>>> 'sink7' problem from marilyn -- Wed Jan  4 14:52:55 1989 <<<

Problem: Deck hose leaks/drips.

>>> 'sink7' problem from phillip -- Fri Jan  6 08:47:45 1989 <<<

P: Deck hose drips.
   Float chamber leaking @ attachment to plenum.

S: Replaced internal parts in Nacom di deck gun.
   Glued chamber attachment at transparent pvc
   part.

   All leaks are now fixed.

>>> 'sink7' problem from tom -- Thu Mar 23 16:06:06 1989 <<<

Resistivity monitor does not appear to be working well.  It seems to
stay at about 3.something all the time.

>>> 'sink7' problem from phillip -- Mon Mar 27 07:20:12 1989 <<<

The recording resistivity is low as reported by Tom.
It is lower on tank6 than on tank3. Before the deck is
removed, can these tanks be cleaned to assure that is
not the problem?

>>> 'sink7' problem from moazzami -- Mon Apr 10 10:28:51 1989 <<<

Phosphoric acid bath temp. does not rise above 132C (It has remained
at that temp. for about 30 min.). Set point is at 155C.

>>> 'sink7' problem from moazzami -- Mon Apr 10 12:56:05 1989 <<<

Full Plenum Lockout!
Phil says the air pressure is too low.

>>> 'sink7' problem from liu -- Fri May 19 20:53:03 1989 <<<

	The heater can not go higher then 25C (set to 150C).

>>> 'sink7' problem from phillip -- Mon May 22 07:30:07 1989 <<<

P: liu reports heater does not rise above room temperature.
S: Found circuit breaker for this function turned off in
   service chase. Restored breaker. Heater is apparently 
   working properly now.
   Sink7 is up.

>>> 'sink7' problem from martin -- Thu Jun 22 15:31:17 1989 <<<

tank 3 drain does not close
tank is not able to fill

>>> 'sink7' problem from phillip -- Tue Jun 27 07:34:35 1989 <<<

Mtced. SV11.    Tank3 drain malfunction as reported by Martin is
repaired. This unit is up.

>>> 'sink7' problem from bill -- Wed Jun 28 11:36:21 1989 <<<

The right heated bath heats VERY slowly
( 15 minutes to go from 132 - 135 C ).

Tom and I checked to insure that the thermocouple was thoroughly
immersed in the tank,
also I removed some liquid from the tank thinking it was 
possibly too full to heat efficiently.

The tank heats fine from room temp to about 120 C,
then it creeps.

If there are 2 heating coils to each bath - possibly one
of them is burned out,- or is 150 C  simply a difficult temp
to reach ?
It didn't used to take this long to heat up.

The tank is still trying to heat -
my wafers can be removed and the tank drained whenever need be.

>>> 'sink7' problem from phillip -- Wed Jun 28 13:31:16 1989 <<<

P: Phosphoric acid bath will not heat.
S: Found solution working at 150dC. The heater is working.
   There is a d.i. water injector into the liquid. Possibly
   the water concentration was  holding down the boiling
   point. The chemicals have been changed.

>>> 'sink7' problem from robin -- Wed Jul  5 10:36:12 1989 <<<

Sink 7 down for heater replacement 10:30 am - 12:00 noon.

>>> 'sink7' problem from phillip -- Wed Jul  5 14:26:17 1989 <<<

P: Sink7 phosphoric bath heater slow to rise to setpoint.
S: Replaced heater with new 'protec' heater. Slightly modified
   reflux apparatus to accomodate heater.

(Robin, there is currently d.i. water in this process chamber.
 It needs evacuation,microcleaning, and new solution before it
 is 'on-line'. There is no marker on the sink itself now that
 shows it having these conditions (down to users).            )

>>> 'sink7' problem from robin -- Wed Jul  5 14:35:05 1989 <<<

The phosphoric acid bath heater has just been replaced.  The bath must
be cleaned before it will be back 'on-line'.  You will be informed
when the phosphoric bath is ready to use (should be up by tomorrow
afternoon).

Robin Rudell

>>> 'sink7' problem from phillip -- Mon Jul 17 11:45:10 1989 <<<

P: Bill reports adverse phosphoric bath behavior.
S: Replaced J-type tc array. It should now be suitable
   for Bill to bathe in.

>>> 'sink7' problem from bill -- Mon Jul 17 13:01:06 1989 <<<

New tc does not read correctly - current reading is erratic 
and from 500 --> 980 !
So much for bathing in sink7.

>>> 'sink7' problem from phillip -- Mon Jul 17 13:47:41 1989 <<<

P: H3PO4 bath tc o.d.
S: Rereplaced tc. Bill's bath is again ready.

