>>> 'ionmill' problem from bob -- Tue Jan 10 13:58:58 1989 <<<

The cryopump on the ionmill has been purged and is now cooling
back down. The knob on the port used to pump dewars was loose giving
the impression that is was closed however only limited torque 
was capable of being applied.

The cryo will take a few hours to cool down before the mill
can be used. The mill should be up and operational around
17:00 tonight.

>>> 'ionmill' problem from rooney -- Thu Jan 12 18:31:10 1989 <<<

someone opened vent while high vac was open

several people used the mill as a vacuum source during the day without
enabling the mill

>>> 'ionmill' problem from bob -- Fri Jan 13 14:04:12 1989 <<<

User reports N2 vent is flowing very slowly and is annoying.
Fix can wait until Monday.

>>> 'ionmill' problem from rooney -- Sun Jan 15 16:22:42 1989 <<<

pumpdown is extemely slow; cryo temp above 30K--it's up in the green
region of the dial.
either there is still a leak or the chamber is getting contaminated

>>> 'ionmill' problem from bob -- Tue Jan 17 07:59:36 1989 <<<

The iomill is down for regeneration. The vent rate 
has been checked and appears to be ok so this will not
be adjusted. Reasons for the cryo pump lifetime being short
will be investigated at a future date as James Parrish is
tied up on a new pump install. In the meantime the system
will be regen'd and put on line.
.

>>> 'ionmill' problem from bob -- Tue Jan 17 15:55:08 1989 <<<

The ionmill cryopump has been regenerated and it is now ready for
use.
From bob Tue Jan 24 08:20:02 1989
Received: by argon (5.57/1.16)
	id AA25769; Tue, 24 Jan 89 08:20:00 PST
From: bob (Robert M. Hamilton)
Message-Id: <8901241620.AA25769@argon>
To: eminami
Cc: parrish, voros
Subject: ionmill
Date: Tue, 24 Jan 89 08:19:58 PST
Status: R

Most of the problems with the mill are related to user
errors. The valve on the dewar pumping port had a loose
handle which prevented it from being fully closed. This
probably accounted for many regen. events. It has been
fixed.

Carlos is doing some cycling and runs as many as 50 cycles
in a period. This certainly doesn't help. 

I think the cryo on the mill is OK and there is no
significant leakage. It was a donated cryo and not state of
the art however it works well.

bob
------- Forwarded Message

Return-Path: eminami
Received: by argon (5.57/1.16)
	id AA24818; Tue, 24 Jan 89 07:48:42 PST
Date: Tue, 24 Jan 89 07:48:42 PST
From: eminami (Eric Minami)
Message-Id: <8901241548.AA24818@argon>
To: bob
Subject: ionmill


Question:  Why does the ionmill need to be regenerated so often?
Is something wrong with the cryopump or does someone keep on
dumping the cryo?

Eric

------- End of Forwarded Message



>>> 'ionmill' problem from bob -- Thu Jan 26 15:08:32 1989 <<<

The ionmill operating temperature is again higher than normal
Myra is using the system now and when she is finished it will 
be regenerated. This will occur in the AM. Reasons for such frequent
regenerations are being investigated.

>>> 'ionmill' problem from myra -- Thu Jan 26 15:12:12 1989 <<<

The "arc" current will not go up and the voltage gets pegged above 60 volts.
Burned out filament?
My wafer is still inside.

>>> 'ionmill' problem from bob -- Fri Jan 27 09:04:53 1989 <<<

Replaced filament in ionmill. I am regenerating the cryo pump. 
Loss of arc current is likely the result of the insulators in
the source needing cleaning. The system cannot be tested until
the pump is regenerated and I will discuss with Myra which option
we will go with.

1. Regen and try
or
2. Tear down and clean ion source

The latter will take several hours and the sample in the machine should
be removed.

bob

>>> 'ionmill' problem from bob -- Fri Jan 27 09:40:06 1989 <<<

The ionmill is being regenerated and will be up for testing shortly.

>>> 'ionmill' problem from myra -- Fri Jan 27 11:29:42 1989 <<<

Still no arc current; arc voltage pegs.
My wafer is out.

>>> 'ionmill' problem from bob -- Fri Jan 27 15:39:17 1989 <<<

Diassembled the Kaufman ion source and cleaned the insulators.
Mo is sputtered on this under noraml conditions. Installed new
neutralizing filament and the main source filament is also new.
Reassembled and pumped system down. I do not have time to test it.
Myra will do this over the weekend.

>>> 'ionmill' problem from myra -- Fri Jan 27 16:42:59 1989 <<<

Sorry to say, still no arc current, arc voltage pegs.
I might have been able to turn it up a bit further this
time before it pegged.  My wafer is out.

>>> 'ionmill' problem from bob -- Mon Jan 30 08:39:54 1989 <<<

Checked ionmill over and it is working very well! It is likely
that after the grids were cleaned they behaved a little erratically
as this procedure always leaves field emission points that can
contribute some instablility. The mill has been conditioned and 
is in good working order. Users should expect some instability
on initial startup after long periods between runs and it is a 
good idea to always purge the argon line prior to use. It appears
the best argon pressure to the machine is 1-2 psi.

