>>> 'lam1' problem from lsfan -- Fri Jan 13 20:59:18 1989 <<<

The terminal is dead. The terminal was switched off when we came,
and it displayed random garbages when we switched it on.

>>> 'lam1' problem from rnorman -- Tue Jan 17 09:06:45 1989 <<<

Problem: The terminal is dead; displays randon garbage.

Solution: The SIO pcb was not in all the way; so I reset it and the lam is up.

>>> 'lam1' problem from jiahua -- Mon Jan 23 14:50:08 1989 <<<

The uniformity of dry etching is not good, and the last time of cleaning the
chamber is Fab. 1988, please have the chamber clearned before using.

>>> 'lam1' problem from rnorman -- Tue Jan 24 08:39:42 1989 <<<

The lma1 will be down for a chamber clean; this will take about 3 hours.

>>> 'lam1' problem from rnorman -- Tue Jan 24 16:51:55 1989 <<<

After the chamber clean there is now a major vacuum leak. I will start
leak checking tomorrow morning.

>>> 'lam1' problem from rnorman -- Wed Jan 25 16:49:35 1989 <<<

The chamber o-ring was replaced, I will look at it tomorrow to see
how the leak looks.

>>> 'lam1' problem from rnorman -- Thu Jan 26 13:47:11 1989 <<<

The lam1 will need to be leak checked; it looks like the upper electrode
guard seal is the cause.

>>> 'lam1' problem from rnorman -- Fri Jan 27 15:12:34 1989 <<<

The upper and lower seals on the upper electrode are leaking and
will need replacment. I leak checked the upper electrode with the
chamber vented and with hld connected to the back upper guard seal.
The leak was major. The new teflon ball seals, PN 739-1856-1, will
be here on tuesday or wednesday. It most likly will take a whole day
to install and leakcheck and should be up by late next week, depending
on when the parts come in.
From phillip Thu Feb  2 07:44:54 1989
To: bob rnorman
Subject: lam chiller
Cc:  $pf/lam1-p

 I installed a new 1/4 hp motor in this unit replacing the
1/3hp motor which had failed. It is back on line and running
as I write this.
 I am going to replace the screws in the chassis cover with knobs.
This will be done today.
pg


>>> 'lam1' problem from rnorman -- Thu Feb  2 16:40:05 1989 <<<

The new upper and lower teflon bal seals were installed. All that
is needed now is to adjust the gap spacing and install the whole
assembly. I will continue tomorrow; the lam should be up by noon.

>>> 'lam1' problem from rnorman -- Fri Feb  3 16:30:59 1989 <<<

Problem: Vacuum leak in chamber; rate of rise at 9mt/min, it should
         be atleast below 2mt/min. 

Cause: The upper and lower bal seals leaked; checked by using hld.

Solution: New bal seals were installed and the upper electrode adjusted
          as parallel as possable with the lower electrode. The chamber 
          was cleaned previously. I adjusted the 10K pot on the RF assemble
          due to the channel 10, gap spacing counts, being off by 50 counts;
          approx. 0.030". I did a 10 min O2 plasma clean also. The lam is up
          for the weekend if you have any problems send me mail. Monday I
          will leak check the chamber and recheck the gap spacing parallelizm.

>>> 'lam1' problem from aplee -- Fri Feb  3 18:14:40 1989 <<<

2 problems :
1. The poly etch module seems to have been screwed up, it loads as 
"process only". I manually change it to "load and process"\
2. The poly etch shows gap brake, and a periodically beep goes on,
then it loop stabs, sometimes it finally stabilizes, sometimes
it won't.

>>> 'lam1' problem from rnorman -- Wed Feb  8 15:08:49 1989 <<<

Well! Good news! I found the 300mt/min vacuum leak. I will need to
basicly rebuild the chamber iso valves, inwhich all I need to do is
to replace the o-rings. After that I will check the rate of rise
and adjust the gap spacing. I am confidant that lam1 will be up by
tomorrow evening.

>>> 'lam1' problem from rnorman -- Fri Feb 10 11:36:00 1989 <<<

Problem: High rate of rise in chamber; 300 mt/m.

Cause: The chamber isolation valves, two, where leaking pneumatic air
       through the valves into the chamber when the valves were closed.

Solution: Both iso-valves were rebuilt by cleaning and replacing all o-rings;
          each valve used: 2 of 2-028 viton, 3 of 2-114 viton. Also, 2
          lam fomlinated white o-rings; Lam # 734-337-1 and 734-690-1.
          The upper electrode bal seals were also replaced. The whole
          chamber was leak-checked and no leak was found. The ROR with the
          top blank-off plate on was 0.5 mt/min; with the upper electrode
          installed and after a 10 min. O2 plasma the ROR was 1.3 mt/min. I
          believe this will reduce in time due to out gassing of the chamber.
          Parallelism is within 0.001" along a 2" radius from the
          electrode center; using a digital caliper. The lam1 is up
          for use; send me comments on how your wafers turn out.

>>> 'lam1' problem from eminami -- Sat Feb 11 08:02:20 1989 <<<

wafer does not transport to the etch chamber.  Not possible to
run process.

>>> 'lam1' problem from jchung -- Sat Feb 11 18:40:44 1989 <<<

Lam1 is reporting coolant overtemp.  This problem occurred
sometime between 5pm and 7pm on Saturday 2/11

>>> 'lam1' problem from rnorman -- Mon Feb 13 11:36:21 1989 <<<

Problem: "Coolant Overtemp" error.

Cause: The water chiller went down.

Solution: Phillip found the drive pin between the chiller
          motor and water pump to be stripped. He replaced the
          pin and both lams are up and working.

>>> 'lam1' problem from galewski -- Mon Feb 13 14:18:37 1989 <<<

The chiller is making an awful sound again.  The pressure is 
reading zero.  There is also a "low water flow" alarm flashing
on the lam screen.

			-Carl

>>> 'lam1' problem from eminami -- Mon Feb 13 14:25:54 1989 <<<


Getting a coolant ovflw error.

>>> 'lam1' problem from rnorman -- Mon Feb 13 16:20:21 1989 <<<

Problem: "coolant" error.

Cause: The lam chiller went down again.

Solution: The chiller water line were connected to the DI water
          supply and return. The lam chiller water is clean, around
          16-18 Megaohms; but I flushed it out by running water into
          the sink. The lam1 is up. 

>>> 'lam1' problem from jimmoon -- Mon Feb 13 18:40:10 1989 <<<


Several times during a loop stabilization step the message
GAS 3 flashed repeatedly on the screen.  I was able to
acknowledge out of the step by pressing FIELD SELECT, and operation
seemed to continue normally.  Results seemed normal.

>>> 'lam1' problem from jiahua -- Fri Feb 17 16:46:08 1989 <<<

Gas 3 problem, Helium is lower than the set point.

>>> 'lam1' problem from rnorman -- Tue Feb 21 09:45:25 1989 <<<

Problem: "GAS 3" flashing.

