>>> 'sink6' problem from carlos -- Thu Jan  5 02:42:38 1989 <<<

The resistivity of the DI water is low. Could not get above 14 Mohm-cm

>>> 'sink6' problem from phillip -- Fri Jan  6 08:45:28 1989 <<<

P: Effluent leaking from plenum.
S: Tightened threaded portions of drain piping.
   The leak (should be) fixed now.

>>> 'sink6' problem from galewski -- Sat Jan  7 16:55:53 1989 <<<

Deck hose had sprung a leak when I came in at 13:00 today.  Could not
find any of the coiled tubing so I just took the deck hose of to stop
the leak.  It is now laying at the back left corner.

Looks like chemical attack similar to the vacuum wand by sink8 caused
the leak to occur.

				Thank you,
				  Carl

>>> 'sink6' problem from bob -- Mon Jan  9 09:50:56 1989 <<<

The deck hose has been replaced on sink6

>>> 'sink6' problem from spence -- Tue Jan 10 14:19:15 1989 <<<

spin dryer next to sink 6 doesn't work because it is not possible
to  close the door to the chamber properly
Chris Spence

>>> 'sink6' problem from galewski -- Thu Jan 12 13:56:30 1989 <<<

tank 4 makes a very loud gurgle noise when emptied.  did not use
to do that.

>>> 'sink6' problem from galewski -- Fri Jan 13 17:49:20 1989 <<<

Never mind the gurgel noise.  It was very loud but gone now.  Only
reported it in case it signified something was going bad.

Big Problem:

Cannot get high resistivity in the rinse tanks.  Either with 
wafers in the cassette or without.  The resitivity will not stay 
above 10.5.  Will go up briefly on a drain and refil to the 11 
range but then falls to low 10's or worse.

Was OK this morning getting easily to 16.2 in the final rinse.  Mario 
put in new Piranha after my morning run.  Suspecting the Piranha,
Marilyn changed Piranha again.  No improvement.  Cannot chance 
contaminating the epi tube by ignoring the low resistivity.

Additional Problem:

Drain valve air solenoid valve is sticking open sometimes.  Air leaking
out the top.  If I cover it with a finger it closes.

>>> 'sink6' problem from galewski -- Mon Jan 16 11:54:27 1989 <<<

Tried a long Piranha on the cassettes only and then tried to rinse
them to high resistivity.  Resistivity of tanks 3 and 6 themsleves
about 15.2 to 15.6 (last week usually 16.5 to 17.2).  After rinsing
cassettes for 2 min in each of the dirtier tanks the cassettes
were put into 4 and 6.  Maximum stable resistivity with cassettes
was 11.2 to 11.5 (last week with wafers would get easily 15.6 to
16.2).  This required 3 drain and refills to get to those levels
(last week this trick not necessary).

It does not encourage me in the quest for a clean sink to see this
morning that the previous user has left one of the cassettes on the
table and wafer pieces in tank 4.  Removed the pieces in tank 4 for
the test.  There is also a wafer piece in the 1:25 HF but I am afraid 
of HF and I a think it up to the person leaving it there to remove it.

Time for a clean up of sink 6 and user behavior?

>>> 'sink6' problem from phillip -- Tue Jan 17 13:07:58 1989 <<<

P: Resistivity measurement is lacking in tank3 & 6
S: Cleaned probe holders of debris from inside plenum.
   Repositioned probes in holders.
   Burnished relay contacts in tank select relay.

The resistivity reading in these two tanks is now
much higher. It achieves these better readings much
faster, also. 

>>> 'sink6' problem from evan -- Tue Jan 17 16:47:24 1989 <<<


For your general info:
The DI resistivity leaving the RODI room was at 18 Mohm which is normal.

>>> 'sink6' problem from galewski -- Sat Jan 21 13:25:14 1989 <<<

The spinner is not working.  The seal did not deflate from a previous
usage.  When I came to use it the door would  not close and nothing
happens when the start button is pressed.  Cycling the power off and
on does nothing.

>>> 'sink6' problem from tom -- Tue Jan 24 09:08:14 1989 <<<

The level sensor in the right piranha tank does not work.  The piranha
was very low and steaming as the heater stayed on while level went past 
the TC.