>>> 'ionmill' problem from rooney -- Wed Feb  1 12:51:17 1989 <<<

mechanical pump not operating

>>> 'ionmill' problem from bob -- Wed Feb  1 13:52:12 1989 <<<

The ionmillhas been regenerated however it's mechanical pump is
overheating and has been turned off. This will have to be fixed
prior to the mill being useable.
James Parrish will look into this problem ASAP.

>>> 'ionmill' problem from bob -- Thu Feb  2 08:38:51 1989 <<<

The ionmill mechanical pump is operating correctly and the mill is
opertional.

>>> 'ionmill' problem from rooney -- Fri Feb  3 10:29:22 1989 <<<

when the top plate is lowered the inside nut on the feedthrough for
the new bundle of electrical connections hits the inside wall of
the chamber cracking off pieces of glass.  Be sure to guide the
top plate down by hand to make sure that the feedthrough nut doesn't
hit the glass.

>>> 'ionmill' problem from bob -- Tue Feb 14 12:06:18 1989 <<<

The ionmill is down for regeneration of the cryopump.

>>> 'ionmill' problem from rnorman -- Tue Feb 28 16:36:54 1989 <<<

Problem: Cryo warmed up.

Cause: Someone turned off the water to the cryo compressor.

Solution: The cryo was regened and is now chilling down; it will
          be up for use by 6:30pm tonight.

>>> 'ionmill' problem from parrish -- Mon Mar 13 14:43:13 1989 <<<

problem:    high pressure in the chamber

cause:      cryo-pump warmed up

solution:   regenerated cryo-pump 
            system is up and being used.

>>> 'ionmill' problem from voros -- Tue Mar 14 10:17:31 1989 <<<

test

>>> 'ionmill' problem from rooney -- Wed Mar 22 04:19:02 1989 <<<

chamber sitting at atmospheric pressure even though high vac valve
is open--cryo is warm--is there a leak? or did someone dump it and
not tell anyone?

>>> 'ionmill' problem from rooney -- Wed Mar 22 08:49:11 1989 <<<

high vac valve not seating properly; it leaks and dumps the cryo when
the chamber is vented; screen that normally covers the chamber vacuum
port was dislodged--particles may have fallen down causing seating problem.
cryo is presently being regenerated (9:00, 3/22)

>>> 'ionmill' problem from parrish -- Wed Mar 22 13:36:21 1989 <<<

problem:    high valve not seating properly

cause:      o-ring need cleaning

solution:   cleaned and regreased o-ring. Also vibration had loosen the mounts
            holding the chamber. I put in a second screw and lock washers and
            retighten the support.

>>> 'ionmill' problem from bierach -- Wed Mar 22 15:43:22 1989 <<<


substrate rotator is jammed

>>> 'ionmill' problem from rooney -- Wed Mar 22 19:24:47 1989 <<<

substrate rotation does not work properly; it keeps stopping

>>> 'ionmill' problem from parrish -- Thu Mar 23 15:01:45 1989 <<<

problem:    substrate table intermittent, keep stopping

cause:      excessive play in the gears and worn o-rings

solution:   adjusted all the gears to run closer, rebushed the feedthrough
            cleaned up the shaft, and replaced the o-rings. seem to be 
            working fine. pressure in the chamber is about 5x10-7 system
            up.

>>> 'ionmill' problem from bob -- Wed Mar 29 07:59:05 1989 <<<

The crypopump is in the process of being regenerated. It should be up 
this afternoon.

>>> 'ionmill' problem from parrish -- Thu Mar 30 07:15:07 1989 <<<

problem:    high pressure in the chamber

cause:      system was found in that condition 

solution:   regenerated the cryo-pump, system is up.

>>> 'ionmill' problem from rosal -- Mon Apr 10 21:33:01 1989 <<<

The cryo pump is not working in the ionmill.  It needs to be regenerated.

>>> 'ionmill' problem from bob -- Tue Apr 11 15:36:09 1989 <<<

The cryopump on the ionmill was regenerated and the system is up for use.

>>> 'ionmill' problem from bob -- Fri Apr 14 10:03:48 1989 <<<

The ionmill is being regenerated and will be up after lunch.

>>> 'ionmill' problem from bob -- Fri Apr 14 13:50:14 1989 <<<

The ionmill has been regenerated and is cooling down. It should be
ready for use latter this afternoon.

>>> 'ionmill' problem from lyons -- Wed Apr 19 21:43:30 1989 <<<

something is making a strange noise under the ion mill machine....

maybe the cryo pump needs regenerating?

>>> 'ionmill' problem from bob -- Thu Apr 20 13:19:29 1989 <<<

The ionmill is down for regeneration

>>> 'ionmill' problem from bob -- Thu Apr 20 15:46:44 1989 <<<

The ionmill has been regenerated and should be cool and ready for use
by 18:00. Reasons for the need for such frequent regenerations have
not been discovered. Also, the mechanical pump is noisier than usual
but still pumps well.

>>> 'ionmill' problem from rosal -- Wed Apr 26 19:22:21 1989 <<<

high vac not working.

>>> 'ionmill' problem from parrish -- Thu Apr 27 15:25:33 1989 <<<

problem:    cryo-punp dumped

cause:      loose connection on the aperture fitting

solution:   regenerated the cryo and tighten up the fitting, system up and
            being used by Rosal pressure at 1x10-7.