Cause: This is most likly due to low gas flows.

Solution: I turned up the He line pressure to the lams to 22 PSI. I
          cycled 5 dummy runs and could not duplicate the problem.
          The lam1 is up.

>>> 'lam1' problem from carlos -- Tue Feb 28 23:25:19 1989 <<<

GAS 3 alarm is on

>>> 'lam1' problem from rnorman -- Wed Mar  1 16:10:18 1989 <<<

Tomorrow morning I will need to run some tests on MFC # 3 to
see if the MFC is in need of calibration or if the Analog PCB
for the MFC needs calibration. So, the lam1 will be down in the
morning for 1 or 2 hrs.

NOTE: The lam is usable, but the He fluctuates down about 10 sccm.

>>> 'lam1' problem from rnorman -- Thu Mar  2 12:15:45 1989 <<<

Problem: Gas 3 fluctuates down from 130 sccm to 119 sccm and then
         flashes "Gas 3".

Cause: I switched gas 2 and gas 3 harness and flowed gas through both;
       there was no fluctuations as stated above. I noticed though that
       gas 3 MFC was way off zero.

Solution: Max flow on the Analog Input channel 3, MFC #3, should be 
          1024 counts, before zeroing max flow was at 0980; an error
          of 44 counts. After zeroing the MFC the Analog Input signal
          went up from 0980 to 1019, which reduced the error signal
          from 44 to 5 counts. In short, the MFC was in need of a little
          calibration adjustment. I went through and zeroed all the
          MFC's in both lam1 and lam2. If you notic any fuctuations
          in your gas flows greater than about 4 sccm, put it in comments
          and send me a copy. The lam1 is up.

>>> 'lam1' problem from rnorman -- Wed Mar  8 12:20:59 1989 <<<

Problem: Chiller making funny sound.

Cause: The Procon pump went out.

Solution: The pu p was replaced and tested for a few days.
          The chiller has been connected to the lams and is up.

>>> 'lam1' problem from phillip -- Mon Mar 13 14:12:37 1989 <<<

P: The chiller work being complete (?): the d.i. deck hose
   for general use in the tylanchase is disconnected.
   The water lines on the electrical breaker panel must
   be slightly rearranged to miss the panel in their travel
   to the machine.

>>> 'lam1' problem from jimmoon -- Wed Mar 15 11:03:17 1989 <<<

Won't load wafers.  Looks like maybe a rubber band broke.

>>> 'lam1' problem from rnorman -- Wed Mar 15 12:05:28 1989 <<<

The lam1 is blowing belt motor fuses, 2/10 amp. I disconnected the
main drive belt on the entry side and it is still blowing fuses.
That means we have a bad belt motor on the entry side; which will
take 1-2 hrs to replace and tests. If all works out well the lam1
should be up by 3:pm today.

>>> 'lam1' problem from rnorman -- Wed Mar 15 15:00:32 1989 <<<

Problem: Entry belts not working.

Cause: Pitman motor Bad.

Solution: The Pitman motor that drives the belts was blowing fuses due
       to the motor failing. So, I replaced the Pitman Drive Motor;
       Lam# 676-1677-1, Pitman #GM9413C292 24VDC. The diode was also
       replaced, 1N4003. All the Lt side belts were also replaced:
          1ea, Lt Motor Drive Belt; Pacific Rubber #2-127P70, 1 in stock.
          1ea, Lt Track Connector Belt; Pacific# 2-117P70, 1 in stock.
          2ea, Front Belt; Pacific# 2-154P70, 6 instock.
          2ea, Lt Back Belt; Lam# 734-4051-1, 8 instock.
          1 ea, Hine indexer belt; Hine# 2503-2130, 10 instock.
          Rt Drive Motor Belt, 3 instock

        The lam1 has been tested and in up for use.

>>> 'lam1' problem from rnorman -- Mon Mar 27 16:46:41 1989 <<<

Problem: Chart recorder knob was loose.

Solution: Filed a flat on the pot and tightened down the set screw.
          The lam is up.

>>> 'lam1' problem from jiahua -- Tue Apr  4 16:07:22 1989 <<<

A rubber ring is broken.

>>> 'lam1' problem from rnorman -- Tue Apr  4 16:18:38 1989 <<<

Problem: A drive belt on the RT side broke.

Solution: I replaced all 4 track belts; the lam1 is up.

>>> 'lam1' problem from jlou -- Thu Apr  6 16:53:18 1989 <<<


Lam 1 shows the C CL4 is in low level condition.

>>> 'lam1' problem from rnorman -- Fri Apr  7 14:30:24 1989 <<<

Problem: "LOW CCL4" error.

Solution: I filled the CCL4 tank to the bottom of the eye glass.
         A vacuum was pulled on the tank and 2 wafers were ran
         with a recipe of 200 SCCM of CCL4. The lam1 is up.

>>> 'lam1' problem from martin -- Wed May 17 13:38:31 1989 <<<

problem with wafer exit system.  After wafer is removed from the exit
air lock station and placed on the exit tracks, it remains there on
the rubber band tracks.  The system does not recognize that the wafer is
on the belts because it prompts "wafer not on exit belt"

>>> 'lam1' problem from rnorman -- Thu May 18 07:19:01 1989 <<<

Problem: Exit cassette track not operating.

Cause: The fuse to the belt drive motor opened.

Solution: The fuse was replaced and the track was tested.
          The lam1 is up.

>>> 'lam1' problem from tang -- Mon May 22 22:13:36 1989 <<<

When I did a standard poly-Si etch using hard baked PR, a lot
of sand like "polymer" formed all over the wafer. To the naked
eyes, the wafer appreared to be covered with a light yellowish
cloudy stuff. Martin Lim also experienced the same problem. We
had 2 layers of PR, about 1.5um thick, over 2um thick of poly.

I've experimented with etching a layer of poly without PR--no
"polymer" formed. My speculation is that the polymer-like material
is from the PR--but why? We never experienced it before. Have
you experienced it before?

Those stuff is hard to get rid of--acetone strip, methanol, ashing,
piranha--nothing works. However, they can be removed by scratching
using a probe tip. But no sane person would scratch an entire wafer
with a probe. Any suggestions? Is the LAM chamber dirty? Or what?

>>> 'lam1' problem from bob -- Fri May 26 07:38:30 1989 <<<

The problem reported for polymer formation during polyetch has been
seen on previous etches of thick poly. Users have a solution. Robin and
I feel that lam1 should be visually inspected and I would like to
wait until Tuesday, May 30th to due this as Robert Norman will be
back. Bill Tang reports his results, when following a light HF dip
post process works well. This is a process others have used in the past
lam1 is considered up.

>>> 'lam1' problem from rnorman -- Tue May 30 11:59:20 1989 <<<

The lam1 will be down to inspect and clean the chamber. After such time
an O2 plasma clean will also be done.  The lam1 should be up by 1pm
today.

