>>> 'mrc' problem from bob -- Wed Feb  1 13:50:40 1989 <<<

The mrc cryopump has been regenerated after a power failure and is
ready for use.

>>> 'mrc' problem from bob -- Tue Feb 28 07:11:25 1989 <<<

The hoist on the mrc is leaking oil and needs service. This 
has been added to the jobs list.
.

>>> 'mrc' problem from straub -- Thu Apr 13 01:24:20 1989 <<<

The hoist does not work.  When I turn the air on I can hear a leak.
Inspecting it I find that the air is leaking from an open port on
the pneumatic valve.  There was no fitting or other lines that
might have blown out that I can see.  I plugged the hole with a threaded
plug and was able to get the top lifted from the chamber, but I know
this isn't right because I have to turn the air off to get the hoist
to lower, and when it does it jerks up and down as I see others have
reported in the past.
I also had another problem.  Aparently when I vented the system the Hi
Vac valve was not completely closed, and consequently the cryo temp
went up to 46K.  I clsed the valve very tightly( actually much tighter
than I prefer to tighten valves) and the temp dropped back to 12K within
about an hour, so I decided not to regenerate it yet.  The system
pressure is only 5x10-6, wheras it has been typically 2x10-7 in the past,
so unless I hear otherwise I will probably regenerate it tomorrow.  I'm
going to try to do a deposition tonight and hope everything is okay.

>>> 'mrc' problem from parrish -- Thu Apr 13 09:21:13 1989 <<<

The hoist is still not working because I was afraid of contaminating the
wafers that was being placed in the v401 therefore I will continue later
today. hopefully having it finished before the days end.

>>> 'mrc' problem from parrish -- Fri Apr 14 07:28:21 1989 <<<

problem:    hoist not working

cause:      oil in the valve that operates the hoist. prehaps
            there`s an intermittent valve problem also
solution:   removed some of the oil, and blew out the oil in the valve
            the hoist works fine.

>>> 'mrc' problem from eskim -- Thu Apr 27 22:44:43 1989 <<<

Cryo-pump needs to be regenerated.
The hoist movement is still very rough, especially for downward movement.

>>> 'mrc' problem from parrish -- Fri Apr 28 09:17:59 1989 <<<

cryo-pump is being regenerated should be up by noon.

>>> 'mrc' problem from bob -- Fri Apr 28 14:34:27 1989 <<<

The mrc has been regenerated and is is now ccooling back down. It should
be ready for use by 17:00 today.

>>> 'mrc' problem from eskim -- Mon May  8 14:03:42 1989 <<<

The mechanical pump does not operate at all.

>>> 'mrc' problem from bob -- Mon May  8 15:09:03 1989 <<<

The belt (1) on the mechanical pump of the mrc has broken
belt which needs replacing ASAP. James will attend to this
tomorow AM at the latest. 
bob

>>> 'mrc' problem from parrish -- Tue May  9 08:20:14 1989 <<<

problem:      mech-pump not working

cause:        v-belt on the pump worn out

solution:     replaced worn-out v-belt with two new ones. system is up.

>>> 'mrc' problem from costello -- Thu May 25 17:52:17 1989 <<<

cryothemometer reads 1 in the middle (tens) digit.
the right (singles) digit is dark as though it is not
working.  I thought at first that the cryo pump was
hotter than the themometer's range but then I would
expect a 1 in the left (hundreds) column.
The cryopump pumped down to 5x10-7 within an hour
and seems to be working fine.

>>> 'mrc' problem from bob -- Fri May 26 09:32:12 1989 <<<


The numeric dispaly on the least significant display of the mrc has
gone south. It will be repaire next week. In the meantime, the mrc
remains up for use.
bob

>>> 'mrc' problem from parrish -- Fri May 26 09:52:24 1989 <<<

system is being regenerated.

>>> 'mrc' problem from bob -- Fri May 26 14:36:05 1989 <<<

The mrc was regenerated before the weekend and should be up for
use latter this afternoon. The HiVac valve is closed hile the 
cryo is cooling down. It can be opened when the pump is cool.
bob.

>>> 'mrc' problem from eskim -- Tue Aug  1 15:28:40 1989 <<<

The Cryo pump needs to be regenerated asap.