>>> 'sink6' problem from phillip -- Tue Jan 24 11:31:57 1989 <<<

Replaced sensor diaphram on overtemp sensor. This fixes the
problem as reported by Tom.
From phillip Thu Jan 26 07:35:19 1989
To: bob phil tom voros
Subject: Re:  sink6 fix~r sink
Cc:  $pf/sink6-p

This bath is apparently o.k. Robin was using it as I checked it.
I believe the problem might be one of etiquette. If trouble exists
in something mechanically, it is not readily apparent to me

From eskim@gold.BERKELEY.EDU Wed Jan 25 16:08:27 1989
Received: by argon (5.57/1.16)
	id AA24425; Wed, 25 Jan 89 16:08:05 PST
Received: by gold (5.57/1.16)
	id AA00264; Wed, 25 Jan 89 16:07:26 PST
Date: Wed, 25 Jan 89 16:07:26 PST
From: eskim@gold.berkeley.edu (Eun Sok Kim)
Message-Id: <8901260007.AA00264@gold>
To: voros@gold
Subject: Re:  any comments?
Cc: bob@gold, eskim@gold, jimmoon@gold, sink6@gold
Status: RO

Katalin,
Regarding the trouble reported by Jim Moon,
As you can see in the equipment log, I used the sink6 at 1AM Tues.
for the last time.  But Jim found the problem on Wed. morning.
Now, the question is that nobody used the sink the whole day of
Tues.?????????????????????????
I would not do that intentionally, no way!!!!!!!!!!!!!!!!
If I remember correctly, the piranha tank was about two third full.
Is it possible that the etchant evaporated, and the temp. control
triggered off due to low liquid?
I hope that we all be a little more carefull when pointing a finger
to someone for possible faults.
Thanks


>>> 'sink6' problem from galewski -- Thu Jan 26 13:58:15 1989 <<<

Bottom sreens on tank 4 and 5 have loose feet.  Looks like nut
holding them on get loose.  Screens wooble alot and make it hard
to retrieve cassette if handle comes off.  Tank 5 is worst with
only 2 working legs.  Tank 6 has one leg starting to come loose.

Not critical but good time to do it would next time the tanks are
cleaned.

			Thank you,
			  Carl

>>> 'sink6' problem from phillip -- Fri Jan 27 06:39:56 1989 <<<

P: Rinse tank cassette stands need new feet per Carl's report.
S: Tanks just RCA cleaned. I will work with marilyn to get new
   feet installed on tanks w/o undoing microclean of yesterday.
   (Marilyn, pls see me today when  you're in the lab.)

>>> 'sink6' problem from aplee -- Sun Jan 29 11:27:24 1989 <<<

tank 5 wouldn't fill when tank 4 and 6 were all filling.

>>> 'sink6' problem from galewski -- Sun Jan 29 16:03:17 1989 <<<

Tank 3 rinses up to about a max of 15.4 (vs. 16.7 in #6) slowly and 
suddenly while rinsing the resistivity will go down to 0.00 and start 
over slowly to rise up again.  Something going on with the tank, 
plumbing, or sensor since tank 6 works just fine.

>>> 'sink6' problem from phillip -- Mon Jan 30 09:24:19 1989 <<<

P: Tank5 does not fill (per aplee).
   Tank3 resistivity too low (per galewski)
S: No trouble found with fill function of tank5.
   With 3 tanks filling simultaneously, the rate
   for each declines signifigantly because of the
   size of the water lines that feed the sink.

   Removed minutely sized wafer chips from resistivity
   probe on tank3.
   Tamk3 and tank6 both read well above 14Mohms.

(Although I was careful not to contaminate this wpt
 while working, I suggest Marilyn check it and make
 the final determination of cleanliness.)

>>> 'sink6' problem from gian -- Mon Jan 30 11:20:04 1989 <<<

The Drain on tank3/sink6 sometimes leaks, reducing the rate at which
the tank can be filled.

>>> 'sink6' problem from phillip -- Mon Jan 30 11:45:07 1989 <<<

Maintenanced sticking solenoid thus allieviating problem with 
tank3 drain as reported by Dave G.

>>> 'sink6' problem from seh -- Wed Feb  8 08:44:27 1989 <<<

The area surrounding the piranha baths is covered with a brown
substance.  This is also observed in the 10/1 bath and some of
the rinse tanks.

>>> 'sink6' problem from marilyn -- Wed Feb  8 09:40:36 1989 <<<

Problem: Area surrounding the right piranha bath covered with a
         brown substance.
Cause: Last user(s) failing to rinse the deck with the deck hose
       after cleaning wafers in the piranha
Solution: Aspirated the piranha bath and the HF tank and replaced
          the solutions.

>>> 'sink6' problem from gian -- Fri Feb 10 08:59:22 1989 <<<

Drain on tank 5 of sink 6 won't close.

>>> 'sink6' problem from phillip -- Fri Feb 10 13:07:04 1989 <<<

Repaired/maintenanced SV15 that was causing tank5 not to drain.
Sink6 is up.

>>> 'sink6' problem from marilyn -- Thu Feb 16 14:41:49 1989 <<<

Problem: Plenum flush does not stay on with the aspirator.

>>> 'sink6' problem from phillip -- Fri Feb 17 11:45:48 1989 <<<

Reset timer on plenum flush function. The problem as reported
by Marilyn is resolved.

