>>> 'kasper' problem from cgoss -- Fri Jan 13 12:32:48 1989 <<<

I found that the x-y translation used to position the wafer did not
move the wafer.  When I tried it with the mask holder up it moved but 
when I had my wafer loaded it did not move.  The only thing I can think
of to cause this is that the wafer is not being held in place by  the
vacuum.  I looked while the wafer was loaded and separated fromthe
mask.  The stage moves but the wafer does not.  I also appears that
the stage that holds the wafer is tilted to the rear of the instrument
when the wafer is loaded.

>>> 'kasper' problem from phillip -- Wed Jan 18 11:37:18 1989 <<<

P: Wafer seems to move with mask, even in contact mode.
S: Set screws that support mask, overlap the mask and
   rested on wafer. Tightened screws. The mask now
   contacts wafer. The kasper is up.

>>> 'kasper' problem from magneton -- Wed Jan 18 15:59:11 1989 <<<

11.   Vacuum intermittent when chuck is down.  Vacuum works when
     chuck is elevated

2.   Vacuum Pressure is not sufficient.  Could the pressure 
     be increased(on the large side of an increase)

>>> 'kasper' problem from phillip -- Thu Jan 19 07:38:12 1989 <<<

Repaired clogged vacuum line to chuck.
The vacuum experienced at the chuck is now of greater force
because of the line that was unclogged.
 The kasper is up and working.

>>> 'kasper' problem from magneton -- Fri Jan 20 11:37:41 1989 <<<

Defective switch on right side adjustment.

Also, Phil, could you make sure the optics are all focused. 

>>> 'kasper' problem from phillip -- Mon Jan 23 08:59:25 1989 <<<

P: RH paddle microswitch is intermittent.
S: Replaced Micro microswitch # 1SX1-T . This
   feature now works. (Optics also adjusted to
   within range per Sam's request.)
   The kasper is up and running.

>>> 'kasper' problem from rooney -- Thu Feb 16 16:05:46 1989 <<<

chuck does not descend all the way--it doesn't trip the microswitch
so there's no response to "loaded manual" i.e., it doesn't come
up when you want it to.  Push the chuck down by hand and make
sure it is flush with the baseplate before pressing "loaded manual"

>>> 'kasper' problem from phillip -- Fri Feb 17 08:12:38 1989 <<<

P: Wafer stage does not readily decend when indicated 
   to do so.
S: Lubricated columar height piston. This function is
   normal again. (Replaced expired switch indicator lamps)
   The kasper is up for use.

>>> 'kasper' problem from phillip -- Fri Feb 17 11:24:01 1989 <<<

test

>>> 'kasper' problem from magneton -- Sat Feb 18 14:18:54 1989 <<<

Chuck would not immediately come up.  Had to turn on many
buttons and lift the mask holder before it would come up.

>>> 'kasper' problem from kim -- Tue Feb 21 10:46:00 1989 <<<

Problem:  Wafer chuck doesn't raise up properly.
Cause:    ?
Solution: Random problem?  It is working fine now.

>>> 'kasper' problem from kim -- Tue Feb 21 10:49:29 1989 <<<

There is a missing screw for adjusting the microscope illumination.

>>> 'kasper' problem from phillip -- Thu Feb 23 07:55:39 1989 <<<

P: Microscope illumination adjustment screw is missing.
S: Ordering a new adjustment screw. The device is of an'
   uncommon thread and not easily substituted.

The kasper should work o.k. until the new part arrives.

>>> 'kasper' problem from cgoss -- Thu Mar  2 22:30:11 1989 <<<


When my wafer was in separate mode the fine control for
alignment did not work.  The wafer stage moved but the 
wafer did not.  I had this problem before and at some
point in time received mail saying it had been fixed.
I guess it is back.

>>> 'kasper' problem from phillip -- Fri Mar  3 09:44:07 1989 <<<

Reestablished clearance between mask and wafer in 'sep' mode.
The problem as reported by Charlie is fixed.
The kasper is up.

>>> 'kasper' problem from phillip -- Fri Mar  3 11:34:23 1989 <<<

Replaced expired kasper exposure lamp per verbal from magneton.

>>> 'kasper' problem from magneton -- Fri Mar  3 12:00:42 1989 <<<

Exposing light burned out.  Was replaced by Phil

>>> 'kasper' problem from phillip -- Mon Mar  6 09:33:05 1989 <<<

Replaced missing screw from the microscope lamp holder.

The screw must be chrome plated gold as it cost $30.00  .

The kasper is up and working.

>>> 'kasper' problem from ee143 -- Mon Mar  6 22:17:21 1989 <<<

The 'LOADED MANUAL' button on the Kasper is not functioning
properly:  The wafer platform raises, but goes too far, 
raising the "mask-holding platform" with it, and thus, obtaining
improper separation.  The mask moves when the wafer is moved.