>>> 'lam1' problem from rnorman -- Tue May 30 13:34:36 1989 <<<

Problem: Contamination on wafers, polymer type.

Cause: The chamber was very dirty, in need of cleaning.

Solution: The chamber was scrubbed clean and a long O2 plamsa
          clean was ran afterward, 15 min. Robin is testing it
          now; so the lam1 is up for use.

>>> 'lam1' problem from phillip -- Thu Jun 15 11:09:25 1989 <<<

P: Chiller malfunctioning and tripping breaker 4LE1 - #8
   Robert verbally notified.

>>> 'lam1' problem from rnorman -- Thu Jun 15 11:52:26 1989 <<<

The lam chiller is down and it looks like it is a burnt out motor.
So, the lam1 will be down shortly to connect an additional H2O cooling
supply to the lams; they should be up by 1:30.

>>> 'lam1' problem from rnorman -- Thu Jun 15 13:12:52 1989 <<<

Problem: Error "Low H2O flow".

Cause: The lam chiller motor burnt out.
       Stopping the water flow to the lams.

Solution: I disconnected the chiller from the lams and connected
          the DI loop until the chiller is repaired.  The chiller
          uses 18 megaohm water so no contamination will occure in the
          DI loop. The lam1 is up.

>>> 'lam1' problem from jimmoon -- Fri Jun 16 15:34:16 1989 <<<

Error message "ARM STUCK AT EXIT AIRLOCK", or something to that effect.

>>> 'lam1' problem from jimmoon -- Sun Jun 18 10:38:22 1989 <<<

Same as before -- ARM STUCK AT EXIT AIRLOCK.

>>> 'lam1' problem from rnorman -- Mon Jun 19 09:56:25 1989 <<<

Problem: Arm stuck at exit airlock.

Cause: The arm would not unload the wafer to the track,
       due to the cylinder air regulator adjust needing
       some fine adjustment.

Solution: Each arm cylinder has 4 adjustment on it: 2 for the
          "in" movement, supply and exhaust; and 2 for the "out"
          movement, supply and exhaust.  So, I adjusted the out
          movement exhaust side, 2nd from the front. This increased
          the arm speed alittle. The lam1 was tested and is up.

>>> 'lam1' problem from rnorman -- Wed Jun 28 13:18:14 1989 <<<

The chiller for the lams has a bad compressor motor, reports
Bruce from Alladin; the start winding in shorted to ground and
the other winding is open.  We are getting an quote for repair
at this time.  The lam water cooling is still on back up supply
So both the lams are still up for use.

>>> 'lam1' problem from rnorman -- Thu Jun 29 08:55:15 1989 <<<

We have a spare chiller that will be installed on the lams, the old chiller
will be moved out.  The lams are still on back up H2O supply and are up
for use.

>>> 'lam1' problem from rnorman -- Wed Jul  5 16:47:29 1989 <<<

Another chiller was installed and is being cleaned out overnight. 
Tomorrow I will flush it out and connect it to the lams if all is
well.  The lams are still up for use using a back-up H2O supply.

>>> 'lam1' problem from rnorman -- Thu Jul  6 15:25:47 1989 <<<

Problem: "Low H2O flow" error.

Cause: The chiller pump motor and compressor motor went out.

Solution: I installed a new pump motor, #5K887, only to find out
        the compressor motor also went out.  So another chiller was
        cleaned and installed to supply the lams with cooling water.
        The old M&W chiller compressor motor will be fix and then the
        unit will be used for a spare when needed.  The lam newly installed
        chiller was tested and works, possible better then our old chiller.
        The lams are up for use.

>>> 'lam1' problem from rnorman -- Tue Jul 11 09:51:12 1989 <<<

Problem: The DI Ohms/cm readout was not working, nor the red and green
         LED's which display above or below DI trip-point.

Cause: The DI Readout board was bad.

Solution: I took a good board out of old chiller and re-installed it
          in the chiller now used on the lams.
          The chiller readout works and the unit is up.

>>> 'lam1' problem from robin -- Fri Jul 14 13:12:40 1989 <<<

Gas leaking from underside of lam1, left hand panel.

>>> 'lam1' problem from evan -- Fri Jul 14 16:45:48 1989 <<<

the plastic needle valve on the compressed air oil trap is broken.
It has an unusual thread and I can not find a plug that will fit.
lam1 is down for the weekend.

>>> 'lam1' problem from rnorman -- Mon Jul 17 10:56:58 1989 <<<

The Sight Dome on the top of the Air Line Filter that broke friday
was ordered and will be here tomorrow. The lam1 will be down until
then. FYI the part number for the Sight Dome is #31535 from Teco.

>>> 'lam1' problem from rnorman -- Tue Jul 18 14:37:53 1989 <<<

The Sight Dome for the Air filter unit did not arrive today but was assured
by Teco it will tomorrow; at that time the part will be installed ASAP.
We get UPS deliveries in the afternoon, so the lam will be up most likly
in the mid-afternoon.

>>> 'lam1' problem from rnorman -- Wed Jul 19 16:26:16 1989 <<<

Problem: The Sight Dome on the Air line filter unit broke and was 
         leaking profusly.

Solution: The Sight Dome was replaced and tested. The lam1 is up.

>>> 'lam1' problem from rnorman -- Fri Jul 21 13:59:54 1989 <<<

There is a "RF Mismatch" error, due to the plasma turning off
durring  the process.  I am looking at it right now.

>>> 'lam1' problem from rnorman -- Fri Jul 21 15:37:48 1989 <<<

Problem: RF mismatch error

Cause: The power supply was over heating and turning off.

Solution: There was lots of H2O flow to the PS and the by-pass 
          solenoid was working properly; water was getting to the
          RF supply for cooling.  After awhile it stopped overheating
          and worked fine.  I think the water temperature was too
          high due to the lab house chiller being down. Tha lam1 is
          up.

>>> 'lam1' problem from phillip -- Fri Jul 28 07:19:47 1989 <<<

Installed new data patch cord equuipped with a pin2 and pin3
rs232 reversal. This was done at Robert's request.

>>> 'lam1' problem from rnorman -- Wed Aug  9 12:22:04 1989 <<<

Problem: Gas channel 3 (He) not at setpoint flow.

Cause: The Analog 0-10V signal on the analog board had drifted.

Solution: I calibrated the analog signal on the Analog I/O board.
          The gas channels were tested and the setpoint is within 
          +/- 1 sccm.   He channel 3 had no drift.  The lam1 is up.

>>> 'lam1' problem from rnorman -- Mon Aug 14 07:57:29 1989 <<<

The chiller readout pcb was returned from M&W and installed in the
chiller.  It runs fine and is up for use.

>>> 'lam1' problem from vilma -- Tue Aug 29 08:26:23 1989 <<<

lam1 message problem rf mismatch.

