was missing from the table to
shaft flange, and one of the table to shaft flange screws was wrong
size. All three table to flange screw holes now have the right sized
screw.

The rotary feedthrough o-ring was compression set. I replaced it.
The spanner nut that holds the feedthrough in place was loose.

I will finish cleaning and assembling in the morning.

>>> 'topgun' problem from rnorman -- Mon Nov 20 09:11:14 1989 <<<

Problem: Loose substraight motor belt.

Solution: Tightened down tension on motor and tested.  There is a
          small leak, probably in the drive motor area, but Dave
          said that it is O.K. and that he can work with it. The
          topgun is up until Hebert says so.

>>> 'topgun' problem from hebert -- Fri Dec  8 08:34:37 1989 <<<

The new Torus 10E S-gun has been installed. The base pressure
is good. I'm waiting for the clamps that hold the adapter ring
in place. 

The water lines and power connect to the new S-gun need to be made.
Since I'm still waiting for the SiO2 target, this can be done
sometime in the next week. 

>>> 'topgun' problem from hebert -- Thu Jan  4 15:26:53 1990 <<<

Problem: New RF gun needs cooling water and biasing.

         The SiO2 target arrived today and I installed it.

         The target needs 3 gallons/minute cooling water.
         
         Lesker will contact me on 1/5 with the bias voltage that
         is needed.

>>> 'topgun' problem from hebert -- Mon Jan  8 08:06:42 1990 <<<

Problem: Film uniformity with existing rotation table is not
         as good as I'd like it to be. At 3.0 spin speed, Mo
         film thickness varies by about 8% across a 100 mm wafer
         when depositing Mo at 400 A/min.

         I'd like to get the other substrate table installed
         (i.e. the one that not only rotates by moves in and
          out along radius at the same time).

>>> 'topgun' problem from hebert -- Wed Jan 10 10:40:30 1990 <<<

I installed the water lines and power cable to the new Torus 10E s-gun.
The plasma ignites and is uniform over the SiO2 target. The problem
is that there is RF leakage from either the chamber or the power
supply that causes all of the electronics in the equipment rack
to be effected when the RF power exceeds 100 W. Reflected power
is only a few watts. RF interference effects the Ar gas valve,
causing it to open and close and the plasma to turn on and off.
The interference also effects the ionization gauge controller,
the shutter control, and the MKS baratron.

>>> 'topgun' problem from hebert -- Tue Jan 16 08:06:39 1990 <<<

I connected the RF matching network to the Torus 10E. Upon
powering up, small sparks arced between the matchning network and
the Varian DC s-gun used for depositing molybdenum. There was
also a burning smell.

>>> 'topgun' problem from rnorman -- Tue Jan 16 14:44:10 1990 <<<

Problem: Small sparks between matching network and s-gun.

Cause: Possibly grounding not well enought.

Solution: Attached grounding cap of new gun securely by installing
          all screws.  Also, ran a breaded ground cable to all
          three guns, as a test.  Turned on RF power and tuned in
          well, then increased power and retuned. The RF power was
          up to 250 watts with no sparks.  There was reflected power
          of 30 watts, Dave said this was  high.  We may pull a RF
          supply and matching network for another system to see if
          it works better.  The topgun is up.

>>> 'topgun' problem from hebert -- Wed Jan 17 15:41:47 1990 <<<

Problem: The Henry 1000D RF power supply fired up to 30 W forward
power then shut down. Since then, it will not power up even
though the "STANDBY" light comes on.

PA GRID and PA VOLT are both zero, and PA FIL is 5.0 VAC.

It looks like the transformers are set for 220-240 VAC, as the
step down is using taps 1 and 3.

The manual states that taps 1 and 2 should be used for 200-215 VAC.
Is this the voltage being used? If so, could this cause the
power supply not to fire up?

>>> 'topgun' problem from rnorman -- Thu Jan 18 12:36:28 1990 <<<

Problem: Report of possible transformer connected wrong.