>>> 'ionmill' problem from eminami -- Mon May  1 11:41:12 1989 <<<

showed bmartin how to use the ionmill.

>>> 'ionmill' problem from bmartin -- Tue May  2 11:24:31 1989 <<<


The arc seems to have an open circuit (e.g. no current flowed when
the voltage was turned up all the way).  Also the cryo pump needs to
be regenerated.

>>> 'ionmill' problem from bob -- Fri May  5 10:09:53 1989 <<<

James Parrish He leak checked the ionmill and repaired a 
leak in the lower part of the system. Hopefully this will 
solve the problem with the cryopump rising in temperature. 
The cryo is now cooling down and the system should be up for
use latter this afternoon. Problems with the ARC as reported
by Bret Martin willl be checked on if they still exist after
users try the machine.
.

>>> 'ionmill' problem from parrish -- Fri May  5 11:00:33 1989 <<<

problem:   system need regenerating

cause:     there was a small leak at the thermocouple gauge.

solution:  tighten the fitting and helium leaked system, system checks out
           tight. pressure now 5x10-7 and is ready for use.

>>> 'ionmill' problem from bob -- Mon May 15 07:45:18 1989 <<<

The ionmill cryo is being regenerated this AM. It should be back
on-line by 12:00.

>>> 'ionmill' problem from rooney -- Mon May 15 15:36:47 1989 <<<

no arc current

>>> 'ionmill' problem from bob -- Mon May 15 15:51:44 1989 <<<

Problem: User reports no arc current

Solution: By reducng the magentic field in the penning source one
can usually get the arc to strike. This was done and the system is
back up for use.

>>> 'ionmill' problem from parrish -- Thu May 18 07:30:10 1989 <<<

System found with high pressure in the cyro-pump. system is being regenerated

>>> 'ionmill' problem from rooney -- Thu May 18 16:12:49 1989 <<<

cryo temp too  high
base pressure is excellent (E-8) and pumpdown is rapid (I cycled it 4X),
but the cryo thermometer reads in the green 

>>> 'ionmill' problem from bob -- Fri May 19 14:08:37 1989 <<<

It appears the high temperatures showing on the cryopump H2 temp thermometer
are in error and the cryo is actually operating at lower temperatures.
James Parrish has observed similar problems on other Varian cryopumps.
The base pressure of the system remains excellent even at these higher
readings.

For the time being the cryo temperature will be ignored. James will look
for a replacement head however it installation will remain a low priority.

>>> 'ionmill' problem from carlos -- Sat May 20 16:41:30 1989 <<<

The cryopump needs to be regenerated. The cause is probably the
50 pump cycles that I had

>>> 'ionmill' problem from carlos -- Sun May 21 01:11:21 1989 <<<

the cryopump needs to be regenerated

>>> 'ionmill' problem from bob -- Mon May 22 07:53:18 1989 <<<

The ionmill is down for regeneration. It should be ready after lunch.

>>> 'ionmill' problem from bob -- Mon May 22 11:28:47 1989 <<<

The ionmill has been regenerated and is cooling down for use. It
should be ready by 14:00.

>>> 'ionmill' problem from parrish -- Tue May 23 11:47:16 1989 <<<

problem:    cryo-pump dumped

cause:      glass tube broke causing high pressure into pump

solution:   regenerated cryo-pump. system up.

>>> 'ionmill' problem from carlos -- Sat May 27 01:45:17 1989 <<<

The cryopump is trashed again

>>> 'ionmill' problem from bob -- Tue May 30 10:59:21 1989 <<<

ThThe ionmill cryo has been regenerated and is cooling doen. It will be
ready for use by 14:00. 
When ionmill users find the cryopump needs regenerating they can save
time by closing the HV valve and then turning off the cryopump
compressor. It is the lower compressor lacated next to the H2 cylinder.

>>> 'ionmill' problem from parrish -- Mon Jun  5 07:19:54 1989 <<<

system down for regeneration

>>> 'ionmill' problem from bob -- Mon Jun  5 11:22:29 1989 <<<

The cryopump on the ionmill is ooliing down and should be ready
for use at 14:00 today.

>>> 'ionmill' problem from bmartin -- Tue Jun 13 14:58:01 1989 <<<


The cryo pump needs to be regenerated.

>>> 'ionmill' problem from rnorman -- Tue Jun 13 16:42:16 1989 <<<

The cryo is being regenerated overnight. Tomorrow morning the cryo will
be pumped out and chilled down, it should be operational by 10AM.

>>> 'ionmill' problem from parrish -- Wed Jun 14 15:01:28 1989 <<<

problem:   cryo-pump up in temp.

cause:     system was found in this position, cause unknown

solution:  regenerated cryo-pump, system up for use.

>>> 'ionmill' problem from raicu -- Mon Jun 19 14:50:34 1989 <<<

the gear used for tilting the table is disengaged from the "threaded"
rod attached to the crank for tilting the table. this is the gear
outside the vacuum chamber. I think it needs to be raised a little bit.

The ion mill is operational as long as the substrate
tilting doesn't need to be changed without venting the chamber.

