resinoid blades are p/n 2.187-8A-64RU7-3
>>> 'tempress' problem from phillip -- Fri Jan  6 14:26:57 1989 <<<

P: Saw cuts an 8 mil thick line from a 2.9 mil blade.
   This is way too much for certain cryo group cuts.
S: Replaced warped aluminum spacer with a new stainless
   steel spacer. The saw now makes a 4 mil line from a
   2.9 mil blade. The saw is up for use by normal or
   resinoid blade users.

>>> 'tempress' problem from rolfe -- Tue Jan 10 10:38:10 1989 <<<


Unable to focus on wafer. This is a 2" wafer with Al/Si pattern
which is very easy to see with the naked eye. In the tempress
I am unable to even see fuzzy lines.

>>> 'tempress' problem from vallath -- Wed Jan 11 14:12:19 1989 <<<

The notch seat for the three positions is not as clearly
defined as before.

The focus was ok.

The kerf width was much better than before.  I did not
measure the actual width.
VN

>>> 'tempress' problem from carlos -- Sat Jan 14 13:48:11 1989 <<<

the drain of the tempress next to the randex is making a loud noise.
Is this normal ?

>>> 'tempress' problem from phillip -- Tue Feb  7 14:10:36 1989 <<<

P: Magneton reports saw fails to travel in 'Z' trajectory.
S: Replaced failed microswitch relay (P&B # KRP11AG).
   The saw is again up and working.

>>> 'tempress' problem from magneton -- Tue Feb  7 20:50:23 1989 <<<

Tempress chuck would not move back in after moving out.
This has already been fixed!!

>>> 'tempress' problem from phillip -- Wed Feb  8 13:48:23 1989 <<<

P: Alignment of view window on saw necessary (?).
S: Observed Magneton dice a wafer. The optics need
   no adjustment @ this time. 
  
  (Bob, this job can be removed now from my 'techjob' list.)

>>> 'tempress' problem from magneton -- Wed Feb  8 14:15:08 1989 <<<

es

Saw arm would move only towards user in y-scan.  Would not 
move back in towards the machine.

>>> 'tempress' problem from phillip -- Thu Feb  9 11:43:03 1989 <<<

The saw will be unavailable for use until 2:00pm tody
while repairs to it are affected. Thank you.

>>> 'tempress' problem from phillip -- Thu Feb  9 14:03:34 1989 <<<

P: Air bearing only travels in one direction (out).
S: Replaced def. octal relay socket. This persisting
   problem was not the relay itself as was first
   suspected and replaced.
  The saw is up.

>>> 'tempress' problem from phillip -- Fri Feb 17 13:37:29 1989 <<<

P: Per a verbal report from Tom; lots of water on the floor
   in the tempress saw room.
S: Emptied FULL vacuum trap bottle of H2o . The water came from
   the deck of the saw. Cleaned spill. The saw is up for use
   once again.

>>> 'tempress' problem from magneton -- Mon Feb 20 13:13:47 1989 <<<

slight flood from the tempress is being soaked up.

>>> 'tempress' problem from mikeb -- Thu Feb 23 10:07:38 1989 <<<

There is some flooding occuring during saw use.  There does not seem to be
an excessive amount of water in the machine's drain basin (i.e. the basin is
not overflowing) but some water does end up on the table from somewhere else.

The tempress works fine otherwise and users should go ahead and use it if they
want.

>>> 'tempress' problem from phillip -- Thu Feb 23 13:14:36 1989 <<<

P: Tempress spills h2o when using it.
S: Redirected internal drain hose. This will stop water
   from accumulating on the deck and spilling over. There
   is NO internal leak in this machine.
   Drain tube may have been mislaid during recent internal
   work performed.

>>> 'tempress' problem from dchin -- Wed Mar  8 14:19:26 1989 <<<

The resin blade is broken. The standard blade is on the machine.

>>> 'tempress' problem from phillip -- Thu Mar  9 06:38:48 1989 <<<

There are reserve resonoid blades next to the saw in the bladebox.
David, thank you for reporting this.

>>> 'tempress' problem from magneton -- Fri Mar 10 12:48:30 1989 <<<

I cut silicon on this machine using 0.003 as the set height of 
the blade above the metal substrate.  This seemed to only cut
part way into the wafer.  Is the blade dulled? or broken?
or is the height adjustment bad?

>>> 'tempress' problem from phillip -- Fri Mar 10 14:37:46 1989 <<<

The tempress is (temporarily) up for the weekend.

>>> 'tempress' problem from phillip -- Mon Mar 13 07:10:35 1989 <<<

The tempress saw will be DOWN until 10:00am today for repairs.