>>> 'sink6' problem from carlos -- Fri Feb 17 22:36:53 1989 <<<

the heater of the right piranha tank is not working

>>> 'sink6' problem from marilyn -- Wed Feb 22 08:34:06 1989 <<<

Problem: A user reported that the right-hand heater is not working.
Solution: Since it's up to temperature (120 C) it can be safely
          assumed that is IS working.

>>> 'sink6' problem from galewski -- Fri Mar  3 13:48:52 1989 <<<

Broken or loose legs in tanks 1, 4, and 5.

>>> 'sink6' problem from phillip -- Mon Mar  6 08:17:00 1989 <<<

Stabilized wafer platforms in tanks1,4, and 6. These tanks
may or may not need cleaning. I was careful not to contaminate
them.

>>> 'sink6' problem from nam -- Mon Mar 13 18:22:36 1989 <<<

The drain of tank5 can not be closed.  It is always opened.

>>> 'sink6' problem from phillip -- Tue Mar 14 07:45:17 1989 <<<

Maintenanced SV15 tank5 drain solenoid. The problem as reported
by Nam is fixed. Sink6 is up.

>>> 'sink6' problem from mcarey -- Sat Apr  1 15:20:11 1989 <<<

I can't seem to get any sink to fill or drain the DI tanks even
when enabled.  I've tried sinks 3,6,7, and 8.

>>> 'sink6' problem from phillip -- Mon Apr  3 08:07:42 1989 <<<

Tightened plumbing connections on and about main plenum drain.
The slight effluent leak in this area is abrogated.

>>> 'sink6' problem from tom -- Mon Apr 10 14:34:30 1989 <<<

Low level sensor not working for the right hot bath.

>>> 'sink6' problem from martin -- Tue Apr 11 22:34:15 1989 <<<

estank1 (1 of 6) has a leak .... leaks slightly slower than when 
drain is activated. 

>>> 'sink6' problem from phillip -- Wed Apr 12 06:59:16 1989 <<<

Maintenanced SV7 solenoid control for tank1 drain. This cleared
the problem as reported by Martin Lim.

>>> 'sink6' problem from phillip -- Wed Apr 12 07:21:58 1989 <<<

Replaced 'sensi-flex' diaphram in low liquid sensor of RH bath.
The problem as reported by tom is fixed.

>>> 'sink6' problem from phillip -- Fri Apr 14 14:47:33 1989 <<<

Replaced lamps in control switches as appropriate as reported by 
Marilyn. 
Dislodged wafer chips from resistivity probe on tank3.
This sink is up.

>>> 'sink6' problem from phillip -- Mon Apr 17 07:15:11 1989 <<<

There is an effluent leak at or near the 'aqua-matic' drain valve.
It is not profuse. A fix will be sought today.

>>> 'sink6' problem from phillip -- Mon Apr 17 08:26:36 1989 <<<

Tightened threaded portions of sink drain pipe. Hopefully this
stopped the leak. If it didn't, the transition will have to be
physically removed and teflon taped,then reassembled.

>>> 'sink6' problem from galewski -- Tue Apr 18 15:14:51 1989 <<<

spindryer shuts off prematurely and does not want to restart.

>>> 'sink6' problem from galewski -- Tue Apr 25 14:53:24 1989 <<<

Spindryer1 not turning.  Indicator shows supposedly that the
dryer is spinning but not so.  N2 comes on that is all.  Garbage
equipment.

>>> 'sink6' problem from phillip -- Wed Apr 26 09:41:29 1989 <<<

referred to category 'spindryer1'.

>>> 'sink6' problem from marilyn -- Mon May 15 09:10:40 1989 <<<

Problem: rinse tank 3 drain nmmot draining/solenoid sticks.

>>> 'sink6' problem from phillip -- Mon May 15 11:55:08 1989 <<<

Replaced plunger in SV11 ( tank3 drain ) per a report from
Marilyn. Sink6 is up.

>>> 'sink6' problem from dcarl -- Fri Jul  7 16:37:00 1989 <<<


One of the two inch carrier handle had photoresist on it.  Very, Very
bad.

>>> 'sink6' problem from marilyn -- Mon Jul 24 08:58:24 1989 <<<

Problem:  A leak has developed at sink6; water is underneath it
          on the floor.

>>> 'sink6' problem from phillip -- Mon Jul 24 14:00:06 1989 <<<

P: WPS leaks effluent .
S: Disjointed main sink drain @ sink. Applied 
   tape and compound to threaded portion of
   PVC. Reassembled same.
   The leak should be gone.
   Sink6 is up.