>>> 'lam1' problem from rnorman -- Tue Aug 29 12:54:31 1989 <<<

Problem: RF mismatch

Cause: The recipe was modified, which at times cause problems.

Solution: After vilma reset the "RF Mismatch" on the parameters
          page the problem did not repeat. The lam1 is up.

>>> 'lam1' problem from vilma -- Wed Sep 13 10:16:08 1989 <<<

lam1 the exit airlock not venting. My wafer still in the exit airlock.

>>> 'lam1' problem from evan -- Wed Sep 13 10:37:08 1989 <<<

User re-enabled and entered "CLEAR" function.  The wafers were then
released properly.
lam1 is up
>>> 'lam1' problem from hguo -- Mon Sep 18 12:38:48 1989 <<< [No Comment]

>>> 'lam1' problem from carlos -- Thu Oct  5 23:28:17 1989 <<<

The endpoint detector doesn't seem to work. Please check it out

>>> 'lam1' problem from bob -- Mon Oct  9 14:22:57 1989 <<<

Tom Booth did a dummy run in lam1 and checked the end pointer. It
is working well and no reason for Carlos' problem report can be found.
lam1 is up.

>>> 'lam1' problem from rnorman -- Tue Oct 10 06:41:24 1989 <<<

Problem: Plotter not working properly.

Cause: The "INPUT" knob was set to 1mv, should be at 1v input signal.
       Because it was on the wrong setting  the pen was slamming against
       the far side when endpointing.

Solution: Tom ran some wafers and no problem was found.  Please in the
          future DO NOT TOUCH the knobs on the chart recorder if you do
          not know how to use it, ask a qualified user to show you.  The
          chart recorder is up and working.

>>> 'lam1' problem from vilma -- Thu Oct 19 12:40:59 1989 <<<

esthe first 5 mins. l tried to run some dummy testwafer to condition
the etcher, the enter airlock door won't open. I called Tom Booth
to help me solve the problem. He check the pressure, and its okey. But
the door still wont open. I waited for 5 more mins. and then the etcher
start working again. I really don't whats going on.
Thanks,
Vilma

>>> 'lam1' problem from rnorman -- Mon Oct 30 13:13:02 1989 <<<

The lam1 Software has been upgraded to a Rev. AH, software 7.33.
The upgrade was to correct some problem in the SECS link.  I have
a detailed discription of the software modifications, if you want a 
copy.  The lam1 is up.

>>> 'lam1' problem from field -- Mon Nov  6 13:05:54 1989 <<<

arm stuck at exit airlock 
is the message the machine is flashing.
I have a wafer stuck in the exit airlock.
Help?

>>> 'lam1' problem from rnorman -- Mon Nov  6 13:59:44 1989 <<<

Problem: Exit air lock arm stuck.

Cause: The pneumatics valve was sticking.

Solution: The pneumatics air adjust was readjusted; 2nd of 4 on the 
          air cylinder.  The lam1 was tested and is up.

>>> 'lam1' problem from rnorman -- Mon Nov 20 09:28:32 1989 <<<

Gas 2 unstable occurred causing an alarm.  It looks like the
gas valve is taking too long to open when running the O2 
scurge. The problem does not seem to occure when running
the SiO2 Etch recipe.

>>> 'lam1' problem from rnorman -- Tue Nov 21 09:05:25 1989 <<<

The lam1 will be down for 1 or 2 hours to remove and test MFC 2.
The Tylan MFC is sticking and we will install a Unit MCF calibrated
for O2 at 200 sccm.  You will be informed when the lam1 is up for use.

>>> 'lam1' problem from rnorman -- Tue Nov 21 09:43:07 1989 <<<

Problem: Gas channel 2 stabilization error.

Cause: The O2 Tylan MFC was sticking. This produced a delay in gas
       flow which resulted it the stabilization error.

Solution: A New Unit MFC was put on the Tylan calibrator and check for
          proper calibration; Model UFC-1020, S/N C-50610F.   The Unit
          MFC was exchanged with the Tylan in gas channel 2 of the lam1.
          The new MFC was pumped out and purged for 20 minutes with O2.
          The lam1 was tested and is up for use.

>>> 'lam1' problem from field -- Mon Nov 27 12:20:36 1989 <<<

some error about failure to transmit appears periodically - it
doesn't seem to affect the etching, however.  I suspect it
has something to do with the data transfer program.

>>> 'lam1' problem from rnorman -- Mon Nov 27 12:35:16 1989 <<<

Problem: Error "failure to transmit".

Solution: The error has no effect on process. This is in connection
          with the SECS link program.  The lam is up.

>>> 'lam1' problem from rnorman -- Thu Nov 30 14:11:46 1989 <<<

Problem: Exit cassette not indexing up.

Cause: No 24vdc to index motor.

Solution: The "Heartbeat" circuit failed so the electronics
          needed to be reset.  The lam1 was tested and is up.

>>> 'lam1' problem from gsm -- Wed Dec  6 12:22:49 1989 <<<

es
The pressure alarm kept going off when 200mtorr was the selected setpoint.
It seemed to happen only when gas flows (CCl-4, O2, He) were greater than
about 250sccm combined.  The throttle valve was not all the way open, so
it may be dirty.  The valve angle was about 63.3-63.9 degrees each time
the alarm went off when it should be 90 degrees.

>>> 'lam1' problem from rnorman -- Wed Dec  6 13:24:41 1989 <<<

The lam1 will be down shortly to clean the AC-2, throttle, valve.
You will be informed when it is up.

>>> 'lam1' problem from rnorman -- Thu Dec  7 07:46:30 1989 <<<

Problem: The AC-2 throttle valve was not going to full open, only to
         63.5 degrees (full open being at 90~).

Cause: The AC-2 valve was actually going past 90~ to a 106.5 degree
        angle; one of the micro switches inside the AC-2 was out of
        adjustment.

Solution: The orange AC-2 throttle valve was removed from the  foreline
          and the micro switch was adjusted as close a possible to full
          open; full open being at 83.8 degree angle.  To get a more
          accurate adjustment it would have to be sent to the factory
          for calibration. With the AC-2 not being able to open full
          affects only users who process at low pressures, below 250mt,
          with high gas flows, total flow of 350 sccm or more. The 
          lam1 was tested with the O2 clean process and no errors
          occurred.  The lam1 is up.

>>> 'lam1' problem from tom -- Mon Dec 11 16:33:14 1989 <<<

Power was off when user tried to use machine. Breaker in back of machine
was turned off. I reset it and the load lock pump started and it sounded 
very sick. After about 10 sec. the breaker tripped again. Pump must be
causing it to throw. 
All speed in fixing this would be appreciated.

>>> 'lam1' problem from rnorman -- Tue Dec 12 11:07:40 1989 <<<

Problem: Main breaker on lam was popping.

Cause: The load lock mech pump was out of oil and froze up, drawing
       hi current and popping the breaker.

Solution: Switched out the pump with a spare Parrish had.
          The lam1 was tested and is up.