Solution: Checked out the connection and was correct.  The RF supply
          will not operate, there is no PA voltage.  We may have
          lost the RF tube.  This report is on the RF supply brought
          from the 5th floor, an unused supply.  When I get some time
          I will try to repair it.

>>> 'topgun' problem from hebert -- Thu Jan 18 16:04:14 1990 <<<

Problems: 1) RF leakage effecting electronics in the rack, and
             the electronics of adjacent dep systems in the old lab.
          2) Unable to go above 100 W RF without Ar gas valve closing.
          3) Poor matching using the Ptherm match network/supply.

Solution: I attached new copper ground straps to the lid, side wall,
          and bottom lid. The copper is 1 - 2 inches wide and solder
          tinned at the connections. Previously there was only a
          copper ground strap to the side wall and the substrate
          rotation motor housing. The old copper strip was corroded
          due to a small water leak at the quick disconnect water
          line behind the TOPGUN (just above the copper water pipe).

          I removed paint from the DC s-gun mounting clamps to improve
          the grounding of the s-gun sidewalls to the top lid.

          I was able to deposit SiO2 at 100 A/min using: 500 W forward;
          70 W reflected; 5 mTorr Ar; substrate to target distance
          of about 4 inches. The new ground straps have greatly reduced
          RF leakage from the chamber.

Problem 1 and 2 above are resolved. Problem 3 still exists: I cannot get
a perfecxt match to a 50 ohm dummy load. The best I can get is 150 W
forward and about 70 W reflected. There appears to be a problem with the
matching network or perhaps we have some bad RF cables. The water leak
in the 1/4 in dia water hose behind the TOPGUN still needs to be fixed.

>>> 'topgun' problem from rnorman -- Fri Jan 19 06:39:10 1990 <<<

At this time there is a small H2O leak behind the topgun in a quick-disconnect.
Also, the RF matching network has fairly high reflected power; we either have 
bad cables or the matching network does not work well. 

>>> 'topgun' problem from hebert -- Fri Jan 19 12:04:49 1990 <<<

Problems: 1) High reflected power.
          2) Ionization gauge won't turn on.

Solution to #1: I made new RF cables and the reflected power
          thru the TORUS 10 E is now less than 1% of the
          forward power. At 460 W forward, I had 4 W reflected.

Problem #2 needs to be addressed. I need to put the test IG on
to see if I have a bad ionization gauge on the TOPGUN.

>>> 'topgun' problem from rnorman -- Mon Jan 22 06:12:21 1990 <<<

Problem: IG tube not turning on.

Cause: Most likely the pressure in the chamber was not low enough.

Solution: When we came in on Saturday for the power shutdown I turned on
        the IG with no problem.  The topgun is up.

>>> 'topgun' problem from hebert -- Thu Feb  8 07:08:39 1990 <<<

Problem: Potential measured between the cathode and anode of the
         Torus 10E (SiO2 target) sputter dep gun.

With the power supply OFF and the RF cable disconnected from the gun,
I measure a potential of 350 mV between the cathode and anode when the
city cooling water is in the target but not flowing. When the water is
flowing, the potential drops to about 125 mV (DC). I am able to measure
a DC current between the cathode and anode or about 2 microamperes. When
the water is blown out of the cooling channel of the s-gun, there is
no measurable DC voltage.

Checking for voltage between the incoming copper water pipe and earth ground
shows that there is no potential difference between the copper pipe and
ground. This eliminates the source of the DC voltage from a voltage
being induced somewhere on the copper water pipe. 

I have had inconsistent RF matching results. Last week I found that by
connecting a copper strap from the target anode to earth ground that I
had no RF leakage but reflected power as high as 30% of the forward
power. At that time, if I removed this one grounding strap from the 
target anode, I had a lot of RF leakage but reflected power was low:
about 2% (max) of the forward power. Going with the "no RF leakage"
high reflected power configuration, the SiO2 dep rate was only about
40 A/min. The dep rate was 100 A/min with the "high RF leakage" configuration.
The problem with using the "high RF leakage" configuration is that it
seriously effects the electronics in all equipment racks within about
20 feet of the TOPGUN.

