>>> 'sink3' problem from rolfe -- Tue Jan 10 11:50:02 1989 <<<

Full plenum lockout alarm went off--I silenced it.

>>> 'sink3' problem from rooney -- Sun Jan 15 02:06:34 1989 <<<

aspirator hose is kinked just above grip

>>> 'sink3' problem from phillip -- Tue Jan 17 07:54:49 1989 <<<

Placed larger, stiffer tubing over existing aspirator tube.
The problem with kinks as reported by Peter is fixed.

>>> 'sink3' problem from bob -- Thu Jan 19 14:17:53 1989 <<<

The tc on sink 3 read 4C instead of 11C so it is defective. The OT
tc was swapped and it is reading correctly. TC's in bath2 of sink3
need attention.

>>> 'sink3' problem from phillip -- Fri Jan 20 07:13:22 1989 <<<

Replaced tc assembly on bath2 of this sink per Bob's report of
yesterday.
Sink3 is working normally.

>>> 'sink3' problem from bmartin -- Thu Jan 26 19:04:17 1989 <<<

The thermocouple reading in the KOH bath of sink 3 seems to be about
10 deg C too low.  DI water gives a reading of 5 C (when it should be
closer to 15 C). 

>>> 'sink3' problem from phillip -- Fri Jan 27 13:46:00 1989 <<<

P: Temp control o.d.
S: Replaced tc in bath. Replaced and calibrated tc controller,
   The problem as reported by Brent is fixed.

>>> 'sink3' problem from mats -- Tue Feb 28 23:48:28 1989 <<<

Tank1 drain does not close.

>>> 'sink3' problem from phillip -- Thu Mar  2 07:20:50 1989 <<<

Replaced plunger & stem of SV7. These worn parts were causing the drain
not to shut on tank1 as reported by mats.

>>> 'sink3' problem from eminami -- Tue Apr 18 12:12:49 1989 <<<

Temperature controller on the right side (for KOH etch) does
not turn on.  

>>> 'sink3' problem from bob -- Wed Apr 19 11:49:37 1989 <<<

This problem occured because user had a low liquid condition. It
has been solved.

>>> 'sink3' problem from costello -- Mon May  1 16:02:46 1989 <<<


one of the buttons (tank 1 fill) gets stuck

>>> 'sink3' problem from phillip -- Tue May  2 07:25:22 1989 <<<

 Restored plastic function label cap which had gone asunder
from the switch.
 Tank1 fill switch as reported by Costello is fixed.

>>> 'sink3' problem from magneton -- Sat May  6 12:22:37 1989 <<<

very full of EDP that had crystallized.  I cleaned out the 
chamber but I  found that there was a broken silicon wafer
at the bottom of the chamber.  I could get the wafer out by
hand so I picked up the chamber and turned it upside down
over the garbage can.  The wafer still wouldn't come out
so I hit the bottom of the chamber as one would hit a 
ketchup bottle.  Unfortunately the ketchup bottle is smaller
than the reflux chamber and the heel of my hand knocked out the
bottom of the chamber rendering it useless.  I am sorry for the
inconvenience this will cause anyone.  If anything, it is
really inconveniencing me.

>>> 'sink3' problem from phillip -- Thu May 11 07:04:56 1989 <<<

 The chamber in this wps has been repaired and returned
to service. Sink3 is again available for use.

>>> 'sink3' problem from rooney -- Thu Jul 27 17:15:43 1989 <<<

low liquid indicator on EDP reflux chamber is not working properly

it indicated low liquid (and disabled the heater) even though the liquid
level was fine.  Tom disabled the low liquid line so that I could use
the heater

>>> 'sink3' problem from phillip -- Fri Jul 28 08:10:39 1989 <<<

P: 'low liquid' sensor on reflux chamber not working.
S: Replaced defective Cagne Sensi-flex n2 sensor. This
   feature is fixed. The unit is up.

>>> 'sink3' problem from mmesser -- Fri Jul 28 22:36:20 1989 <<<

Heater control erratic. Hard to set because the numbers jump around.
Temperature does not track number set. Bad pot in switch?



tanks 4,5,6 do not fill.

>>> 'sink3' problem from mmesser -- Fri Jul 28 22:52:50 1989 <<<

Never mind - the tanks fill.