>>> 'tempress' problem from phillip -- Mon Mar 13 11:21:19 1989 <<<

P: Tempress leaking air and spilling recirc water when enabled.
S: Replumbed saw such that constantly running utilities are now
   under solenoid control. The saw is up.

>>> 'tempress' problem from vallath -- Tue Mar 28 11:24:13 1989 <<<

The index is not repeatable for the first few times after
aligning in the y-scan mode.  The blade stops at points close to
but not on the previously aligned point each time I index back and
forth.  This problem is getting worse (has been around for a few
weeks).

The hairline cannot be aligned to the cut .  OUtside adjustment
range.
VN

>>> 'tempress' problem from phillip -- Wed Mar 29 08:54:37 1989 <<<

P: Alignment problems as reported by Vallath
S: Aligned optics. Maintenanced all races,bearings
   and guides dealing with alignment.
   (Val, pls try it now. Let me know what specific
    feature fails while you are using
   

>>> 'tempress' problem from vallath -- Thu Mar 30 13:16:32 1989 <<<

The problem I reported is still present, tho to  a lesser
extent. i.e. after alignment, the first time i move the 
chuck with the index mode, the indexing is not correct.
after realignment to the street and a few more index motions,
the thing seems to settle down.
Vallath

>>> 'tempress' problem from phillip -- Fri Mar 31 08:07:49 1989 <<<

Cannot duplicate Vallath's problem.  Val, please come by & demonstrate.

>>> 'tempress' problem from mikeb -- Thu Apr 27 14:18:20 1989 <<<

Stepping in INDEX mode or WHILE CUTTING is unreliable. The error is
~3 mils and occurs only occasionally, but it accumulates while cutting.
Users should check alignment to their wafer streets after every one or 
two cuts.

This will be a difficult problem to reproduce and fix.  Phil Guillory
said he is aware of it and can describe the problem in more detail.

>>> 'tempress' problem from phillip -- Tue May  2 08:08:08 1989 <<<

P: Saw temporarily operates outside programmable parameters.
S: Could not duplicate problem. Diced 4" wafer with no ill
   effects. Several users since the last time phenomina occured.
   Could not locate source of problem.
   The saw is available for use.

>>> 'tempress' problem from carlos -- Tue May 16 07:19:53 1989 <<<

The cut does not ocurr at the middle line of the microscope.
Also, when the arm which moves the blade is all the way in 
the tempress, the blade makes a loud noise. It seems that something
is touching a gear inside. The blade is OK, but when this happens,
the indexing does not work properly.

>>> 'tempress' problem from phillip -- Tue May 16 15:00:02 1989 <<<

The tempress is being worked on. It can be used , however.
Repair will be complete tomorrow by noon.

>>> 'tempress' problem from phillip -- Wed May 17 14:18:26 1989 <<<

The tempress saw is again available for use.

>>> 'tempress' problem from vallath -- Wed May 17 17:05:17 1989 <<<

The blade installed in the tempress was broken.  I used my own.
Vallath

>>> 'tempress' problem from phillip -- Thu May 18 11:03:03 1989 <<<

P: Saw blade broken.
S: Replaced standard 2.5 mil blade with like type.
   The blade has been dressed.
   The saw is available for use.

>>> 'tempress' problem from cleland -- Tue May 30 14:40:36 1989 <<<

I'm afraid the second-to-last resinoid blade broke while I was using
it. There is still one left. Sorry about that - don't know what
happened.

>>> 'tempress' problem from phillip -- Wed May 31 11:03:10 1989 <<<

Ordered more resinoid blades for tsaw. There is one remaining
until the new ones arrive (within 2 weeks).

>>> 'tempress' problem from phillip -- Tue Jun  6 06:50:58 1989 <<<

Added another diamond blade to user area per Mike Brums' recent mail.
Added 2 resinoid blades to user area near saw. These had been out of
stock and arrived just yesterday afternoon.

>>> 'tempress' problem from phillip -- Wed Jun  7 11:36:34 1989 <<<

After speaking with new lab user Scott S. , He is 
VERY knowledgable about out tempress saw. He showed me
a couple of things I did not know about it. After our
discourse, I felt compelled to qualify him myself.

>>> 'tempress' problem from phillip -- Fri Jun  9 08:19:28 1989 <<<

Placed 2 more resinoid blades in tempress saw area for qualified
users. 

 When using this type of blade, please be certain that the spindle
speed is set to 'LOW 1'.

>>> 'tempress' problem from vallath -- Tue Jun 13 14:50:44 1989 <<<

The vacumm for a 2 in wafer was bad with the old plate, so
phil gave me a new one.  the vacuum is ok now.
vn

>>> 'tempress' problem from bob -- Wed Jun 21 15:08:24 1989 <<<

Problem: Users have had the saw run into the new chuck during intitial
setup of the height.

