>>> 'semi' problem from hebert -- Thu Jan 12 14:59:40 1989 <<<

The hoist down sense switch needs to be adjusted. The chamber
crashes into the base plate causing the hoist drive chain to
ratchet. 

>>> 'semi' problem from rnorman -- Thu Jan 12 16:40:39 1989 <<<

Problem: The chamber crashes into the bottom plate and ratchets.

Cause: The hoist down micro switch was loose and went out of adjustment.

Solution: The switch was readjusted and the hoist tested. The semi is up.

>>> 'semi' problem from hebert -- Tue Jan 17 15:31:27 1989 <<<

Turbo isn't powering up. 

>>> 'semi' problem from hebert -- Tue Jan 17 19:13:29 1989 <<<

Turbo doesn't power up.

>>> 'semi' problem from hebert -- Tue Jan 17 19:25:23 1989 <<<

The M&W heater/chiller isn't pumping water through the electrode.
I turned off the unit in case there is a burnt-up pump. The water
temp in the tank was at the setpoint of 45 deg C. There was no
water flow through the flow meter and the water pressure gage
read zero psi.

>>> 'semi' problem from rnorman -- Wed Jan 18 08:38:59 1989 <<<

Problem: The M&W chiller was not pumping water through electrode.

Cause: Phil found the band-clamp of the Procon pump removed; it could
       have vibrated off or was not tightened down the last time it was
       worked on.

Solution: Phil put the clamp back in place. The chiller in now up and
          operating in heat/cool mode.

>>> 'semi' problem from rnorman -- Wed Jan 18 13:58:36 1989 <<<

Problem: No pressure gauge on foreline.

Solution: A convectron gauge was install above the oil trap on the
          mechanical pump foreline. The base pressure of the pump with
          the foreline disconnected was 4 mtorr. The semi is up.

>>> 'semi' problem from hebert -- Thu Jan 19 18:14:56 1989 <<<

There is no water flow through the substrate table. The M&W
water pump is not working again.

>>> 'semi' problem from phillip -- Fri Jan 20 09:06:21 1989 <<<

P: The pump motor in the m&w chiller is shot. A new one has been
   ordered ($68.00) and will be here by next Tuesday, 1/24/89.

>>> 'semi' problem from hebert -- Tue Jan 24 14:57:45 1989 <<<

The turbo only powers up to about 60% of full speed and then
shuts down. The fore pressure was 38 mTorr when this occured.

Shorting the Proteus interlock at the back of the Advanced
Energy process controller did NOT eliminate the problem.

I turned on the N2 bearing purge and the turbo powered up to 
100% of full power, however it accelerated slowly from the
60% of full power level.

>>> 'semi' problem from rnorman -- Wed Jan 25 15:32:30 1989 <<<

Problem: The turbo was turning off before full speed.

Cause: There was a vacuum leak in the foreline that cause an increase
       back pressure on the turbo, which it turns off while pumping down.

Solution: James Parrish found a leak at a KF fitting, which he fixed.
          The turbo pump oil was low; some oil residue was found in the 
          foreline. 5CC of oil was put in the turbo; it is now just above
          halfway on the site-glass. The system was tested and is up.

>>> 'semi' problem from vallath -- Mon Jan 30 22:57:00 1989 <<<

The power supply falied to come on and the ITLK light on the power
supply controller flashed.  On repeating the step, it came on OK.
I don't know if we have a problem or not.
Vallath

>>> 'semi' problem from bob -- Wed Feb  1 15:40:38 1989 <<<

There is a muffin fan out in the RF supply. It needs fixing.

>>> 'semi' problem from mikeb -- Tue Feb 28 13:54:08 1989 <<<

Keep your ears open for a strange sound (mid-range whirring tone) coming
from inside the chassis.  It went away as I was investigating . . .

>>> 'semi' problem from vallath -- Wed Mar  1 10:26:24 1989 <<<

Rough pressure over 140 mTorr - maybe leak in foreline.
VN

>>> 'semi' problem from hebert -- Wed Mar  1 14:23:01 1989 <<<

I need a new ionization gage for the semi. It's a G-75-K. I'll
install it.

