>>> 'mti' problem from carlos -- Fri Jan  6 04:15:37 1989 <<<

The screen displays the message CHUCK SENSOR UNMADE

>>> 'mti' problem from marilyn -- Fri Jan  6 08:09:40 1989 <<<

Problem: User reported "chuck sensor unmade" error on screen
Cause: Yellow "AUTO" button not turned on
Solution: Turned button on.

>>> 'mti' problem from eskim -- Thu Jan 19 21:34:10 1989 <<<

mti does not spray developer.

>>> 'mti' problem from marilyn -- Fri Jan 20 11:17:04 1989 <<<

Problem: User reported that developer was not spraying
Cause: Pressure gauge in sevice chase turned to 0 (off)
Solution: Turned gauge back up to 10

>>> 'mti' problem from carlos -- Fri Jan 20 21:07:31 1989 <<<

It is out of developer, and there is no more developer left 
in the lockers.

>>> 'mti' problem from tom -- Mon Jan 23 09:28:34 1989 <<<

Problem: No developer.

Cause:   No presure to developer tank.

Solution: Turned on presure.

>>> 'mti' problem from lyons -- Wed Feb  8 23:22:12 1989 <<<

uthe power off switch stuck and did not want to work.
if you lift the switch up then try it, it worked.  It
was also quite hot.

>>> 'mti' problem from bob -- Thu Feb  9 15:00:50 1989 <<<

Sprayed contact cleaner and lubricant on switch and tested.
The MTI is up for use.

>>> 'mti' problem from jimmoon -- Wed Feb 22 19:03:17 1989 <<<


Ran just fine for about 15 wafers.  Then it acted like it
had lost its memory.  Pretty strange.  I didn't notice any
electrical glitches at the time that might have caused it
to drop memory.  

>>> 'mti' problem from tom -- Thu Feb 23 11:03:42 1989 <<<

Problem:  Lost its memory.
Cause:    Unknown.
Solution: Reprogramed.  Up for use.

>>> 'mti' problem from carlos -- Sun Mar 12 16:59:18 1989 <<<

it is out of developer, and there is no more developer in the storage
area.

>>> 'mti' problem from carlos -- Sun Mar 26 17:54:59 1989 <<<

someone changed the speed of the development program. It  is way 
too fast and the developent does not come out right.

>>> 'mti' problem from carlos -- Sun Mar 26 20:59:22 1989 <<<

same problem as reported before. It seems thet the chuck speed 
is 6000 rpm for all the programs

>>> 'mti' problem from tom -- Mon Mar 27 11:47:03 1989 <<<

Problem:  User reported it was spinning to fast.

Cause: Unknown.  could not duplicate.

Solution:  
	  Put machine back up and wait for it to appear again.

>>> 'mti' problem from bill -- Wed Mar 29 11:18:48 1989 <<<

The chuck speed is not correct.
This is not a problem with the programs :
Tom verified that the programs are all correct
and properly stored,
the chuck spins at full speed regardless of the
% speed requested by the program.
Robert Norman saw the problem demonstrated.
MTI should not be used until the problem is investigated.

>>> 'mti' problem from moazzami -- Wed Mar 29 12:46:34 1989 <<<

Keep getting 'Chuck sensor unmade' message after depressing run
(program 10).
Can someone please look into this problem?

>>> 'mti' problem from mikeb -- Wed Mar 29 13:10:13 1989 <<<

Wafer spins too rapidly during develop cycle (program 40), and during
strip cycle (program 10).  This problem was reported by Carlos a few days
ago.  The preceeding problem as reported by Reza (wafer not received on
vacuum chuck) may have appeared because the AUTO button was in the off 
position, disabling the wafer handler.