>>> 'ionmill' problem from parrish -- Tue Jun 20 08:06:39 1989 <<<

problem:   hand crank for tilting the substrate table non-operational

cause:     it had been disconnected

solution:  reconnected the hand crank gear

>>> 'ionmill' problem from parrish -- Tue Jun 20 08:10:26 1989 <<<

system needs regenerating, pressure in the 4 range. I am starting the process
of regeneration. 

>>> 'ionmill' problem from bob -- Tue Jun 20 15:24:26 1989 <<<

James Parrish reports the iomill is cooling down and should be ready
for use by 18:00 today. We will look into changing the cryopump as 
clearly it is requiring excessive regenerations.

>>> 'ionmill' problem from parrish -- Wed Jun 21 10:59:30 1989 <<<

system down, we will be changing the arrays in the cryo-head. Hopefully
this will reduce the excessive regenerations.

>>> 'ionmill' problem from bob -- Thu Jun 22 15:00:46 1989 <<<

The cryo array within the cryopump is being replaced in an effort to
solve the problem of frequent regenerations. James Parrish should
have this work completed in the morning, June 23rd.

>>> 'ionmill' problem from parrish -- Fri Jun 23 11:11:51 1989 <<<

problem:   frequent regenerations

cause:     the arrays were though to be saturated and need replacing

solution:  removed cryo, changed the arrays and reinstalled. the system
           is up with a good base pressure( 1x10-7) we will monitor the 
           regeneration times.

>>> 'ionmill' problem from liu -- Thu Jun 29 12:44:28 1989 <<<

	The chamber temperature is very high. Sorry.
	
	Xiaoming Liu

>>> 'ionmill' problem from bob -- Thu Jun 29 13:30:23 1989 <<<

The ionmill is down for regeneration. It will not be up until
20:00 today.

>>> 'ionmill' problem from bob -- Thu Jun 29 16:36:47 1989 <<<

The ionmill is now cooling down. It should be useable by 18:00.

>>> 'ionmill' problem from bierach -- Mon Jul  3 13:01:46 1989 <<<

After closing the high vac valve and watching it close,
I vented the chamber.... and dumped the cryo.  When I
first opened the high vac, it took a while to open 
(Fore vac ~300 microns).  Could the high vac valve
seal be "sticky" and not sealing properly?
Anyway, its DOWN.

>>> 'ionmill' problem from bob -- Mon Jul  3 13:24:19 1989 <<<

The ionmill is down, the gate valve has problems and needs to be
rebuilt.

>>> 'ionmill' problem from parrish -- Thu Jul  6 08:42:20 1989 <<<

problem:   gate valve not closing properly, causing dumping of the cryo-pump

cause:     alignment shifted at support point, and o-ring on the valve itself
           needed cleaning (it was sticking).
solution:  realigned the support, cleaned o-ring, and checked the valve opera-
           tion. system works correctly and is cooling down. should be up for
           use around noon.

>>> 'ionmill' problem from rooney -- Thu Jul  6 14:44:26 1989 <<<

substrate rotation fails intermittently

>>> 'ionmill' problem from raicu -- Thu Jul  6 19:06:23 1989 <<<

[please note that another problem was reported by rooney]

Due to a misunderstanding, the silver grease for the ion mill
appears to have been thrown away (it was confused with the
silver filled epoxy for chip bonding).

When the substrate table is tilted, there is some slippage
between the table and the gear which is attached to it.

Eugen

>>> 'ionmill' problem from parrish -- Fri Jul  7 07:42:26 1989 <<<

problem: intermittant table rotation when the table is tilted.

cause:   I have tilted the table and rotated the table at the same
         time, and have seem no problems.

solution: Please contact me that you may be able to show me the problem
          thank you.

>>> 'ionmill' problem from raicu -- Mon Jul 10 21:51:20 1989 <<<

I did not use the ion mill. The cryo thermometer was in the green
range.

Eugen

>>> 'ionmill' problem from parrish -- Tue Jul 11 07:45:10 1989 <<<

problem:   frequent regenerations

cause:     the actual cause has not been determined at this time,it
           could be a number of things or a combination of them.           
 
solution:  we will leak check the system, and/or change the cold head, and/or
           change the compressor. we are working on the problem. meantime the
           system is being used as is.

>>> 'ionmill' problem from raicu -- Tue Jul 11 17:20:50 1989 <<<

The ion mill was left with the high vacuum valve closed and
a do not operate sign on it. Is there anything wrong with it?

>>> 'ionmill' problem from mmesser -- Wed Jul 12 10:32:55 1989 <<<

Cannot maintain arc current.

Started with magnet at 0.8 amp. It worked for a while. Then I noticed 
the arc voltage was off scale, the current was 0, and no milling seemed
to be happening. 

I turned the HV down to 0, reduced the magnet current to 0.7 amp, and tried 
again. It worked for about two minutes.

Now I cannot get the arc current to stay on when the magnet current is as low
as 0.6 amp.

>>> 'ionmill' problem from mmesser -- Wed Jul 12 10:41:33 1989 <<<

I tweaked with the knobs some more with Peter. It seems ok now.