>>> 'kasper' problem from phillip -- Tue Mar  7 08:15:40 1989 <<<

The kasper will be down until 11:00 am today for repairs.

>>> 'kasper' problem from phillip -- Tue Mar  7 11:40:23 1989 <<<

The kasper is back on line for use.

>>> 'kasper' problem from ee143 -- Tue Mar  7 18:27:18 1989 <<<

Under 'SPLIT FIELD' I can't even see the wafer alignment
marks when the mask marks are in focus.

>>> 'kasper' problem from ee143 -- Wed Mar  8 05:31:13 1989 <<<

The chuck raises the mask plate when the chuck raises; consequently
the separation is all messed up.

>>> 'kasper' problem from phillip -- Wed Mar  8 07:33:59 1989 <<<

Adjusted separation on the Y1 kasper to Carlos' satisfaction.

(If you turn the 'separation adjustment' knob, the chuck must
 be in the 'contact' mode to have an effect.
  The procedure would be:
   1. Noticing separation between mask and wafer is too great,
      or too close, change to 'contact' mode.
   2. Turn knob right or left 1/2 to 1 turn at a time.
   3. Change mode back to 'sep' and look at the change in separation.
   4. Repeat until desired distancing is achieved.)

>>> 'kasper' problem from phillip -- Thu Mar  9 07:59:33 1989 <<<

P: Mask holder turret not easily adjusted (per Magneton)
S: Lubricated circular mechanism. Replaced keepers on holder
   assembly. This adjustment is now in good working order.
   (Thanks to Mr. Parrish for some early morning machine shop
    work in making the keepers.)

    The kasper is up.

>>> 'kasper' problem from voros -- Thu Mar 16 11:32:32 1989 <<<

test

>>> 'kasper' problem from straub -- Mon Mar 20 13:34:29 1989 <<<

the separation between mask and wafer is not large enough.  I scratched
up a chrome mask badly while doing a simple allignment.  Since the knob
is marked "do not touch" I leave it for you to adjust this.

>>> 'kasper' problem from kim -- Tue Mar 21 10:58:52 1989 <<<

Problem:  Separation between the mask and the wafer was enough.

Cause:    Student had an unlevel substrate?

Solution: Separation worked well between the mask and a 2" wafer without
          any adjustment.

>>> 'kasper' problem from magneton -- Mon Mar 27 15:13:57 1989 <<<

Focus knob on kasper is turned so that only at the one end
of its travel will the kasper focus on a mask.

>>> 'kasper' problem from phillip -- Tue Mar 28 07:07:17 1989 <<<

P: The 'row & column microscope' adjustment/focus knob was
   at the end of its travel. No further scope adjustment possible.
S: Adjusted scope lense height. This increased the amount of 
   available clearance to the regulator. 

>>> 'kasper' problem from raicu -- Wed Jul  5 08:37:52 1989 <<<

I am not sure this is a real problem but the shutter of the
UV lamp doesn't seem to close fully. It would be a good idea
not to wait too long between turning the turret to the
expose position and pressing the expose button.

>>> 'kasper' problem from phillip -- Wed Jul  5 14:38:06 1989 <<<

P: UV shutter not closing properly.
S: Replaced missing screw in shutter mechanism.
   The kasper no longer leaks UV light as reported
   by Eugen is fixed. The kasper is up.

>>> 'kasper' problem from kuchta -- Thu Jul 13 16:39:13 1989 <<<

Please note this:
                 I had to expose an unusually thick substrate.  I order
for me to do this I had to adjust the knob marked "Do not touch this Knob"
.  This knob adjusts the separation between substrate and mask in the SEP
mode.  The next user may want to readjust this to suit needs.
Dan Kuchta
From alex@mv2.Berkeley.EDU Mon Aug 21 11:08:24 1989
Received: by argon (5.57/1.16)
	id AA14427; Mon, 21 Aug 89 11:08:20 PDT
Received: by mv2.Berkeley.EDU.berkeley.edu (5.57/1.16)
	id AA22118; Mon, 21 Aug 89 11:08:42 PDT
Date: Mon, 21 Aug 89 11:08:42 PDT
From: alex@mv2.berkeley.edu (Machine owner)
Message-Id: <8908211808.AA22118@mv2.Berkeley.EDU.berkeley.edu>
To: bob@argon, ferenc@janus.berkeley.edu
Subject: Re:  kasper
Cc: alex@argon, phillip@argon
Status: RO

Since we maintain it when it breaks down I think
that we should take care of it so that we always
know its working status.

Alex


>>> 'kasper' problem from raicu -- Tue Sep 26 20:38:42 1989 <<<

The shutter does not close completely.