>>> 'mti' problem from rnorman -- Wed Mar 29 16:37:55 1989 <<<

I called MTI about the high rotation problem with the chuck and got
a few things to check. Possible problems are: bad motor, bad motor drive
board or some connection between. I checked the motor windings: Field windings,
from brn to yel wires, should be between 900-1000 ohms, it was 937; armature,
red and blk wires, should be 5-9 ohms, it was 2.5 ohms. I don't know if the 
latter is a problem or not, I will have to talk to Field Service at
MTI. 

I say go ahead and use the MTI. The high rotation may slow down the
development of you wafers, if so run them twice. I will continue to
look at the problem tomorrow.

>>> 'mti' problem from jlou -- Wed Mar 29 17:08:32 1989 <<<

Yes 
,I follow your advise.Just go ahead.
This machine givesm
This machine gives me an express ticket.It only takes 10 seconds to
load  and lift  each wafer. These poor wafers have no enough time to take an
aceton shower.
                                                    Jlou

>>> 'mti' problem from lyons -- Wed Mar 29 17:35:53 1989 <<<

None of the programs are operational or in memory or whatever.
For each program the wafer is loaded to the chuck, the chuck
lowers, then the chuck is raised and the wafer loaded back in
the cassette.  

>>> 'mti' problem from rnorman -- Thu Mar 30 10:51:33 1989 <<<

All the programs are gone from the mti. I started on #1, but did something
wrong because it stoped halfway thru it. But the chuck speed when applying
the developer was normal not fast like yesterday. ???? Tom will reprogram
the recipes.
.

>>> 'mti' problem from tom -- Thu Mar 30 11:32:23 1989 <<<

Still spins way to fast.  Seems to be a sporatic problem.

>>> 'mti' problem from bill -- Thu Mar 30 17:32:40 1989 <<<

Tom reported chuck problem as sporadic -
so I tried to use the mti -
but the chuck still spins at 6000 rpms all the time.
Hand developing always works...

>>> 'mti' problem from rnorman -- Fri Mar 31 10:36:53 1989 <<<

The MTI is temporarily working fine! I will be working on it though
to see if I can find the cause on the intermittant problem. If you
need to use the mti while I working on it you may, because I will be
running dummys until I find the problem.

>>> 'mti' problem from rnorman -- Fri Mar 31 16:47:07 1989 <<<

The mti is down with the chuck spinning at 6k RPMs; I will continue
repair on monday.

>>> 'mti' problem from rnorman -- Mon Apr  3 16:09:38 1989 <<<

Problem: MTI chuck spins at 6000 RPMs on every program.

cause: Intermittant problem around the 555 timer, which triggers the
       SCR's to turn motor.

Solution: The output signal from the 555, pin 3, was gone when
          the system was failing. There was an input signal to the 555, pin
          4, comming from IC2 a 741 OP-AMP, pin 6. I checked various components
          around the 555, diodes and caps, by unsolder and ohming out. I also
          replaced all five 741's and the 555 timmer, durring the ordeal.
          I will say that the mti is operational.

>>> 'mti' problem from lyons -- Wed Apr  5 14:15:18 1989 <<<

replaced acetone with one bottle of acetone and one bottle of
methonal.  when I realized that, I drained the acetone tank
and refilled with two bottles of acetone.  ran 16 wafers to
clean out the line and everything appeared fine.

>>> 'mti' problem from vilma -- Wed Apr 19 18:21:46 1989 <<<


ran out of acetone, none in cabinet to refill canister

>>> 'mti' problem from martin -- Mon May  1 01:17:47 1989 <<<

hyperdermic needle/nozzle for developer has fallen off.  It is lying in 
the chuck's drain resevoir.  Development process is ok but the unrestricted
developer flow probably leads to wasted consumption.

>>> 'mti' problem from rnorman -- Mon May  1 08:10:39 1989 <<<

Problem: The hyperdermic needle for the developer fell off and was
         in the drain resevoir.

Solution: It was put back on the developer line and was tested.
          The mti is up.

>>> 'mti' problem from eminami -- Wed May  3 14:02:59 1989 <<<

does not expose the center of the wafer.  The developer dispenser
is not centered at the chuck...should be adjusted.