>>> 'ionmill' problem from rooney -- Wed Jul 12 13:06:51 1989 <<<

power supply meters read normally, but mill does not etch

>>> 'ionmill' problem from raicu -- Thu Jul 13 21:33:29 1989 <<<

I tested the ion mill. It did etch SiO2. I cannot compare
the etch rate with previous results. The suppressor current
was lower than normal, the current out of the high voltage
power supply was slightly higher than normal but then it
dropped back to normal. The currents from the middle and bottom
grids were initially higher than normal but then dropped.

I also checked whether the voltage of the supressor power
supply appears across its external terminals. It does and i think this
is a safety hazard.

DO NOT TOUCH THE TERMINALS OF THE SUPRESSOR POWER SUPPLY WHEN IT
GENERATES HIGH VOLTAGE!

>>> 'ionmill' problem from rooney -- Fri Jul 14 09:03:02 1989 <<<

etch rate for Au-Pd nearly zero
dials and guages read normally
substrate heats up as usual

>>> 'ionmill' problem from parrish -- Mon Jul 17 07:31:16 1989 <<<

systen down, there seem to be a intermittant problem with striking a 
plasma in the chamber, also the system needs regenerating.

>>> 'ionmill' problem from bob -- Mon Jul 17 15:23:29 1989 <<<

Problem: User reports no etching on ionmill and suppresor grid
         voltage was erratic.
Cause:   Unknown, next user had good etching results.

Solution:JP found a loose connection on the top of the machine. The 
         ionmill has been serviced, the connection tightened and the
         cryo regenerated. It is cooling down and should be ready
         by 18:00. 

>>> 'ionmill' problem from harshman -- Thu Jul 20 15:17:28 1989 <<<

Bob,

cryopump temp was (is) high - - a little above 22; seems to
need to be regenerated.

>>> 'ionmill' problem from parrish -- Fri Jul 21 07:48:30 1989 <<<

system is being regenerated, should be up about 1:00pm.

>>> 'ionmill' problem from parrish -- Fri Jul 21 13:21:38 1989 <<<

problem:   high temp. in the cryo-pump

cause:     an ongoing question we are working on.

solution:  until the problem is found and fixed we only can regenerate
           and wait for a final solution, meantime the system is up and
           operational

>>> 'ionmill' problem from liu -- Fri Jul 28 12:53:10 1989 <<<


	I am going to use the ionmill, but the temperature is very high.
Does it need regenerate?

	Xiaoming Liu

>>> 'ionmill' problem from parrish -- Fri Jul 28 14:47:59 1989 <<<

system is being regenerated.

>>> 'ionmill' problem from parrish -- Fri Jul 28 15:56:57 1989 <<<

The ionmill has been regenerated and is cooling down. It should be ready for
use 19:00.

>>> 'ionmill' problem from mmesser -- Mon Jul 31 17:18:54 1989 <<<

I had a good vaccuum. I closed the high vac valve and opened the intermediate
valve to the argon supply. Both pressure meters went up. I opened the vent. 
A few seconds later the ion gauge on the cryo pump turned itself off. The 
pressure inside the cryo pump was 1 mtorr.

I think the high vac valve may have dirt in it. Earlier today, a wafer fell
and broke in the chamber. I vaccuumed it out, but I may not have got it all.

>>> 'ionmill' problem from parrish -- Tue Aug  1 09:44:34 1989 <<<

problem:   High vaccum not sealing 

cause:     the type of high vacuum valve in this system is called a butterfly
           valve, this kind of valve closes on a taper, and when the o-ring
           gets dirty and/or dry it does not close to a vacuum seal.
solution:  cleaned and regreased the valve o-ring. system is being regenerated
           properly be availably after lunch today.

>>> 'ionmill' problem from bob -- Fri Aug  4 15:06:36 1989 <<<

The ionmill is being regenerated for the weekend.

>>> 'ionmill' problem from bob -- Fri Aug  4 15:48:54 1989 <<<

The cryopump on the ionmill has been regenerated. It should be ready
for use by 19:00 tonight.

>>> 'ionmill' problem from parrish -- Wed Aug  9 08:08:54 1989 <<<

system down for regeneration.

>>> 'ionmill' problem from parrish -- Wed Aug  9 14:52:57 1989 <<<

problem:   temp. in the cold-head

cause:     as yet the replacement cold-head has not arrived, will
           be shipped this week according th Austin Scientific, hopefully
           the replacement pump will solve our regeneration problem.

solution:  regenerated cryo-pump. system is in use.

>>> 'ionmill' problem from parrish -- Mon Aug 14 08:51:31 1989 <<<

system down for regeneration

>>> 'ionmill' problem from bob -- Mon Aug 14 15:38:31 1989 <<<

The ionmill has been regenerated and is cooling down. It should be
ready  for use at 18:00 today.

>>> 'ionmill' problem from mmesser -- Tue Aug 15 15:36:53 1989 <<<

Power supply problem: I was ion milling some fragile membranes. Three 
broke, so I turned everything off and opened the chamber to look at them.
When I tried to turn the power back on, I cannot turn the arc knob 
without the arc voltage going above 60v. Normally my membranes don't break
unless I turn the power up to 1000v.

>>> 'ionmill' problem from mmesser -- Wed Aug 16 11:26:19 1989 <<<

More of the same problem with the power supply. Is it possible to fix today?
Thanks.

