>>> 'randex' problem from bob -- Thu Jan 26 07:28:13 1989 <<<

The cryopump on the rahdex is ratcheting and likely need decontamination.
It will be shut down this AM, decontaminated and returned to service.

s

>>> 'randex' problem from rnorman -- Thu Jan 26 08:07:08 1989 <<<

The randex will be down for decontamination of the cryo. The Helium 
line have beed disconnected from the compressor and the cryo is now
being regenerated. It will be down until 12:noon or so.

>>> 'randex' problem from rnorman -- Thu Jan 26 13:48:43 1989 <<<

The cryo is at atms. and the cryo is ready for decontamination.
The UHP Helium is next to the randex ready for use.

>>> 'randex' problem from bob -- Thu Jan 26 15:41:45 1989 <<<

James Parrish purged the cold head of the randex to eliminate
contamination in the He. The cryo pump has been regenerated and
is cooling down. Assuming this purge was successful, the randex
should be ready about 18:00.

>>> 'randex' problem from bob -- Wed Feb  1 13:51:36 1989 <<<

The randex cryopump has been regenerated and is ready for use.

>>> 'randex' problem from khui -- Thu Feb  2 00:27:44 1989 <<<

after 1st cryo pump regeneration:
Chamber pressure: 3x10(-6)
Cryo pressure: 1x10(-6)  with vacuum valve closed

Regenated again. The cryo temperature goes up immediately, an indication that
the pump was saturated.  Same result after 2nd regeneration.
Randex is down.

Kelvin.

>>> 'randex' problem from khui -- Thu Feb  2 01:39:27 1989 <<<

the randex is working fine now.  Even the cyro temp was sufficiently low (~14K)
it took quite a while for the cryo pressure (with high vacuum valve closed)
to reach low 10(-7) after regeneration.

kelvin.

>>> 'randex' problem from rooney -- Fri Feb  3 06:48:14 1989 <<<

base pressure too high
pressure = 5X10-4
cryo temp = 14K

>>> 'randex' problem from rnorman -- Fri Feb  3 11:56:59 1989 <<<

Problem: Base pressure of cryo not good; also, when the chamber is vented
        the cryo pressure goes up.

Cause: The chamber has a vacuum leak and the hivac valve is leaking also.

Solution: The chamber and cryo were vented and target 1 was removed and cleaned;
          also, the hivac valve o-ring was cleaned, it was very dirty. The main
          chamber o-ring was removed, cleaned and reinstalled; a new o-ring
          will be ordered by parrish for future replacement. The cryo has
          been regenerated and is now chilling down, it should be ready
          for use by 2pm to day.

>>> 'randex' problem from liang -- Tue Feb  7 18:24:53 1989 <<<

The cooling water pressure is low and it prevent the high power being
turned on. I will try late to see if it return to normal or not.

>>> 'randex' problem from liang -- Tue Feb  7 22:22:44 1989 <<<

The pressure of cooling water is still too low to turn on the
power supply. 

>>> 'randex' problem from rnorman -- Wed Feb  8 09:06:17 1989 <<<

Problem: Water flow too low to enable RF supply.

Cause: It does look like the return side of the water loop has 
       higher pressure. 

Solurion: I ran the water supply into a jar and the flow was 700ml/min.
          This flow is probably enough for cooling, but the problem is
          the back pressure is high. On the randex there are two water
          3-way valves; one has water supply and air supply (to change 
          targets), the other valve has water return and drain (used for
          changing targets). If you have problems with the Rf not turning
          on again; to increase flow turn the second valve, return/drain,
          to drain. This will reduce the back pressure and allow you to use
          the RF supply. The randex is up.

>>> 'randex' problem from rnorman -- Wed Feb 15 15:35:43 1989 <<<

The randex will be down for a cryo regeneration; it was setting at
16~K, too high.

>>> 'randex' problem from rnorman -- Wed Feb 15 16:45:17 1989 <<<

Problem: Down for cryo regen.

Cause: Temp at 16~K, too high.

Solution: The cryo was regened and is now pumping down. It should be up
          and ready for use by 6:30 pm tonight.

>>> 'randex' problem from rnorman -- Thu Feb 23 11:37:20 1989 <<<

Problem: Water flow meter not rotating.

Cause: IT looks like we are and have been having REC. water problems;
       there is a high back pressure on the return line. This is causing
       low water flow through the water flow meter.