Cause: It appears that the tempress does not always reset itself when it
is initiated. The chuck is supposed to be lowered ans the horizontal
motion is supposed tp go al the way to the left. It appears the chuck
isn't always dropping and therefore crashes into the blade on set up.

Solution: This is an electronics problem and will be looked into. In the
meantime users can feed the stage 1/2" or so to the right using the 
horizonral motion toggle, realease the toggle and then turn the power off
waiting 10 secnds and then truning it on. If the reset is done correctly
the table will lower and the stage will move hard left. You can then 
proceed. We are looking into a permanent fix.

>>> 'tempress' problem from bob -- Fri Jun 23 09:19:39 1989 <<<

A sign has been made, laminated and posted on the tempress instructing
users to always lower the chuck manualy when they are through and not
rely on the on-off switch to reset this height. This should help prevent
running the table into the blade during setup.

>>> 'tempress' problem from hphlee -- Sat Jul  1 17:07:59 1989 <<<

We are cutting a Si on saphire wafer when the diamond saw appears to be
damaged. The cutting speed is low 6 at that time. We probably should
use a lower speed.
Henry and Jay (under Hsin)

>>> 'tempress' problem from bob -- Mon Jul  3 10:04:36 1989 <<<

A new blade has been installed. It requires dressing before use. The 
next user of the tempress should observe the header file and dress
the blade.

>>> 'tempress' problem from scotts -- Thu Jul  6 10:04:23 1989 <<<

the tempress seems to have an electronic glitch in it, when the auto switpressed periodically the water will not come on.  Of course, water is necessary
for dicing, please check to see that you have water flowing before you make a cut.

It seems that once you have encountered this glitch the only way to begin 
cutting is to power down the saw and then bring it back up again.

>>> 'tempress' problem from jiahua -- Wed Aug  2 16:32:37 1989 <<<

Sometimes the table can't move down when press HEIGHT.

>>> 'tempress' problem from jaytu -- Wed Aug  2 17:17:43 1989 <<<

Tried tempress after jiahua.  Height worked ok.  When I hit auto to start
the dicing, the chuck did not move.

>>> 'tempress' problem from phillip -- Thu Aug  3 14:52:12 1989 <<<

P: Height adjustment o.d. Chuck will not move.
S: Replaced i.c. #C-8 ( 4001 type chip ).
   The saw should be o.k. for use now.

>>> 'tempress' problem from jiahua -- Thu Aug  3 16:08:23 1989 <<<

Flooding!

>>> 'tempress' problem from hoagland -- Thu Aug  3 16:42:09 1989 <<<

I turned off water to the tempress after a user reported flooding.
It appears the drain is plugged.  The standing water was mopped
up, but the saw remains down until Phil can fix it tomorrow.

>>> 'tempress' problem from phillip -- Fri Aug  4 07:49:18 1989 <<<

P: Water coming out of saw.
S: Replaced ruptured d.i. water line.
   Replaced frayed motor drive belt. 
   Cleaned chips and sludge from drain ports.
   The saw is up and available for use.

>>> 'tempress' problem from jsanchez -- Fri Aug  4 13:58:37 1989 <<<

Taurus shut off air pressure to tempress spindle in the middle of a cut.
Phil looked at spindle motor since it would not restart.  It looks and cuts
ok now, and job was finished.
john

>>> 'tempress' problem from mikeb -- Tue Aug  8 10:38:33 1989 <<<

The N2 for the air bearing does not turn off when the Tempress
is disabled, but stays on all the time.

>>> 'tempress' problem from phillip -- Thu Aug 10 11:02:32 1989 <<<

Replaced failed viewscreen illuminator.
The saw is up.

>>> 'tempress' problem from mikeb -- Mon Aug 14 15:18:55 1989 <<<

N2 to tempress doesn't shut off when I disable the saw.

>>> 'tempress' problem from hoagland -- Wed Aug 16 16:58:48 1989 <<<

Problems reported recently with Y-axis motion appear to be
related to binding of a gasket against a utilities tube feeding
the blade.  All signals to the spindle stepper motor are normal
at all times(spindle slide stepper).  The spindle slide is held
against the stepper by a spring, with a 1/2 inch of play. As the
spindle slide moves a slight squeaking sound is made by the edge
of the spindle gasket binding against this tube.  The gasket will
be cut tomorrow following further investigation into the recent
rebuilding of the spindle air bearing and it' installation.
If this was a cause of positioning errors the tempress saw
will be up tomorrow afternoon.

>>> 'tempress' problem from hoagland -- Thu Aug 17 15:31:27 1989 <<<

The gasket problem was corrected today and several adjustments made
on the spindle slide.  A flood in VLSI prevented testing the saw,
but it is available for use.  A dummy wafer was left on the chuck
for the next qualified user to test before mounting their own
samples.  Please note any problems or observations which might
be useful if you use the saw tonight.  Thanks.  Please note-
new blades should arrive tomorrow.