>>> 'semi' problem from parrish -- Thu Mar  2 14:01:38 1989 <<<

problem: Ion guage needs replacing, System won`t pump below 140mT

cause:   Chemicals attacking ion guage, The pump-oil,fittings, and the
         N2 purge.
solution:  replaced oil guage, changed the oil in the pump and new filters
           foreline pressure was 5 mT after cleaning and replacing the oil fil-
           ters, and KF fittings. Also Hebert cleaned the window and adjusted
           N2 purge valve he set it at 125mT ( which fills like it is still
           closed) a better purge valve is being ordered. System is up.
           

>>> 'semi' problem from hebert -- Thu Mar 30 16:15:47 1989 <<<

The RF power supply doesn't ignite plasma. The "INTERLOCK" light
is "ON" and the "SETPOINT" light comes "ON." I checked to make
sure that the control panel switches were in the proper position,
and reset the circuit breaker several times. This did not help.

The muffin fan was load this morning while I O2 plasma cleaned
the chamber. When I went to do an etch this afternoon, I discovered
that the plasma wouldn't ignite. The fan turns very slowly and 
isn't as loud as this morning. The fan stops rotating as soon as the 
circuit breaker is turned off, indicating high bearing load. 

I tried to replace the muffin fan thinking that low fan rotation
speed might be sensed either by a temp sensor or electrically
within the controller, and cause the INTERLOCK light to turn ON.
I wasn't able to remove the top cover plate because the phillips
screws are in very tightly and the screw heads are deforming.
The power supply will probably have to be brought down to the
machine shop to have these screws removed so that the muffin fan can
be replaced. I'm not sure that the fan is the cause of the problem.
The manual doesn't give very much info for troubleshooting.

The power supply has been unpluged from the AC outlet. The muffin
fan power leads are also disconnected. The side panel to the SEMI
cabinet has been removed and the side panel interlock switch defeated
so that the system can be run with the panel OFF. The new muffin fan
is on top of the SEMI, along with the allen screws for remounting the
power supply in the rack. A DO NOT USE SIGN is on the system.

THE SEMI IS DOWN.

EST REPAIR TIME: 2 hours

>>> 'semi' problem from parrish -- Fri Mar 31 13:32:34 1989 <<<

problem:    high foreline pressure was reported @ 140mT

solution:   I found the pressure at 5mT on top of the intake filter
            nevertheless I changed the oil filters.

>>> 'semi' problem from hebert -- Fri Mar 31 16:27:37 1989 <<<

Problem: RF power supply wouldn't ignite plasma.

Solution: Steve Hoagland replaced the bad muffin fan. Two
bad transistors were found along with a bad fuse. Apparently
the unit over heated because of the bad fan and the bipolar
transistors went into thermal runaway. The unit had been
reinstalled and tested.

THE SEMI IS UP.

Thanks for a job well done, Steve! Please report the parts
that were replaced and where they went in the supply. Also,
lets order the schematics. When we bought the SEMI I was told
that Advanced Energy never furnished schematics because they
considered them to be proprietary. Since they are now available,
let's spend the $75.00 and get them.

>>> 'semi' problem from hoagland -- Fri Mar 31 16:37:38 1989 <<<

\problem:  RF power supply failed- no output.

cause:  Overheating caused by bad cooling fan; Switching transistors
        failed on 50Volt supply causing 8amp fuse to blow.

solution:  Replace fan; replace 2N6678 transistors with ECG53's;
           replace blown fuse.

>>> 'semi' problem from mikeb -- Mon Apr  3 09:30:29 1989 <<<

Ion gauge does not work.  (It has not been working since before it was 
replaced 2 months ago.)

>>> 'semi' problem from hebert -- Mon Apr  3 17:40:29 1989 <<<

Problem: The RF power supply doesn't ignite plasma. The symptoms
are the same as last week before two bad transistors were replaced.

EST REPAIR TIME: 2 hours.

WE need the SEMI badly. Can we get this fixed right away?

DH

>>> 'semi' problem from hoagland -- Tue Apr  4 11:37:35 1989 <<<

problem:  RF power supply failed; interlocks made.

cause:  Blown fuse.  Reason for fuse failure unknown.

solution:  Replace fuse.  Unit was burned in for 20 minutes at
           400 watts on a dummy load without failure.