>>> 'sink3' problem from mmesser -- Sat Jul 29 15:25:04 1989 <<<

Never mind previous problem - temp controller works.

>>> 'sink3' problem from bob -- Mon Jul 31 08:35:25 1989 <<<

Problem: User reports the low liquid light will not reset

Cause:   Excessively low levels of etchant being used in the EDP
         and the sensing tube (low liquid) was not in the proper
         position.

Solution:Replaced the gaskets in the pneumatic N2 lines of the low
         liquid sensor. Adjusted the sensor tubing for correct placement
         and had the user raise the liquid level. sink3 is up.

>>> 'sink3' problem from wenzel -- Fri Aug  4 01:06:27 1989 <<<

The set-point on the right temp control is very difficult to
adjust.

>>> 'sink3' problem from wenzel -- Fri Aug  4 02:00:34 1989 <<<

Also, tank 4 drain seems to be stuck on and tank 1 leaks.

>>> 'sink3' problem from phillip -- Mon Aug  7 14:52:04 1989 <<<

P: Temp. controller-LH bath not working.
   Tank4 drain stuck open.
   Tank1 leaks.
S: Replaced defective temp. controller.
   Rebuilt air solenoid conttol (SV13) drain tank4.
   No trouble found with tank1.
Sink3 is up and available for use.

>>> 'sink3' problem from wenzel -- Fri Aug 18 13:44:23 1989 <<<

The water seems to be turned off

>>> 'sink3' problem from bob -- Fri Aug 18 14:03:51 1989 <<<

The lack of water on sink3 was caused by the breakers on sink2
being in the off posisition. Since the water for all 3 sinks
is on one shunt loop a loss of power or a full plenum lockout
on any of these sinks effects the water supply to all three.

>>> 'sink3' problem from phillip -- Mon Aug 21 09:49:24 1989 <<<

Installed modified hood and vent hose from the area
that surrounds the EDP ETCH reflux column.
 The lid of the apparatus is easily removable for
work in the chamber. 

>>> 'sink3' problem from phillip -- Tue Oct 10 14:27:45 1989 <<<

The main drain (aqua-matic) valve is FAILED. It will be 
replaced Wednesday early a.m. Until then,

DO NOT USE THIS SINK !!!

>>> 'sink3' problem from jules -- Tue Oct 10 16:38:36 1989 <<<

An 1/8" line worked itself loose from a fitting on the very 
bottom of the sink, causing a small flood. The line is back in place,
but the sink is still down.

>>> 'sink3' problem from phillip -- Wed Oct 11 07:01:28 1989 <<<

Replaced aqua-matic drain valve on this sink. 
Sink3 is available for use.

>>> 'sink3' problem from kjordan -- Wed Oct 11 12:01:15 1989 <<<

full plenum lockout alarm was sounding,  
I silenced it and sent this message.  I can't tell if anything else
is wrong.  

>>> 'sink3' problem from bob -- Wed Oct 11 12:17:56 1989 <<<

sink3 is down for repair. PLease do not use.

>>> 'sink3' problem from bob -- Wed Oct 11 14:51:24 1989 <<<


sink3 has a leaking aquamatic valve on the aspirator. In addition
the spool valve used to isolate the ICW in the event of a full
lock-out is seeping slightly in the closed position. 

The ICW line has been removed from this sink. In addition there are 
hoses that need replacing and these problems will be worked on first
thing Oct 12.

>>> 'sink3' problem from phillip -- Thu Oct 12 14:42:50 1989 <<<

sink1, 2, and 3 are unusable until at least tomorrow.
There is a vacuum leak(s) in cg2 that will be repaired.

>>> 'sink3' problem from phillip -- Fri Oct 13 11:47:21 1989 <<<

Sink3 is down because of a vacuum drain problem.
It will hopefully be repaired by Monday p.m.

>>> 'sink3' problem from phillip -- Mon Oct 16 13:29:39 1989 <<<

P: Sink in general state of disrepair. Vacuum drain valve failed.
S: Cleaned build-up of brown residue off of almost every piece of
   the sink. Replaced 6" exhaust hose temp. Replaced 2 520-type
   and 1 521-type aqua-matic valve.

This sink is up and available for use.