>>> 'mti' problem from eminami -- Wed May  3 14:06:23 1989 <<<

developer dispenser loose.  The center of the wafer does not get
developed.

>>> 'mti' problem from tom -- Wed May  3 15:04:53 1989 <<<

Needle centered.  MTI up.

>>> 'mti' problem from robin -- Thu May 11 15:13:33 1989 <<<

Wafers not developing out completely - could we have a larger gauge needle
on the system?  Also, could we have a 15 sec. develop program put in?

>>> 'mti' problem from tom -- Fri May 12 09:39:57 1989 <<<

Problem: Needle clogged up.
Cause:   Normal use.
Solution: Replace needle with new one.

>>> 'mti' problem from rnorman -- Thu May 18 10:49:50 1989 <<<

The mti will be down shortly, about 1 hour, to install a
acetone level sensor.

>>> 'mti' problem from rnorman -- Thu May 18 12:38:42 1989 <<<

You may use the mti now for the time being. I'm still not
done with the Acetone level retrofit.

>>> 'mti' problem from eskim -- Thu May 18 15:31:54 1989 <<<

Chuck sensor unmade error comes on whenever run button is pushed in, and
can not do anything.

>>> 'mti' problem from eskim -- Thu May 18 15:47:31 1989 <<< [No Comment]
>>> 'mti' problem from marilyn -- Thu May 18 16:45:19 1989 <<<

Problem: A user reported that CHUCK SENSOR UNMADE eror showed on the screen
Cause: Yellow AUTO light not on
Solution: AUTO light turned on; the MTI is up.

>>> 'mti' problem from rnorman -- Fri May 19 07:04:15 1989 <<<

The mti will be down to finish installing the Acetone level
sensor, should be up by 9AM.

>>> 'mti' problem from rnorman -- Fri May 19 09:18:53 1989 <<<

The new "Acetone Level Senor" has been installed in the acetone
tank. When the acetone level gets low, close to the bottom, a
RED light behind the the mti in the window will come on.
Let it be know that when this RED light comes on it is recommended
to fill the acetone tank. The sensor box and assembly was tested
and works well. The mti is up.

>>> 'mti' problem from martin -- Fri Jun  2 13:03:28 1989 <<<

chuck speed = 6000 rpm !!!
too fast for developing
this problem occured for programs 1, 10, 40
did not try programs 60 and 65
suspect hardware failure

>>> 'mti' problem from rnorman -- Fri Jun  2 16:45:12 1989 <<<

The mti will be down for the weekend. The chuck spins at 6000 RPM.
It does this on all programs.  This speed would only be OK for
program 65, cleaning wafers.  USE AT YOUR OWN RISK!

>>> 'mti' problem from rnorman -- Mon Jun  5 11:15:52 1989 <<<

Problem: Chuck spins at 6000 RPM on every program.

Cause: An intermittent connection, wire or chip.

Solution: Over the weekend the MTI strted working normally.
          Many students used it over the weekend and today with
          no problems, and I also ran some wafers with no problem.
          The mti is up.

>>> 'mti' problem from mcknelly -- Wed Jun 28 17:29:55 1989 <<<


During a run of 22 wafers, the acetone stopped hitting the center
of the wafers and was not completely stripping the resist. The low
level light was not on at the time.  The nitrogen pressure was at
0 and I adjusted to 5 psi. Now it seems to be OK. The acetone level is low now though and I don`t know how to refill it.

>>> 'mti' problem from marilyn -- Fri Jun 30 08:39:59 1989 <<<

Problem: User reported that nitrogen pressure was low and that the
         acetone tank needed to be refilled.
Solution: User adjusted the nitrogen pressure upwards, and the next
          user refilled the tank.