>>> 'sink6' problem from robin -- Wed Jul 26 08:25:59 1989 <<<

Handles and cassettes cause resistivity reading to plummet from
17+ megohm-cm to < 1 megohm-cm.  These are either dirty or have
not been rinsed of RCA clean sufficiently.

>>> 'sink6' problem from bob -- Wed Jul 26 09:25:22 1989 <<<

tank5 has a small anount od air appearing in the water. This is an
indication that the ait operator on the solenoid is leaking house
air across it into the di. It may take a day to repair this. In the
meanitme please avoid using tank5.

>>> 'sink6' problem from jhopkin -- Wed Jul 26 14:02:29 1989 <<<

Test problem for sink6

>>> 'sink6' problem from phillip -- Thu Jul 27 07:50:03 1989 <<<

P: Airiated water entering tank5.
S: Replaced SV14 plunger. Replaced defective
   Aqua-Matic valve. The diaphram from this valve may
   have been particulating so an RCA clean is suggested.
   Sink5 is up.

>>> 'sink6' problem from marilyn -- Thu Jul 27 08:32:15 1989 <<<

Problem: Rinse tank 6 is aerating; same problem as tank 5 yesterday.

>>> 'sink6' problem from phillip -- Thu Jul 27 13:29:31 1989 <<<

Changed aqua-matic valve on tank6 fill.
This unit feature should be o.k. now.

>>> 'sink6' problem from robin -- Thu Jul 27 15:07:22 1989 <<<

The right side of sink 6 is being RCA cleaned overnight, and will
be unusable until tomorrow afternoon, Friday, 7/28, at 2pm.

We regret any inconvenience.

>>> 'sink6' problem from denlinge -- Sat Jul 29 17:09:03 1989 <<<

tank 4 was slow to drain

>>> 'sink6' problem from phillip -- Wed Aug  2 07:32:08 1989 <<<

Cleared broken wafer pieces from drain port of tank4.,
The problem as reported by denlinge is fixed.

>>> 'sink6' problem from bill -- Sat Aug 12 19:32:26 1989 <<<

I changed the piranha in sink6 right bath,
I thought I left the level sufficently below the top of the tank,
however,
upon adding 100mls peroxide and then my wafers - some of the fresh
hot piranha spilled over the edge of the bath.

This is something we try to avoid - but I thought the sinks could
handle it -

The piranha burned the bath skirt ( those stains have nothing to do
with photoresist )
and some of the piranha that went below caused further damage :
there was a very loud "pink" - sounded like something small exploding.

All utilities on the sink work fine - except the drain to tank4
does not work at all. Also if the tanks are left full -
( ie, tanks 5 and 6 ) they drain to 1/2 full - without the drain
buttons pushed.

So... - I guess I fried the drain solenoid somewhere ?
Perhaps there is some plumbing too near the bath ?

I aspirated the right bath-
Other users note - the left bath and left tanks are fine.

>>> 'sink6' problem from phillip -- Mon Aug 14 07:53:20 1989 <<<

Sink6 will be down until 9:00am for repairs.

>>> 'sink6' problem from phillip -- Mon Aug 14 09:01:23 1989 <<<

P: Assorted problems.
S: Repaired burst air delivery tubing inside plenum.
   Replaced d.i. deck gun kwik disconnect : leaking.
   Replaced entirely tank5 and tank6      : leaking.

If the resistivity of tank6,after cleaning, is erratic,
please apprise so it can be resolved.

The LH side of this wps must be RCA cleaned b-4 use.

>>> 'sink6' problem from robin -- Mon Aug 14 09:05:43 1989 <<<

Please be advised that the right side of sink6 will be undergoing
RCA I & II clean most of today.  Please restrict your usage of sink6
to the left side.  

Thank you.

>>> 'sink6' problem from saunders -- Mon Aug 14 13:34:57 1989 <<<

There are pieces of broken wafer stuck in the aspirator tube.

>>> 'sink6' problem from phillip -- Mon Aug 14 14:29:09 1989 <<<

Removed sink deck and cleared aspirator tube.

>>> 'sink6' problem from tom -- Tue Aug 15 11:27:16 1989 <<<

Left piranha bath not heating. Heater light is on but the temp is
still at 24 C.

>>> 'sink6' problem from phillip -- Wed Aug 16 07:13:15 1989 <<<

P: LH piranha bath fails to heat.
S: Reseated corroded connector. This heated bath now works.

(Correction to earlier report: Rinse tanks 5 & 6 were replaced bacausee
 of seam leaks. Their replacement was unrelated to Bill's piranha spill
 of last weekend.)

>>> 'sink6' problem from bill -- Wed Aug 16 10:40:06 1989 <<<

Resistivity meter is reading 15 - 19 Mohm-cm most of the time,
and sometimes not reading at all.
Please investigate as soon as possible - thanks.