Solution: I replace the protius water flow meter and it did not change the
          problem. There is about .75 GPM of supply water, but the back pressure          is so high it goes to nothing. To run the randex until this problem
          is repaired the supply water must be dumped down the "Drain" as noted
          on the water control knob. The randex is operational.

>>> 'randex' problem from phillip -- Mon Feb 27 08:08:06 1989 <<<

P: Cryo temp to 138K. Sounds as if a pneumatic valve is cycling.
   Turned off compressor.

>>> 'randex' problem from rnorman -- Tue Feb 28 16:22:35 1989 <<<

Problem: Cryo temp at 138~K.

Cause: Someone had turned the water return line off to the
       randex and ionmill; this caused the cryo compressors
       to warm up and turn off.

Solution: Phillip found the cryo warm and turned it off. Today
          the cryo was purged and is now chilling down. The randex
          will be up for use by 6:30pm tonight.

>>> 'randex' problem from rnorman -- Fri Mar 10 14:34:23 1989 <<<

Target 1 was changed to Pt and target 3 changed to Ta. The randex
is now up for use.

>>> 'randex' problem from moazzami -- Tue Mar 14 08:04:31 1989 <<<

Can not ignite plasma (too much reflected power).

>>> 'randex' problem from rnorman -- Tue Mar 14 12:36:09 1989 <<<

Problem: Could not ignite plasma.

Solution: The plasma would not ignite at first, but after looking into
          it and adjusting the LOAD & TUNE knobs the problem went away.
          Also, the heater blew a fuse and was replaced by Peter.
          The randex is up.

>>> 'randex' problem from rooney -- Wed Mar 15 18:55:10 1989 <<<

cryo temp up to 18K during deposition

substrate table assembly "froze" in mid-rotation.  There's nothing obvious
hanging it up.  As it stands now, the table will not move.

>>> 'randex' problem from rnorman -- Thu Mar 16 07:20:22 1989 <<<

Problem: Cryo temp @ 18~K and the J-Arm is stuck in mid-rotation.

Cause: Cryo is due for a Regeneration and the shielding for target 2
       was jamming up the J-arm movement.

Solution: The cryo is being regenerated and should be up for use
          by 10AM today; also, the target shielding was unstuck and
          adjusted back in place. The randex will be up by 10Am.

>>> 'randex' problem from moazzami -- Thu Mar 16 15:34:47 1989 <<<

pressure on nitrogen gun next to the randex is too low.

>>> 'randex' problem from khui -- Fri Mar 31 13:47:25 1989 <<<

1) water flow rate too slow
2) table won't turn
3) pressure of nitrogen gun too low
4) cryo pump probably needs regeneration ( I can do it over the weekend, but
   not today).

>>> 'randex' problem from rnorman -- Tue Apr  4 13:32:24 1989 <<<

The J-arm rotation problem is due to a froze up bearing in the 
J-arm assembly. The bearing will need to be removed and replaced; the
mech-shop is removing the bearing at this time. The new bearing will
need to be ordered and install, this will take 2 or 3 days. You will
be informed of the progress.

>>> 'randex' problem from rnorman -- Thu Apr  6 11:08:46 1989 <<<

The J-arm rotation bearing has been orders and will be here friday
or this comming monday. At that time it will need to be pressed into
to bearing assly and installed in the randex. The randex should be
up for use by mid-week. For future referance the Fafnir bearing
number is B542DD-FS464 from Bearings INC.

>>> 'randex' problem from rnorman -- Fri Apr  7 15:46:50 1989 <<<

The J-arm rotation bearing that was ordered will be here on monday.
King Bearing, in Oakland, call back that their driver could not find
Cory Hall, so he brought it back. The driver will call me on monday
before he delivers. The randex should be up by tuesday.

>>> 'randex' problem from rnorman -- Mon Apr 10 16:44:31 1989 <<<

The bearings have arrived and have been installed in the J-Arm 
housing. Tomorrow I will install them in the randex

>>> 'randex' problem from rnorman -- Wed Apr 12 16:51:23 1989 <<<

The J-arm housing has been installed and the randex is under vacuum.
I'm sorry I could not finish it today; all that is letf is connecte
the drive motor and gear, check if the microswitch positions are
correct, ck for water leak and leak check if necessary.

>>> 'randex' problem from rnorman -- Mon Apr 17 16:46:23 1989 <<<

Problem: J-arm not rotating.

Cause: The J-arm housing bearings were froze up.

Solution: The bearings were replaced and the j-arm adjusted. The system 
          was leak tigh this morning @ 3x10-7. The randex is up for use.

