>>> 'nrc' problem from rosal -- Thu Jan 19 16:20:57 1989 <<<

es
Au boat is getting old, the next user might want to change it (it takes a
large current to evaporate).  I left clean Ni where it is marked Cr. Not
really a problem, but it is dificult to tell them apart, and we are gathering
a collection on unidentified boats on top of the samples.

>>> 'nrc' problem from magneton -- Tue Jan 24 11:16:02 1989 <<<

uI stupidly vented the chamber with the high vac valve open.
The cryo pump needs to be regenned!

>>> 'nrc' problem from bob -- Tue Jan 24 14:35:12 1989 <<<

The nrc has been regenerated and is cooling down. The nrc should be
ready for use by 18:00.

>>> 'nrc' problem from bob -- Fri Jan 27 15:36:51 1989 <<<

I found the nrc with the HV valve open and the N2 vent on. I
suspect when the last user used the nrc they disabled the machine
and opened the HV valve not noticing the vent was left on. When
the taurus overide activated it dumped the nrc. The nrc has
been regenerated and is ready for use.

>>> 'nrc' problem from bob -- Wed Feb  1 13:50:08 1989 <<<

The nrc has been regenerated after a power failure and is up for use.

>>> 'nrc' problem from magneton -- Thu Feb  9 19:01:17 1989 <<<

Handle on outside of nrc for raising and rotating chip holder
is bent.  Chip holder is stuck in gold/chrome  position

>>> 'nrc' problem from bob -- Fri Feb 10 13:17:17 1989 <<<

The handle for raising and rotating the chip chuck
has been straigtened. The nrc is up and ready for use.

>>> 'nrc' problem from rosal -- Thu Feb 23 10:51:06 1989 <<<

es
does not let me vent

>>> 'nrc' problem from khacha -- Tue Feb 28 13:20:44 1989 <<<

the behaviour of crystal monitor is erratic.
the reading of the film thickness jumps around and the reading for evaporation
rate can suddenly go to zero and then reappear again. readings cannot be trusted. . 

>>> 'nrc' problem from khacha -- Tue Feb 28 14:06:51 1989 <<<

ecrystal monitor showed erratic, jumping around readings

>>> 'nrc' problem from rosal -- Thu Mar  9 18:10:16 1989 <<<

The high vacuum does not seem to work.  I pumped down to 200 mtorr
with the roughing pump as usual, and switched to high vac (after turning off
roughing).  the pressure actually went up to 800 mtorr.  This is the same pressure
as tc2 cryopump gauge.  I left it with a 200 mtorr pressure.

>>> 'nrc' problem from phillip -- Fri Mar 10 13:12:18 1989 <<<

P:Regen in progress.  Hivac valve open,vent on, belljar weighted,
  and cryo purge valve MANUALLY opened. (Most of this was done this
  a.m.)

>>> 'nrc' problem from parrish -- Fri Mar 10 15:17:25 1989 <<<

problem:    system pumping at 200mT

cause:      cryo-pump warmed up

solution:   regenerating cryo-pump, and reconnected the N2 line to the cryo
            system is pumping and should be able to be used this afternoon.
            Its about 5x10-5 now.

>>> 'nrc' problem from rosal -- Tue Apr 11 21:53:54 1989 <<<

Did not get great vacuum after 2 hours of pumping (1 E-6 torr)

>>> 'nrc' problem from magneton -- Mon Apr 17 20:16:14 1989 <<<

The crystal monitor is intermittently zeroing itself during
deposition.  I tried tightening the screws around the monitor
to assure good contacts but this did not help.

>>> 'nrc' problem from parrish -- Thu Apr 27 15:29:12 1989 <<<

I found the system at about 5Torr and the cryo temp in the green area
starting a regeneration.

>>> 'nrc' problem from parrish -- Fri Apr 28 09:19:15 1989 <<<

regenerating in process system should be up by noon.

>>> 'nrc' problem from bob -- Fri Apr 28 14:32:24 1989 <<<

The nrc has been regenerated and is back on line.