>>> 'mrc' problem from jules -- Wed Aug  2 16:38:55 1989 <<<

Cryo pump regenerated. The machine will be available for use at 20:00 today.

>>> 'mrc' problem from nam -- Fri Aug  4 10:24:06 1989 <<<

Temperature of cryo is 15-16 K.  It needs regeneration again.
Please do the regeneration as soon as possible.  Eun Sok and I want
use it today afternoon.

>>> 'mrc' problem from bob -- Fri Aug  4 13:47:52 1989 <<<

A regeneration is in progress on the mrc. It should be ready for
use late this afternoon.

>>> 'mrc' problem from bob -- Fri Aug  4 15:45:30 1989 <<<

The mrc has been regenerated and is cooling down. It will be ready for
use by 18:00.

>>> 'mrc' problem from bob -- Tue Aug  8 13:52:35 1989 <<<

eskim reports the mechanical pump is making a noise. I have 
checked it over and the oil level is fine. In addition I found 
the gas ballast open. It should not be. It is now closed. The
mechanical pump is pumping satisfactory and James Parrish will
check it over when he returns.

..

>>> 'mrc' problem from wenzel -- Thu Aug 24 18:29:38 1989 <<<

The hoist is in really bad shape -- it barely lifts and is
unpredictable.

>>> 'mrc' problem from parrish -- Fri Aug 25 10:24:12 1989 <<<

problem:   hoist not operating properly

cause:     4 way solenoid not functioning 

solution:  removed solenoid and replaced with a new one, hoist is moving
           smoothly.

>>> 'mrc' problem from bmartin -- Mon Oct  9 17:50:24 1989 <<<

The heater for the mrc stage is not working.  The temperature
of the stage remained at 28 degrees after the heater was turned
on for 20 minutes.

>>> 'mrc' problem from parrish -- Tue Oct 10 11:04:21 1989 <<<

update:  the heater is a open circuit, and need replacing. I don`t know
where it came from or who ordered it, but will locate info. and order
a new one if there is not one in stock.

>>> 'mrc' problem from bob -- Wed Oct 11 11:28:50 1989 <<<

The new heater fot the mrc is on order and will be here tomorow.
Repairs will effected upon its arrival. The mrc should be up
for use by the Oct 13th.

>>> 'mrc' problem from parrish -- Wed Oct 11 15:18:15 1989 <<<

update:  I replaced the heater, now the heater is getting hot but
         the display is reading at 25C, will have to be checked out
         in the morning.

>>> 'mrc' problem from bob -- Thu Oct 12 16:31:04 1989 <<<

The mrc has had a new heater installed however the temp readout is
not working. It will be repaired in the morning.

>>> 'mrc' problem from bob -- Mon Oct 16 11:39:58 1989 <<<

The heater in the mrc has been replaced. The reason it burned out was
a user set the Variac to a setting which burns out these heaters when 
they are run in vacuum. The problem that prevented the user from seeing
a temperature rise when heating was called for was a defective TC. 
Raising the heater voltage setting led to its early demise.

A new TC (and a spare) have been ordered from Omega. These TC's can't
be fabricated in-house as they are ungrounded junctions sheathed in
inconel to prevent shorting the RF bias on the substrate holder.

P/N SCAIN-062-6 has been ordered from Omega Eng and should be here on
Oct 19th. The mrc is down until then.

>>> 'mrc' problem from bob -- Fri Oct 20 14:40:17 1989 <<<

A new type K tc has been installed in the mrc and tested. It appears
to work fine. A spare is available if needed. The cryopump was
regenerated and the system is now operational.

>>> 'mrc' problem from parrish -- Wed Dec 13 06:56:17 1989 <<<

system down for regeneration, the temp. of the cryo is 30k.
.

>>> 'mrc' problem from parrish -- Wed Dec 13 07:03:48 1989 <<<

problem:    controller reading 30K

cause:      either electroonic drift, doide going bad,or electronic problem

solution:   I  cloesd the high vacuum valve, and the pressure wint down to
            the low 7 range, so I turned off and turn on again the controller
	    and the temp. read 15. system is up    

>>> 'mrc' problem from bmartin -- Sun Dec 17 10:01:16 1989 <<<

The power supply for the mrc did not turn on after I did one
ZnO deposition.  After turning off the power to change wafers
and pumping the system down, I could not get the yellow standby
light to come on.  Cooling water was flowing and all other obvious
switches were correct.  It seems there might be an open circuit
since one of the ammeters read zero amps.  I have a wafer in the system
presently, and I would appreciate it greatly if the power supply could
be fixed sometime on Monday.  Thanks.