>>> 'tempress' problem from hoagland -- Fri Aug 18 17:36:37 1989 <<<

It was discovered today that the resistor cooling block water line
was completely blocked.  This was disassembled and the wafer fragments
and debris removed to restore normal flow.  The spindle slide lead 
screw was manually rotated to check for binding or slop- none was found.
Repeated stepping without cutting the wafer produced no positioning
errors at all.  More study on the blades influence of chuck slide
position will be done Monday; perhaps play in the slides bearings might
be at fault.  In the meantime the saw is still usable and a new blade
has been left on the saw table for the next user.

>>> 'tempress' problem from hoagland -- Mon Aug 21 10:49:46 1989 <<<

The tempress will be marked up for the time being.  A very slight
error in indexing step distance occurs randomly, but should present
no problem to most users.  This problem seems likely a mechanical
one and will be further investigated in the future as time allows.
Please see Steve if your sample needs finer cutting tolerances than
the saw currently provides.  

>>> 'tempress' problem from vallath -- Thu Aug 24 10:49:05 1989 <<<

The spacer behind the blade is missing.
VN

>>> 'tempress' problem from bob -- Thu Aug 24 11:48:51 1989 <<<

The spacer for the blade on the tempress has been found. The tempress
is up.

>>> 'tempress' problem from vallath -- Thu Aug 24 17:13:50 1989 <<<

1. The cross hair does not stop at the same place when indexing to
a position from above and from below.  The error is maybe 0.2 mils
to 0.5 mils.

2. After several cuts in sequence , the position of the cross hair
and the position of the cut drift apart - I have noticed a drift of
about 0.8 mils after 7 cuts.
Vallath

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:03:31 1989 <<<

this is a test, this is only a test. If this was a real emergency, you
would be advised to tune in to your local radio station for instructions
and information.

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:15:28 1989 <<<

this is a test.. this is only, a test!
>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:31:50 1989 <<< [No Comment]

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:38:57 1989 <<<

this is another test. it uses comments -ep, y to fix?

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:43:05 1989 <<<

yet another test.

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:44:30 1989 <<<

dkfhf test again

>>> 'tempress' problem from ljmassa -- Mon Aug 28 13:48:56 1989 <<<

a test of clear

>>> 'tempress' problem from hoagland -- Mon Aug 28 16:52:52 1989 <<<

To correct the viewscreen cut misalignment problem reported earlier
the viewscreen bracket hold down screws had to be loosened and viewscreen
moved, because the fine reticle adjustment screw was out of range.
The cut and image now line up.  The index problem is still present,
and appears to accumulate with each cut.  Index motions without cuts
are still accurate across the entire wafer.  The saw has been taken
down this afternoon for more tests... it will be available tomorrow
afternoon.

>>> 'tempress' problem from nam -- Wed Aug 30 10:21:53 1989 <<<

Cooling water stopped during dicing and chuck was stucked at the right end
of the machine.  Power off and on restored proper chuck movement.  But
no water still.

>>> 'tempress' problem from hoagland -- Wed Aug 30 11:54:12 1989 <<<

problem:  User reported cooling water for dicing wheel cutoff
          during wafer scribe.

cause:  Unknown.  Water solenoid and lines were inspected and
        no problem found.  DI water line was checked and found
        to be at full pressure- perhaps pressure dropped momentarily.

solution:  Wafer was loaded on chuck and cut proceeded normally
           with cooling water.  The saw is up and available for use-
           Please exercise caution when using indexing mode.

>>> 'tempress' problem from hoagland -- Thu Aug 31 14:04:18 1989 <<<

The indexing problem with the saw remains.  While cleaning the 
index thumbwheel switches damage was done to the leading
number switches.  These switches no longer set reliably and
replacement units have been ordered which should arrive in a week
or so.  In the meantime cuts will have to be made 1 street at a 
time.  I'm very sorry for this inconvenience- the saws index function
will be restored ASAP. 

>>> 'tempress' problem from vallath -- Fri Sep  8 16:24:50 1989 <<<

The forward-backward motion does not work in both the y-scan
and index modes.
Valalth

>>> 'tempress' problem from bob -- Tue Sep 12 11:18:30 1989 <<<

The recent problem Vallath reported along with earlier problems
with the y-indexing appear to be caused from hardening of the 
rubber boot around the spindle. This boot keeps water from entering
the chassis area and replacing it is a big job as the spindle must
be removed. A dry teflon lubricant was used to reduce friction and 
Phil will be consulted regarding its replacement.