>>> 'lam1' problem from tang -- Wed Dec 13 14:53:54 1989 <<<

The helium flow rate is around 117 instead of the recipe-requested
130. Therefore, the standard poly etch recipe will be stuck at step 2,
where flow rates are checked. 

Temporary solution: The user can modify the recipe and request a
helium flow rate of 145. The actual flow rate will then be around 130.
Also, after 20 sec into step 2, the user should manually progress the
program to step 3 by hitting the [field setect] button.

>>> 'lam1' problem from rnorman -- Thu Dec 14 09:35:41 1989 <<<

Problem: He, gas 3, flow drifts from set point.

Cause: The He MFC was not regulating flow properly.

Solution: The contacts on the MFC were in need of cleaning.
          An O2 clean process was ran 3 times and the He flow was 
          stable on the set-point. The lam1 is up.

>>> 'lam1' problem from voros -- Thu Dec 28 14:43:59 1989 <<<

stuck problem on lam1 from voros (28-dec-1989 14:41)

User Comments:
the lifter stuck on my wafer.
this is just a test problem.

>>> 'lam1' problem from voros -- Thu Dec 28 14:49:11 1989 <<<

stuck problem on lam1 from voros (28-dec-1989 14:41)

User Comments:
the lifter stuck on my wafer.
this is just a test problem.

Comments from voros on 28-dec-1989 14:48:59 :
new lifter on order

>>> 'lam1' problem from voros -- Thu Dec 28 14:50:35 1989 <<<

stuck problem on lam1 from voros (28-dec-1989 14:41)

User Comments:
the lifter stuck on my wafer.
this is just a test problem.

Comments from voros on 28-dec-1989 14:48:59 :
new lifter on order


Comments from voros on 28-dec-1989 14:50:21 :
new lifter installed, works great

>>> 'lam1' problem from voros -- Wed Jan 10 15:47:56 1990 <<<

alarm problem on lam1 from voros (10-jan-1990 15:42)

User Comments:
Ignore, this is a test.

>>> 'lam1' problem from voros -- Wed Jan 10 16:01:37 1990 <<<

alarm problem on lam1 from voros (10-jan-1990 15:42)

User Comments:
Ignore, this is a test.


Comments from voros at 10-jan-1990 16:01 :
ignire test

>>> 'lam1' problem from voros -- Wed Jan 10 16:05:44 1990 <<<

test, ignore

>>> 'lam1' problem from mudie -- Thu Jan 11 15:09:36 1990 <<<

alarm problem on lam1 from mudie (11-jan-1990 14:59)

User Comments:
test problem, ignore

>>> 'lam1' problem from mudie -- Thu Jan 11 15:17:07 1990 <<<

alarm problem on lam1 from mudie (11-jan-1990 14:59)

User Comments:
test problem, ignore


Comments from mudie at 11-jan-1990 15:16 :
new valve on order

>>> 'lam1' problem from mudie -- Thu Jan 11 15:19:00 1990 <<<

alarm problem on lam1 from mudie (11-jan-1990 14:59)

User Comments:
test problem, ignore


Comments from mudie at 11-jan-1990 15:16 :
new valve on order


Comments from mudie at 11-jan-1990 15:18 :
valve arrived and installed, back on line

>>> 'lam1' problem from voros -- Thu Jan 11 16:31:01 1990 <<<

leak problem on lam1 from voros (11-jan-1990 16:27)

User Comments:
test, ignore

>>> 'lam1' problem from voros -- Thu Jan 11 16:50:36 1990 <<<

leak problem on lam1 from voros (11-jan-1990 16:27)

User Comments:
test, ignore

Comments from voros at 11-jan-1990 16:49 :
gas leak fixed; this is a test, ignore

>>> 'lam1' problem from mudie -- Fri Jan 12 13:55:45 1990 <<<

lamother problem on lam1 from mudie (12-jan-1990 13:54)

User Comments:
dummy problem, please ignore

>>> 'lam1' problem from mudie -- Fri Jan 12 14:27:34 1990 <<<

o-rings problem on lam1 from mudie (12-jan-1990 14:26)

User Comments:
dirty o-ring on lam1
please ignore, still testing

>>> 'lam1' problem from mudie -- Fri Jan 12 14:37:16 1990 <<<

o-rings problem on lam1 from mudie (12-jan-1990 14:26)

User Comments:
dirty o-ring on lam1
please ignore, still testing

Comments from mudie at 12-jan-1990 14:36 :

o-ring arrived, installed.  machine back up

>>> 'lam1' problem from mudie -- Sat Jan 13 18:02:39 1990 <<<

electrodes problem on lam1 from mudie (13-jan-1990 18:01)

User Comments:
test, ignore

>>> 'lam1' problem from mudie -- Sat Jan 13 18:04:38 1990 <<<

electrodes problem on lam1 from mudie (13-jan-1990 18:01)

User Comments:
test, ignore

Comments from mudie at 13-jan-1990 18:04 :
clearing test problem

>>> 'lam1' problem from field -- Mon Jan 15 15:14:52 1990 <<<

pen is running out of ink.

>>> 'lam1' problem from rnorman -- Tue Jan 16 13:28:12 1990 <<<

Problem: Chart recorder pen running out of inc.

Solution: After trying a couple pens I found one that was not dry
          and installed it on the chart recorder.  More pens will be
          ordered by kellogg, since we have no more in stock.  The
          newly installed pen was tested and works well. 

>>> 'lam1' problem from mudie -- Wed Jan 17 16:54:55 1990 <<<

clean problem on lam1 from mudie (17-jan-1990 16:42)

User Comments:
test problem, please ignore

>>> 'lam1' problem from mudie -- Wed Jan 17 16:56:47 1990 <<<

clean problem on lam1 from mudie (17-jan-1990 16:42)

User Comments:
test problem, please ignore


Comments from mudie at 17-jan-1990 16:56 :
test update

>>> 'lam1' problem from mudie -- Wed Jan 17 18:10:36 1990 <<<

clean problem on lam1 from mudie (17-jan-1990 16:42)

User Comments:
test problem, please ignore


Comments from mudie at 17-jan-1990 16:56 :
test update

Comments from mudie at 17-jan-1990 18:10 :
clearing test problem

>>> 'lam1' problem from judy -- Mon Jan 22 01:10:41 1990 <<<

The exit arm got stuck holding one of my wafers with the exit door open.  
I tried to cycle to machine on/off then run the wafer clean 
out proceedure.  That didn't work so I tried
to pull my wafer out of the exit chamber with my tweezers - BIG mistake.
The exit port immediately thought that the wafer was gone and started to 
close the exit door ---- thereby smashing my wafer all over the inside
and outside of the exit chamber.  After I did this the exit chamber failed
to pump down so I performed the wafer clean out proceedure and on/off
cycle until I could clean off the seal of the exit door.  I was then able
to run the rest of my wafers with little problem.  What is left is to 
clean out the inside of the exit chamber.

