>>> 'sink8' problem from phillip -- Fri Jan  6 08:33:59 1989 <<<

Per a verbal report from Carlos:

Repaired a sticking solenoid (SV17) that was causing 
tank6 not to fill. The problem is allieviated.

>>> 'sink8' problem from carlos -- Mon Jan  9 07:20:10 1989 <<<

The drain of tank 4 does not turn off

>>> 'sink8' problem from jules -- Tue Jan 10 14:12:17 1989 <<<

The top float will sometimes remain stuck in the bottom of its range.

>>> 'sink8' problem from bob -- Tue Jan 10 15:49:26 1989 <<<

Besides sticking floats, sink8 has a minor leak in its drain. It
should be fixed.

>>> 'sink8' problem from galewski -- Fri Jan 13 08:40:24 1989 <<<

Found Piranha (right side) overtemped this morning.  Restarted it and
overtemped again in 1/2 hr.  In other words, not working.

>>> 'sink8' problem from phillip -- Tue Jan 17 14:02:04 1989 <<<

P: Piranha bath on RH side goes to overtemp.
S: ""  "" solution changed. The bath is o.k. now
   to use. Trouble resolved with solution change.

>>> 'sink8' problem from phillip -- Wed Jan 18 07:15:54 1989 <<<

Repaired effluent leak at drain valve. This leak was small
and left no deposit to clean up.

>>> 'sink8' problem from spence -- Wed Jan 18 10:57:45 1989 <<<

sorry, when I said sink 6 in my message I meant sink 8 really.
(cretinously yours) Chris

>>> 'sink8' problem from dcarl -- Wed Jan 25 16:12:00 1989 <<<

The ohm meter seems to be stuch at a reding of 8.3 - no matter
which tank (3 or 6) or what level of DI or what cleanliness of
wafers.

Very frustrating

>>> 'sink8' problem from phillip -- Thu Jan 26 09:47:43 1989 <<<

P: No change in ohmmeter when operate parameters change.
S: On the meter itself, repositioned cell switch from
   cell 2 (unused) to cell 1 . This switch should always
   be left on cell one (on all the sinks). Oscillate between
   tanks3 and 6 for resistivity via 'tank3' and 'tank6' illum-
   inated switches on the front control panel.Questions,see me.

>>> 'sink8' problem from bill -- Thu Jan 26 12:10:21 1989 <<<

Overtemp alarm went off at 12:05 pm 1/26/89
Level about 3/4 full.
Silenced alarm, checked set point = 120 C,
reset heater, temp reads only 118 C.

Left heater on, alarm did not sound again.

>>> 'sink8' problem from aplee -- Thu Jan 26 22:15:10 1989 <<<

I think the ohm meter is wrong, the reading was 8.30 before I started
using it, and it remined around 8.30 throughout the cleaning process.
This never happened before to me. The temperature was ok.

>>> 'sink8' problem from aplee -- Thu Jan 26 22:22:15 1989 <<<

I just read the problems, and have solved the ohm meter problem.

>>> 'sink8' problem from tam -- Wed Feb  8 17:51:39 1989 <<<

There is a hole in the tube connecting the jet sprinkler.  A stream
of water is shooting out constantly and if you try to rinse in the
sink, the stream will hit the prianha bath and causing some splash
and reactions in the bath!  Please fix it as soon as possible.

Nelson Tam

>>> 'sink8' problem from phillip -- Thu Feb  9 09:07:25 1989 <<<

Replaced defective d.i. deck gun tubing. The problem as
reported by Nelson is fixed.

>>> 'sink8' problem from mats -- Fri Feb 10 15:16:03 1989 <<<

There are large amounts of photoresist flakes floating around 
in the HF in the right tank, which stick to the wafers and could
be carried over to contaminate sink 6.

>>> 'sink8' problem from marilyn -- Mon Feb 13 08:59:12 1989 <<<

Problem: large PR flakes in HF tank
Solution: Aspirate HF, then rinse tank and refill with new HF.