>>> 'sink7' problem from bill -- Mon Aug 14 18:48:42 1989 <<<

Right heated bath continually shuts off due to overtemp,

however the tc reads only 140 C - and the setpoint was 150,
I couldn't even reach the setpoint due to the overtemp tripping.
From bob Tue Aug 15 08:07:41 1989
Received: by argon (5.57/1.16)
	id AA23651; Tue, 15 Aug 89 08:07:40 PDT
From: bob (Robert M. Hamilton)
Message-Id: <8908151507.AA23651@argon>
To: bill
Cc: phillip
Subject: Re: sink7 problem 
In-Reply-To: Your message of Mon, 14 Aug 89 18:50:03 -0700.
             <8908150150.AA18396@argon> 
Date: Tue, 15 Aug 89 08:07:38 PDT
Status: RO

FYI
The overtemp board on a sink is a completely separate
function from the temp controller. It is independent with
its own tc and set point. Phil has combined two tc's into
one 1/8" teflon tube. One goes to the temp controller and
the other to the overtemp board. If either tc fails the
baths turn off.

The tc wire is very thin and unfortunately the sink vendor,
Semifab, chose type J wire of which one component is iron
and therefore failure is common.

bob


>>> 'sink7' problem from phillip -- Tue Aug 15 11:52:02 1989 <<<

P: Phosphoric bath not reaching setpoint.
S: Replaced defective set of 'J' type tcs.
   The bath is too dilute with H2o currently
   to reach 150dC. Next user will need to add
   phos. acid.

   The overtemp alarm as reported by Bill is fixed.

>>> 'sink7' problem from field -- Mon Nov 27 11:21:57 1989 <<<

tank 4 has difficulty draining.

>>> 'sink7' problem from phillip -- Thu Nov 30 08:30:24 1989 <<<

P: tank4 drain not working.
S: repaired open air line on SV13.
   Sink7 is up.
From phillip Thu Feb  1 08:59:16 1990
To: bob
Subject: sink solenoid upgrade
Cc:  $pf/sink8-p $pf/sink7-p $pf/sink6-p kellogg 


  A salesman by the name of Steve Popolizio from Elect. air tool
is coming by on 2/12/90, Monday . We will be talking/specifying/
ordering  Honeywell solenoids for this project. 
 He is also bringing an updated Elect Air Tool catalog.

(Susan, please arrange parking for him @ the East gate.
 Please apprise me when this is done. Thank you.      )


>>> 'sink7' problem from marilyn -- Fri Feb  2 07:41:55 1990 <<<

Problems: 1) rinse tank 3 does not hold water
          2) aspirator and plenum flush cycles need to be synchronized

>>> 'sink7' problem from jimmoon -- Fri Feb  2 09:26:37 1990 <<<

Phosphoric acid bath reads 150C but is actually at room
temperature.

>>> 'sink7' problem from phillip -- Fri Feb  2 09:52:57 1990 <<<

The phosphoric acid bath temp controller needs calibration.
This will be done today. 

>>> 'sink7' problem from phillip -- Fri Feb  2 11:48:09 1990 <<<

P: P acid bath does not heat according to controller readout.
S: Replaced J type tc. Calibrated controller. Sin7 is up.
   H3PO4 bath is now operational.

>>> 'sink7' problem from field -- Fri Feb 16 12:05:07 1990 <<<

heater for phosphoric acid bath doesn't seem to be working.  It 
is set to heat to 150 C and is only at 23-24 C after about 1 hour of 
operation.

>>> 'sink7' problem from phillip -- Fri Feb 16 13:26:53 1990 <<<

Replaced phosphoric acid bath thermocouple. This 
repairs the problem as reported by Leslie.

>>> 'sink7' problem from cjkim -- Thu Mar 22 00:07:25 1990 <<<

spindryer for sink7&8 keeps slowly rotate(rpm ~ 2) after normal spin.
Had to turn off the power to stop it.

>>> 'sink7' problem from cjkim -- Thu Mar 22 01:49:46 1990 <<<

The slow rotation I previously reported did not happen this time.

>>> 'sink7' problem from kpister -- Fri Mar 30 18:24:55 1990 <<<

spindryer2 stopped in mid-cycle several times.  other people were using
lots of nitrogen at the time.  wasn't able  to repeat the problem when
other nitrogen users stopped.

>>> 'sink7' fix from phillip -- Tue May  8 07:36:46 1990 <<<

Fabricated and replaced 'J' type thermocouple in
Phosphoric acid bath. The problem as reported
by Nam is fixed.