>>> 'ionmill' problem from bob -- Thu Aug 17 08:03:46 1989 <<<

The ionmill is down for an ion gun clean. This will take about
2-3 hours. 
RE: Milling 4" wafers:
James Parrish has measured the chuck diameter and
with the addition of a simple plate (wafer holder) of
appropriate size, the ionmill is capable of milling 4"
wafers. The milled pattern will remain slightly larger than
3", not extending to the edge of the wafer.

>>> 'ionmill' problem from bob -- Thu Aug 17 16:14:54 1989 <<<

A new filament has been installed in the ionmill. James Parrish
cleaned the grids and a new neutrilizing wire has been installed.
The cryo has been regenererated and is cooling down. Until the
cryo is ready the ion source cannot be tested. It should operate
fine however there is usually some arcing on initial startup until
the field emmision points burn off. User should be aware of this.

In addition, the ion source had a lot of W oxides in it. Someone
has vented this system while the cathode was hot. I am looking
into an interlock so this cannot happen.

The ionmill should be ready to use at 19:00 tonight.

>>> 'ionmill' problem from hsin -- Mon Aug 21 18:35:20 1989 <<<

I found the cryo-pump temp is high.  Some one leave the cryogate
opened!!   The cryo-pump needs to be regenerated first thing in 
the morning.   I need to use it at 10:00.

I should remind everyone to remember to close the cryo-gate after
finishing their job.  Otherwise the leakage through the  chamber 
will make the regeneration more frequent.

Will James or Bob please do a regeneration in the morning? Thanks.

Wei Hsin

>>> 'ionmill' problem from bob -- Tue Aug 22 07:47:13 1989 <<<

The ionmill is down for regeneration. It should be up around 10:00.
Much time could be saved if users would turn off the cryo compressor
when they notice the ionmill needs a regen. 

Leaving the gate valve open does not increase the frequency needed
regenerations. PLease continue to observe the operating procedures
for the ionmill and leave the HiVac valve open when in standby..

>>> 'ionmill' problem from bob -- Tue Aug 22 11:42:43 1989 <<<

The ionmill has been regenerated and will be up at apx. 13:00.

>>> 'ionmill' problem from bob -- Fri Aug 25 16:12:51 1989 <<<

The ionmill has been cryo has been regenerated for the 
weekend and will be ready for use at 19:00.      

>>> 'ionmill' problem from hsin -- Wed Aug 30 14:03:51 1989 <<<

The cyropump temp. is high.  I turned off the compresser and vent
the cyro-pump.  It needs to be regenarated. 

Wei Hsin

>>> 'ionmill' problem from bob -- Wed Aug 30 16:10:00 1989 <<<

The ionmill has been regenerated and is now pumping down. It should
be ready for use by 18:00.

>>> 'ionmill' problem from hsin -- Mon Sep  4 10:11:11 1989 <<<

Temperature is high for the cyro. I turned off the compressor.
Cyropump needs to be regenerated on Tuesday morning.

Wei Hsin

>>> 'ionmill' problem from parrish -- Tue Sep  5 09:19:01 1989 <<<

system is being regenerated, and should be ready for use by 11:00 am.

>>> 'ionmill' problem from hsin -- Mon Sep 11 11:02:23 1989 <<<

Ionmill needs to be regenerated.  I turned off the compressor at
weekend.

Wei

>>> 'ionmill' problem from hsin -- Thu Sep 14 17:52:46 1989 <<<

Cyro temperature goes to high. I turned off the compresser at 17:40.
It needs to be regenerated in the morning.

Wei

>>> 'ionmill' problem from rosal -- Fri Sep 15 08:45:50 1989 <<<

ion mill needs to be regenerated.  I could not use it.

>>> 'ionmill' problem from rnorman -- Fri Sep 15 09:51:49 1989 <<<

The ionmill is being regenerated and will be up by 12:30 pm today.

>>> 'ionmill' problem from rnorman -- Fri Sep 15 10:51:48 1989 <<<

Problem: Cryo temp warm.

Solution: The cryo was regenerated and is now chilling down.
          The ionmill will be ready for use by 12:30 today.

>>> 'ionmill' problem from bob -- Mon Sep 18 13:29:53 1989 <<<

The ionmill has been regenerated and is cooling down. It will be ready 
for use by 16:00 today.

A new cryopump should arrive this week and will be installed ending 
these frequent regenerations.

>>> 'ionmill' problem from bob -- Fri Sep 22 07:32:51 1989 <<<

The ionmill cryopump is being regenerated before the weekend. It
will be up and ready for use by 16:00.

>>> 'ionmill' problem from bob -- Fri Sep 22 10:36:04 1989 <<<

The ionmill cryopump has been regenerated and the system should
be ready for use by 14:00.

>>> 'ionmill' problem from raicu -- Tue Sep 26 21:25:30 1989 <<<

Dumped the cryopump. I turned off the
compressor so it can be regenerated.
I hope the ion gauges are OK.
I left the chamber closed but at
atmospheric pressure.

>>> 'ionmill' problem from bob -- Wed Sep 27 14:01:23 1989 <<<

The ionmill has been regenerated and is cooling down. It should be ready
for use by 1700: today.