>>> 'sink3' problem from kim -- Thu Oct 19 14:56:41 1989 <<<

Temp. controller is not read right.
Evan is checking it out now.

>>> 'sink3' problem from evan -- Thu Oct 19 15:41:00 1989 <<<

The temp controller is not working correctly. When temperature reaches to
about 10 deg below setpoint (heater 'LOAD' on), the controller readout jumps
about 10 deg higher (as 'LOAD' turns off). 
The error seems to relate to whether the heater is on or off.
The result is a false reading which is higher than actual temp.
Since I am not sure how phillip manages the heat controller inventory, this
will not be repaired until tomorrow.
.
 

>>> 'sink3' problem from bob -- Fri Oct 20 09:48:19 1989 <<<

A tc readout and an additional tc have been added to the reflux system
on sink3. The current controller is reading about 4 degrees lower than
actual temperature and when it's load light turns on the temperature reads
about 10 degrees lower. The manual readout is set on a J type tc. To read
out J tc's requires toggling the on-off button on while holding donw the 
hold button. Wait for 10 seconds before releasing the hold button. This
procedure is required as the default is a type K tc. 
The controller will be serviced on Monday, Oct 23rd when Phil Guillory
returns.

>>> 'sink3' problem from costello -- Sat Oct 21 18:24:17 1989 <<<

full plenum lockout alarm sounded 
no one was using the sink at the time

>>> 'sink3' problem from bob -- Sun Oct 22 10:37:25 1989 <<<

sink3 is down. It is failing to drain and there is a source of
water flow that is filling it even when everything is disabled.
It has been shunted out of the loop in CG-2 and posted 
"Do Not Operate".

Flooding occured in the reception area and GL-2 and GL-3. It was 
cleaned up bu Scott Sachtjen and his visitor Joe Nahum of Physics. 
I certainly think Scott should be credited with his clean up time 
as he spent several hours vacuuming up water.

>>> 'sink3' problem from phillip -- Tue Oct 24 10:37:06 1989 <<<

Replaced defected 'aspirator' function aqua-matic valve.
Replaced tc in reflux column.
Tightened loose liquid tubing on back of sink.

sink3 is again available for use.

>>> 'sink3' problem from phillip -- Tue Nov  7 08:41:08 1989 <<<

Replaced teflon aspiration tube.
Sink3 is available for use.

>>> 'sink3' problem from carlos -- Tue Nov 14 09:36:19 1989 <<<

The low-liquid indicator of the EDP tank of sink3 will not reset.
This looks that something minor, but it doesn't let me turn on the 
temperature controller.


							Carlos

>>> 'sink3' problem from carlos -- Tue Nov 14 20:56:55 1989 <<<

The temperature controller of the EDP tank will not go above 90C

>>> 'sink3' problem from bob -- Wed Nov 15 15:11:51 1989 <<<

The tc's on sink3 have been changed. We use 2 tc's/temp controller.
Both tc's read -1C at 12C and 73C at 85C. This means the tc controller
is reading 12 degrees below the actual temperature. In addition the reflux
system would not go above 85C (73C as read by the errant controller)
despite operating at full power for 1 hour. It appears the hot plate 
and the controller are both defective. In view of our office move Phil 
Guillory is tied up. It will take a day or two to fix this problem. 
If you are in a hurry please send a problem report to sink3 and we 
will try and expedite this repair.

>>> 'sink3' problem from hoagland -- Mon Nov 20 10:49:16 1989 <<<

problem:  Sink3 reflux heater will not go above 85C; calibration
          of temperature controller is off by 12C.

cause:  Hot plate damaged by corrosion.  Also temperature controller
        is out of adjustment.

solution:  Hot plate disassembled and heater replaced with new 600W
           element.  Rheostat on plate was also badly corroded- unit was
           bypassed and heater connected directly to controller.  Temp-
           erature controller was swapped out with working spare.  Sink3
           is up for use.

>>> 'sink3' problem from bob -- Mon Nov 20 11:07:44 1989 <<<

The temperature probe on the KOH has been married to the low liquid
sensor. This will prevent the temperature bath from boiling if the
level dips below the tc.

>>> 'sink3' problem from costello -- Thu Dec  7 18:39:44 1989 <<<

aspirator is very weak and deck hose won't work if two sinks are filling.