>>> 'randex' problem from rnorman -- Mon May  1 07:56:43 1989 <<<

The cryo temperature was at 16~K this morning and will be regenerated.
It should be up by 12 noon.

>>> 'randex' problem from rnorman -- Mon May  1 10:00:39 1989 <<<

Problem: Cryo temp at 16~K, high.

Cause: Normal use.

Solution: The cryo was regenerated and is now chilling down. It will
          be operational by 12noon.

>>> 'randex' problem from rnorman -- Mon May  1 10:38:45 1989 <<<

The regenerated cryo was ratacheting and will need to be decontaminated.

>>> 'randex' problem from bob -- Mon May  1 14:51:41 1989 <<<

The cryo ratcheted upon restart. It has been decontaminated and is cooling
down again. While down, a flow restrictor was added to the randex and the
ionmill cryo compressors. This has increased the recirc available for target
cooling on the randex to an acceptable,reliable amount. The randex should
be available for use by 17:00 if the cryo proves reliable.

>>> 'randex' problem from rnorman -- Tue May  2 13:02:32 1989 <<<

Problem: After regen cryo started ratcheting durring chill down.

Cause: Whenever a cryo is making a noise different then normanl, most
       likly it is because the cryo is contaminated with H2O vapor. The
       H2O vapor condenses in the inner cold head and freezes, this causes
       grinding, ratcheting or other types of funny noises.

Solution: When ratcheting is heard in the cryo the following should be done:
          -Have your cryo wrenches ready and then turn off the cryo compressor.
          -Immediatly disconnect the return and supply gas lines from the 
           compressor.
          -Regenerate the cryo; warm up to room temp(287-290~K).
          -Once cryo is warm connect 99.999% He bottle to the supply
           gas line going to the cryo.
          -Connect purge exhoust fitting w/gauge to the return gas
           line comming from the cryo.
          -Open He bottle valve and set regulator to static pressure
           of compressor.
          -Open exhoust fitting
          -Turn on the compressor to actuate cryo cold head valves.
          -Let He bottle to purge through cryo for 10-15 sec, then
           close He exhoust valve 3-5 sec so cryo line can build up
           pressure; open He exhoust valve and repeat 4-6 times.(1-2 min
           total time)
          -Turn off compressor, disconnect He bottle from cryo and
           exhoust valve, reconnect gas lines from cryo to compressor.
          -finish cryo regeneration and chill down cryo.
          -Decontamination of cryo compleat

Note: The above should only be done by staff personnel unless
      authorization is given.

>>> 'randex' problem from parrish -- Tue Jul 25 07:01:27 1989 <<<

cold-head ratcheting

>>> 'randex' problem from rnorman -- Fri Jul 28 07:53:38 1989 <<<

Problem: Cold head ratcheting.

Solution: The cryo was regenerated by dchin and the noise stopped.
          This is a good sign of a cryo contamination; after warming the
          cryo the H20 vapor dispersed back into the Helium lines, only to
          accumulate back in the cold head latter.  This will have no
          effect on your wafers.  The randex is up.

>>> 'randex' problem from carlos -- Tue Aug 22 16:01:01 1989 <<<

The plasma (SiN) does not ignite. P=7mT, Ar=125sccm, N2=25sccm.
It seems that the tuning knob is not working. Please fix asap.

>>> 'randex' problem from rnorman -- Wed Aug 23 14:56:28 1989 <<<

Problem: No plasma at SiN

Solution: Way out of tune; could not duplicate any other problem.
         The randex is up.

>>> 'randex' problem from rnorman -- Thu Aug 24 07:08:28 1989 <<<

The randex will be down until 10am to regen the cryo.

>>> 'randex' problem from rnorman -- Thu Aug 24 09:06:31 1989 <<<

The cryo was regened and it is now chilling down. The randex will
be up for use by 10am. As a reminder, the targets installed at this
time  are:   #1) SiO2  #2) Al #3)SiN

>>> 'randex' problem from rnorman -- Mon Sep 18 11:52:04 1989 <<<

dchin and scotts had a problem with the J-arm and wandered if the 
arm can be configured to RF dias etch mode. I will look into it dias
etch.
  

>>> 'randex' problem from rnorman -- Mon Sep 18 14:31:14 1989 <<<

Problem: Hard to ignite sputter etch mode.

Solution: got to work with no problem; tested good. 

>>> 'randex' problem from rnorman -- Fri Oct 13 07:41:48 1989 <<<

The randex cryo is being regenerated at this time.  You will be informed
when it is up, in about 3 hrs.