>>> 'ionmill' problem from bob -- Mon Oct  2 11:32:01 1989 <<<

The ionmill is down temporarily as we are changing the cryopump.
It should be available latter this afternoon.

>>> 'ionmill' problem from parrish -- Tue Oct  3 07:26:33 1989 <<<

problem:   cryo-pump needs regenerating more than normal( like once or twice
           a week) 

cause:     we`re looking at the cold-head as the reason

solution:  we have replaced the cold-head with a rebuilt one, the system
           is now pumping at 3x10-7 and is operational.

>>> 'ionmill' problem from hsin -- Mon Oct  9 11:02:17 1989 <<<

Cyro temperature went high in Sunday afternoon. I just turned off
the compressor.  Cyro needs to be regenerated today.

Wei Hsin

>>> 'ionmill' problem from hsin -- Mon Oct  9 11:06:01 1989 <<<

I made a mistake. The temperature acturely is "LOW".  I turned on
the compressor again.  There is no need for regeneration.  Sorry
about the mistake.  Please ignore my previous problem report.

Wei hsin

>>> 'ionmill' problem from bierach -- Tue Oct 10 12:28:43 1989 <<<

cryo was dumped in the middle of my run when Phil and I were trying to
determine why the target current was reading zero after the shutter was
opened.  Apparently, the cable feethrough vented the system as we were 
checking to see if the connector was causing the erroneous meter reading.

>>> 'ionmill' problem from parrish -- Tue Oct 10 13:09:25 1989 <<<

system is being regenerated

>>> 'ionmill' problem from bob -- Wed Oct 11 11:16:18 1989 <<<

Shorts are occurring in dielectrically isolated parts within the
chamber of the ionmill due to metal deposits. This is a normal
situation based on use. Maintenance will require about 1.5
days and is underway.

The ionmill will be restored to a mode where it can be used
for pumping ampoules in the evenings.

>>> 'ionmill' problem from parrish -- Wed Oct 11 15:21:22 1989 <<<

update:   I have the rotating table apart and have cleaned the insulators
          and will start reassembly in the morning. the chamber is in 
          tack for ampoules use. (caution the parts for the table are lying on           he system).

>>> 'ionmill' problem from bob -- Thu Oct 12 16:09:23 1989 <<<

The ionmill has been cleaned of deposits thought to be causing a short
in the target current. It has been partially tested and appears to be up.
It will be tested tomorow morning by a user in the morning and if problem
persist they will be addressed.

>>> 'ionmill' problem from bierach -- Fri Oct 13 15:15:39 1989 <<<

The substrate cooling water line was blocked.  Bob bypassed the 
flow switch and got the water to flow again.

>>> 'ionmill' problem from bob -- Fri Oct 13 15:19:27 1989 <<<

The substrate cooling on the iomill was interrupted by a plugged
flow switch. In addition this flow switch is defective and indicates
there is flow. On Monday the flow switch will be replaced with a
Proteus. The ionmill is working and useable in its present form. The 
cooling is operating however without an interlock.

>>> 'ionmill' problem from parrish -- Mon Oct 16 08:39:57 1989 <<<

system down for repair of water interlok

>>> 'ionmill' problem from parrish -- Mon Oct 16 15:27:38 1989 <<<

system is still down in replacment of water interlok

>>> 'ionmill' problem from parrish -- Tue Oct 17 10:27:00 1989 <<<

problem:   water interlok not working

cause:     Hanes Sure Flow Interlok clogged

solution:  Removed Hanes Interlok and replaced with a Proteus/w flow
           indicater. system is up for use.

>>> 'ionmill' problem from rosal -- Tue Nov 14 17:40:25 1989 <<<

I would like to evacuate an ampule byt the hydrogen tank is empty.
Should I change it myself?  Please let me know.
rosa

>>> 'ionmill' problem from rosal -- Tue Nov 14 17:55:21 1989 <<<

hydrogen bottle seems to be empty.  I need this for the acethylene
torch to seal my evacuated ampule.  I removed the ampule so it would
not be accidentally bumped.
rosa

>>> 'ionmill' problem from rosal -- Thu Nov 16 10:16:33 1989 <<<

I have been trying to evacuate an ampule for the last thre 
days.  Something else is attached to the evacuation end of the
ionmill, but the machine is not activated.  I don't want to
screw up someone elses experiment, but I had reserved the
equipment for this morning.  Life is full of dilemas.
I'll come back in 1 hour.
rosa

>>> 'ionmill' problem from jayyang -- Thu Dec  7 14:35:18 1989 <<<

Cry-pump temperature was high and needs regeneration.

>>> 'ionmill' problem from gtdu -- Thu Dec  7 19:28:05 1989 <<<

cy
r
Cry-pump temperature is too high to operate it and need
regeneration.

>>> 'ionmill' problem from parrish -- Fri Dec  8 08:06:58 1989 <<<

system down for regenerating cryo-pump.

>>> 'ionmill' problem from parrish -- Fri Dec  8 15:40:40 1989 <<<

update:   system cooling down and should be at operating pressure about
          6:00 or 6:30 pm today.

>>> 'ionmill' problem from xwu -- Sat Dec  9 16:50:22 1989 <<<

When I was trying to seal the glass tube off from ionmill,
it broke so that the system exposured to atmosphere (very short, 
I turned the valve off immediately, but cryo pump needs to
be regenerated, the ionmill is down.

