>>> 'microstrip' problem from gian -- Wed Aug 23 11:56:08 1989 <<<

I could only achieve 60-70 watts of power.
I made sure that the wafer carrier was inserted properly,
and not shorting the electrodes.  Tuning was not very effective.

In the middle of my second run, the power suddenly jumped from
60 Watts to 230 Watts, and worked fine from that point on.

>>> 'microstrip' problem from rnorman -- Wed Aug 23 14:57:50 1989 <<<

Problem: Low RF power.

Solution: Could not duplicat the problem other then if no wafers
          are put into the system there is very low RF out, 100 watts.
          The system is up.

>>> 'microstrip' problem from rnorman -- Wed Aug 30 07:52:24 1989 <<<

Problem: System shut down; total power off.

Cause: Possibly a user turned off the unit or someone
       accidently hit the EPO button, emergency power off.

Solution: The main power was turned on by pushing the button
          on the back of the unit and the chamber was pumped down
          under vacuum.  The ms is up for use.

>>> 'microstrip' problem from field -- Fri Dec  1 15:02:54 1989 <<<

plasma went unstable during the process.  started out as usual,
around 250 W, then during the process the plasma was flickering
and power was varying from 30 - 250 W.  I tuned it in some more
and then the power went to ~450 W.  But the plasma was not visible.
I stopped the process, using the stop/start and the power still
registered as ~450 W.  When I finally went back to manual
mode, the power display went back to 0 W, where it should have
been as soon as I had hit the stop/start button.

>>> 'microstrip' problem from rnorman -- Mon Dec  4 07:33:51 1989 <<<

Problem: Plasma unstable during process.

Solution: I could not duplicate the problem after running an O2 plasma
          for 45 min.  During the run I was tunning the plasma in and out
          of tune, still no problem occurred.  The microstrip is up.

>>> 'microstrip' problem from parrish -- Mon Jan 29 13:55:18 1990 <<<

system down to change oil in the roughing-pump

>>> 'microstrip' problem from parrish -- Mon Jan 29 15:39:13 1990 <<<

need oil change, will change it in the morning
From bob Mon Feb 26 09:51:36 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA16850; Mon, 26 Feb 90 09:51:33 PST
Date: Mon, 26 Feb 90 09:51:33 PST
From: bob (Robert M. Hamilton)
Message-Id: <9002261751.AA16850@argon.berkeley.edu.>
To: field
Subject: Re:  technics-c comments
Cc: derba, phillip, voros
Status: R

The microstrip was supposed to be a super-duper stripper when we
bought! It works at 13.5mhz instead of 50khz and was supposed to do 
less damage (ion bombardment) to the devices. I sure can't argue with
what works! I know technics-c has a heated platten which may help
the strip rate.

Bob


>>> 'microstrip' fix from phillip -- Fri May  4 07:49:08 1990 <<<

Connected house n2 (regulated @ 10psi) to 'gas2' port
per Leslie's request.
The MS is up and available for use.