>>> 'mti' problem from rwilliam -- Thu Jul 13 09:31:02 1989 <<<

The stripping program doesn't work.  The, uh, grabber
arm won't come over.  It has vacuum, but it won't move...
>>> 'mti' problem from rwilliam -- Thu Jul 13 09:54:00 1989 <<< [No Comment]

>>> 'mti' problem from rwilliam -- Thu Jul 13 10:00:13 1989 <<<

That problem is now fixed, by The Wisdom o' Tom-
>>> 'mti' problem from rwilliam -- Thu Jul 13 10:01:24 1989 <<< [No Comment]

>>> 'mti' problem from kim -- Tue Oct 24 10:59:16 1989 <<<

Problem:  the limit switch got stuck on cassette indexer.

>>> 'mti' problem from rnorman -- Wed Oct 25 07:10:18 1989 <<<

Problem: Cassette limit switch stuck.

Solutiuon: I could not duplicate the problem.  I will talk to
          the user to get more details on what failed. The
          mti is up.

>>> 'mti' problem from marilyn -- Mon Nov  6 14:15:59 1989 <<<

Problem: MTI programs wiped out
Cause: Weekend power shutdown
Solution: Reprogrammed by MK and TB.

>>> 'mti' problem from hyeh -- Wed Nov  8 11:05:50 1989 <<<


the developer dispenser does not go all the way to the outer edgers of the wafer

>>> 'mti' problem from marilyn -- Wed Nov  8 11:31:47 1989 <<<

Problem: A user reported that the developer doesn't go out to the edges
         of the wafer.
Solution: It does; there is no problem.  If the developer goes out any
          further, it will leak onto the back of the wafer being
          developed.  The mti is up.

>>> 'mti' problem from field -- Wed Nov 22 13:45:28 1989 <<<

maybe just a fluke, but the mti just smashed one of my wafers.
Sigh!

>>> 'mti' problem from rnorman -- Mon Nov 27 11:56:43 1989 <<<

Problem: The mti ate a wafer.

Solution: Ran 20 wafers and could not duplicate the problem.
          The mti is up.

>>> 'mti' problem from marilyn -- Fri Dec  1 10:00:11 1989 <<<

Problem: SPACER RETRACT LIMIT UNMADE (shows on the screen)

>>> 'mti' problem from rnorman -- Fri Dec  1 11:05:03 1989 <<<

Problem: Spacer Retract Limit Unmade(error shown on screen).

Solution: After running wafers no error was duplicated.
          The mti is up.

>>> 'mti' problem from field -- Tue Dec  5 11:25:25 1989 <<<

fortunately this was on a dummy wafer - the white plastic opening
which allows a wafer to be loaded shut during the loading process,
scratching the photoresist on the wafer.  It did not happen
when I reloaded the wafer to try again.

>>> 'mti' problem from rnorman -- Wed Dec  6 06:37:49 1989 <<<

Problem: The white plastic shield door cloed on a wafer.

Cause: The door in actuated closed by a micro-switch when the arm
       in at home or at rest.  I not sure how the wafer got cought
       enless the wafer fell off the arm.

Solution: Ran some wafers and could not reproduce the error.
         The mti is up.

>>> 'mti' problem from marilyn -- Wed Dec  6 15:21:17 1989 <<<

Problem: The developer in the tank in the service chase needs to
         changed out from KTI 934 1:1 to KTI 934 2:1 in order to
         conform to the greater exposure time due to the GCA Wafer
         Stepper retrofit.
Solution: Robert Norman disconnected the tank; it was then taken to
          the old lab and thoroughly rinsed/cleaned.  The tank was 
          then refilled with the KTI 934 2:1 Developer (premixed).
          The tank has been reconnected.
Caution: Development time must still be optimized; the wafers coated
         with KTI 820 Positive Photoresist were taking 2 minutes to
         develop in the develop tank at sink5.  Work on this will
         continue on Thursday, December 7th.
Note: KTI 934 2:1 developer can be found in C-locker #1.