>>> 'tempress' problem from vallath -- Tue Sep 12 23:13:02 1989 <<<

Y-motion possible in channel one, although index does not work
right. On channel 2, no y motion is possible at all.
Vallath

>>> 'tempress' problem from phillip -- Wed Sep 13 07:46:23 1989 <<<

Loosened chassis barrrier gasket around spindle.

Thumbwheel switches need be installed to rectify problems.
Switches are on order.

>>> 'tempress' problem from vallath -- Mon Sep 18 21:19:20 1989 <<<

The cross hair cannot line up with the cut - the motion on the
cross hair is out of range.
Vallath

>>> 'tempress' problem from rnorman -- Thu Sep 21 14:34:44 1989 <<<

The problem with the cross hair being lined up will be look into
when the other thumb wheel switch arrives; it should be here in
or about monday.

>>> 'tempress' problem from phillip -- Fri Oct  6 07:38:38 1989 <<<

The thumb wheel switches which are needed for the fix are on order.
Until then, use the tempress at your own risk.

>>> 'tempress' problem from jiahua -- Fri Oct 13 09:51:31 1989 <<<

I am so sorry that I operated the machine without vacuum on, so I think
the machine has been damaged.

>>> 'tempress' problem from phillip -- Fri Oct 13 14:06:45 1989 <<<

A new blade has been installed and dressed.
The street width pots are still on order.

>>> 'tempress' problem from hoagland -- Thu Oct 19 10:27:56 1989 <<<

The tempress saw is down for repairs today.  It will be up again 
ASAP- either late today or early tomorrow.

>>> 'tempress' problem from hoagland -- Thu Oct 19 16:49:34 1989 <<<

The tempress saw will be up tomorrow morning, after all repairs
have been completed and the unit is thoroughly tested.

>>> 'tempress' problem from hoagland -- Fri Oct 20 13:45:24 1989 <<<

The damaged thumbwheel switches on the tempress saw have been replaced
and the machine is up and working.  The previously reported indexing
problem will be further investigated when the current backlog of
users have finished their jobs.  The next step in troubleshooting
will be the attachment of a pulse counter to the indexing stepper
drive to ascertain the count accuracy over repeated steps.  Results
will be posted when available.  

>>> 'tempress' problem from raicu -- Tue Oct 24 13:46:03 1989 <<<

The indexing still is not accurate.

Eugen

>>> 'tempress' problem from hoagland -- Tue Oct 24 15:41:56 1989 <<<

The indexing errors previously noted on the saw remain unaffected
by a recent switch replacement.  Further isolation of this problem
will require determination of either a mechanical or electronic failure.
A pulse counter attached to the index stepper motor drive circuit would
likely reveal faulty step counts, if that is the origin of this problem.
An effort will be made to borrow this test equipment from another shop
so a test can be run ASAP.  Results will be posted when available.

>>> 'tempress' problem from vallath -- Tue Oct 31 16:43:12 1989 <<<

The tempress worked OK for me except for one or two things -
The cross hair could not be aligned to the cut, the alignment
was out of range.
The indexing was sort of OK - i.e. it was not as bad as before, but
it was sometimes slightly off (by 0.5 mils or so for each indexing
step).
There was some sort of vibration of the bladeor something, making
the cut slightly wider than it should have been
Vallath

>>> 'tempress' problem from hoagland -- Thu Nov  2 14:39:56 1989 <<<

Using a pulse counter it was determined that the electronics in the
saw are not responsible for it's indexing problem.  It appears 
most likely the spindle slide is binding and hanging up the bias
spring which tensions the spindle stepper motor.  The slide has been
greased profusely without improvement in positioning accuracy,
and the only apparent recourse would be to completely disassemble
the saw and rebuild the spindle assembly.

One immediate solution to improve indexing accuracy now is to only make
cuts in the OUT direction.  That is, position the blade as far in as possible
over a sample and scribe or dice outward.  This forces the spindle slide to
seat squarely against the stepper motor without spring tension and
minimizes slippage between cuts.  A warning to this effect will be posted
on the saw.  Would users please report if their cuts do not improve
using this recommended procedure.

>>> 'tempress' problem from straub -- Wed Nov  8 13:19:19 1989 <<<

the saw actually cuts about 150um above the reticle line.

>>> 'tempress' problem from bob -- Fri Nov 10 10:21:39 1989 <<<

The reticle line on the tempress has been adjusted by moving the
microscope mounts. There is also a manual lever that allows adjusting
the line. There are several width saw blades used on the tempress
therefore it is impossible to fix this line at a setting that suits
all blades.