>>> 'randex' problem from rnorman -- Fri Oct 13 15:01:09 1989 <<<

The randex cryo is chilling down and will be operational
in one hour.

>>> 'randex' problem from liang -- Mon Oct 16 01:53:30 1989 <<<

The vaccun can not reach below 8-9e-7. 
liang

>>> 'randex' problem from bob -- Mon Oct 16 15:40:48 1989 <<<

The target assembly has been removed, the o-ring cleaned and
the o-ring surface cleaned. The system is now reassembled and
pumping down. It will be checked in the morning for better
base pressure. 
The randex is up for use.

>>> 'randex' problem from bob -- Tue Oct 17 08:14:17 1989 <<<

The randex is down for regeneration.

>>> 'randex' problem from bob -- Tue Oct 17 13:56:49 1989 <<<

The randex has been regenerated in an attempt to find out why the base
pressure of the cryopump is high. It is cooling down and should be ready 
for use by 17:00 today. The roughing time on the cryo is far less than it
used to be therefore it is likely the activated carbon array is partially
loaded. James Parrish will be consulted to see if it is time for service
on the cryopump.

Currently there is:

WSi-Zr-SiN are installed in the randex.
 
The randex is up for use at 17:00. Target changes should be
resubmitted if another target is needed.

>>> 'randex' problem from hphlee -- Thu Oct 26 00:33:13 1989 <<<

When depositing silicon, after 90 minutes, the target bias jumped
suddenly from 700 V to 1700 V.  All other gauges kept the same values,
and the plasma was still there.

jay tu and henry lee

>>> 'randex' problem from rnorman -- Thu Oct 26 07:46:41 1989 <<<

Problem: After 90 minutes of sputtering the target bias jumped
         from 700Vdc to 1700Vdc.

Solution: I tested the Si target but could not duplicate the problem.
          The target bias or DC Bias is normally proportional to the
          amount of RF applied power.  For the target bias to jump up
          in voltage so dramaticly the application of RF power would
          also have to increase dramaticly, by which ever means.  I
          have no other answer why the DC bias increased at this time.
          The randex is up.

>>> 'randex' problem from rnorman -- Thu Nov  9 07:44:09 1989 <<<

Problem: Report of temperature rise of cryo when the chamber was vented.

Cause: I vented the chamber and partical were very thick on the bottom
       plate.  Most likly the cause was some particals fell down across
       the gate valve creating a leak.

Solution: The chamber was cleaned out with a vacuum.  I waited awhile
          to see if the pressure in the cryo increased, but it did not.
          The particals causing the leak must have been sucked into the
          cryo; only a very small leak occurred to 2x10-6.  The randex
          is up.

>>> 'randex' problem from mmesser -- Mon Dec 18 14:48:04 1989 <<<

This is a tough one. The fuse on the variac sitting on the Randex blew. I
hope we can find an expert to fix it.

>>> 'randex' problem from rnorman -- Tue Dec 19 07:01:37 1989 <<<

Problem: Variac for heat plate blew a fuse.

Cause: The hot plate shorted out on the hot plate arm, most likely
       when moving the J-arm.

Solution: When using this primitive hot plate set up, one must be
          very careful when installing the plate; make sure
          the fasten screw is tightened down so the hot plate
          does not also turn when the j-arm is rotated.  The 
          hot plate fastening screw was tightened and tested.
          The randex is up.

>>> 'randex' problem from rnorman -- Tue Dec 19 08:11:32 1989 <<<

The cryo is down for a regeneration.  It will be up by 11:am.

>>> 'randex' problem from rnorman -- Tue Dec 19 09:56:24 1989 <<<

Problem: Cryo temp too high, at 16~K.

Soluiton: The cryo was regenerated and is now pumping down.
          It will be ready for use by 11am.

>>> 'randex' problem from bob -- Thu Dec 28 12:10:56 1989 <<<

The randex is at 17K. It is being regenerated. The Pt target will
be changed to SiO2 for Darrel Denlinger who is here from San Diego.

>>> 'randex' problem from bob -- Thu Dec 28 14:05:13 1989 <<<

The randex has been regenerated and is cooling down. The
cryo should be cooled down by 17:00 today.

The target was not changed to SiO2 therefore the header remains
unmodified and the targets as per before regeneration.

>>> 'randex' problem from mmesser -- Fri Dec 29 17:21:34 1989 <<<

When I press the vent valve, the pressure in the ion gauge goes up. The 
temperature in the cryopump goes up. Turning off the vent and pumping down
makes it happy. Leaky high vac valve is likely cause.