>>> 'nrc' problem from bob -- Mon May  1 10:57:00 1989 <<<

The nrc has had a flow restrictor added to the cryo compressor. Because
of this it will be regenerated and should be back online by 14:00.

>>> 'nrc' problem from bob -- Mon May  1 11:44:55 1989 <<<

Moved pressure regulator upstream of cryopump regeneration manifold.
N2 vent pressre is now visible at the wall. Cryo is cooling down,
ready by 14:00.

>>> 'nrc' problem from rosal -- Sun May  7 15:39:25 1989 <<<


Very slow venting (slower than usual).

>>> 'nrc' problem from kuchta -- Thu Jun 15 18:10:17 1989 <<<

Two problems:

1. pumped down for over 2 hours and only achieved 1e-6 torr.
   I think the cryo needs to be regenerated.

2. The gold boat required 500amps before gold evaporated.  This is much too
   high.  I suspect that there is a loose connection somewhere.  Also some
   copper melted to the boat.  I removed the old boat but did not have 
   a new to replace it.

Dan

>>> 'nrc' problem from voros -- Fri Jun 16 17:21:25 1989 <<<

Due to a lose connection and high current applied pert of the
electrode melted. james is in the process of fabricating new ones.

The cryo pumped down ok, nothing was done to it.

>>> 'nrc' problem from parrish -- Mon Jun 19 13:04:15 1989 <<<

problem:   electrodes melted

cause:     loose connections

solution:  made new electrodes, and tighten the connections,since there
           isn`t any boats I cannot position the electrodes exactly.

>>> 'nrc' problem from kuchta -- Fri Jun 23 13:08:55 1989 <<<

The nrc still will not pump below 1e-6 even after 90minutes
When was the last time the cryo was regenerated?

>>> 'nrc' problem from bob -- Fri Jun 23 14:06:40 1989 <<<

Problem: User reports high base pressure

Cause: SOmeone had increased the vent pressure on the N2 regulator to
       15 psi causing the vent solenoid to leak.

Solution: Decreased pressure to 3-4 psi (black line on gauge). Pressure
          on 6 range is 2-3 X 10-7 however the seven range doesn't
          seem to read right.

>>> 'nrc' problem from parrish -- Mon Jun 26 14:29:38 1989 <<<

problem:   ion gauge controller out of adjustment

cause:     undetermined at this time

solution:  removed controller for inspection, and replaced it with a rebuilt 
           one.

>>> 'nrc' problem from rosal -- Thu Jul  6 09:52:19 1989 <<<

Does not get better than 1 x 10-6 after 8 hours pumping.
Roughing pump is slower than normal.

>>> 'nrc' problem from bob -- Fri Jul  7 07:21:51 1989 <<<

Rosal reports the nrc has a higher operating base pressure than
normal. The nrc remains useable in the meantime and its base pressure
problem will be investigated next week.

>>> 'nrc' problem from kuchta -- Fri Jul 21 15:23:33 1989 <<<

The roughing pump will not pump below 300mTorr and it takes a long time
to reach even that!

Also, the chamber will not go below 1e-6 no matter how long you pump it!
This problem has been reported several times in just the last two months
.  Is this being looked into at all?

Dan

>>> 'nrc' problem from parrish -- Mon Jul 24 10:01:33 1989 <<<

the system is down for repair. 

>>> 'nrc' problem from parrish -- Mon Jul 24 15:31:39 1989 <<<

system still down for repair. the bellows in the foreline is
one of the problems, and should be resolved tomorrow.

>>> 'nrc' problem from parrish -- Tue Jul 25 10:20:42 1989 <<<

update. bellows has been replaced, and system is being pumped down to check
ultimate chamber pressure.
>>> 'nrc' problem from parrish -- Tue Jul 25 14:59:41 1989 <<< [No Comment]

>>> 'nrc' problem from parrish -- Tue Jul 25 15:00:59 1989 <<<

system still down, bell jar chipped, I epoxyed it but it still is`nt
pumping below 1x10-6 will continue in the morning.

