>>> 'sink9' problem from bob -- Fri Jan  6 15:50:49 1989 <<<

A broken 1/16 inch tube barb located on the Aquamatic Valve has been
replaced. It was plastic and fragile and has been replaced with metal.

>>> 'sink9' problem from galewski -- Fri Jan 13 17:14:00 1989 <<<

Tried resistivity in this supposedly clean sink.  Very slow in comming
up and then stayed around 14.3 Mohm-cm.  While rinsing tank 6 

>>> 'sink9' problem from galewski -- Fri Jan 13 18:24:11 1989 <<<

Was trying to see what the resistivity was by rinsing an empty
tank (#6) when full plenum lock out alarm sounded.  Silenced
it and put a label on the sink.

Why is uknown liquid sitting precariously on the sheild?  Note
saying watch out for concentrated HF.  Second, why it the sink
enabled with no user showing?

>>> 'sink9' problem from bob -- Tue Jan 17 08:22:39 1989 <<<

sink9 had a full plenum lockout. This was caused by the isolation
valve being closed. I closed this valve while repairing a broken
barb and forgot to reopen it. Carl reports the sink was enabled when
he went to use it. This is the result of the taurus overide being on.

>>> 'sink9' problem from bill -- Wed May 10 17:04:03 1989 <<<

Tank 6 drain not working well -
otherwise ok

>>> 'sink9' problem from phillip -- Thu May 11 08:34:11 1989 <<<

No trouble found with tank6 drain.
Performed routine mtce on this sink. All features now
in good working order. sink9 is available for use. 

>>> 'sink9' problem from bob -- Sun Jul 23 09:40:37 1989 <<<

The drain on sink9, tank6 is very, very, slow.

>>> 'sink9' problem from phillip -- Wed Aug  2 08:22:01 1989 <<<

The slow drain on tank6 is o.k. as tested by Steve Holland.

>>> 'sink9' problem from seh -- Thu Aug 24 14:22:49 1989 <<<

This is minor.  The Low Liquid light bulb for the right-hand
side bath is burned out.

>>> 'sink9' problem from phillip -- Fri Aug 25 07:22:28 1989 <<<

Replaced visual alarm indicator per Steve's report.
Sink9 is up.
From bob Fri Oct  6 08:54:10 1989
Received: by argon (5.57/1.16)
	id AA02220; Fri, 6 Oct 89 08:54:06 PDT
From: bob (Robert M. Hamilton)
Message-Id: <8910061554.AA02220@argon>
To: alley
Cc: procestaff, evan, phillip
Subject: DI etch results
Date: Fri, 06 Oct 89 08:54:05 PDT
Status: R

Rod, here is some information regarding our DI:

The DI delivered to the wet process stations is at the
theoretical resistivity for absolute water, 18.2
megohms@20C. It is delivered at ~10C as we keep the DI
storage subambiant to retard bacteria growth. The two most
troublesome impurities we deal with (and so does everyone
else!) are dissolved colloidal silica and Total Organic
Carbon (TOC) neither of which show up as a change in
resistivity. The TOC is been held responsible for masking
etches as it react with HF in our process chemistry to form
Fluorocarbons which are pretty inert. The source of the TOC is
from bacterial growth and we are very careful to control
this with UV and periodic sterilizations therefore it should
be of little concern. Our filtration at the point of use is 
excellent!

Another issue with DI water is its pH. DI water left standing
in air will become acidic due to the dissolution of CO2,
forming carbonic acid. Due to the lack of buffering in ion
free water this can be a couple of numbers with time
yielding pH's as low as 5. In addition there is some OH
equilibrium to be considered. Our resin beds are capable of
OH (hydroxyl) removal however in standing water an equilibrium 
will be established. 

I am interested in your results. Water is a very interesting
binary compound, often bizarre in its behavior.


From: alley (Rod Alley)

    I'd like to check the etch rates of silicon, oxide and
nitride in our DI water.  The latter two shouldn't measurably
etch at all; the first may etch at a slow rate, which is of 
interest in something I'm working on.  What I suggest doing
is the only way I know of to do this; simply having wafers
sit in still DI may not be an adequate test because of 
solubility limits and because one can't count on the purity
of still water for any length of time.  The long time is 
necessary because I expect any etching to be quite slow, 
and it will take a while to see a measurable change in 
thickness.

Thx,
RLA


------- End of Forwarded Message



>>> 'sink9' problem from seh -- Mon Oct  9 10:40:43 1989 <<<

The hose for the DI deck gun is leaking.

>>> 'sink9' problem from bob -- Mon Oct  9 13:54:20 1989 <<<

The deck gun hose on sink9 has been replaced with a new one. sink9
is operational.