>>> 'sink8' problem from jimmoon -- Mon Feb 13 18:59:50 1989 <<<

The piranha bath doesn't want to come up to temperature.  
The OVER TEMP alarm  goes off shortly (within 5 minutes)
of turning the temperature controller on.

>>> 'sink8' problem from phillip -- Tue Feb 14 08:01:28 1989 <<<

Restored tc which was removed from piranha bath. Sink8
is now operating with all features normal.

>>> 'sink8' problem from galewski -- Thu Mar  2 12:14:14 1989 <<<

Legs broken on bottom screen in both tanks 4 and 6.  Makes it
hard to get cassette out with handle.

>>> 'sink8' problem from phillip -- Thu Mar  2 13:27:00 1989 <<<

Repaired 'feet' on tank4 and tank6 screens. The problem as reported
by Carl is fixed.

>>> 'sink8' problem from jchen -- Wed Mar 15 09:40:42 1989 <<<


Someone please be considerate, there is no cassiate in sink8 now and
there are three in sink6. When you bring wafer to sink6 form sink8, 
please remember to take the cassiate back.

>>> 'sink8' problem from mcarey -- Thu Mar 30 16:06:29 1989 <<<

Sink 4 on the right side drains even when the drain button is not
depressed.

>>> 'sink8' problem from phillip -- Fri Mar 31 07:32:07 1989 <<<

Replaced scored plunger assembly (SV13) on tank4 drain control.
The problem as reported by mcarey is fixed.

>>> 'sink8' problem from robin -- Mon Apr  3 08:53:33 1989 <<<

Plenum flush will not work unless button is being actively depressed.
Please set to time out with ASP.

>>> 'sink8' problem from phillip -- Mon Apr  3 11:27:45 1989 <<<

Resst plenum flush timer. The normally tandem aspirator/plenum flush
functions work again in unison.

>>> 'sink8' problem from robin -- Mon Apr 17 10:00:30 1989 <<<

Tank 2 will not drain.

RRR

>>> 'sink8' problem from phillip -- Thu Apr 20 07:38:52 1989 <<<

All tanks1 thru 6 drain appropriately. The problem as reported
by Robin on Monday is gone.

>>> 'sink8' problem from jiahua -- Thu May 11 18:10:49 1989 <<<

Both drydens on sink8 and sink7 are leak.

>>> 'sink8' problem from phillip -- Fri May 12 14:13:25 1989 <<<

Replaced n2 guns on this sink and sink7. Both have n2 dispense 
pressure set at 25 psi.

>>> 'sink8' problem from rolfe -- Mon May 15 11:23:47 1989 <<<

Air gun velocity too low ... almost useless.

>>> 'sink8' problem from phillip -- Mon May 15 11:54:11 1989 <<<

Increased n2 pressure to deck gun per a report from
Rolfe.

>>> 'sink8' problem from yonkoski -- Mon May 22 10:53:26 1989 <<<

tank 4 would not drain.

>>> 'sink8' problem from phillip -- Mon May 22 14:34:35 1989 <<<

Mtced.  SV9 (tank4 drain solenoid) . Tank4 now operates
correctly. Sink8 is available for use.

>>> 'sink8' problem from bob -- Wed May 24 13:25:54 1989 <<<

It appears rinse tank6 has air in the rinse water, an indicator
of a possible diaphragm rupture of the aquamatic valve on this sink.
Phil will check into this.

>>> 'sink8' problem from phillip -- Thu May 25 07:27:59 1989 <<<

P: tank6 d.i. supply apparently aerated. Low resistive value noted.
S: Replaced defective aqua-matic supply valve. This problem is
   now corrected. The tank6 should be microcleaned.
 
   sink8 is fully available for use. 

>>> 'sink8' problem from rwilliam -- Fri Jun  2 10:08:59 1989 <<<

The spin-dryer is being funky...  Seems to overpressure the
compartment, so the door opens every 5 seconds  to vent.
As a result, it never gets any speed, and doesn't really dry the 
wafers off very well.