>>> 'nrc' problem from parrish -- Wed Jul 26 07:53:39 1989 <<<

update: the pressure in the chamber this morning after pumping over night
was 6x10-7. I have vented the system and is pumping again to see how long
it will take to get into the 7 range.

>>> 'nrc' problem from khacha -- Fri Sep  1 09:24:42 1989 <<<

eswas getting 0 reading from the crystal monitor, even though the evaporation
occured successfully

>>> 'nrc' problem from bob -- Fri Sep  1 10:41:30 1989 <<<

The switch that toggles the crystal monitor between the v401 and the
nrc is dirty and will need to be replaced. It works reliably if you
toggle it a few times. It will be serviced Sept 5th. Until then please
check it out before doing an evaporation to make sure it is working.

>>> 'nrc' problem from parrish -- Thu Sep  7 14:17:11 1989 <<<

problem:   faulty switch

cause:     switching knob slipping

solution:  removed switch, cleaned contacts, reinstalled and adjusted knob
           and tighten adjusting screw. switch operates properly.

>>> 'nrc' problem from rosal -- Thu Oct 26 09:21:30 1989 <<<

the crystal monitor is not functioning.

>>> 'nrc' problem from hsin -- Wed Dec  6 15:51:40 1989 <<<

I found the sidewall of the Bell Jar was covered with a layer
of metal!!!   I can not see through the Bell Jar for precision
positioning of my wafer .  The bell jar needs cleanning.
One of the previous users must forget to put the glass cylinder
around the boat.  Please be more careful and considerate.

Wei Hsin

>>> 'nrc' problem from jayyang -- Thu Dec  7 10:47:58 1989 <<<

After I evaperated Al using electrod #4 (Cr), the electrod was found damaged
possiblly due to overheating and needs to be repaired. I appalogize for the
misuse.

>>> 'nrc' problem from parrish -- Tue Dec 12 15:38:00 1989 <<<

problem:   electrodes damaged

cause:     overheating

solution:  inspected electrodes and they to be exceptable for use.

>>> 'nrc' problem from gtdu -- Wed Feb 21 22:42:15 1990 <<<

the vaccum is too low. the cryo pump need to be regenerated.

>>> 'nrc' problem from parrish -- Thu Feb 22 06:44:12 1990 <<<

system is being regenerated.

>>> 'nrc' problem from parrish -- Thu Feb 22 12:34:44 1990 <<<

problem:    base pressure high

cause:      accumulated evaporating time

solution:   regenerated cryo-pump. system base pressure is 3x10-7 

>>> 'nrc' problem from jgtsay -- Fri Feb 23 00:23:25 1990 <<<

esNi boat is broken. I can't find a replacement.

>>> 'nrc' problem from jgtsay -- Wed Feb 28 15:59:02 1990 <<<

It seems to me that some one forgot to close the mech pump. Now the ion pump cannot function .

>>> 'nrc' problem from parrish -- Thu Mar  1 09:35:34 1990 <<<

problem:    ion-pump not function( should read cryo-pump, there is no ion-pump
            on the nrc).
cause:      undetermined 

solution:   system gate valve was open and chamber pressure was 3x10-7, I
            vented the system and pumped it back down, pressure was the same
            I found no problem. system is up.

>>> 'nrc' problem from jgtsay -- Sun Mar 11 17:15:59 1990 <<<


The venting process took too much time ( about 45 mins ).

>>> 'nrc' problem from parrish -- Tue Mar 13 06:52:23 1990 <<<

problem:    vent cycle took 45 mins.

cause:      vent pressure set to low.

solution:   reset the nitrogen pressure to 5 psi. working pressure
            (the static pressure is 7 psi.) system is up.

>>> 'nrc' problem from hebert -- Wed Mar 14 15:15:17 1990 <<<

Burning phenolic smell after instability in current was
observed during evap of Au-Ge. The source select knob
does not turn as smoothly as before, reports XWu. There
is a sign that the souce select board got hot. I'm not
sure that this is where the problem is. The NRC should NOT be
used until the evap circuitry is checked out.