>>> 'kasper' problem from phillip -- Wed Sep 27 07:26:59 1989 <<<

P: Shutter will not close all the way.
S: Replaced missing cover lense screw that
   was allowing uv light to excape from the
   lense perforation. 
   Replaced 'power' indicator lamp.
   The kasper is up.

>>> 'kasper' problem from robin -- Tue Nov 28 13:41:10 1989 <<<

Light source in left split-field objective burned out.

>>> 'kasper' problem from phillip -- Thu Nov 30 08:18:35 1989 <<<

P: LH split field lamp out.
S: Replaced and focused split field illuminators.
   The kasper is up.

>>> 'kasper' problem from robin -- Wed Dec  6 11:53:38 1989 <<<

Wafer rotation knob is stripped - keeps slipping.  This is the knob
on the left side which rotates the wafer chuck.

>>> 'kasper' problem from phillip -- Thu Dec  7 08:19:05 1989 <<<

Repaired chuck height problem (as reported by Scott S.).
"  "   "  wafer rotation knob (as reported by Robin R.).
The kasper is up.

>>> 'kasper' problem from phillip -- Mon Jan 22 07:23:22 1990 <<<

Replaced kasper exposure lamp prior to restart after power shutdown.
The log indicates the old one as being 10 months on-line.
(Bulb intensity set to max.500watts.)

The kasper is up.

>>> 'kasper' problem from cgoss -- Fri Jan 26 12:21:21 1990 <<<

the wafer stage does not lower completely when the eject button is pushed.

>>> 'kasper' problem from phillip -- Fri Jan 26 13:27:04 1990 <<<

The previous report concerning illicit chuck height was
in error. The kasper is up and working.

>>> 'kasper' problem from cgoss -- Fri Jan 26 13:55:41 1990 <<<

the stage still has problems keeping itself up when in Sep. mode
if you load, wait for the Sep light, then hit Contact, it stays.
But that is not really adequate because you need Sep to position wafer.
I did a simple test.  I raised stage with Mask Load on (light source up).
It stayed up, even after turning Mask Load off.  I then hit Vis. Al. to raise
light source.  Stage remained up.  Only after I hit Vis. Al. again to lower 
	Disregard above paragraph.  I think it has some problem keeping stage
up no matter what is done

>>> 'kasper' problem from cgoss -- Fri Jan 26 16:02:38 1990 <<<

the shutter is misaligned so that UV light is emitted when the shutter
is closed.  This causes premature exposure of wafers.

>>> 'kasper' problem from phillip -- Mon Jan 29 06:48:51 1990 <<<

P:a. Exposure lamp 'leaks' thru shroud b-4 mechanism is activated.
  b. Stage separation is not constant.
S:a. Repalced missing set screw in shutter arm.
  b. Increased chuck blatter pressure by a small amount.
     The separation may  need user adjustment on the knob
     labelled 'DO NOT TOUCH THIS KNOB'. This proceedure
     will be covered with Charlie.

The kasper is available for use.

>>> 'kasper' problem from khacha -- Mon Apr 16 13:27:34 1990 <<<


the mask support plate could not be risen after the exposure cycle was finished.

>>> 'kasper' problem from khacha -- Mon Apr 16 16:21:03 1990 <<<

once
again the mask support plate could not be lifted up

>>> 'kasper' fix from phillip -- Tue Apr 17 13:16:34 1990 <<<

P: Mask plate cannot be lifted up.
S: Could not get the mask plate function
   to fail. Tested o.k. 20 of 20 times.
No trouble found. This machine is up and
  available for use.

>>> 'kasper' problem from davor -- Wed Apr 25 17:00:22 1990 <<<

The chuck for the wafer refused to lower itself

>>> 'kasper' fix from phillip -- Thu Apr 26 10:45:23 1990 <<<

P: Wafer chuck will not lower.
S: Dissasembled and mtced. stage piston assembly.
   Mtced. separation distance gimbel assembly.
   Tha kasper is up and available for use.


(Thanks to Evan for his assistance.)

>>> 'kasper' problem from davor -- Fri Apr 27 12:55:51 1990 <<<

The row and column microscope is out of focus over its entire range.
Only by gently pressing down on the eyepiece was I able to focus the
image. Can someone please adjust the distance between the objective 
and the wafer plane. Thank you.

>>> 'kasper' fix from phillip -- Fri Apr 27 14:03:49 1990 <<<

P: Mask focus does not focus.
S: Adjusted focus such that it works.
   Davor checked it and agrees that it works fine.
The kasper is up and running.

>>> 'kasper' fix from phillip -- Mon Apr 30 13:16:25 1990 <<<

Explained to Ken (and Debra) how to adjust the 
'separation' distance between mask and substrate.