>>> 'sink8' problem from rwilliam -- Thu Jun 15 15:27:43 1989 <<<


...But not a biggie.  The spin dryer wouldn't stop spinning
at its hey-let's-get-aligned rate: nothing fast, maybe
40 Hz?  Anyhow, I turned the power off, and it stopped (!);
back on, and it stayed quiet.  May have been just a temporary 
wierdness...

>>> 'sink8' problem from phillip -- Fri Jun 16 13:27:57 1989 <<<

Adjusted door seal n2 regulator as to keep the door from opening
midcycle. The spindryer2 should be o.k. now.

>>> 'sink8' problem from rwilliam -- Wed Jun 21 14:23:37 1989 <<<

The spin-dryer is acting up again- either it won't spin
at all, or it'll spin for a second or two before shutting off.

>>> 'sink8' problem from jimmoon -- Fri Jun 23 08:14:13 1989 <<<

The temperature control alarm was sounding for the metal etch
bath when I came in.  The temperature control is now off.

>>> 'sink8' problem from bob -- Fri Jun 23 09:50:54 1989 <<<

I have turned the heater back on for the mretal etchant and so far
everything appears normal. It is possible that the DI water dilution
solenoid is not perfroming correctly and the etchant has concentrated
to a higher boiling point.

>>> 'sink8' problem from bob -- Fri Jun 23 10:05:06 1989 <<<

The heater in sink8-metal etch went off because the OT thermocouple
appears to be open. This tc is built into the protec heater. No
damage of the heater is evidenced and this tc is not user repairable
so the double junction tc has been hooked into the OT circuit and this
will serve us perfectly saving the replacement of a protec heater.

>>> 'sink8' problem from kjordan -- Thu Jul 13 14:51:37 1989 <<<

spin dryer for sink8 won't stop spinning.

>>> 'sink8' problem from martin -- Tue Jul 25 12:19:52 1989 <<<

drain for tank2 is always open ... prevents tank from filling

>>> 'sink8 problem from marilyn -- Wed Jul 26 <<<

metal etch OT light

the tc on the metal etch has been replaced with a new one.



>>> 'sink8' problem from jimmoon -- Thu Jul 27 11:40:58 1989 <<<

The over-temperature alarm has gone off for the metal etch bath.

>>> 'sink8' problem from phillip -- Thu Jul 27 12:57:31 1989 <<<

P: Alarm on metal etch bath.
S: Replaced (again) the tc's . This feature/ as well as the sink/
is up and working.

>>> 'sink8' problem from field -- Mon Jul 31 18:28:41 1989 <<<

no small beaker for H2O2 at sink 8.

>>> 'sink8' problem from marilyn -- Tue Aug  1 09:59:44 1989 <<<

Problem: 100ml beaker for measuring H2O2 missing
Solution: Replaced with a new one

>>> 'sink8' problem from phillip -- Wed Aug  2 08:06:47 1989 <<<

Repaired drain solenoid for tank2 as reported defective by Martin Lim.

>>> 'sink8' problem from gian -- Thu Aug  3 16:40:27 1989 <<<

Sink8, tank 5 is bubbling air into the water.

>>> 'sink8' problem from phillip -- Fri Aug  4 11:08:44 1989 <<<

P: D.I. airiating into tank5.
S: Replaced defective fill valve (aqua-matic).
   Tank5 is fixed. sink8 is up.

>>> 'sink8' problem from wenzel -- Thu Aug 10 13:03:50 1989 <<<

The drain on tank6 sticks some of the time

>>> 'sink8' problem from phillip -- Thu Aug 10 14:46:43 1989 <<<

Replaced plunger assembly in SV13. This alleviates the problem
with the drain as reported by Stuart.

>>> 'sink8' problem from straub -- Sat Aug 26 09:26:07 1989 <<<

the full plenum lockout alarm came on shortly after I started using the sink,
though there doesn't seem to be any problem.  The float level in the back
is about halfway up the tube(which they tell me is okay?) and there is no water
on the floor or anything like that.  The alarm will not go off however, so
I have just silenced it and disabled the sink.

>>> 'sink8' problem from phillip -- Mon Aug 28 07:09:56 1989 <<<

The sink12 solution of today remedied sink8 problem.

