>>> 'lberg9' problem from xwu -- Thu Feb  9 13:13:03 1989 <<<

when I came to lberg9 I found the door was not sealed, I tried pretty
hard to seal it but didn't work.  Is there any problem on the system
or just I am not expert enough to handle it?  I used lberg9 many times
before but never have had this trouble.

So I'm not able to use it now.


Xin

>>> 'lberg9' problem from evan -- Fri Feb 10 09:42:29 1989 <<<

problem: door won't seal
cause: bad o-rings
solution: replaced the door o-rings. door seals.
lberg9 is up

>>> 'lberg9' problem from evan -- Wed Mar  1 16:08:47 1989 <<<

The tube and door assembly were replaced with a new set-up.
The new flange has a built in gas mixing nozzel and a removable
(therefore cleanable) exhaust tube.  The new door has a viewport
and the door holding vacuum line has been moved to the flange.

N2 is being run as a purge and the gas fittings were "snooped".
The furnace has been turned on and will take overnight to temperature
stabilize.  wsin will be running tests for the next week and will report 
his results and any difficulties.

A few immediate things that need attention:
1) The quartz exhaust tube did not fit into the flange very far.  It will be
reseated after the tube has reached operating temperature and the flange
has expanded.
2) The door holder on the side of the furnace needs to have the slot
enlarged to >1".
3) The tube might need a bit more heat insulating packing around where it
leaves the furnace.

lberg9 is up for test runs. (see wsin)

>>> 'lberg9' problem from evan -- Thu Mar  2 11:11:21 1989 <<<

Update on lberg9 work:

1) The door holder slot has been enlarged to hold the new door.
2) The handle on the door has been resecured with washers and should
remain tight.
3) The exhaust tube was reseated into the flange but does not go in as
far as it should.  Either the flange needs to be machined or the quartz
needs to be reground.  I will check with bob.  It is usable as is for now.
From hsin Tue Mar  7 16:57:45 1989
Received: by argon (5.57/1.16)
	id AA04975; Tue, 7 Mar 89 16:57:43 PST
Date: Tue, 7 Mar 89 16:57:43 PST
From: hsin (Wei Hsin)
Message-Id: <8903080057.AA04975@argon>
To: bob, evan, voros
Subject: lberg9 comments 
Status: R

I run it for 15 min and is O.K.  The film seems good. I will check
the new deposition rate tomorrow and also the refractive index.

When I pull the pushing rod out, I forgot to pull the O-ring out together.
Therefore, the O-ring melt a little bit on the hot pushing rod. Could
Evan change a new O-ring for the pushing rod? Thanks. Even the pushing
rod is contaminated by the molten O-ring the deposited film looks 
as good as before by eye.

I will try to clean the pushing rod by tomorrow.


Wei Hsin


>>> 'lberg9' problem from hsin -- Mon May 22 12:59:37 1989 <<<

The mass flow control unit for the house N2 does not work properly.
The nob can turn but the flow rate will not change. Therefore, the 
nob must be loose and need to be fixed.

Wei Hsin

>>> 'lberg9' problem from bob -- Mon May 22 14:20:49 1989 <<<

The N2 needle valve was taken apart and cleaned and reinstalled. lberg9
is operating again.

>>> 'lberg9' problem from hsin -- Fri Jun  2 10:28:38 1989 <<<

I broke the pushing rod yesterday. Today I can not find any pushing
rod for it. Therefore I take the old LPE pushing rod to replace it.
Could I ask Bob to order 5 more pushing rods for the lberg9 and LPE?
Thanks.

Wei

>>> 'lberg9' problem from bob -- Fri Jun  2 11:54:25 1989 <<<

A new pushrod has been installed and a cracked window was replaced. The
lberg9 is up and operational. Spare pushrods wiill be ordered.
bob

>>> 'lberg9' problem from jayyang -- Tue Jun  6 13:02:15 1989 <<<

There is no NH3 coming out when switch is on, but regulator shows 8 psi
.Is it empty?

>>> 'lberg9' problem from evan -- Wed Jun  7 10:03:42 1989 <<<

The NH3 solenoid has failed.  I will be replacing it today.  The solenoid
controller has also been removed for upgrading. 

>>> 'lberg9' problem from evan -- Wed Jun  7 14:19:52 1989 <<<

Problem: NH3 solenoid failed
Cause: Solenoid power supply delivering 40vpeak full wave rectified A.C. 
These are 24v D.C. solenoids.
Solution: replaced coil in NH3 solenoid.  Installed a 24vdc power supply in
the solenoid control box.

lberg9 is up.

>>> 'lberg9' problem from hsin -- Wed Jun 14 18:56:53 1989 <<<

I believe there is a leakage somewhere in the line. The deposited
film looks terrible. A lot of "patterns" on the film. I even not
sure whether it is SiNx film or not. I turned off the power. 

Could evan take a look at the system first thing in the morning?
We really need a good system as soon as possible. Thanks.