On 2/6/90, I disconnected the target anode grounding strap and for the first
time I had very low RF leakage and low reflected power. I had never observed
this before without this particular ground strap in place. I was able
to keep a RF plasma going at 450 W RF with about 15 W reflected power
for about 15 minutes (with the cooling water circulating thru the target).
After about 15 minutes, the reflected power increased to 90 W and I wasn't
able to improve the RF match. Also, the RF leakage increased at this time.

On 2/7/90 I used the HI POT to check the Torus 10E target. With the cooling
water (city water) in the target, there was a short between the anode
and cathode at 150 VDC (90 microamps leakage current at 150 VDC). With
the cooling water blown out of the target, I was able to apply a bias
of 4000 VDC between the anode and cathode before breakdown. I also HI POTTED
all of the RF cables and the matching network: all of these had breakdown
voltages above 1800 VDC.

It is possible that the city cooling water resistivity varys during the day
and that it is marginal for use as cooling water in the TORUS 10E. The
design of the Torus 10E cooling channel and the path length between the
anode and cathode may be sufficiently short that the resistivity of the
city water is causing shorting between the electrodes. This would effect
RF leakage: the target cooling water tubes at various times are carrying
RF thru the water line. This has been observed to happen on the Gartek
when the coolant resistivity decreases. Also, a similar observation was
made on the SEMI about 1 1/2 years ago: plasma flickered for about
a week, and then plasma wouldn't ignite. Initially it was thought that
the SEMI RF power supply was down, but HI POT test of the powered substrate
table to ground showed a short. The problem with the SEMI at that time
was resolved by changing the M&W coolant, as the glycol resistivity had
decreased.

Solution: The Torus 10E HI POT test indicates that the cooling water is
conductive enough to cause a short in that s-gun. This may explain some
or even all of the inconsistent RF match/leakage problems that I've
observed on this gun in the past weeks. The installation of DI water cooling
(closed loop) or a resin bed should eliminate the cooling water as a
contributor to these problems.

NOTE: I have NOT been able to improve the RF match by blowing the water
out of the target. The reflected power is just as high without cooling
water in the target. The only explanation that I have for this is that
blowing the water out of the target allows a DC potential to be applied
between the anode and cathode, but with RF there is still leakage between
the electrodes due to the cooling channel not being completely dry
and RF conductance being more at the surface of the channels than DC
conductance.

>>> 'topgun' problem from hebert -- Thu Feb  8 10:06:36 1990 <<<

Problem: high reflected power/poor matching.

The matching network output connector is missing 2 of 4 prongs
that make contact to the RF cable center lead. It is an intermittent
open circuit with the RF cable attached. This connect needs tp be
replaced. The Part Number is 74868  UG-58 U. We do not have any stock
on this item. I have pulled the connector and will try to get one
from the Plasma Shop. Otherwise I will have to hard wire the output
cable to the matching network.

>>> 'topgun' problem from hebert -- Thu Feb  8 11:36:51 1990 <<<

Problem: high reflected power.

Solution: I replaced the connector on the output side of the
matching network. I now have reflected power less than 5% of
the forward power up to 450 W. At 500 W, the reflected power
is almost 10% of the forward power. The gas pressure is 5 mTorr.
There is a moderate amount of RF leakage effecting the electronics.
The forward and reflected power readings are from an RF power
meter added to the power cable at the phase mag box. I think that
the RF leakage and interference with the electronics will be
reduced when the resistivity of the cooling water increases
by adding a resin bed.

Any word on when the resin bed will get here?