>>> 'lam1' problem from rnorman -- Mon Jan 22 08:28:01 1990 <<<

Problem: Exit arm stuck.

Solution: Adjusted arm speed by adjusting the air solenoid to the 
          "out" cylinder.  The arm was tested and the lam1 is up.

>>> 'lam1' problem from judy -- Mon Jan 22 11:49:01 1990 <<<

Black polymer build up during long etch sequence (2-2.5 um of poly).
Etch rate decreased to 2000 A/min to 1000 A/min!!
Chamber needs to be cleaned - I think.

>>> 'lam1' problem from rnorman -- Tue Jan 23 10:44:59 1990 <<<

The lam1 chamber will be cleaned starting at this time.  It should be
up after lunch.

>>> 'lam1' problem from rnorman -- Tue Jan 23 12:01:21 1990 <<<

Problem: Polymer showing on wafer.

Cause: Chamber very dirty!

Solution: The chamber was throughly cleaned, I had to even scrape
          some of the polymer up with a razor blade.  Afterward a
          plasma clean was ran for 15 min.  The lam1 is up.

>>> 'lam1' problem from judy -- Wed Jan 24 01:05:23 1990 <<<

Helium flow rate too low - maybe the supply is low.

>>> 'lam1' problem from rnorman -- Wed Jan 24 09:56:26 1990 <<<

Problem: Low  He flow error.

Cause: Dirty connector on MFC.

Solution: The He pressure to the MFC was turned up to 25psi and
          down to 15 psi to see if pressure was effecting the 
          MFC H2 flow, but it was not; it still was giving low
          flow error.  The connectors between the He and O2 were
          switched to test if the MFC or the electronics were bad,
          but nothing occurred.  I then cleaned the MFC connector
          and adjusted the pin's for a tighter fit.  I ran a 10
          minute process with no error or fluctuation on the He
          MFC read out. The lam1 is up.

>>> 'lam1' problem from mudie -- Thu Jan 25 09:30:13 1990 <<<

temperature problem on lam1 from mudie (25-jan-1990 09:26)

User Comments:
temperature too high for my run

>>> 'lam1' problem from mudie -- Thu Jan 25 09:38:18 1990 <<<

temperature problem on lam1 from mudie (25-jan-1990 09:26)

User Comments:
temperature too high for my run


Comments from mudie at 25-jan-1990 09:38 :
pump motor fixed

>>> 'lam1' problem from judy -- Thu Jan 25 10:38:29 1990 <<<

The exit arm was stuck again.

>>> 'lam1' problem from rnorman -- Thu Jan 25 11:36:17 1990 <<<

Problem: exit arm sticking, will not move out.

Cause: Sticky air cylinder.

Solution: The "out" cylinder exhaust port was adjusted open a
          little more. When I get some time I will put some
          oil into the cylinder. The lam1 is up.

          

>>> 'lam1' problem from mudie -- Tue Jan 30 16:14:24 1990 <<<

gap problem on lam1 from mudie (30-jan-1990 16:11)

User Comments:
another test problem, please ignore

>>> 'lam1' problem from mudie -- Wed Jan 31 14:24:18 1990 <<<

lamsymptom problem on lam1 from mudie (31-jan-1990 14:23)

User Comments:
test lam problem

>>> 'lam1' problem from mudie -- Wed Jan 31 15:23:25 1990 <<<

temperature problem on lam1 from mudie (31-jan-1990 15:22)

User Comments:
run exited too early
test message only, please ignore

>>> 'lam1' problem from mudie -- Wed Jan 31 15:26:59 1990 <<<

temperature problem on lam1 from mudie (31-jan-1990 15:22)

User Comments:
run exited too early
test message only, please ignore


Diagnosed as water (DI water system) by mudie (31-jan-1990 15:25:20)

Comments from mudie at 31-jan-1990 15:26 :
clearing test problem

>>> 'lam1' problem from voros -- Thu Feb  1 15:18:38 1990 <<<

Pls check and calibrate the MFC's. Students reported a drift in
processing results in etching poly-Si. Also, inspect chamber for 
cleanliness.

>>> 'lam1' problem from rnorman -- Fri Feb  2 09:01:50 1990 <<<

Those users that are having process problems with the lam1 please
contact me so that I can get some facts on the problem and put
together a plan of attack.  
From judy Mon Feb  5 17:36:10 1990
Return-Path: <judy>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA27867; Mon, 5 Feb 90 17:36:07 PST
Date: Mon, 5 Feb 90 17:36:07 PST
From: judy (Michael Judy)
Message-Id: <9002060136.AA27867@argon.berkeley.edu.>
To: bob, rnorman
Subject: lam1 - problems
Cc: voros
Status: R

All,

I talked with Ken L. from Lam Research today (659-2063).  I told him
of our troubles including the black fogging of the wafers and the
top Aluminum electrode wear.  He basically said what we already
expected - that it is time to change the electrode.  I got the
information on the electrodes that we need.  

	top electrode (old style)  #715-01408-001        $766

	bottom electrode (mushroom lifter)  #715-4042-1  $859
		(pull out entire assemble - difficult!)

He said that the electrodes start to fail after about 10,000
wafers.  Have we processd that many?  Other things to check
would be whether the Al electrode was shorted to the chassis and
pitting in both of the electrodes.  He also suggested that both
electrodes be replaced since the bottom one is probably
weakened.  Hope this is helpful.  How long would it talk to
install a new electrode in lam1?

Mike


>>> 'lam1' problem from judy -- Tue Feb  6 08:30:33 1990 <<<

Here is a summary of the problems I have encountered in using lam1.

1.  The etch rate has been very slow - 1000-2000 A/min - which is about
    half of the etch rate documented in the wand for the standard recipe.
    (I used both the standard and Martin Lim's recipe which is
    200 W, 130:10:130  CCl4:O2:He, 1.2 gap, 280 mtorr)

2.  As the etch progresses the poly areas become BLACK!  Very much like
    carbon deposits - charcoal color.  In addition the blackness seems
    to be more pronounced in the open areas (darker), and the intensity
    or darkness of the black also varys over a single die (Looks like
    some kind of flow had deposited the blackness?  Like a river with
    deposits in the eddy currents around some of my structures.)

    Overall the deposits are very uniform for a macro perspective!

    As the etch continues the blackness becomes browner, but does not
    completely disappear.  I have even done some wet Si etching to 
    remove the poly peaks (see below).  This helped but did not remove
    all the browness.

3.  I have examined some of my wafers in the SEM.  There is entensive
    peaking occuring (like micromasking but the top of the peak is
    sharp).  In addition the peaking seems to occur mostly in
    the larger open areas.