>>> 'sink8' problem from liew -- Thu Sep  7 15:26:51 1989 <<<

Spindryer2 continue spinning when it was supposed to have stopped. 
I turned off the power to unload.

>>> 'sink8' problem from field -- Thu Oct 19 15:33:56 1989 <<<

tank 2 not draining.
cassette missing from sink 8.

>>> 'sink8' problem from field -- Fri Oct 27 10:40:30 1989 <<<

tank 4 doesn't drain.  when I hit the drain valve, I hear a
large hissing sound.

>>> 'sink8' problem from phillip -- Fri Oct 27 14:51:13 1989 <<<

Repaired open air line .
Sink8 is available for use.

>>> 'sink8' problem from marilyn -- Mon Nov  6 09:22:17 1989 <<<

Problem: Al bath "overtemp" light is on; the heater is OFF

>>> 'sink8' problem from bob -- Mon Nov  6 11:46:52 1989 <<<

The Al bath on sink8 was reset and appears to be operating correctly.
sink8 is up.

>>> 'sink8' problem from marilyn -- Mon Nov  6 13:34:40 1989 <<<

Problem: Rinse tank 2 does not drain.

>>> 'sink8' problem from bob -- Mon Nov  6 15:21:12 1989 <<<

tank2 drain is again working. There appears to be an intermittent in
the wires on the coil of the solenoid. It will be monitored. sink8
is up.

>>> 'sink8' problem from field -- Wed Nov 15 20:00:29 1989 <<<

tank 3 is leaking badly

>>> 'sink8' problem from phillip -- Thu Nov 16 07:58:40 1989 <<<

Replaced plunger of SV11. Sink8/tank3 drain is fixed.
Sink8 is available for use.

>>> 'sink8' problem from denlinge -- Sat Nov 18 16:04:13 1989 <<<

The drain on tank 1 was always draining- makes it slow to fill.

>>> 'sink8' problem from denlinge -- Sun Nov 19 15:41:31 1989 <<<

The deck around the piranha is warped or melted.  I don't remember ever
seeing that before so I thought I would report it.

>>> 'sink8' problem from robin -- Mon Nov 20 09:41:38 1989 <<<

Problem for piranha bath is more serious than the previous message would
lead one to believe.  The bath is actually in danger of falling into the
sink.  This should be looked into right away.  I am going to turn off the
temp. controller in the meantime, and establish a temporary "dirty" piranha
in sink7 which can be used until sink8 is up.

>>> 'sink8' problem from bob -- Mon Nov 20 11:03:44 1989 <<<

The deck problems reported on sink8 have been fixed. sink8 is up.

>>> 'sink8' problem from jiahua -- Fri Nov 24 18:40:08 1989 <<<

Tank2 drain doesn't work.

>>> 'sink8' problem from phillip -- Thu Nov 30 08:37:41 1989 <<<

No trouble found on the report from Jiahua that tank2 does not work.

Sink8 is up and available for use.

>>> 'sink8' problem from denlinge -- Wed Dec 13 12:13:15 1989 <<<

Tank 1 drain is permanently on.  

>>> 'sink8' problem from phillip -- Thu Dec 14 07:58:32 1989 <<<

Replaced SV7 internal plunger. The problem with tank1 as reported
by D.Delinger is repaired.

>>> 'sink8' problem from galewski -- Sat Dec 30 21:29:30 1989 <<<

Air leak on input to solenoid valve SV2.

>>> 'sink8' problem from galewski -- Mon Jan  1 15:54:40 1990 <<<

Solenoid valve SV13 sticks not allowing drain to tank 4 to close.  Has 
happened to me a few times now.  Can close drain by holding finger on
top of solenoid (vent).

>>> 'sink8' problem from phillip -- Tue Jan  2 08:42:48 1990 <<<

Mtced SV13 (tank4 drain) as reported by Carl.
Sink8 is up.