>>> 'sink6' problem from phillip -- Wed Aug 16 13:38:19 1989 <<<

P: Tank6 resistivity measurement of dubious integrity.
C: Probe exposed to air during measurement.
S: Increased the volume of water thru the bath onto
   the probe.It is now submerged during test.
    The Mohm / cm. reading is now much closer to corrct.

>>> 'sink6' problem from moazzami -- Thu Aug 17 10:34:33 1989 <<<

Resistivity monitor for tank 3 isn't working (see previous
problem reported by Bill Flounders.).

>>> 'sink6' problem from moazzami -- Thu Aug 17 10:36:35 1989 <<<

The previous problem report should read:
Resistivity monitor for tank 6 (not tank3) is not working.
(see previous problem report.)

>>> 'sink6' problem from saunders -- Tue Aug 29 09:39:30 1989 <<<

The low liquid alarm on the left-hand piranha bath is not working.

>>> 'sink6' problem from phillip -- Tue Aug 29 11:46:26 1989 <<<

P: LH bath alarm o.d.
S: Reseated connector #29. The alkarm is now repaired.
   sink 6 is up.

>>> 'sink6' problem from galewski -- Sat Sep  2 13:30:40 1989 <<<

Resistivity meter for tank 6 does not work properly.  Goes off scale
and does not register.

When changing the piranha tanks it would be nice it they were filled 
up about 1/2 inch more so that the boats will be fully covered.  This 
is espceially so in the tank behind rinse tanks 1-2-3 where the heater 
wants to float up so that the full depth cannot be used.  Maybe the
cables to the heater can be pulled down to make the heater sit lower?

The resistivity is extremely slow and erratic.  15 min to get a decent
resitivity (within 1 Mohm of tank alone).  Seems to be related to the
boats again since I tried without wafers after piranha cleaning the
boats by themselves.  Get the typical initial rise to a higher number
and then sag to a low value which remains even after 30 min of 
rinsining.  Maybe the boats get more porous with age and absorb more
piranha that then takes a long time to leach out?

The bench top by the sink is looking very bad.  Looks like a lot of wet
stuff gets put on it.  Tried to clean it a little but not much help.
Does not by the way have one of those plastic protector tops like most
of the benches do.

			-Carl

>>> 'sink6' problem from galewski -- Tue Sep  5 14:45:17 1989 <<<

Showed problem to Bob with tank 6 resistivity meter.

Reads off scale.
			-Carl

>>> 'sink6' problem from phillip -- Wed Sep  6 08:17:37 1989 <<<

P: Tank6 reads off scale in Mohms when idle.
S: Replaced tank6. Water is now held on the probe  
   when the tank is idle causing the readout to go
   to zero instead of infinity. 
   Sink6 is up.


(Robin, the new tank was cleaned by me b-4 installation
 but it really needs an RCA clean. )

>>> 'sink6' problem from galewski -- Sat Sep  9 11:51:39 1989 <<<

Less than .5 gpm flow in the di loop.  Not enough flow to rinse the
wafers decently even with only one tank flowing.  Is there some
regeneration or something like that on Sat. mornings?  I think the
last time I complained about low flow it was last Sat.  If so it would
be nice to know so I do not waste my time trying to do experiments
while there is no di.

Low di flow in the whole lab.  I checked the rotometers other sinks
in front of lab, they also show no flow.  The big black gauge at
front (unlabeled) shows 11psi, up form 9 psi earlier.  Is that the
di loop pressure?  Old lab also low.

The 143 TA just came in and now there is now flow at all. 

			-Carl

>>> 'sink6' problem from marilyn -- Mon Sep 18 08:52:15 1989 <<<

Problem: Small red LOAD light on at the left-hand piranha bath;
         the bath is NOT up to temperature (120 C) but is instead
         at 27 C.

>>> 'sink6' problem from phillip -- Mon Sep 18 12:24:16 1989 <<<

No trouble found with the LH piranha bath.
It is currently @ 121dC.

>>> 'sink6' problem from jchung -- Tue Sep 19 17:08:08 1989 <<<

I am RCA cleaning the left pirahna tank.
Will finish by noon Wednesday.

>>> 'sink6' problem from phillip -- Mon Sep 25 08:32:36 1989 <<<

 Replaced pipe compound on transition plumbing to stop
the effluent leak. This sink is up.

>>> 'sink6' problem from marilyn -- Mon Sep 25 09:01:20 1989 <<<

Tank 2 at sink6 is aerated; also, fills but doesn't drain.