The structure I have been trying to etch is:  PSG (5000 A) TOP, 
poly (2.5 um) undoped, PSG (5000 A), Si wafer.  I annealed the entire
structure at 1050 for 1 hr to dope the polysilicon.  I have used a photoresist
mask to pattern the oxide, and dipped the wafers in 5:1 BHF for 10 sec
to remove any leftover oxide.  I have both etched in lam1 with and without
the photoresist mask.  I get the same results for both cases.  Leslie
has also done some testing of her own and she has the same results.

Mike Judy

>>> 'lam1' problem from rnorman -- Tue Feb  6 10:29:15 1990 <<<

The lam1 will be down to replaced the cathode.  This job will
take 2 days.  You will be informed of progress.

>>> 'lam1' problem from rnorman -- Tue Feb  6 14:58:53 1990 <<<

The upper electode was removed and is in the tech room.  The
lam1 is under vacuum, with the blank-off on the chamber.  I
will continue replacement of the cathode tomorrow.
*** The lm1 is down, DO NOT OPERATE ***

>>> 'lam1' problem from rnorman -- Wed Feb  7 09:32:33 1990 <<<

The cathode was removed and replaced with a new Al upper
electrode.  The  old one was very much etch away, a strong
cause of contamination to wafers.  I checked the palallelizom
of the upper to lower electrode and it is off by .003-.005"; I
will adjust this gap to be with in .002".  The lam1 should be
up for use by 12noon, if things go right.
***DO NOT OPERATE***

>>> 'lam1' problem from rnorman -- Wed Feb  7 15:15:16 1990 <<<

Problem: Cathode eroding, possibly contaminating wafers.

Cause: Usage, in need of replacing.  Should be replaced every
       10,000 wafers.

Solution: The upper electrode was replaced and a parallelism was
          done to make the two electrode parallel; it is with in
          .002", but using putty balls is not too accurate.  
          The chamber was cleaned by wiping out with alcohol,
          also a plasma clean was ran. The lam1 is up.

>>> 'lam1' problem from judy -- Thu Feb  8 11:49:48 1990 <<<

1. Ran 3 3min O2 scourges

2. Ran 1 test wafer 6 times 2min - standard recipe (300W, 1.5 cm gap,
   CCl4:O2:He  130:15:130, and 280 mtorr)

3. Results:  BAD!  Same problems as before!  Blackness and very low
             etch rates.

--------------------------

Robert suggested that one of the gases/liquids may be contaminated.  He looked
at the CCl4 level and there WAS NO CCl4 LEFT!!!!  EMPTY!!  The level detector
must either be stuck or defective.  Also, I still get a flow rate on the
status screen so maybe there is a leak into the CCl4 liquid tank (like air).
(question:  Does the CCl4 use a carrier gas or is it directly evaporated?)

Mike

>>> 'lam1' problem from rnorman -- Thu Feb  8 14:54:00 1990 <<<

Problem: Still more blackness on wafers.

Solution: I could not find a leak on the CCL4 gas line, so count that out.
          The tank still had some CCL4 in it thats why we were getting gas 
          flow; it was filled up with CCL4.  I also removed the in-line gas 
          filter, just to see what happens; we do not need it, it is
          just over kill.  Try it again and let me know what happens. The
          lam1 is up.

>>> 'lam1' problem from judy -- Fri Feb  9 18:21:33 1990 <<<

1.  He flow rate only slightly below nom. - 127 sccm instead of 130.

2.  Still having same troubles - blackness although not as bad.
    Peaking is the result.  I can see the peaks in the microscope
    in the vlsi room.

>>> 'lam1' problem from liew -- Sun Feb 11 12:48:57 1990 <<<

Alarm came on when equipment was not in use. Message on the monitor says
coolant overtmp.

>>> 'lam1' problem from bob -- Mon Feb 12 09:27:36 1990 <<<

The coolant flow problem on lam1 has been fixed. The chiller needed
service. For elaboration on this problem, check lam2 problems on
this same date.
.,

>>> 'lam1' problem from judy -- Thu Feb 15 10:02:24 1990 <<<

'WARNING: OVRRUN ERROR' keeps periodically flashing.  
What does this mean?  Can I operate the machine?

>>> 'lam1' problem from rnorman -- Thu Feb 15 11:49:22 1990 <<<

Problem: OVRRUN ERROR periodically flashing.

Cause: The problem is related to the SECS link, LAM LINK.

Solution: If this problem persists we could have a Serial I/O
          board problem.  Or the problem could just be a transmit
          error through SECS.  Continue to report the problem, but
          continue to run, because it does not affect operation.
          The lam1 is up.

>>> 'lam1' problem from judy -- Fri Feb 16 00:24:28 1990 <<<

WARNING: OVRRUN ERROR - it is still happening....

>>> 'lam1' problem from rnorman -- Fri Feb 16 07:41:58 1990 <<<

Problem: Getting "WARNING: OVRRUN ERROR"

Cause: It looks like it has something to do with "Lamlink", because
       if Lamlink is toggled "INACTIVE", no error occurs.  This could
       be a problem with the Lamlink software? I'm not sure at this point.

Solution: For the time, Lamlink has been set to "INACTIVE" on the parameters
          page.  This will remove the error message.  The lam1 is up.

      NOTE: Lamlink users, have you noticed any problems with collecting
            data?  Or have you changed any programming in the last week or so?
           

>>> 'lam1' problem from mudie -- Wed Feb 21 16:42:36 1990 <<<

test problem, please ignore

>>> 'lam1' problem from cjkim -- Wed Feb 21 20:34:57 1990 <<<


Gas3 (Helium?) does not stabilize.  I was running a standard poly etch
recipe with just one wafer, followed by O2 scurge.  I quit the process
with manual end-point.

>>> 'lam1' problem from rnorman -- Thu Feb 22 14:57:18 1990 <<<

Problem: Gas 3, Helium, does not stabilize.

Solution: After running 3 or 4 "O2 cleans" I could not duplicate
          the problem.  The Gas3 MFC normally fluctuates 3-7 sccm,
          if this is not acceptable we could change the MFC out.
          The lam1 is up.

>>> 'lam1' problem from judy -- Tue Mar  6 12:05:22 1990 <<<

He flow rate too low again - 119 sccm instead of 130 sccm.

>>> 'lam1' problem from rnorman -- Tue Mar  6 14:57:20 1990 <<<

Due to the low He flow tomorrow I will install a new unit MFC.

>>> 'lam1' problem from rnorman -- Wed Mar  7 07:17:39 1990 <<<

Problem: The He flow is occasionally below set-point by as much as
         11 sccm.

Cause: Tylan admitted that their MFC's have a hard time controlling
       He gas, which was the case is this situation.

Solution: The Tylan 200 sccm He MFC was removed and a Unit 200 sccm
          He MFC was installed.  The new MFC was pumped out and purge
          off and on for 10 minutes.  It was then tested, running an
          O2 plasma clean.  The lam1 is up.

>>> 'lam1' problem from rnorman -- Mon Mar 19 09:08:39 1990 <<<

The users of the SECS link to lam1 and lam2 have reported 
"No SECS Link" error on both lams.  This looks like something
wrong with the port to the lams SECS link communication.  Could
smiles or ljmassa check out this port problem.