>>> 'semi' problem from hebert -- Wed Apr  5 14:27:49 1989 <<<

Problem: The DC bias varies by +/- 25%. Normally the DC bias
varies by about +/- 5%.

>>> 'semi' problem from hebert -- Wed Apr  5 17:22:47 1989 <<<

Problem: Erratic DC bias voltage.

Solution: I ignited a plasma and increased the power from
20% to 100%. I left the supply at 100% power for 10 to 15 seconds,
then reduced the power to 20%. The DC bias stability returned
to the normal fluctuation range (approx +/-5%). 

The chamber was vented twice, and a plasma ignited two times using
different chamber pressure. The DC bias was stable for both plasmas.

Apparently there was a problem with the tuning network, and bringing
the power supply to its upper rail caused the matching network/tuner
to tune properly.


THE SYSTEM IS UP.

>>> 'semi' problem from rnorman -- Mon Apr 10 09:19:46 1989 <<<

The semi will be down shortly to calibrate and install the turbo
N2 purge regulator. If you need to use it let me know what time
you would like to have the semi.

>>> 'semi' problem from hebert -- Mon Apr 10 11:19:44 1989 <<<

Problem: MFC's need adjustment. 

Solution: Adjusted all MFC's to read 0.0 when lines pumped out.

>>> 'semi' problem from rnorman -- Tue Apr 11 08:23:32 1989 <<<

I will work on the Turbo N2 puurge regulator this morning; if you
need to use the semi let me know.

>>> 'semi' problem from rnorman -- Tue Apr 11 10:07:01 1989 <<<

The turbo N2 regulator has been installed at the entry of the 
N2 flow meter. The regulator was set to 4 PSI; to operate 
properly it must have a differance of 20 PSI on the input, or
24 psi N2 supply pressure. 

>>> 'semi' problem from rnorman -- Tue Apr 11 10:11:07 1989 <<<

The semi is not roughing down below 248 mtorr.

>>> 'semi' problem from bob -- Tue Apr 11 15:32:28 1989 <<<

Dave Hebert fine tuned the bearing purge on the semi and has the roughing
pressure at an accpetable figure. Robert Norman will have to be informed
of the changes. He set the bearing purge at the value suggested by Balzers
and it should have been right on.

>>> 'semi' problem from mikeb -- Thu Apr 13 15:00:43 1989 <<<

Problem: Ion gauge does not work.  Problem exists since the tube was replaced,
as was reported previously.

>>> 'semi' problem from rnorman -- Mon Apr 24 09:59:11 1989 <<<

Problem: Ion gauge not working after replacement of tube.

Cause: The ion gauge cable was bad.

Solution: James Parrish had a extra cable that was installed in the
          semi. The ion gauge was tested and works well. The semi is up.

>>> 'semi' problem from hebert -- Mon May  8 14:57:07 1989 <<<

Problem: RF power supply won't ignite plasma.

>>> 'semi' problem from hebert -- Mon May  8 17:45:15 1989 <<<

Problem: RF pwr supply won't ignight plasma under any condition.

I suspect that we have either a bad fuse or a bad power transistor.
I removed the unit from the rack to replace the fuse inside the
housing. The fuse is in a difficult place to reach. Can Steve Hoagland
check out the problem? I left the power supply on the table in GL1.

EST repair time: Replace fuse only - 30 minutes
                 replace transistors - 3 hrs.

>>> 'semi' problem from hebert -- Tue May  9 12:21:33 1989 <<<

Checked fuses with ohm meter. They're OK. The transistors need
to be checked with a diode meter.

>>> 'semi' problem from hebert -- Tue May  9 12:31:44 1989 <<<

The powered electrode is shorted to ground. I used the HiPot
to determine this. The electrode will need to be removed so
that the cause of the short can be eliminated.

>>> 'semi' problem from hebert -- Tue May  9 15:46:37 1989 <<<

Problem: RF power supply won't ignite plasma.

The powered electrode was found to be shorted to ground due to the
glycol used to control substrate temperature. RNorman drained the
glycol from the electrode, flushed the electrode with DI water,
and then HIPOT'd. The electrode wasn't shorted to ground after
doing this.