>>> 'randex' problem from rnorman -- Wed Jan  3 07:05:36 1990 <<<

Problem: Large pressure rise in cryo when chamber is vented, temperature
         increases.

Cause: The gate valve had some particle(s) across seal.

Solution: Opened and closed gate valve 2 or 3 times, in hope to
          dislodge particles on seal.  The chamber was vented and
          a small increase in the cryo pressure was observed, to
          5x10-6 on the ion gauge.  This is acceptable for this 
          system.  The next time the cryo is regenerated the gate
          valve seal will be wiped clean.  The randex is up for use.

>>> 'randex' problem from kim -- Thu Jan 18 13:16:53 1990 <<<

Problem:  There is a burning smell in the power supply.  When
          the power ramp up to 400 watts, it dropped down to
          200 watts very quickly and can't ramp up to 400 watts
          any more.  R. Norman will look into it.

>>> 'randex' problem from rnorman -- Thu Jan 18 14:58:02 1990 <<<

The RF supply is not operating correctly.  The randex is down at this
time.  Tomorrow I will further check out the supply.

>>> 'randex' problem from rnorman -- Fri Jan 19 08:56:00 1990 <<<

Problem: RF Power Supply has a funny smell.

Solution: Yesterday I did smell something funny, but today I ran the
         RF supply up to 800 watts into a dummy load and no problem
         or smell ocurred.  The supply must have just heated up
         yesterday.  The randex is up.

>>> 'randex' problem from bob -- Mon Jan 22 07:20:55 1990 <<<

The belts on the randex mechanical pump were replaced as they
were badly worn. The cryopump was regenerated and the randex is 
up.

>>> 'randex' problem from rnorman -- Fri Feb 16 06:32:44 1990 <<<

Randex not pumping down below 2x10-6, looks like a vacuum leak.

>>> 'randex' problem from rnorman -- Fri Feb 16 09:10:55 1990 <<<

The cryo is being regenerated and should be up for use by 11AM.

>>> 'randex' problem from rnorman -- Fri Feb 16 11:32:13 1990 <<<

The cryo was regenerated and is now chilling down.  Target 2 was
changed to Al and target 3  was changed to SiN.

>>> 'randex' problem from rnorman -- Wed Feb 21 13:52:38 1990 <<<

Problem: Vacuum leak in chamber a 2x10-6.

Solution: Two leaks were found one at a view port, the o-ring was 
          replaced; and the other at the leak check port, the 
          Rad lab fitting was removed and blanked off.  The leak
          check valve has a bad bellow and will be repaired by
          parrish.  The base pressure at this time is 5x10-7.
          The randex is up.

>>> 'randex' problem from dchin -- Sun Mar 11 16:06:36 1990 <<<

It took many tries to lower the hoist. Once it was lowering, it was
coming down at higher rate than used to be. It almost slammed onto the
chamber base.

David

>>> 'randex' problem from rnorman -- Mon Mar 12 12:58:30 1990 <<<

Problem: Hoist raises slowly and when lowering it first hesitates
         then accelerates as it moves down, hitting the chamber a
         little hard.

Cause: The hoist bushing was gummed up and sticking, causing a
       hesitation effect at first.   Also, the taurus solenoid
       to the air line was a little clogged and limiting the air
       flow.

Solution: The hoist bushing was cleaned and lubricated; also, the
        solenoid was removed from the air line and a new taurus
        solenoid was installed on the vent, just before the vent
        valve.  The hoist was tested and the randex is up.

>>> 'randex' problem from denlinge -- Tue Mar 27 17:58:01 1990 <<<

Water was dripping from the left water knob very slowly- about
1 drop every several minutes.  I don't know if this is important or not.

>>> 'randex' problem from rnorman -- Thu Mar 29 13:33:18 1990 <<<

Problem: The left water knob was leaking water.

Solution: The compression nut was tightened down. No
          leak was then noticed.  Randex is up.

>>> 'randex' problem from denlinge -- Sun Apr  1 11:23:02 1990 <<<

The were lead to the hot plate broke right at the connector to the plate.
Needs to be reattached.

>>> 'randex' problem from rnorman -- Tue Apr  3 07:19:35 1990 <<<

Problem: Hot plate voltage wire broken off from connector.

Solution: Two new voltage connectors were attached to the 
          lead wires and firmly connected to the hot plate.
          The randex is up.