>>> 'lam1' problem from rnorman -- Tue Mar 20 14:05:46 1990 <<<

clean problem on lam1 from rnorman (20-mar-1990 14:00:20)

User Comments:
This is a test.,

Diagnosed as clean (chamber clean) by rnorman (20-mar-1990 14:05:25)

Comments from rnorman at 20-mar-1990 14:05:30 :
This is still a test.

>>> 'lam1' problem from aplee -- Tue Mar 20 21:44:38 1990 <<<

Transmit failure kept coming on the screen, etched two wafers, results
were terrible. The wafer turned black then turned into rusty red.
Disaster.

>>> 'lam1' problem from aplee -- Tue Mar 20 23:09:02 1990 <<<

After HF dip, I retried, all is ok. 
Sorry.

>>> 'lam1' problem from rnorman -- Wed Mar 21 11:12:54 1990 <<<

We are getting "Warning: transmit error" on both lams; this has to do
with the SECS communication.  This error will not effect your process,
so please ignore.

>>> 'lam1' problem from ljmassa -- Wed Mar 21 11:37:54 1990 <<<

Subject: lam1 lma2 communcations problem
	From: rnorman (Robert L. Norman Jr.)
	Message-Id: <9003211916.AA04079@argon.berkeley.edu.>
	To: debra, lab_equip_probs, lam1, ljmassa, parrish, rnorman, tom
	Subject: lam1 problem
	Status: R

	We are getting "Warning: transmit error" on both lams; this has to do
	with the SECS communication.  This error will not effect your process,
	so please ignore.


Robert, will you please phone me when you have a chance about this problem?

	Thanks
        Lauren 
 

>>> 'lam1' problem from ljmassa -- Thu Mar 22 15:14:45 1990 <<<


test

>>> 'lam1' problem from rnorman -- Mon Apr  2 11:24:33 1990 <<<

Problem: When pumping down the mechanical pump makes a loud
         walrus cry.

Cause: The "fill" lid was not on.

Solution: The lid was installed and tightened down.
          Tha lam1 is up for use.

>>> 'lam1' problem from phillip -- Wed Apr  4 08:27:41 1990 <<<

The problem with the argon 'lamlink' has been unearthed.
Verbal communication with Lauren is necessary to activate
the computer port in software. As she is off today, this will
be accmplished upon her return to work.

>>> 'lam1' problem from rnorman -- Thu Apr  5 10:47:19 1990 <<<

Problem: MFC display showing a non-zero nubers when there was no flow.

Cause: The  MFC's were in need of zero calibration.

Solution: The Analog System was calibrated and then the MFC's
          were zeroed.  Initially the CCL4 MFC displayed a 
          +5 sccm, O2 showed - 5 to 9 sccm, and He displayed
          -18 to 19 sccm.  What this is saying is before the 
          zero calibration these 3 MFC's had an off set of the
          above flows, ie) for the He MFC to get a set point of
          100 sccm the MFC was flowing 118 to 119 sccm.  The 
          MFC's are now at zeroed and the lam1 is up.

>>> 'lam1' problem from tom -- Wed Apr 18 15:09:04 1990 <<<

Entry airlock door not opening. rnorman thinks the solenoid needs
to be replaced. He will do that in the morning.

>>> 'lam1' fix from rnorman -- Thu Apr 19 10:32:20 1990 <<<

Problem: Entry airlock outer door was not opening.

Cause: Solenoid #3 on the entry side was clogged, thus no air
      output to open the door.

Solution: The solenoid was removed and cleaned.  The air lock
        door was tested and works well.  The lam1 is up.

>>> 'lam1' problem from judy -- Thu May  3 11:54:04 1990 <<<

Entry door won't open even though lam1 is enabled!?  I was able to run a 
process only O2 clean with no trouble.  When I started my poly etch 
process the wafer was loaded and stopped on the plunger waiting for 
the entry door to open.  Robert Norman suggested that this could be a 
problem with the solenoid controlling the entry door.

Mike

>>> 'lam1' fix from rnorman -- Fri May  4 11:59:25 1990 <<<

Problem: entry LL outer door not opening.

Cause: Solenoid failure, #4.

Solution: Replaced solenoid.  Lam is up.

>>> 'lam1' problem from judy -- Mon May  7 12:20:08 1990 <<<

-> He flow rate low - 120 sccm instead of 130 sccm set point.  Is the
   MFC bad?

-> There is a deep popping sound that comes from the entry chamber
   as the door to the entry chamber is opened - is this bad?

>>> 'lam1' fix from rnorman -- Tue May  8 08:32:08 1990 <<<

Problem: MFC #3, He flow rate low; 120 instead of 130 sccm. Also, entry door
      
Cause: The zero was off by 9 sccm, 47 counts.

Solution: The MFC was zeroed.  The lam1 is up.

>>> 'lam1' fix from mudie -- Tue Jun 12 16:35:25 1990 <<<

 problem on lam1 from mudie (12-jun-1990 16:26:32)

User Comments:
test
Diagnosed as flow-sensor (water flow sensor problem) by mudie (12-jun-1990 16:34

Comments from mudie at 12-jun-1990 16:34:32 :
test update
Comments from mudie at 12-jun-1990 16:35:12 :
clearing lam problem

>>> 'lam1' fix from mudie -- Fri Jun 15 15:12:48 1990 <<<

lam1only             problem on lam1 from mudie (15-jun-1990

User Comments:
test problem 2
Diagnosed as endpoint-window (endpoint detector problem) by mudie (15-jun-1990 1

Comments from mudie at 15-jun-1990 15:12:36 :
clearing

>>> 'lam1' fix from mudie -- Fri Jun 15 15:14:13 1990 <<<

broken-wafer problem on lam1 from mudie (15-jun-1990 15:10:5

User Comments:
dummy problem 1

Diagnosed as chiller-water-level (low water level) by mudie (15-jun-1990 15:14:0

Comments from mudie at 15-jun-1990 15:14:05 :
clearing

>>> 'lam1' fix from mudie -- Tue Jun 19 18:04:49 1990 <<<

broken-wafer problem on lam1 from mudie (19-jun-1990 17:57:3

User Comments:
test report

Comments from mudie at 19-jun-1990 18:00:21 :
report update


Diagnosed as recipe-error (Process/User Related Problems) by mudie (19-jun-1990 

Comments from mudie at 19-jun-1990 18:04:38 :
testing clear

>>> 'lam1' fix from mudie -- Thu Jun 21 12:55:55 1990 <<<

wafer-feed, air-lock-entry problem on lam1 from mudie (21-jun-1990 12:

air lock problem

Diagnosed as indexer-motor (NA) by mudie (21-jun-1990 12:54:36)

Comments from mudie at 21-jun-1990 12:55:32 :
lam1 repaired, back in operation