>>> 'topgun' problem from hebert -- Thu Feb  8 11:41:17 1990 <<<

Problem: RF power meters on the RF generator do not agree with
the in-line RF power meter. The in-line meter agrees pretty well
with the RF meters on the Gartek. I think that the TOPGUN RF
power meters are tweeked and need to be replaced.

>>> 'topgun' problem from hebert -- Tue Feb 27 11:53:39 1990 <<<

I enabled the system at 7:30 AM this morning. Somehow it got
disabled at about 11:40 AM, possibly when the Taurus override
was shut off. I enabled again, and the Taurus box wouldn't
turn on, and the wand states that I had just turned on the TOPGUN.

The danger with this is that the Taurus interlock turns OFF my
target cooling water when the system is disabled. I was sputtering
SiO2 and the cooling water was off because the system had been
disabled.

A new Taurus interlock needs to be installed. I'd prefer to have it
attached to the N2 vent or to the top lid drive motor.

That way I can sputter without losing my cooling water when the
Taurus override is turned off.

I can't operate the system at this time because there is no cooling
water flow/the Taurus box won't turn on.

>>> 'topgun' problem from rnorman -- Tue Feb 27 12:56:31 1990 <<<

Problem: Could not enable topgun.

Solution: Could not duplicate, the taurus box LED turns on.
          I did find the main H2O shutt-off turned off; this
          valve is behind the topgun.  The topgun is up.

 NOTE: I will talk to bob about moving the taurus interlock
       to the vent.
.

>>> 'topgun' problem from rnorman -- Tue Mar  6 06:44:47 1990 <<<

The topgun will be down shortly to move the taurus interlock
from the water to the N2 vent;  give me til 7:30 am.

>>> 'topgun' problem from rnorman -- Tue Mar  6 07:30:20 1990 <<<

Problem: Taurus water interlock could cause damage to targets.

Solution: The interlock was moved to the vent line.  I also
          repaired a water leak on the ultek supply line that was
          leaking on the topgun main grounding connection, a fitting
          was loose.  The topgun is up.

>>> 'topgun' problem from hebert -- Tue Mar  6 09:35:55 1990 <<<

Problem: Substrate table rotary feedthrough wobbles.

James Parrish says that he may have a 1/2 in feedthrough that can
replace the 3/8 in dia feedthrough currently in the chamber.

>>> 'topgun' problem from hebert -- Tue Mar  6 09:37:12 1990 <<<

Problem: N2 vent is slow. It takes about 2 to 3 times longer t
vent the chamber since the Taurus interlock was switched from the
cooling water to N2 vent.

>>> 'topgun' problem from rnorman -- Tue Mar  6 10:52:17 1990 <<<

ProbProblem: N2 vent takes 2-3 times longer.

Cause: The taurus interlock was moved to the Vent or N2 line; the 
       solenoid limits the N2 flow.

Solution: Hebert could increase the N2 pressure to increase N2 flow.
          It may be better as is, there will be less partical contamination
          on wafer.  The topgun is operational.

>>> 'topgun' problem from hebert -- Tue Mar  6 12:01:41 1990 <<<

Problem: The N2 vent solenoid (120V) is hot to the touch. It has a
         1/16 in dia orifice, and the N2 vent line is 0.25 in dia
         tubing. 

Assuming the tube i.d. is 0.15 inches, the cross sectional area of the
0.25 o.d. tube is 0.017 square inches.

The cross sectional area of a 1/16 in orifice is 0.003 inches.

What this means is that at a given N2 line pressure, the vent up
time is about 6 times longer with the orifice solenoid orifice in-line.
Even is the line pressure is doubled, the vent up time is still about
3 times longer than it was.

Is there a solenoid available with a larger orifice? As mentioned,
the solenoid is hot, and I'm not sure that it is supposed to be at
such a high temp.

If a solenoid with a larger orifice is not available, I'd like the other
Taurus interlock option installed: interlock with the hoist UP so that
the chamber can't be entered if the system is not enabled.