>>> 'randex' problem from parrish -- Thu Apr  5 15:00:09 1990 <<<

problem:    system need regenerating

cause:       cryo-temp to high

solution:    regenerated system should be ready for use by 5:00pm today

>>> 'randex' problem from rnorman -- Fri Apr  6 13:39:35 1990 <<<

The cryo pressure was not getting below 2x10-6, so it is being
regenerated.

>>> 'randex' problem from hebert -- Fri Apr  6 14:57:17 1990 <<<

The cryo pump is very noisy as it is cooling down after regen.
The temp is 223 deg K. I turned off the compressor to let the
pump warm up. Sometimes this helps reduce/eliminate ratcheting.

>>> 'randex' fix from rnorman -- Mon Apr  9 06:43:58 1990 <<<

The randex compressor will be turned on, it should have been turned
on over the weekend and reported up.

>>> 'randex' problem from rnorman -- Mon Apr  9 06:45:42 1990 <<<

The randex cryo will be regenerated and turned on.

>>> 'randex' fix from rnorman -- Mon Apr  9 06:55:14 1990 <<<

Problem: Cryo making noise, so compressor was turned off.

Solution: The compressor was turned back on by someone and
        it was not reported up.  Any way, the cryo is chilled
        down and the randex is up.

>>> 'randex' problem from rnorman -- Tue Apr 10 14:55:53 1990 <<<

The randex is down for a chamber clean.  It will take 1-2 more days
to finish cleaning, re-assembly and leak checking.  DO NOT USE!
Please send me target requests to be installed when done.

>>> 'randex' problem from rnorman -- Wed Apr 11 14:56:01 1990 <<<

The randex has been disassembled and cleaned.  Tomorrow I will 
do some minor cleaning and then reassemble.  IT may be up
by Friday morning.  DO NOT OPERATE.
.

>>> 'randex' problem from rnorman -- Thu Apr 12 14:49:37 1990 <<<

Tomorrow I will continue to assemble the system and then leak
check.  DO NOT OPERATE.

>>> 'randex' fix from rnorman -- Fri Apr 13 14:45:32 1990 <<<

Problem: Chamber clean.

Solution:  The chamber was totally disassembled and cleaned thoroughly;
         bead blasted chamber walls and other small parts, sanded down
         top and bottom plates.  All o-rings in the chamber assembly
         was replaced:

         top chamber o-ring, 2-473; bottom chamber o-ring, 2-472
        -J-arm upper seal to atms, 2-337; inner ceramic 2-110&2-116
        -Shutter feedthru, 2-026; T.C. Feedthru, 2-122; view ports, 2-229;
         all 6 blank-offs, 2-216.

         The chamber was leak checked and is leak tight.  Al, Ti and Pt
         was re-installed.  The cryo was regenerated and is chilling down
         at this time.  The randex should be up for use by tonight if
         no problem occurs with the cryo chilling down.

>>> 'randex' problem from rnorman -- Mon Apr 16 08:09:36 1990 <<<

The cryo has a thermal short at the top.  It will have to
be pulled and checked out.  The randex is down.

>>> 'randex' problem from rnorman -- Mon Apr 16 13:06:28 1990 <<<

The cryo was pulled out, turned upside down(to remove anything that 
could cause a thermal short) and then capped off and chilled down;
outside the randex.  The same problem resulted, the upper 1/4 got
frosted up.  Parrish called CTI and gave us a couple suggestions,
one being we have a vacuum leak in the cryo and another the inner
array is bad.  I will leak check the cryo for a vacuum leak, if no
leak is found the inner array may need changed out, parrish says
they cost about $500.   The randex is down.

>>> 'randex' problem from parrish -- Tue Apr 17 09:09:48 1990 <<<

update:   The randex cryo-pump is being replaed with a spare pump
          cleaning and installing will proberly take the rest of the
          day.

>>> 'randex' problem from rnorman -- Tue Apr 17 14:41:14 1990 <<<

The other cryo was installed and chilled down fine.  When the 
chamber was vented the cryo dumped, due to a leak across the 
hi-vac valve.  The cryo was vented up and the gate valve cleaned
from the chamber side.  The cryo is now regenerating and will be
chilled down in the morning.  DO NOT OPERATE.

>>> 'randex' fix from rnorman -- Wed Apr 18 10:35:00 1990 <<<

Problem: Cryo dumped after venting chamber.

Cause: Leak across the gate valve o-ring.

Solution: The gate valve was removed and all sealing o-rings
         replaced, see comments for o-ring numbers.
         The cryo was regenerated and is now chilling 
         down.  It should be up for use by 12 noon.