>>> 'sink6' problem from marilyn -- Mon Sep 25 09:08:26 1989 <<<

Second problem at sink6:
Full-plenum lock-out
Cause: Bottom float stuck
Solution: Tom freed it by hitting it; says it needs to be cleaned

>>> 'sink6' problem from phillip -- Mon Sep 25 09:28:54 1989 <<<

P: Air in tank2 d.i.
S: Point of use d.i. filter recently changed.
   This injected a small amount of air into the 
   water and it appeared in tank2.
   SInk 6 is up.

>>> 'sink6' problem from galewski -- Mon Sep 25 14:45:23 1989 <<<

Sorry forgot a word.  Should read:

Higher flow rate noticeable in much reduced rinse up times.

>>> 'sink6' problem from marilyn -- Tue Sep 26 09:30:47 1989 <<<

Problem: tank 2 at sink6 FILLS, but does not DRAIN.

>>> 'sink6' problem from kim -- Tue Sep 26 10:29:07 1989 <<<

Problem:  Tank 2 at the left side of sink6 didn't drain.

Cause:    Small green tube splitted and blew off.

Solution: Cut off the tip of the green tube and put it back on.

>>> 'sink6' problem from jimmoon -- Wed Oct 11 07:40:05 1989 <<<

Having four or five tanks rinsing at the same time causes the
plenum flush alarm to go off after about 15 minutes 
(unless this is just coincidental and there is something wrong
with the lab vacuum).
Same thing happened last Thursday.

>>> 'sink6' problem from phillip -- Wed Oct 11 10:39:34 1989 <<<

Trouble in CG2 caused this sink to act up.
That problem is being looked into.

>>> 'sink6' problem from field -- Mon Oct 30 12:40:12 1989 <<<

tank 1 doesn't drain.

>>> 'sink6' problem from phillip -- Tue Oct 31 08:30:49 1989 <<<

Replaced internals in SV7- tank4 drain.
Sink6 isd available for use.

>>> 'sink6' problem from saunders -- Tue Oct 31 09:41:56 1989 <<<

"low liquid" light for right-hand piranha bath will not turn off, so heater cannot be turned on.

>>> 'sink6' problem from jlou -- Thu Nov  2 10:27:23 1989 <<<

The sulfric acid tank does not show right temperature( Now it shows room
temperature). Could somebody fix it in time.
                                         Thanks
                                                        Jlou

>>> 'sink6' problem from bob -- Thu Nov  2 11:30:49 1989 <<<

The low liquid alarm on sink6 would not reset due to a loose connection
by the pressure switch diaphragm This connect has been retightened and
the piranah bath on sink6 is now heating. 

>>> 'sink6' problem from tang -- Thu Dec 14 21:50:56 1989 <<<

very slow DI water rate--out of DI water? Same with sink8.

>>> 'sink6' problem from galewski -- Sat Dec 30 21:30:49 1989 <<<

Air leak on input to solenoid valve SV11

>>> 'sink6' problem from galewski -- Thu Jan 18 15:13:22 1990 <<<

Air leak SV9.  Reason slow in rinsing up or maybe low on DI?

>>> 'sink6' problem from phillip -- Fri Jan 19 07:01:12 1990 <<<

Per Carl's report:
 SV9 - no trouble found.
 SV11- replaced faulty section of air line.
sink6 is up.

>>> 'sink6' problem from murray -- Wed Jan 24 15:20:20 1990 <<<

Resistivity meter will not go above 4 and fluctuates around 1-2 with 
cassette in tank 6.  Soaking in piranha and rinsing 2 mins in tanks 4 and
5 doesn't help.  However, resistivity will go above 17 with nothing in 
tank 6 indicating that meter is not at fault.  M. Murray and T. Wilson
suspected that cassette might have been dropped or contaminated.  We placed
dirty cassette on counter opposite sink6 clearly labelled not to use.  With
new cassette from drawer and new wafer, resistivity tops off at 17.1 so we
are leaving new cassette in sink6.

>>> 'sink6' problem from marilyn -- Wed Jan 24 15:50:49 1990 <<<

Problem: contaminated cassette at sink6
Solution: cassette has been removed from circulation until the
          next RCA 1 & 2 clean at sink6
From phillip Thu Feb  1 08:59:16 1990
To: bob
Subject: sink solenoid upgrade
Cc:  $pf/sink8-p $pf/sink7-p $pf/sink6-p kellogg 


  A salesman by the name of Steve Popolizio from Elect. air tool
is coming by on 2/12/90, Monday . We will be talking/specifying/
ordering  Honeywell solenoids for this project. 
 He is also bringing an updated Elect Air Tool catalog.

(Susan, please arrange parking for him @ the East gate.
 Please apprise me when this is done. Thank you.      )


>>> 'sink6' problem from galewski -- Sun Feb 18 23:43:59 1990 <<<

Forgot to mention this after I used sink.  Got full plenum lockout
alarm 4 times while using sink.  Would alarm and shut off rinse.
After rinse off, if I would hit ack. button it would go off and
sink work again.  Does short alarms like this mean the drain is
weak or maybe the sensor is too tight?