>>> 'sink8' problem from marilyn -- Wed Jan 10 11:45:39 1990 <<<

Problem: rinse tank 4 is aerating

>>> 'sink8' problem from phillip -- Thu Jan 11 07:10:46 1990 <<<

Replaced aqua-matic p/n 520A Valve.
The problem of tank4 aeriation is fixed.

>>> 'sink8' problem from bob -- Thu Jan 11 07:23:42 1990 <<<

tank4 of sink8 has been maintenanced and should not be used until
the Process Staff has cleaned it.
sink8 is up on all other functions.

>>> 'sink8' problem from marilyn -- Fri Jan 12 15:48:52 1990 <<<

All baths/tanks/cassettes/handles have been RCA 1 & 2 cleaned.

>>> 'sink8' problem from marilyn -- Fri Jan 12 15:49:37 1990 <<<

Problem: tank 2 fills but does not drain

>>> 'sink8' problem from phillip -- Tue Jan 16 07:33:44 1990 <<<

P: tank2 will not drain.
S: Replaced a.full wave bridge, b.solenoid coil, c.plunger
   assembly. The problem as reported by Marilyn is remidied.

>>> 'sink8' problem from denlinge -- Fri Jan 19 00:18:30 1990 <<<

I think sink8 used to have two 2" cassettes, I only see one there now.
I could really use two. 

>>> 'sink8' problem from marilyn -- Fri Jan 19 08:06:51 1990 <<<

Problem: One of the two 2" teflon cassettes for sink8 is missing.
Cause: Someone has not returned it to the cassette drawer by sink8
       when finished with it.
Solution: E-mail has been sent out previously asking the user(s) to
          please return it.  Since this request has met with no
          response, more have been ordered.

>>> 'sink8' problem from saunders -- Fri Jan 26 12:03:36 1990 <<<

low liquid alarm on piranha bath is not working

>>> 'sink8' problem from phillip -- Mon Jan 29 07:32:18 1990 <<<

P: Low Temp Alarms operate only intermittently.
S: Replaced worn 'sensi-flex' electro-pneumatic
   switch bladders on both alarms. The problem
   as reported by Saunders is remidied.
   Sink8 is available for use.

 Debra, 
The Al etch in the left hand bath was adulterated
then removed. A fresh supply of chemical is in order.
thank you.
From phillip Thu Feb  1 08:59:16 1990
To: bob
Subject: sink solenoid upgrade
Cc:  $pf/sink8-p $pf/sink7-p $pf/sink6-p kellogg 


  A salesman by the name of Steve Popolizio from Elect. air tool
is coming by on 2/12/90, Monday . We will be talking/specifying/
ordering  Honeywell solenoids for this project. 
 He is also bringing an updated Elect Air Tool catalog.

(Susan, please arrange parking for him @ the East gate.
 Please apprise me when this is done. Thank you.      )


>>> 'sink8' problem from marilyn -- Tue Feb 20 14:10:23 1990 <<<

Problem: Vacuum wand handle rubs off black onto clean room gloves.
Solution: Replaced handle.

>>> 'sink8' problem from judy -- Tue Mar  6 12:44:50 1990 <<<

light for drain of tank 4 on right side is out.

>>> 'sink8' problem from phillip -- Wed Mar  7 07:10:26 1990 <<<

Replaced lamp (indicator) tank4 drain as reported
by Mike Judy (my neighbor!).

>>> 'sink8' problem from murray -- Mon Mar 12 15:12:52 1990 <<<

The resistivity meter will not climb above 10 for wash tank #6 (right 
side).  The problem may either be bad water, bad meter, or bad tank.

>>> 'sink8' problem from murray -- Wed Mar 14 16:01:36 1990 <<<

Rinse tank 6 still will not show resistivity above 10, even w/o
the cassette.

>>> 'sink8' problem from phillip -- Thu Mar 15 13:56:52 1990 <<<

[P: tank6 resistivity is low.
S: Replaced the tank which is tank6. 
   This problem as reported by murray is fixed.
(Marilyn, can you please 'microclean' this bath?)

>>> 'sink8' problem from galewski -- Thu Mar 15 17:30:46 1990 <<<

SV15 has cracked and leaking output tube.