>>> 'randex' problem from bmartin -- Wed Apr 18 18:01:21 1990 <<<

The deposition of Ti and Pt was fine.  The chamber pumped down to below
6 x 10-7.  After venting system to remove wafer, the O-ring for the lid
came out of its groove.  Although I reseated the O-ring, the chamber would
not pump down below 100 torr.  I believe the leak at the O-ring can be
fixed easily using vacuum grease and/or a new O-ring, but I'll let
Robert handle this task.  By the way, I'm finished with the Ti and Pt
targets for now.

>>> 'randex' fix from rnorman -- Thu Apr 19 07:44:10 1990 <<<

Problem: Not pumping down below 100 torr.

Cause: Chamber o-ring not fully in o-ring groove.

Solution: The o-ring was removed, clean, and re-greased.  The Cu
          target was also installed at #3.  The base pressure of the cryo was
          1.8x10-7, inside the cryo, with a temperature of 12-13~K.  The randex
          is up for use. 

Note: When ever a vacuum system can not pump below 1 torr, especially
      if it can't go below 100 torr,  don't leave it roughing all night.
      Stop the system from pumping by pushing the stop button, or in this
      case the "Vacuum" pump button.  It is better on the pumping unit.
~
     

>>> 'randex' problem from guochun -- Fri Apr 20 01:45:20 1990 <<<

When RF power is applied to target 3. Target 1 is also ignited (at about 115W), after that happened, I reduced the RF power.  Plasma at target 1 disapear at around 90 W.  I did the similar experiment to target 1, no similar problem occurs.
But when I apply RF to target 2. Both 1 and 3 are weekly ignited.  The copper
film I got is not as shiny as what I got last month.  Also, it seems there is
some leaks in the Ar line.  I pumped the line for about 45 mins. The pressure
is 5x10-6.  The cryo pump works VERY well.  Base pressure  as low as 4x10-7
can be reached within one hour.
guochun

>>> 'randex' fix from rnorman -- Fri Apr 20 07:30:09 1990 <<<

Problem: RF leakage from one target to the other and cloudy wafers.

Cause: The RF leakage may have been caused by low conductance between
       the RF selector switch and the pins for each target.  A leak
       in the Ar gas line may have contributed to the cloudy wafers,
       among other factors.

Solution: The contacts on the RF target select switch were cleaned and
         the poly line was removed and a SST gas line was installed from
         the Ar bottle to the MFC valve.  The SST line is pumping out.
         Base pressure this morning was 2x10-7 before pumping on the new gas
         line.  Let me know how it turns out.  The randex is up.

>>> 'randex' problem from hebert -- Fri Apr 20 08:23:47 1990 <<<

Problem: Plasma at target 2 when source select is target 3.

Analysis: The RF source select switch was checked for leakage
between different targets. The breakdown voltage (using Hi Pot
tester) was greater than 4 kV. The switch appears to be good.

Each target was Hi Potted between anode and cathode. Each target
is shorted at 200 to 300 V DC. When the target cooling water was
drained from the target, the breakdown voltage between anode and
cathode is about 3 kV DC.

The targets are connected in series and are on the same circuit as the
cooling water for the RF power supply. Target #2 is the first target
that gets cooling water after the cooling water exits the RF power
supply. This could explain why Target #2 has plasma on it when
the source select switch is at Target #3. 

The cooling water conductivity is too great. It causes RF power
to be shared between targets and/or ignition at the wrong target.
This can cause multiple films to be deposited unintentionally
as the substrate rotates to the station where deposition is 
intended. 

The Randex needs either a closed loop cooling water system OR
a resin bed set-up as is being used on TOPGUN.

>>> 'randex' problem from rnorman -- Fri Apr 20 14:25:53 1990 <<<

The water causes some RF leakage between the targets, especially at
higher powers.  Monday we will look into a solution to this problem.
Use the randex with your own judgement until then.

>>> 'randex' fix from bob -- Fri Apr 27 08:57:23 1990 <<<

liang reported a leak on the water fitting of target2. This
report occurred late in the day and he was given verbal permission
to tighten it enough to stop this leak.

RE: Unselected target discharges.

Low resisistivity of the recirc cooling water is suspect in causing 
unselected targets to have a discharge. A shunt loop with a 
resistivity monitor and a 10 MB/resin cartridge were added to the 
main recirc loop to increase the resistivity of the Microlab loop.

Resistivity has been increased from 17K Ohms to 400K Ohms. The
randex will be monitored for results. This should eliminate
any spurious discharges. Users are asked to report their observations
during this trial period.