			-Carl

>>> 'sink6' problem from galewski -- Mon Feb 19 18:27:56 1990 <<<

Got that short full plenum lockout alarm twice.  Actually resets
itself after a few seconds.  Not only me, Michael Judy had it
happen to him also this morning.

				-Carl

>>> 'sink6' problem from troy -- Tue Feb 20 00:13:38 1990 <<<

Sink 6 still suffering from full plenum lockout syndrome. Alarm sounded
for about 10 seconds and then shut off without my pressing silence key.
No further problems, so finished wafer run.

>>> 'sink6' problem from galewski -- Tue Feb 20 12:19:10 1990 <<<

plenum lockout alarm hit twice again.  resets almost right away.

>>> 'sink6' problem from bob -- Tue Feb 20 14:35:15 1990 <<<

The full plenum lockout on sink6 seem to be caused by the aquamatic
not fully opening on demand. The presure regulators that hold off
this valve (40psi) and the one that supplies the opening force
60 psi have been reset to:
hold off=40 psi
open    =65 psi
The sink is now draining at normal rates.
A remaining problem with this sink is a plenum leak apparently in
the lower seam of the sink by the Herman-Miller wall. repairing
this will be added to Phill's joblist.

>>> 'sink6' problem from jlou -- Mon Feb 26 00:39:33 1990 <<<

On Saturday some person contaminated wafer holder of sink 6.
I tried to immerse it in the parahna for whole night to remove the mess
but it is in vain. The resistivity is still in between 9 to 10 Mohm.
                                                     jlou

>>> 'sink6' problem from marilyn -- Tue Feb 27 15:23:21 1990 <<<

Problem: A user reported that he suspected one of the sink6 cassette
         had been contaminated.
Solution: Sink6- plus ALL the cassettes and handles, including the
          new (opaque) cassettes and handles for 2" wafers- have
          been RCA 1&2 cleaned.  After the clean was complete, the
          cassettes and handles were overflow-rinsed for 30 minutes.
          Sink6 is UP.

>>> 'sink6' problem from rnorman -- Fri Mar  9 06:35:48 1990 <<<

The deck hose is spraying DI from above the lower connector.

>>> 'sink6' problem from phillip -- Fri Mar  9 07:01:47 1990 <<<

Replaced defected d.i. deck gun tubing.
Sink6 is up.

>>> 'sink6' problem from saunders -- Fri Mar 16 11:23:39 1990 <<<

deck hose came unattached to sink

>>> 'sink6' problem from phillip -- Fri Mar 16 11:42:09 1990 <<<

Reattached deck hose to water spigot per Christine's  report.
>>> 'sink6' problem from carlos -- Fri Mar 16 16:59:31 1990 <<< [No Comment]

>>> 'sink6' problem from marilyn -- Mon Mar 19 07:35:34 1990 <<<

No problem; user hit wrong key.

>>> 'sink6' problem from jlou -- Tue Mar 20 14:58:20 1990 <<<

The alarm on the left side sounds repeatly. Please fix it.
                                                   Jlou

>>> 'sink6' problem from jlou -- Tue Mar 20 15:16:51 1990 <<<

zThe alarm sounds repeatly.

>>> 'sink6' problem from bob -- Wed Mar 21 08:19:27 1990 <<<

Problem: User reports full plenum lockout.
Cause: ??
Solution: Drain valve and drain rate were checked and are about
normal for a sink. Phill will check the fill rate adjustments
on thenrinse tanks and make sure they do not exceed the sink
drain capacity. sink6 is up.

>>> 'sink6' problem from weijie -- Wed Mar 21 22:19:52 1990 <<<


The spinner near sink6 vibrates when spinning.

>>> 'sink6' problem from jlou -- Thu Mar 22 12:26:43 1990 <<<

Full plenum lockout alarms again. Woo! Woo! Woo!
                                            Jlou

>>> 'sink6' problem from marilyn -- Wed Apr  4 09:23:39 1990 <<<

Problem: Right side piranha bath heater not keeping piranha up
         to temperature (120 C)

>>> 'sink6' problem from phillip -- Wed Apr  4 11:15:37 1990 <<<

Right hand side heater is operating properly.
No trouble found. The problem reported earlier
is o.k. now.

>>> 'sink6' problem from bob -- Sat Apr  7 10:51:54 1990 <<<

There is a plenum leak on sink6 which requires attention. This will
be repaired next week. The sink is uip until then.

>>> 'sink6' problem from bob -- Mon Apr  9 07:52:17 1990 <<<

sink6 is unavailable for use this AM> It is down for repair of
a plenum leak. It should be up this afternoon. 
sink6 is down.