>>> 'nrc' problem from xwu -- Wed Mar 14 15:28:38 1990 <<<

during the evaporation, the burning smell came out, it seems
the filament selector has bad contact there (Au and Au/Ge, I
used).

I don't think nrc is usable before staff checks the problem
out.

xin

>>> 'nrc' problem from parrish -- Fri Mar 16 07:48:23 1990 <<<

system down for repair of electrode switching slector. 

>>> 'nrc' problem from parrish -- Tue Mar 20 11:04:18 1990 <<<

update:    All the burned parts has been remanufactured, and the copper
	   parts have been cleaned, reassembly of parts should be finished
	   today.   

           

>>> 'nrc' problem from parrish -- Wed Mar 21 09:34:00 1990 <<<

problem:    power supply smoking when turned on

cause:      switching mechanism loose, causing overheating of insulation
            board.

solution:   removed the switching mechanism board,mfg. new switching board
            cleaned all copper and brass parts and reinstalled the new
            board.note: because of the construction of the switching mech-
            anism the handle is fairly tight. system is up.

>>> 'nrc' problem from xwu -- Wed Mar 21 18:27:15 1990 <<<

the newly changed electrode switch board seems too tight, especially
not be able to turn to Zn position, could James pls to adjust it?

the nrc is still up, except Zn.

Xin

>>> 'nrc' problem from parrish -- Thu Mar 22 08:06:47 1990 <<<

problem:    switch board to tight,not able to turn to the Zn position

cause:      construction of the board makes it difficult to adjust tension
            without loosing good electrical contact.
            I put the board in reverse
solution:   removed the board and readjusted the tension,and reversed the
            board. tested the switching mechanism. all positions are avaliable
            and the tension is lighter.

>>> 'nrc' problem from prouty -- Mon Apr  9 18:26:45 1990 <<<

Crystal monitor 'xtal' light flashes on powerup.  Can get it to
go off by adjusting xtal holder.  Light will flash again if
power is cycled.

>>> 'nrc' fix from parrish -- Fri Apr 13 08:05:41 1990 <<<

problem:    `xtal light flashes on powerup

cause:       crystal monitor head loose

solution:    tighten head, light not flashing

>>> 'nrc' problem from xwu -- Fri Apr 20 12:13:32 1990 <<<

when i came to nrc, i found the cryo pump needs to be regenerated,
the temparature is within green zone.

xin

>>> 'nrc' problem from honglin -- Fri Apr 20 13:44:49 1990 <<<


The cryo pump need to be regenerated.

>>> 'nrc' fix from rnorman -- Fri Apr 20 14:21:00 1990 <<<

The cryo was pump/purge/pump for about 3 cycles.  Then at 40mt the hi-vac
valve was closed and the compressor turned on.  We have no idea how long
the cryo was off, but it was a least 3 hrs.  The cryo is chilling down now
and should be up for use at about 4:30 PM tonight.

>>> 'nrc' problem from xwu -- Wed Apr 25 12:43:29 1990 <<<

this morning about 11:40 when i came to nrc, i found that the cryo
pump was dumped again, the temperature is in green zone.
i turned off the comprasser and started to vent the cryo pump and
i'm going to regenerate it in about 2 hours.

could some one to investigate the reason?  i reported the similar
problem last friday.

xin

>>> 'nrc' problem from bob -- Thu Apr 26 09:34:08 1990 <<<

The cryopump on the nrc has failed and will need replacing. A spare
pump will be installed from stock on Monday, May 30th. The nrc is
down until then.
BOB

>>> 'nrc' problem from parrish -- Mon Apr 30 09:32:04 1990 <<<

update:   Cryo-pump change,a new array and absorber is being changed also
          at this time. the system should be back together tomorrow.

>>> 'nrc' fix from parrish -- Tue May  1 07:33:03 1990 <<<

problem:   cryo-pump failed

cause:     the mechanical parts appear to have a problem

solution:  removed the pump and replaced with a spare(this is not a rebuilt
           pump). system is up the pressure in the chamber is in the mid 7 
           range.