>>> 'randex' fix from rnorman -- Fri Apr 27 14:29:23 1990 <<<

Problem: User reported process N2 flows not correct.

Cause: The N2 regulator was not set correctly, was at 10psi.

Solution: Increased N2 pressure to 20 psi.  Randex is up.

>>> 'randex' problem from hebert -- Thu May 10 09:43:39 1990 <<<

Target #1 has plasma even though power is directed to target #3 (Cu).

>>> 'randex' fix from rnorman -- Thu May 10 14:55:55 1990 <<<

I connected a couple ground leads to targets 2 & 3 for hebert.  He
will test the Cu to see if this will temporarily fix the plasma problems.
He his report his findings.

NOTE: Please disconnect the leads when done with target 1.
,

>>> 'randex' problem from hebert -- Fri May 11 08:07:37 1990 <<<

The water lines to target #1 and target #2 have been removed.
Water is flowing only thru target #3. There was still plasma on
target #2. Then the RF power lines to target #1 and target #2 were
removed. There is only plasma at target #3 now. A "popping" sound
was heard when trying to ignite the plasma at target #3. RNorman
observed arcing between the cathode and anode at target #3 when the
popping sound occurred. The insulators that isolate the target from
ground seem to be leaky and should be cleaned.

>>> 'randex' problem from hebert -- Fri May 11 09:20:19 1990 <<<

The RF power supply went to "stand by" several times while trying to
ignite plasma at target #3. Now neither the "stand by" or "power"
lights are ON. I reset the circuit breaker and waited several minutes,
but the supply still doesn't have any output power.

>>> 'randex' problem from rnorman -- Fri May 11 09:07:43 1990 <<<

WE are still getting some RF feedback to target 1 & 2 when power is on
target 3; though it is better then before.  After removing the water lines
from targets 1 & 2 there was even less RF feedback, if any on the other 2
targets; it was hard to tell with a plasma on #3.  

AT the earliest convenience I will clean the  ceramic insulator rings of each
target and replaced the water lines between each target.  We believe the water
purity is high enough, measured at more then 1.8 Megaohms by the tylans.  There
could be metal particles or some type of conductive material within the randex
water lines.  We have some oil-free Aluminum that can be placed around
the other targets to prevent metal from getting onto your wafer; this
would also be a good way to see how badly the other targets are
sputtering, with out applying power to them.

NOTE: the randex is still up for use.

>>> 'randex' problem from hebert -- Fri May 11 13:39:20 1990 <<<

After the water flow problem was corrected, the RF power supply was OK.
I deposited Cu at 500 W and 10 mTorr (throttled cryo), and the film
was very hazy. I tried using 500 W after films deposited at 200 W
came out hazy. About 6 weeks ago we got good (not hazy) Cu films
in the Randex at 200 W (dep rate approx 6 A/s). The dep rate today at
200 W is also 6 A/s. 

There is either a leak or a cryo pump problem causing the films to
be hazy. I know that this problem was reported several weeks ago, 
and that after the "fix" a student successfully deposited Pt without
any haze. However, Pt is not reactive with O2 and one would not
expect Pt to be hazy even if a small leak is present.

We set-up the TOPGUN for Cu dep, and got good Cu films right away.

>>> 'randex' fix from rnorman -- Mon May 14 13:06:42 1990 <<<

Problem: Cu film hazy and arcing on external side of target.

Cause: The film being hazing could be cause by the quality of the 
       target. I think it was made out of just some oil free Cu in the
       mech.shop.  Either that or the cryo change had a effect of the
       sputter quality.

Solution: The target ceramics were cleaned in HCl/Nitric, the copper
         backing plates were cleaned with scotch brite.  Also, the temp
         of the cryo is at 15~C, about 3~High for this newer cryo, so
         tomorrow I will regenerate the cryo.  I don't think there is
         a leak because the vacuum is very good, at 2x10-7. The randex
         is up.

>>> 'randex' problem from rnorman -- Tue May 15 12:08:08 1990 <<<

After leak checking the system this morning a leak was found at the
gas input to the chamber, swagelok leaking.  The leak was repaired
and the chamber leak checked again in which no leak was found.  I then
ran a test wafer with Al @ 200 watts @ 200 sccm @ 6mt on the convectron
gauge.  The film look very cloudy.  At this time the cryo will be
regenerated and tomorrow the Ar line with be pumped out to the bottle
and leak checked. The cryo though could be causing part of this problem.  

User are free to use the randex tonight.