In regards to my earlier report on long vent up cycle: I didn't actually
time the vent cycle. It does take too long though. Particulates have NOT
been a problem when venting. 

>>> 'topgun' problem from rnorman -- Tue Mar  6 13:19:12 1990 <<<

Problem: N2 vent too slow.

Cause: Taurus interlock solenoid orifice 1/16".

Solution: The solenoid was replaced with one that has a larger
          orifice size, 1/4".   The topgun is ready for use.

>>> 'topgun' problem from hebert -- Wed Mar 14 14:05:30 1990 <<<

Problem: Substrate rotation feedthrough has excessive eccentricity.

Solution: The feedthrough has been pulled. It will be machined
          with extension rods in place so that it rotates true.

>>> 'topgun' problem from hebert -- Thu Apr 12 11:54:48 1990 <<<

I have been He leak testing the chamber to locate a leak that
prevents the chamber from going below the mid 10E-5 Torr range.
So far the only leak that I've detected is at the Ar Nupro valve.

 I pumped out the Ar gas line to the bottle. The Ar Nupro
valve is leaking. When the Ar Nupro is closed, the leak rate
is high and positiive. When the Ar Nupro is opened, the leak
rate (as indicated by the He leak detector) decreases significantly.

I need either a replacement Nupro valve (VCR fittings) or a Nupro
rebuild kit (and som,eone to rebuild the valve if possible).

>>> 'topgun' problem from hebert -- Thu Apr 12 

The light on the topgun's resin beds has gone out indicating
they need changing. A new 1.2 M/B has been ordered. A 1.2
M/B is rated for about 2000 gallons of EBMUD/UC water
before replacement is needed.


>>> 'topgun' problem from hebert -- Fri Apr 13 15:56:02 1990 <<<

I cleaned the Ar Nupro valve seat. It didn't look dirty. I replaced
the crush seal. The leak is still present after doing this.

>>> 'topgun' problem from rnorman -- Mon Apr 16 08:08:39 1990 <<<

I am leak checking the leaking Nupro valve at this time.

>>> 'topgun' problem from rnorman -- Mon Apr 16 08:13:40 1990 <<<

After leak checking the nupro I found a leak across the valve
seat, by means of the leak detector.  I will replace the seat and
install the nupro , then leak check again.

>>> 'topgun' fix from hebert -- Mon Apr 16 08:51:54 1990 <<<

Problem: Substrate rotation stops above 100 W RF with max torque/speed
set on motor controller.

Solution: Electrically isolating the motor housing from the chamber
          allowed the substrate table to rotate up to 150 W RF.
          Adding a ground strap between the motor controller and earth
          ground permitted rotation up to 200 W RF. Switching the ground
          strap from between the controller and earth ground to between
          the controller and the drive motor housing permits the substrate
          table to rotate up to 500 W RF (i.e. the upper limit of the RF
          power supply).

>>> 'topgun' problem from hebert -- Mon Apr 16 08:56:16 1990 <<<

RNorman is fixing the leak in the Ar Nupro valve. I blanked off the
tube where the Nupro mounts, and there is still a leak. The chamber
pressure rises to over 200 mTorr within a few minutes of closing
the high vac valve. Additional He leak testing is required to locate

the leak.

>>> 'topgun' problem from rnorman -- Mon Apr 16 09:49:00 1990 <<<

The nupro valve seat and gasket was replaced.  It was then leak
checked on the hld and was leak tight.  The nupro was installed
on the topgun and hebert is now leak checking the system for a leak.
He will report his findings.

>>> 'topgun' fix from hebert -- Wed Apr 18 08:32:50 1990 <<<

The leak was found to be at a braze in the water cooling loop
of the xtal monitor. I removed the monitor and blanked off the
hole. The base pressure in the TOPGUN is in the mid 10E-7 Torr 
range this morning. TOPGUN IS UP.