Bret

>>> 'mrc' problem from bob -- Mon Dec 18 15:33:18 1989 <<<

The interlock light failing to turn on and consequent 
failure of the RF power supply on the mrc will be looked at
quickly this afternoon by Evan Stateler. If significant
repair is needed, Robert Norman will perform this 12-19-89.

>>> 'mrc' problem from evan -- Mon Dec 18 16:15:23 1989 <<<

Problem: standby not lighting
Cause: ?
Solution: The bulb to the MAINS indicator was burned out.  While looking
inside cabinet, I noticed that the fan did not turn on the first time I
switched on the AC MAINS.  On the second and subsequent tries, the fan
operated.  With the fan operating and H2O flowing, the STANDBY lamp
illuminated after a few minutes as is normal.  I switched over to POWER
and found that this lamp was also dark.  I replaced the two burnt lamps
and found operation to be normal.  It wasn't the lamps causing the failure
but without them, it is possible to be in a POWER state if the POWER button
was pressed, and not know it.  It is also possible that there is a problem
with the AC MAINS breaker.  Again, without a lamp it was hard to tell.

mrc rf power supply is up.

>>> 'mrc' problem from phillip -- Thu Jan  4 11:23:35 1990 <<<

The 'inficon' thickness rate monitor has been repaired and
reinstalled on the mrc/nrc.
Dave Hebert's unit has been given back to him.
The mrc is up.

>>> 'mrc' problem from costello -- Thu Jan 18 11:40:28 1990 <<<

Argon/oxygen tank is almost empty.

>>> 'mrc' problem from costello -- Thu Jan 18 13:58:05 1990 <<<

Cryopump temperature is 26 K and it will only pump the chamber down
to 8*10-6 torr:  cryopump needs regenerating.

>>> 'mrc' problem from rnorman -- Thu Jan 18 14:59:51 1990 <<<

The cryo is purging at this time. Do not operate.

>>> 'mrc' problem from bob -- Thu Jan 18 15:51:41 1990 <<<

The mrc cryopump has been regenerated and is cooling down.
The mrc should be ready for use around 18:30 today.
A minor problem which does not effect the user need to be 
looked into. This is a slight leakage across the roughing valve
when the valve is closed. James Parrish has taken a quick look
at this problem and has OK'd the use of the system.
The mrc is up at 18:30 today.

>>> 'mrc' problem from straub -- Wed Jan 31 11:49:09 1990 <<<

the pnuematic hoist is terrible, particularly when lowering the top.  At first
it won't lower, then it will all of a sudden drop very quickly.  This makes
it particularly difficult to try and allign the shutter lever.  It feels like
the problem is that the gears are sticking on the track rather than an air valve problem.

>>> 'mrc' problem from bob -- Fri Feb  2 07:09:02 1990 <<<

The mrc is down for cleaning. Qualified users are performing this
operation.

>>> 'mrc' problem from bob -- Mon Feb  5 15:10:30 1990 <<<

The mrc has been cleaned. A new hoist cylinder will be ordered by James
Parrish and installed.

>>> 'mrc' problem from costello -- Wed Feb  7 12:01:04 1990 <<<

The temperature controller reads VERY eratically when the plasma
is ignited.  I can see the plasma envelop the thermocouple wire.
This did not happen before cleaning, I don't think.

>>> 'mrc' problem from bob -- Thu Feb  8 09:34:01 1990 <<<

Problem:   User reports erratic readout of the temperature controller.

Cause:     This is likely caused by a short of the thermocouple wires
           to it SS sheath. The type tc in the mrc is an "ungrounded 
           junction tc".

Solution:  The tc should be replaced. A spare is sitting on the machine.
           In addition I have ordered additional spares to have on hand.
           Currently the machine is enabled and in use by Marc Straub.
           When he is finished James Parrish will change the tc. Users
           should be warned that a short to ground through the tc
           will result in different bias conditions on the substrate
           holder.