>>> 'tempress' problem from vallath -- Wed Nov 29 11:43:15 1989 <<<

Indexing terrible - repeated errors ranging from 10's of microns
to hundreds of microns.
Suggestion:  Throw this one out, and get a new one.
Vallath

>>> 'tempress' problem from wcdanchi -- Wed Dec  6 14:03:03 1989 <<<

I found that the tempress worked OK after a bit of fussing around.
In particular I found that it did not index well until it had been 
warmed up for about 1/2-1 hr.  It initially appeared that the saw indexed
but with the wrong distance, as though there was a problem with an
overall linear scale factor.  Later it settled down and indexed reasonably
well, ie. to a mil or so, which is basically as good as ever.  
There is still some backlash, but again it is at a tolerable level. 
I sawed quartz chips which were bonded to Si backing wafers.  I used
the low 5 speed setting, and a 1.52 mm "in" offset to compensate for 
the blade adapter I am using for the resinoid blades.  So far the saw
seems workable but not great.  More later when I saw up another chip.
  BI
Bill Danchi (wcdanchi@argon) 

>>> 'tempress' problem from wcdanchi -- Thu Dec  7 11:52:15 1989 <<<


Took about 45 mins. to warm up today.  It behaved better than yesterday
in that the indexing settled down and became reasonable a bit quicker.
It also was less flaky in general than yesterday.  I would recommend 
that all users try dicing a test piece both as a way to practice making
the kind of cuts that are needed for the valuable sample, as well as 
a way of allowing the saw to warm up.  It looks to me as though the 
saw is workable at least for a while longer, but a replacement should
be sought when funds become available.

Bill Danchi (wcdanchi@argon)
From vallath@palladium.BERKELEY.EDU Thu Dec  7 12:24:10 1989
Received: by argon (5.57/1.16)
	id AA15151; Thu, 7 Dec 89 12:24:07 PST
Received: by palladium (5.57/1.16)
	id AA08468; Thu, 7 Dec 89 12:23:54 PST
Date: Thu, 7 Dec 89 12:23:54 PST
From: vallath@palladium.berkeley.edu (Vallath Nandakumar)
Message-Id: <8912072023.AA08468@palladium>
To: phillip@palladium, voros@palladium
Subject: Tempress
Status: R


What Bill Danchi has said is what I have seen as well, but
please note that the saw used to be perfect in terms of indexing -
i.e. the dimension was as exact as we wanted it, and there 
was no backlash error.  This is not true even under the best
conditions now.  Also, you never really know when the saw
is warmed up enough.
VN


>>> 'tempress' problem from carlos -- Wed Jan 31 22:51:17 1990 <<<


Level problem and indexing problem => caused the blade to break

Once the height was set to 14 mils below the reference, I proceded
to do the azimuth alignment. The blade did not touch the wafer 
while I did the alignment (as it is supposed to do) near the 
center of the wafer, but once everything was set, I moved the 
blade all the way in to the first cut and several things happened:

	1. The blade touched the chuck and was damaged
	2. The indexing would not go in all the way, and 
	   I could not make the first cut.

Maybe there is a chuck leveling error causing 1. and something wrong
with the index causing 2.

The blade needs to be replaced.

>>> 'tempress' problem from cleland -- Fri Feb  2 19:59:43 1990 <<<

The blade cut is right on the edge of the view screen, out of range of
adjustment with the y-axis fine control. It needs to be moved up to
line up with the crosshair. Otherwise, no problems.

>>> 'tempress' problem from carlos -- Sun Feb  4 15:42:58 1990 <<<

It works fine except that the cut is made about half a screen below 
the cut line.

>>> 'tempress' problem from phillip -- Mon Feb  5 08:10:36 1990 <<<

P: Optical hair line askew relative to blade cut on wafer.
S: Replaced view window scope bulb. Aligned scope to hairline
   cut. The tempress is up.

>>> 'tempress' problem from costello -- Wed Feb  7 16:34:31 1990 <<<

saw cut is above the field of view of the microscope.

>>> 'tempress' problem from phillip -- Thu Feb  8 11:28:18 1990 <<<

P: Microscope hair line 'off' from cut .
S: Refastened loose allen screw (left loose
   from last adjustment....oops!)
The saw is fixed and available for use.

>>> 'tempress' problem from nam -- Fri Feb  9 11:07:59 1990 <<<

blade is broken.

>>> 'tempress' problem from phillip -- Fri Feb  9 11:53:18 1990 <<<

Replaced tempress blade per Nam Kim's report .

>>> 'tempress' problem from liew -- Tue Feb 20 10:10:56 1990 <<<

The saw leaves a milky brown stuff along the cut. 

>>> 'tempress' problem from bob -- Tue Feb 20 11:47:56 1990 <<<

The milky (brown) patches left on liew's wafer were the result of 
insufficient cooling water. The valves that normally control this
flow were in there proper setting and, in fact had been cemented
there with RTV. The main shutoff valve was found only partially
open. It is not used  to regulate flow and should have been fully
open.