>>> 'sink6' fix from bob -- Mon Apr  9 13:33:10 1990 <<<

Two leaks were found on sink6. 
1. Drain fitting leaking
2. Bulkhead fitting for spindryer leaking
These leaks were repaired by Otto Olivera and the sink
has been returned to service.

>>> 'sink6' problem from rozsnyai -- Mon Apr  9 16:21:16 1990 <<<

Contaminated cassette.  Wrapped and left near sink 6.

>>> 'sink6' fix from phillip -- Tue Apr 10 06:45:55 1990 <<<

P: F.P.L. @ 6:25a.m. reported verbally by Jim Moon
S: Replaced defective SMAV-3 valve. 
The sink6 is now up and available for use.

>>> 'sink6' problem from murray -- Sun Apr 15 15:14:41 1990 <<<

	The drain for rinse tank #5 in sink 6 is not working.  It 
sounds like the vacume line has come loose.

Murray

>>> 'sink6' fix from phillip -- Mon Apr 16 07:30:16 1990 <<<

P: Rinse tank5 doesn't.
S: Replaced split section of pneumatic tubing
   inside plenum. The problem as reported by 
   Murray is fixed.
sink6 is available for use.

note to procestaff: I emptied the 10-1 hf while working
on this sink. It needs replenishing.

>>> 'sink6' problem from alley -- Thu Apr 19 20:30:16 1990 <<<

We have no DI water flow.  I didn't check the flow before putting
my wafers in the sink6 piranha.  When I removed them and put them
in first quench, I noted that the flow was very low.  By the time 
I reached resistivity, I had no flow.  I am disabling the sink for
the time being, leaving two cassettes full of wafers 
in still quench water.  I'll check back in two hours to see if we
then have DI flow.  Since the wafers are still at very low resis-
tivity (the highest reading I got was .21 Mohm-cm), I'm not going
to put them in the sink6 dryer.  If I do anything else, I'll con-
taminate the cassettes (if for instance, I used the sink8 dryer).
If there's still no flow in sink6 two hours from now, I will leave
the wafers in water overnight.  If I have to do it, it will be 
labeled, and I ask that if someone else comes upon them before I do
tomorrow morning, that the wafers be put through piranha again, 
quenched and rinsed to > 14 Mohm-cm, dried and only then placed back
in the blue box that I'll leave near sink6.

Bill Tang was good enough to let me go ahead of him on Tylan11; unfor-
tunately this had to happen and I couldn't use it.  

Is there any way I could have checked beforehand so
that I at least didn't have wafers stuck in the water for hours?  

RLA

>>> 'sink6' problem from alley -- Thu Apr 19 22:33:49 1990 <<<

Not actually a problem to report this time:  everything worked fine 
and there was sufficient water, only I missed my chance to get into 
tylan11.  I suppose the only question remaining is how I could have
told beforehand that this would happen.  I think I vaguely remember 
being told something I could check, but I've forgotten what.  AND
EVEN THEN, RUNNING OUT OF WATER WOULD HAVE BEEN A PROBLEM.

>>> 'sink6' problem from alley -- Sat Apr 21 19:09:02 1990 <<<

the sink isn't down or anything like that, but after the two sink6 cassettes
of wafers were taken from the dryer over to the furnace aisle, I had a 
problem which may have contaminated the cassettes.  This is why there are
two 4" sink6 cassettes out in plastic wrap, waiting to be cleaned.  The 
wafers were to be loaded into tylan11.  While doing so, and with the 
tylan11 sled out, the polysilicon on the sled and boats spalled and I got
polysilicon particles all over the sink6 cassettes (and my wafers) which
were below.  I don't know if the usual practice is to rinse off the cassettes
in sink6 or to put them through a contamination clean, so I was conservative.
See tylan11 entry.

>>> 'sink6' problem from marilyn -- Mon Apr 23 10:58:40 1990 <<<

Problem: Emergency glove wash inoperative.

>>> 'sink6' fix from phillip -- Mon Apr 23 13:25:59 1990 <<<

P: Glove wash inoperative .
S: Reinabled (purposely) disabled glove wash 
   'aqua-matic' valve. The problem as reported 
   by Marilyn is fixed.

>>> 'sink6' problem from saunders -- Fri Apr 27 12:30:02 1990 <<<

deck hose came unattached again

>>> 'sink6' fix from phillip -- Fri Apr 27 13:10:29 1990 <<<

Refastened d.i. deck hose to deck spigot.
The problem as reported by Christine is fixed.

>>> 'sink6' fix from phillip -- Tue May  8 07:06:34 1990 <<<

Replaced sagging BHF tank support. The problem
as reported by Debra is repaired.

(The buffered HF was aspirated out to accomplish
this. It needs replenishing.)