			-Carl

>>> 'sink8' problem from phillip -- Fri Mar 16 07:24:44 1990 <<<

P: SV15 - cracked air line
   Tank6- low resistivity
S: Repaired air line.
   A replacement tank modification is in the machine shop
   being completed. When this is installed, probably Monday,
   the resistivity will be much better.
   The fix of the tank yesterday did not work.

 Aside from this, sink8 is up and available for use.

>>> 'sink8' problem from aplee -- Wed Mar 21 00:18:41 1990 <<<

One cartridge is contaminated and labelled by the sink.

>>> 'sink8' problem from marilyn -- Wed Mar 21 08:38:10 1990 <<<

Problem: Contaminated cassette
Solution: Removed from circulation until next RCA 1-2 clean of sink8

>>> 'sink8' problem from hebert -- Fri Mar 23 09:14:50 1990 <<<

The Verteq spin drier is not working properly. When the "start"
button is pressed, the door continuously opens and closes.

>>> 'sink8' problem from tom -- Fri Mar 23 10:39:29 1990 <<<

Fou
Found TC out of the Al etch and low level sensor tripped. Temp of 
Al etch was 210C!!! Must have evaporated away. Also I noticed the 
TC's teflon tube is leaking as it seems to have a hole in it. It will 
need to be replaced as well as having the Al etch changed.

>>> 'sink8' problem from phillip -- Fri Mar 23 13:57:37 1990 <<<

Replaced tc in the AL etch.
The problem as reported by Tom is fixed.

>>> 'sink8' problem from murray -- Sun Mar 25 19:20:25 1990 <<<

Resistivity in rinse tank 6 would not go above 8.0 even before I
placed my wafers in. 

>>> 'sink8' problem from phillip -- Mon Mar 26 07:29:41 1990 <<<

P: tank6 will not achieve desired resistivity
   as read on monitor.
S: Replaced tank6 (again). The readings on the
   monitor should be indicative of water quality
   (after the tank is microcleaned).
Sink8 is available for use.

>>> 'sink8' problem from denlinge -- Sat Mar 31 01:10:14 1990 <<<

Drain in tank 5 is permanently on.

>>> 'sink8' problem from phillip -- Mon Apr  2 06:55:30 1990 <<<

P: tank5 drain constantly operated.
S: Replaced plunger in SV15. The problem as
   reported by denlinge is repaired.
Sink8 is up and available for use.

>>> 'sink8' problem from kpister -- Tue Apr 24 13:23:57 1990 <<<

tank 4 seems to be in auto-drain mode.  It will fill, but if you
turn off the water it drains fast.

>>> 'sink8' fix from phillip -- Wed Apr 25 07:16:56 1990 <<<

Mtced SV13 - tank4 drain solenoid. The problem as reported by
kpister is fixed.
sink8 is up.

>>> 'sink8' problem from field -- Fri Apr 27 11:37:38 1990 <<<

tank 5 won't drain

>>> 'sink8' fix from phillip -- Fri Apr 27 13:09:02 1990 <<<

P: Tank5 will not drain.
S: Mtced. solenoid. Removed defective section of air
   supply tubing burnt by hot aspiration. tank5 now drains
   correctly. 
Sink8 is up and available for use.

>>> 'sink8' problem from marilyn -- Mon Apr 30 09:04:40 1990 <<<

Problem: tank 5 fills, but does not drain

>>> 'sink8' problem from field -- Mon Apr 30 12:09:33 1990 <<<

tank 5 still won't drain.

>>> 'sink8' fix from phillip -- Tue May  1 07:47:46 1990 <<<

Repaired open section of tubing causing tank5 to drain properly.
The problem as reported is fixed. Sink8 is again available for use.

>>> 'sink8' problem from judy -- Mon May  7 11:48:52 1990 <<<

light for resistivity of sink 6 is out.

>>> 'sink8' fix from phillip -- Tue May  8 07:05:37 1990 <<<

Replaced bulb in 'tank6 resistivity' selsct switch.
The problem as reported by Mike Judy is fixed.