I will show Evan the film I got once I come into the lab.

Wei Hsin & Jay Yang

>>> 'lberg9' problem from evan -- Fri Jun 16 16:41:00 1989 <<<

The tube was removed and cleaned.  The hole in the flange for the quartz
exhaust tube was lined with brownish deposits.  The end of the quartz
had broken off a couple places in the hole.  It appeared that the sealing
of this junction was inadequite over the long run.  Parrish and I met
with Jose in the machine shop and an alternate solution for this coupling
was devised.  Jose fabricated a sleeve with o-rings which fit inside the
quartz tube.  This should provide a good seal under changing conditions of
thermal expansion and contraction as well as any bumping of the tube while
loading boats.
The tube/flange assembly was replaced and hsin will be doing tests over the
weekend.
lberg9 is up

>>> 'lberg9' problem from hsin -- Sat Jun 17 17:05:23 1989 <<<

The vaccum for the door does not work. I think the O-rings on the
door should be changed.  I tryed many many times, but the door still
can not be sucked by the vaccum.

Also, the push rod is broken again. The reason is because there is
a pressure buld up inside the tube ( I don't know why ), and when
I switch the vaccum to OFF position for the door, the whole door
just "jumping" out like explosion! This sudden movement of the door
breaks the push rod. 

I turned off the power again so that Evan can do some work on it 
again on Monday.  I will contact Evan as soon as I get into the lab.

Wei Hsin

>>> 'lberg9' problem from evan -- Mon Jun 19 10:34:38 1989 <<<

Problem:pressure build-up in tube.
Cause: build-up of deposits in exhaust tube.  Additional flow restriction
in flange/quartz tube modification.
Solution: Checked exhaust lines and blew them out with high pressure N2.
I will be ordering new flex lines and this should help.  The greatest
amount of deposits formed in the first few inched of the line.  I sealed
the tube with 10liters/min of N2 flow and found no pressure build-up in
the tube. (When vacuum to door was shut off, there was no 'popping open'
of the door.)  I do not think the new quartz exhaust tube fitting had 
added any significant back pressure.
I replaced the door o-rings but this didn't seem to make it easier to
get the vacuum seal.  I will continue to try and figure out a fix for this
problem.  It may be that the heating/cooling cycles have slightly warped
the door.
I have turned the heaters back on.
lberg9 is up for hsin's testing.

>>> 'lberg9' problem from xwu -- Wed Jul 12 13:29:51 1989 <<<

when I came to lberg9 I found that the glass pulling rod had been
broken, do we have any rod can replace it?
lberg9 is not usable without pulling rod.

Xin

>>> 'lberg9' problem from bob -- Wed Jul 12 13:54:17 1989 <<<

The qtz pushrod has been replaced.

>>> 'lberg9' problem from hsin -- Tue Aug 22 17:08:17 1989 <<<

I broke the push rod.  I cleaned one rod and put it inside the tank
of the sink in the lberg room.  It needs to be bended on top to form
a hook.  Could Bob take 5 min in the morning to form the hook for me?

Thanks.

Wei Hsin

>>> 'lberg9' problem from hsin -- Wed Aug 23 13:31:16 1989 <<<

The air asperater used to seal the door of lberg9 is off.  I do not
hear any sound of air flowing.  The door can not be sealed now. I 
can not do any deposition without the air pressure system being fixed
first.

Wei

>>> 'lberg9' problem from evan -- Thu Aug 24 08:08:59 1989 <<<

problem: loss of air pressure
cause: feed valve closed by stationary engineer
solution: valve was closed during demolition of 1st floor remodeling.  It
was not posted as being a microlab feed.  This affected the entire old lab.
The valve was reopened.  It will be closed for a short time this morning but 
will not have to be closed again.  The valve will be posted as a microlab
feed for future reference.

>>> 'lberg9' problem from gamelin -- Mon Dec 18 00:45:52 1989 <<<


Rod was broken on Thursday and new pull rod needs to be made.
It would also be a good idea to have the tube cleaned at the
same time as the deposition rate is falling.

>>> 'lberg9' problem from bob -- Tue Jan  9 07:39:33 1990 <<<

lberg9 will be cleaned and a broken pushrod will be replaced
shortly. It is on rnormans techjob list and has a moderate
priority as users of lberg9 acknowledge it still works well
and is useable as is.

>>> 'lberg9' problem from bob -- Mon Feb 26 11:53:41 1990 <<<

TThe pushrod on lberg9 will be replaced when the tube is taken down
for cleaning by the users. Until that time, lberg9 is up for use.

>>> 'lberg9' problem from jayyang -- Mon Apr 23 16:27:29 1990 <<<

The deposition rate seemed to be getting lower and the deposited film
looked hazy. I suggest that the systym shoud be cleaned out and leak checked.

>>> 'lberg9' fix from bob -- Fri Apr 27 15:45:34 1990 <<<

lberg9 clean has been added to rnorman's job list.