>>> 'mti' problem from kpister -- Thu Dec  7 17:37:04 1989 <<<

problem: after developing 1 wafer, cassette is normally lowered a
cm or so to check for any remaining wafers.  This time it just kept
going, knocking the cassette forward into the spin shield.

solution (suggested):  discharge 12 gauge shotgun into innards of
mti wafer handling mechanism, develop wafers by hand.

ksjp

>>> 'mti' problem from rnorman -- Fri Dec  8 09:20:50 1989 <<<

Problem: cassette indexer did not stop when indexing down and knocked
         wafers forward.

Cause: If the arm that loads the wafer does not sense a wafer, vacuum
       sensor, the cassette will continue to index down.  This  can
       happen if the wafers are not flat or the vacuum can't seal due
       to formations on the sealing surface, or the wafer is in the
       cassette crooked. Or of course a malfunction in the 
       vacuum switch itself.

Solution: Users, after the problem was reported, have had no problems
          running the mti.  The problem was not duplicated, sorry.
          The mti is up.

>>> 'mti' problem from bill -- Wed Jan 17 08:32:25 1990 <<<

The MTI is up to its old trick :
chuck speed 6000 rpm's regardless of program request.
I tried programs #1, #10, and #50 - they all go at 6000 rpm's
on all steps.

The problem log shows this problem first appearing 3/89,
fixed itself occasionally, Then Robert attacked it - and it
worked fine till June. In June it fixed itself - so we can
only hope this time.

I powered off/on many times  - but the problem remains at ther moment.

>>> 'mti' problem from rnorman -- Wed Jan 17 09:35:55 1990 <<<

Problem: Chuck speed at 6000 RPM regardless of recipe.

Solution: I ran 10 wafers and could not duplicate the problem.
          This problem has occurred before intermittantly.
          The mti is up.

>>> 'mti' problem from marilyn -- Thu Jan 18 13:29:04 1990 <<<

Problem: SPACER ERROR RETRACT LIMIT shows on the screen; the MTI
         will not operate with this error.

>>> 'mti' problem from debra -- Thu Jan 18 13:57:29 1990 <<<

spacer arm had not fully retracted therefore not tripping
the limit switch. I manually tripped limit switch and
restarted. Seems to operate normally now.

>>> 'mti' problem from jiahua -- Wed Jan 24 13:45:21 1990 <<<

It says: the carrier monitor limited unmade.

>>> 'mti' problem from marilyn -- Thu Jan 25 10:53:26 1990 <<<

Problem: carrier monitor limit unmade
Solution: the mti is up/temporary hang-up

>>> 'mti' problem from spence -- Fri Jan 26 13:41:00 1990 <<<


The chuck spin speed during acetone dispense is 1000rpm
for program 10 (resist strip) is this normal? It seems a little high to me
though the wafer looked clean enough afterwards!

>>> 'mti' problem from rnorman -- Fri Jan 26 14:02:00 1990 <<<

The spin on the acetone dispense of 1000 rpm's is normal; this is
programed in and can be changed by the programmer.
The mti is up.

>>> 'mti' problem from ried -- Sat Feb  3 00:11:14 1990 <<<

Mti works fine, but vent on developer tank does not seem to work by 
simply turning metal switch.  It was necessary to adjust the black
plastic pressure controller knob to vent the tank.

>>> 'mti' problem from rnorman -- Fri Feb  9 09:16:04 1990 <<<

Problem: Developer tank not venting when black valve is turned.

Cause: The N2 regulator was acting like a check valve, preventing
       the N2 from flowing back up through to vent out the black knob.

Solution: The black N2 vent valve was moved to the other side of the
          regulator of the developer tank. Also another black 
          N2 shutoff valve was put on the acetone tank,
          you will use this for stopping the N2 flow before
          venting the tank. Both tanks have been tested and the
          mti is up.