The transitors that were replaced about a month ago were checked 
and were found to be OK. Two green diagnostic LED's on the same
PCB also light up, supposedly meaning that everything is OK.

Bob, can Steve Hoagland be assigned to this? We need the etcher
right away. Mario is ordering the glycol and I'd like to get it
in-house right away so that the chiller can be drained, purged with
DI water, and refilled with new glycol. We appreciate all that you
can do to help us get this system back up. It is used heavily by 
our group.

>>> 'semi' problem from hoagland -- Wed May 10 17:21:01 1989 <<<

The RF supply is working, but I had to cut a trace to allow this.
One of the user control lines labeled CEX was disabling the exciter
board.  In our schematics this line shows an open connection to the 
user socket on the back of the supply.  However that line is being
held low by something not identified in our prints inside the chassis.
I will confer with Advanced Energy tomorrow about an updated schematic
and hopefully resolve the problem by noon.

>>> 'semi' problem from hoagland -- Thu May 11 15:47:15 1989 <<<

problem:  RF power supply will not output power to dummy load; no
          fault indication present.


cause:  Arcing in the chamber damaged a control line between the user
        interface connector and the exciter board.  This CEX control
        signal, used to disable the local oscillator in a Common EXiter
        mode(for paralleling supplies) was stuck low(disabling oscillator). 
        Either a burned trace or damaged undocumented component(likely zener
        diode) is probable cause.


 solution:  Advanced Energy agreed it would take quite a while to completely
            disassemble the chassis and isolate such a failure.  Since this
            CEX signal is not used in our installation the problem was corrected
            instead by disconnecting the damaged section of line.  This was
            accomplished by cutting the CEX signal trace under R14 on the
            exciter board.  In later versions of this RFX600 supply zener
            protection was incorporated for this line on the exciter board
            itself.

>>> 'semi' problem from rnorman -- Fri May 12 13:46:22 1989 <<<

Problem: Lower electrode shorted.

Cause: The prop-gly in the semi chiller was conductive causing
       the hi-potter to fail instantly at its lowest setting,
       lowest sensitivity.

Solution: The old prop-gly was drained out and new prop-gly was added.
          There was a lot of Prestone in the chiller either that
          or it changed color to green. The prop-gly that was added
          is clear; 10 gal of prop-gly were added with the balance
          being DI, another 10 gal or so. We have 10 gal left to 
          go into the chem-room. After filling up the chiller all lines
          were reconnected and tested for leaks, none were found after
          1 hour. The lower electrode was hi-potted and failed at 2.5 KV
          at low sensitivity. The semi is up for use.

>>> 'semi' problem from evan -- Thu Jun  1 16:32:44 1989 <<<

House O2 line was vented to atmosphere and needs to be purged.  Plasma
shows nitrogen is present.  

>>> 'semi' problem from hebert -- Thu Jun  1 19:03:29 1989 <<<


Contaminated house O2 will effect our etch processes. I have a
regulator that I could donate if the lab will install an O2
bottle to the SEMI. 

>>> 'semi' problem from hebert -- Wed Nov  8 09:19:44 1989 <<<

The RF power supply won't ignite a plasma. The "SETPOINT" light
flashes when the "RF ON" light is on.

The Semi is down.

>>> 'semi' problem from hebert -- Wed Nov  8 10:07:11 1989 <<<

Problem: Power supply won't ignite plasma.

I checked resistance between the powered electrode and ground.
The resistance is about 3 meg-ohms.

I pulled the power supply out of the equipment rack. I connected
the interlock jumper. The power supply still doesn't power up.

I left the power supply on the bench next to the SEMI.

>>> 'semi' problem from hebert -- Mon Nov 13 08:21:25 1989 <<<

Problem: power supply won't ignite plasma.

Can I get an update on the status of this repair and the
estimated time that it will take to finish the repair?
There haven't been any updates on the Wand since I 
originally reported the problem. Thank you!

>>> 'semi' problem from bob -- Mon Nov 13 09:41:17 1989 <<<

The semi remains down while Steve Hoagland repairs the RF 
supply. It should be operational later today.

>>> 'semi' problem from bob -- Wed Nov 15 15:31:43 1989 <<<

The semi is operational with a rented power supply. It's power
supply is being repaired and should be early next week.
The semi is up.