>>> 'sink3' problem from phillip -- Fri Dec  8 07:10:16 1989 <<<

P: insufficient water flow to sink
S: Adjusted aspiration water to increase suction.
   D.i. water is flowing at normal rates.

>>> 'sink3' problem from field -- Wed Jan 10 22:53:47 1990 <<<

Rinse Start 2, which controls tanks 4 - 6, seems to be connected
to Cycle End, so that as soon as I push Rinse Start 2 so I can
fill tanks 4-6, Cycle End lights up and the tanks won't fill.

>>> 'sink3' problem from phillip -- Thu Jan 11 07:30:31 1990 <<<

P: Short cycle on rinse tanks4,5,6.
S: Reset timer to 6 minute rinse interval.
   The problem as reported by Leslie is fixed.

>>> 'sink3' problem from denlinge -- Sat Apr 21 12:22:30 1990 <<<

The EDP temp controller won't turn on.  If anyone could mail me a quick tip
about how to get it on, I would appreciate it.

>>> 'sink3' problem from wenzel -- Sat Apr 21 14:42:39 1990 <<<

Temp controller for EDP bath not working -- it appears to be
the low liquid sensor.

>>> 'sink3' problem from dchin -- Sun Apr 22 22:22:41 1990 <<<

The glass container for KOH is broken. The bottom of the container became
extremely thin after a long period under KOH solution. When I loaded the wafer
cassettee, the cassettee hit the bottom and punched a hole at the thinnest
region of the container accidentally. When I came back to check my wafers,
all the solution in the container has been lost. The container need to be
replaced. 

David

>>> 'sink3' problem from bob -- Mon Apr 23 15:41:52 1990 <<<

A replacement bath for the KOH bath is in the process of being installed.
It should be operational sometime tomorow.

>>> 'sink3' fix from phillip -- Tue Apr 24 10:49:49 1990 <<<

P: 1. EDP temp. controller not working per Denlinge.
   2. KOH bath quartz beaker etched through bottom per Dchin.
   3. Tank1 drain constantly on.
S: 1: Fixed leaky n2 liquid sensor line.
   2. Installed new teflon immersion heater in
      teflon tank under supervision of the RH controller. :wq
   3. Replaced plunger mechanism in SV7.

Sink3 is up and available for use

>>> 'sink3' problem from dchin -- Sat Apr 28 13:37:54 1990 <<<

The temperature controller for KOH etch does not work. It could not be turned
on.

>>> 'sink3' problem from dchin -- Sat Apr 28 16:56:49 1990 <<<

Forget about the earlier problem I reported. The problem was due to that
the thermocouple didn't immerse under the solution deep enough. By pushing
the T.C. little deeper into the solution, it worked fine.

>>> 'sink3' problem from phillip -- Tue May  1 13:15:58 1990 <<<

The heater on the EDP etch has gone bad.
It will be replaced 5/2/90 in the a.m.

>>> 'sink3' fix from phillip -- Wed May  2 07:25:08 1990 <<<

P: EDP etch not heating. 
S: Replaced defected 'Corning model S35' hot plate.
   The problem as reported by Nam Kim is repaired.

>>> 'sink3' fix from phillip -- Thu May  3 06:53:37 1990 <<<

P: 'low liquid' sensor doomed to fail because the
    n2 tubing is kinked at 90degree transition.
S: Drilled out right angle 'galtek' fitting and installed
   in trouble spot of edp process apparatus.
sink3 is up and available for use.

>>> 'sink3' problem from nam -- Fri May  4 17:00:57 1990 <<<

Tank 1 is leaky.  The tankful of water just drained out in ~5 min
without drain solenoid on.

>>> 'sink3' fix from phillip -- Mon May  7 07:39:17 1990 <<<

P: Tank1 drains perpetually.
S: Replaced all o-rings and return spring
   in the nacom drain valve. The problem as
   reportedf by Nam is fixed.

>>> 'sink3' problem from nam -- Thu May 10 16:34:24 1990 <<<

Tank1 fill button wanted to be on all the time.

>>> 'sink3' fix from phillip -- Fri May 11 07:10:46 1990 <<<

Mtced fill components of tank1 operation.
The problem as reported by Nam should be fixed.