>>> 'mti' problem from liew -- Tue Feb 13 23:22:00 1990 <<<

Chuck speed during developing was 6000rpm

>>> 'mti' problem from rnorman -- Wed Feb 14 09:53:31 1990 <<<

The mti chuck speed is stuck at 6000 RPM, this is an intermittent
problem that comes and goes.  The last time it a chip latched up,
but durring the troubleshooting it went away; I will try to pick up
were I left off last time.   The mti is only good for stripping
wafers, and other programs not related to developing wafers.  The
mti is down.

>>> 'mti' problem from rnorman -- Wed Feb 14 14:13:20 1990 <<<

Problem: Chuck spins at 6000 RPM on all programs.

Solution: After turning the power on and off a couple times
          the problem went away.  It seems to be a chip
          latching up intermittently.  The mti is up for all use.

>>> 'mti' problem from ling -- Mon Mar 19 17:50:37 1990 <<<

aceton is  used out when i started to strip resist on my wafer.
With someone's help, we refilled three bottles aceton. Unfortuntely,
rubby O-ring of aceton container is droped into the aceton container
(we don't know how and when). Now, we used another O-ring without
took dropped O-ring out. Please do something necessary or contact with me.
Thanks
zml

>>> 'mti' problem from rnorman -- Tue Mar 20 07:24:03 1990 <<<

Problem: Sealing o-ring fell into the acetone tank.

Solution: The o-ring was removed and placed in a plastic
          bag next to the acetone tank.  The mti is up.

>>> 'mti' problem from judy -- Wed Apr  4 19:17:56 1990 <<<

I don't know if it is a problem or not, but in the I-line develop
program #70 I see small bubbles on the surface of the wafer and 
sometimes the entire wafer isn't completely wetted.  I am just 
starting to use the I-line resist so I'm not up to speed on the
quirks of the system.

MJ

>>> 'mti' problem from debra -- Thu Apr  5 07:57:54 1990 <<<

The bubbles are normal and have not seemingly affected development.
The wafer edges are sometimes not completely wetted, but these
areas are not used anyway.

>>> 'mti' fix from rnorman -- Fri Apr  6 07:45:32 1990 <<<

Problem: Needle too far from wafer and producing bubbles.

Solution: The i-line developer needle was adjusted about 
         3/4" closer to the wafer; any more than that and
         I will have to modify the "bowl".  Debra wil test
         it out.  The mti is up.

>>> 'mti' problem from debra -- Mon Apr  9 10:22:23 1990 <<<

DI water leak, no water reaching nozzle for DI rinse.
mti is down

>>> 'mti' problem from bob -- Mon Apr  9 10:35:41 1990 <<<

The recirc water on the temp controll unit was valved off due
to a minor leak. The mti is running; however, the tcu needs
attention.

>>> 'mti' fix from debra -- Mon Apr  9 11:47:01 1990 <<<

mti available for use 

>>> 'mti' problem from rnorman -- Mon Apr  9 12:44:02 1990 <<<

The mti will be down to repair a water leak from the developer
heater reservoir.  You will be notified when it is up.

>>> 'mti' fix from rnorman -- Mon Apr  9 14:47:50 1990 <<<

Problem: Water leak from left developer heater reservoir, as reported.

Solution: The heater was removed and the hose cut and reconnected and
          the band clamp tightened.  The mti was also clean up a little
          and is up for use.

>>> 'mti' fix from rnorman -- Tue Apr 10 10:20:00 1990 <<<

Problem: Water leak still present.

Cause: The right developer heater reservoir had a
       leak from the cooling line, located under the reservoir.

Solution: The reservoir was removed and the cooling line trimmed
          down and connected tightly.

>>> 'mti' problem from jiahua -- Fri Apr 27 14:20:51 1990 <<<

One wafer stuck in the plat, but Robert fixed it.

>>> 'mti' problem from jlou -- Fri May 11 11:37:37 1990 <<<

tI use program #1 to develope my wafers. It seems that this program can
not fully develope photoresistor. It takes two times to get a clean
surface.
                                                              Jlou