           In addition, James Parrish will be repairing the hoist and
           also replacing an o-ring in the roughing valve.

>>> 'mrc' problem from straub -- Thu Feb  8 11:22:11 1990 <<<

read mail I sent to mrc et al today about the thermocouple problem.
It might also be worth taking a look at the high vacuum valve.  Unless
the crank is tightened  a couple of turns past where you can feel contact first
made I don't think that the valve is fully closed, and even then as you
watch the ion gauge readout it seems to respond slightly to things like venting
or opening the roughing valve.  I'm afraid to tighten the hi vac valve too 
much for fear of damaging the valve.  Am I just overly concerned over nothing?

>>> 'mrc' problem from ried -- Sun Feb 18 15:37:47 1990 <<<

Cleaned and installed plate for 4 inch wafers, but in the process
the temp controller wire cracked.  There is no temp control now.

>>> 'mrc' problem from ried -- Sun Feb 18 15:47:26 1990 <<<

An additional problem to the one above (no temp control),
the base pressure of the chamber seems limited to 2E-6 torr, though
the cryo pump will go down at least to 2E-7 torr.  (Even pumping
overnight, the pressure was 2E-6).  Thus there appears to be a leak.

>>> 'mrc' problem from ried -- Sun Feb 18 22:27:39 1990 <<<

My previous problem report about was in error - the chamber
is now pumped down below 2x10E-7 - there must have been a bad fit
on the gasket when I found the system originally.

>>> 'mrc' problem from costello -- Mon Feb 19 13:05:10 1990 <<<

The wires that connect the thermocouple plug to the feedthrough
are broken.  The ends of wire are too short to solder together.
New wires between the feedthrough and the plug are needed.  Do
these have to be made of thermocouple wire?

>>> 'mrc' problem from parrish -- Tue Feb 20 14:17:06 1990 <<<

1. hoist chattering comming down
2. t.c. wire disconnected
3. high vacuum valve closing with excessive force
system down for repairs, tomorrow morning may be up.

>>> 'mrc' problem from parrish -- Wed Feb 21 07:14:43 1990 <<<

update:   removed and replaced the high vacuum valve, regenerated the 
          cryo-pump and working on the t.c connection.

>>> 'mrc' problem from parrish -- Wed Feb 21 11:47:13 1990 <<<

problem:     1. high vacuum valve hard to close
             2. t.c. connection shorted
             3. hoist chattering, and roughing valve leaking
cause:       1. track that the wheels travel is worn
             2. broken connection
             3. off balance load, bushing worn, and the valve body worn
solution:    1. removed, cleaned and replaced, it will have to be used as is
             2. removed old t.c. and replaced with a new one
             3. removed solenoid and useing air only, it slow but it works
                and replaced the roughing valve. ststem is up.

>>> 'mrc' problem from ried -- Fri Mar  2 23:51:22 1990 <<<

There is a noncritical problem that the chamber lid will not raise to
sufficient height that the shutter arm will clear the side wall.
A solution might be to go back to the previous raising/lowering
scheme even though it was too fast at times - the speed of the
descent in the previous scheme could be reduced by turning off the
air pressure.

>>> 'mrc' problem from parrish -- Wed Mar  7 08:28:51 1990 <<<

system is down for rework of the hoist cylinder.

>>> 'mrc' problem from parrish -- Thu Mar  8 13:26:38 1990 <<<

problem:    hoist slow, and won`t clear shutter arm.

cause:      water in the oil lifting system, not allowing uniform flow

solution:   removed air cylinder, oil reservoir, and lines, cleaned and
            recharged the reservoir, reinstalled, adjusted, and checked
            the system. system is working.

>>> 'mrc' problem from parrish -- Tue Apr  3 09:15:17 1990 <<<

system down for regeneration of cryo-pump.

>>> 'mrc' problem from parrish -- Tue Apr  3 14:14:49 1990 <<<

problem:   temp. of cryo-pump at 25K

cause:     system was at that temp. when I came in this morning

solution:  regenerated system, system is up temp.15K
           base pressure at 2x10-7