The water flow has been reset and the saw is now cutting without
leaving a residue. Phill will recement these valve settings upon
his return. In addition the 8 amp control fuse needs replacing.
It is a 15 amp fuse and the machine requires an 8 amp fuse.
This does not effect users.

The tempress saw is up.

>>> 'tempress' problem from liew -- Tue Feb 20 12:34:56 1990 <<<

Water not draining fast enough and overflowed to table. Solution: I stopped 
for a moment after each cut.

>>> 'tempress' problem from bob -- Wed Feb 21 16:08:33 1990 <<<

ThThe water has been decreased on the tempress. This shold prevent
the tray from overfilling.
The tempress is up.

>>> 'tempress' problem from kim -- Fri Feb 23 13:36:30 1990 <<<

Problem:  Water leaks from underneath the Tempress Saw.

>>> 'tempress' problem from phillip -- Tue Feb 27 06:45:44 1990 <<<

Replaced small orifice drain grates with larger diameter orifice
drain grates. The problem as reported by Kim about excess water
is fixed.

>>> 'tempress' problem from jaytu -- Tue Feb 27 22:58:50 1990 <<<

I experienced the indexing problem when running the saw.  Also, the water
leak reappeared.  No water drained into the bottle at all.

>>> 'tempress' problem from jgtsay -- Wed Feb 28 01:51:10 1990 <<<

what happen to the water?

>>> 'tempress' problem from scotts -- Wed Feb 28 17:58:32 1990 <<<

the index on channel 1 at least does not seem to be self-consistent.  I made several cuts in a sample then scanned (using the index) back across my wafer and
the cuts did not!! line up with the video alignment mark. 

>>> 'tempress' problem from murray -- Sun Mar 18 17:35:36 1990 <<<

	When the saw initially was turned on on I heard a vibration, which disdisappeared after a few moments.  Believing that everything was all
right, I proceeded to scribe my wafer.  After the saw had completed about 
half of the wafer the saw jammed.  Taking the cover off of the blade,
I noticed that the saw was unable to rotate and that the blade was broken.
I turned the instrument off and am reporting the problem.

>>> 'tempress' problem from murray -- Sun Mar 18 17:56:14 1990 <<<

	The tempress siezed half-way thru cutting a wafer. Upon inspection
I found that the saw was stuck (could not turn w/ my hand) and that
the blade appeared to be broken. I had a user named "Carlos" inspect
the saw, and unable to find a simple explanation for the problem, turned
the instrument off and reported the problem.

>>> 'tempress' problem from phillip -- Mon Mar 19 09:06:25 1990 <<<

P: Spindle stalled?
S: Replaced blade. Dressed blade.
   The cause of the problem over the weekend is unknown.

The tempress saw is up and available for use.

>>> 'tempress' problem from jaytu -- Mon Mar 19 22:22:32 1990 <<<

Water did not drain even after 1 cut.  Leaked after every cut.
Also, after rotating by 90 degrees for the cross cuts, the cooling
water started turning brown under the saw.

Alignment problems were not severe until after the 90 degree rotation.
After the rotation, while the saw was in dice mode, the saw made 2 misaligned
cuts in one pass through.

>>> 'tempress' problem from guochun -- Thu Mar 22 23:10:49 1990 <<<

TThe rotator of the blade is jamed! It doesn't rotate AT ALL.
guochun

>>> 'tempress' problem from bob -- Fri Mar 23 12:18:33 1990 <<<

There is a problem with the air bearing spindle of the tempress.
Repairs will take several days. Users will be informed of the progress.

>>> 'tempress' problem from murray -- Sun Mar 25 18:21:04 1990 <<<

Blade on tempress not spinning.

>>> 'tempress' problem from phillip -- Mon Mar 26 06:35:33 1990 <<<

P: The spindle will not spin.
S: The inevitable has happened. The air bearing spindle
   has locked up and cannot be freed. The only way to
   remedy this problem is to replace this $7000.00+ part.


        THE TEMPRESS SAW IS DOWN INDEFINITELY!

>>> 'tempress' problem from phillip -- Tue Mar 27 14:05:41 1990 <<<

P: Spindle not turning.
S: Mechanician Jose Rivera repaired (and aligned)
   air bearing portion of saw. The saw is up and 
   available for use.

>>> 'tempress' problem from hebert -- Wed Mar 28 12:05:10 1990 <<<

The spindle locked up once while cutting a 100mm wafer. Phil loosened
the drive belt. After this, the spindle turned freely. The spindle
drive motor gets very hot.

The tempress is UP.