>>> 'semi' problem from hoagland -- Fri Dec  8 09:47:06 1989 <<<

The original Advanced Energy RF supply has been repaired(with
upgrades) and reinstalled in the semi.  It was operated for
20 minutes without problem- the semi is up and available for use. 

>>> 'semi' problem from evan -- Thu Mar  1 08:42:42 1990 <<<

taurus box failure

>>> 'semi' problem from hebert -- Thu Mar 15 15:58:45 1990 <<<

The M&W heater/chiller heats but will not cool.

>>> 'semi' problem from rnorman -- Fri Mar 16 09:55:23 1990 <<<

I called M&W and told them the situation that the relay on the 
PCB is engaging but the compressor is not turning on.  John Pataye
said that is looks like the freon pressure interlock switch is open.
I talked with Bob and it was decided to call Aladin to check out
and recharge the compressor.  Bob will make the arrangements.
Dave said the chiller is usable, but will need it with in one week.

>>> 'semi' problem from bob -- Fri Mar 16 11:11:18 1990 <<<

Alladin Mechanical Contractors has been contacted regarding the servicing
of the chiller on the semi. Doug Murray of Alladin, will be sending
someone by for an estimate of this repair.

>>> 'semi' problem from rnorman -- Mon Mar 19 12:18:10 1990 <<<

The Alladin Contractor has arrived and is working on the chiller.
The semi will be down until he is done.

>>> 'semi' problem from rnorman -- Mon Mar 19 13:01:37 1990 <<<

The man from Alladin found the problem with the chiller.  It is
the large coil on the contactor located under the "reset box".
He does not have the coil on hand, but will come back tomorrow
with the new coil.  The semi is up for use until he comes back 
tomorrow.

>>> 'semi' problem from rnorman -- Tue Mar 20 14:26:00 1990 <<<

Problem: The Heat/Cool chiller was not chilling down.

Cause: The coil to the large contacter under the "reset box"
       was bad; the contacter was not engaging the compressor.

Solution: Alladin found the problem and replaced the coil.  The
          compressor had a freon leak and needed charged with freon;
          the fitting/gas valve was tightened down.  The Alladin
          repairman also noticed that there was no interlock/timer
          on the compressor to keep it from burning up; due to starting
          up too quickly after a power failure.  He installed a
          3 min. time delay relay to the contacter to prevent damage
          to the compressor; with heberts permission.  The chiller is
          now up and operating.

>>> 'semi' problem from rnorman -- Tue Mar 20 14:41:13 1990 <<<

The main power outlet to the chiller is loose and the plug
slips out.  The power to the chiller acts intermittent if it
is moved.  The power receptacle and/or the plug needs to be
replaced.

>>> 'semi' problem from bob -- Wed Mar 21 08:27:40 1990 <<<

The problem of the plug/recepticle needing replacement on the
semi has been added to Phill's techjobs. As this problem is
not effecting the use of the semi it will be removed from the
e-stat board.

>>> 'semi' problem from phillip -- Tue Mar 27 11:10:08 1990 <<<

P: A.C. line cord receptacle is intermittent.
S: Replaced 3P/240V/4wire receptacle. The chiller
   no longer turns on & off by moving the power cord.

The chiller is up.

>>> 'semi' problem from hebert -- Wed Mar 28 09:30:05 1990 <<<

Problem: The CHF3 gas line wouldn't pump out. The minimum flow
was 9.5 sccm after pumping out (should be 0.0 sccm). 

Solution: The leak was determined to be at the shut off valve that
isolates the regulator from the gas line. There IS NO external leak
that is detectable by monitoring gas flow with MKS Baratron.

>>> 'semi' problem from hebert -- Wed Mar 28 15:18:52 1990 <<<

It would be a good idea to change the valve that causes gas to
leak from the regulatorr to the gas line. It's easy to do and
will prevent any further reports of gas line leak on the CHF3 line.

>>> 'semi' problem from parrish -- Tue Apr  3 10:59:29 1990 <<<

problem:    gas leaking to the line.

cause:      shutoff valve leaking across the seat

solution:   removed valve from system,cleaned,reinstalled and checked
	    line. system and line tight.