>>> 'tempress' problem from murray -- Thu Mar 29 14:45:08 1990 <<<

	The blinking light does not come on when the platform is
raised to adjust depth of cut.  Instrument is inoperable in this 
condition.
>>> 'tempress' problem from murray -- Thu Mar 29 14:47:25 1990 <<< [No Comment]

>>> 'tempress' problem from bmartin -- Thu Mar 29 19:08:46 1990 <<<

The diamond saw does not go to the correct cutting depth, and the
y-scan only moves in one direction after the height is adjusted.
>>> 'tempress' problem from xiaohong -- Fri Mar 30 10:23:31 1990 <<< [No Comment]

>>> 'tempress' problem from jgtsay -- Fri Mar 30 13:57:47 1990 <<<

The height adjustment doesn't work. Ref light won't flash.

>>> 'tempress' problem from voros -- Sat Mar 31 11:19:19 1990 <<<

The tempress is down waiting for repair. Pls do not use.

>>> 'tempress' problem from phillip -- Mon Apr  2 10:34:58 1990 <<<

P: Sensor for 'chuck height' not functioning.
S: Replaced resinoid blade with lab standard
   diamond blade. Burnished height sensor contact
   on tail end of air bearing mechanism.
   Installed and dressed new diamond blade.
The tempress is up and available for use.

>>> 'tempress' problem from dchin -- Mon Apr  2 16:57:25 1990 <<<

The optical microscope on the tempress saw could not be focused on wafers.
The features on the wafers could not be seen. When I turned the nob on the
scope to adjust the focus, it slipped.

The saw itself works. Indexing seems OK too.

>>> 'tempress' problem from phillip -- Tue Apr  3 10:33:32 1990 <<<

P: Microscope not easily focused.
S: Repositioned scope illumination bulb. 
   The saw is up and available for use.

>>> 'tempress' problem from bob -- Mon Apr  9 15:19:39 1990 <<<

User reports low water flow/wafers covered with debris.
The water cooling on the tempress has been increased
to sufficient levels. It is likely the control valves for
this are vibrating closed. These will be glued at the
appropriate settings by Phil Guillory tomorow.
The tempress is up for use in the meantime.

>>> 'tempress' fix from phillip -- Wed Apr 11 08:02:31 1990 <<<

P: Cooling water backs up drain and tends to spill
   onto floor.
S: Ran separate internal drain from cooling water
   drain tray to external floor drain. This fixes
   a long standing problem.
The tempress is up and available for use.

>>> 'tempress' problem from liew -- Sat Apr 14 16:16:43 1990 <<<

The saw cut too deep and actually cutting the bottom plate for
a depth setting of 0.0065"

>>> 'tempress' problem from murray -- Sun Apr 15 14:23:34 1990 <<<


	Y-axis control will not work for me.

Matt

>>> 'tempress' fix from phillip -- Mon Apr 16 07:47:31 1990 <<<

P: Y--axis control doesn't work per Murray
S: Replaced damaged blade.
   The y--axis fine adjust knob cannot be turned
   during a cut. This action ruins the blade.
   The saw is up and available for use.

>>> 'tempress' problem from dchin -- Wed Apr 25 01:44:37 1990 <<<

The microscope focus does not work. The knob for adjusting focus slips when
it is turned.

>>> 'tempress' fix from phillip -- Wed Apr 25 08:03:41 1990 <<<

P: Scope optics out of sinc with actual blade cut per dchin.
S: Successfully diced 2" wafer wiith the specs Dave had left
   dialed into saw controls. NO problem with optics was encountered
   during or after (at least) 10 cuts.
No trouble found. The saw is up and available for use.

>>> 'tempress' problem from xiaohong -- Fri May  4 12:32:44 1990 <<<

esWhen press HEIGHT, move chuck up, the REF light doesn't flashes or lits.
The blade on the machine is resinoid blade.

>>> 'tempress' fix from phillip -- Fri May  4 13:21:38 1990 <<<

Will replace broken resinoid (or diamond) cutting wheel
after need verification. The problem with the tempress saw
will be remidied shortly.
.,

>>> 'tempress' problem from xiaohong -- Wed May  9 15:27:42 1990 <<<

When I used resin blade to cut sapphire wafer. The blade alwayse broke.
Today two blades broke. For the 1st blade, I set HEIGHT 0.004 inch and
SPEED low 6, after cut 1/2 line it broke. For the 2nd blade, I tried to
cut sillicon wafer first, it worked well. Then I cut sapphire, this time 
I set HEIGHT 0.003 inch (my wafer is 17 mil thick) , it only cut 2 lines.
Does anybody can help me to solve the problem? Or does anyone has the 
experience to cut sapphire ? Please let me know. Thanks!

Xiaohong

>>> 'tempress' fix from bob -- Mon May 14 11:38:43 1990 <<<

New resin blades have been ordered for the tempress saw. This will solve
a breakage problem when cutting saphire. The tempress is up and available
for use with it's regular blades.