I'm sorry about that.

Xin

>>> 'ionmill' problem from parrish -- Mon Dec 11 08:07:42 1989 <<<

problem:   after further inspection I found the glass cylinder chipped
           also, and the compressor left on after the system had been dumped

cause:     the stainless steel top has feedthroughs at a bolt circle that is
           close to the glass cylinder and has to be lowered and watched to 
           asure the feedthroughs don`t touch the glass. A sign was put on the 
	   front of the system, stating that the compressor should be shut off
	   if the cryo needs regenerating.

solution:  epoxy is being applied to the glass cylinder, and should be dried
	   this afternoon, the boot gasket was cleaned, and the gate valve o-
	   ring was cleaned,and checked.
	   Being careful is the only solution to avoid the chipping of the
	   glass cylinder, and carefully following instructions.
	   .

>>> 'ionmill' problem from parrish -- Mon Dec 11 15:21:27 1989 <<<

update:   did not get the epoxy sanded off today, will start on it first
          thing in the morning.

>>> 'ionmill' problem from parrish -- Tue Dec 12 07:22:44 1989 <<<

Glass cylinder is back on the system and is cooling off. System should
be up by 11:000 am tthis morning.

>>> 'ionmill' problem from mmesser -- Tue Dec 19 21:07:32 1989 <<<

When I turn on the power supply, the cathode current wont go above 2 amps.

>>> 'ionmill' problem from parrish -- Wed Dec 20 11:04:05 1989 <<<

the system is working properly, I don`t see a problem and the system is being
used.

>>> 'ionmill' problem from parrish -- Wed Jan 31 08:01:52 1990 <<<

chamber pressure at 1000 microns and cryo-temp. in the green
will start system in regeneration process. 

>>> 'ionmill' problem from rnorman -- Wed Jan 31 14:46:29 1990 <<<

Problem: Chamber vacuum elevated and cryo temp high.

Cause: Cryo warmed up.

Solution: Parrish started the regen earlier today.  It was
          just now pumped out and the cryo compressor turned
          on.  The ionmill will be up for use in 2 hrs. when
          the cryo is below 20~k on the cryo gauge.

>>> 'ionmill' problem from parrish -- Fri Feb  2 06:28:05 1990 <<<

cryo-head temp. above 40k, system is being regenerated.

>>> 'ionmill' problem from parrish -- Fri Feb  2 15:28:27 1990 <<<

problem:    cryo temp. at 40k

cause:      system may not have had a good regeneration before last used.

solution;   regenerated system, chamber pressure is 1x10-6. system should
            reach low 7 range in about 1/2 hour.

>>> 'ionmill' problem from bierach -- Wed Feb  7 17:13:33 1990 <<<

The argon flow was somewhat erratic, and midway through my
run the controller lost it and the filament blew. (It was set
as 8x10E-5).  Otherwise OK.

>>> 'ionmill' problem from bob -- Fri Feb  9 15:48:19 1990 <<<

The argon flow controller was checked out along with the filaments
on the ionmill. Everything seems to be in working condition and the
unstable flow reported by bierach could not be reproduced. The
ionmill is up.

>>> 'ionmill' problem from bullard -- Fri Mar  2 11:53:08 1990 <<<

After about 5 minutes of stable milling conditions, the argon pressure
started to fluctuate, as well as the arc voltage, arc current, and target
current.  Finally, the arc voltage pegged past 60 and the arc current 
dropped to zero.  At this point I went through the shutdown procedure as
given in the manual, in order to avert further problems.

I notice that the argon pressure is less than 5 psi, maybe that is the
root of the problem.

>>> 'ionmill' problem from bob -- Tue Mar  6 11:57:20 1990 <<<

The ionmill experiences pressure burst on the Ar input.
The cause of this is likely the pzt contorl valve or the 
pressure regulator supplying it. James Parrish will
look into this problem shortly. Users will be posted.
.

>>> 'ionmill' problem from parrish -- Fri Mar  9 07:46:35 1990 <<<

system down for repair of pressure burst.

>>> 'ionmill' problem from parrish -- Fri Mar  9 10:25:08 1990 <<<

problem:    pressure brust when argon is flowing

cause:      PZT control valve

solution:   removed the valve, cleaned and replaced. Ran the Argon for
            15 mins. and it was controlling the flow according to the
            pressure gauge. System can be used.

>>> 'ionmill' problem from bob -- Mon Mar 19 14:04:56 1990 <<<

Problems previously reported for the pressure control valve
turned out to be problems with a leaking rotary feedthrough.
The packing nut has been tightened and pressure control is
now excellent. James will clean and repack this feedthrough
during the next regeneration cycle.

>>> 'ionmill' problem from bierach -- Mon Mar 19 15:09:41 1990 <<<

The same problem with pressure fluctuations occured.  Bob isolated
the problem as a leak in the rotation platform feedthrough.  When
tightened up, all was well.

>>> 'ionmill' problem from bullard -- Tue Mar 20 12:32:24 1990 <<<

Argon pressure fluctuations are still occuring after about 5-10 minutes
of stable milling conditions.  Shut down after 10 minutes.

>>> 'ionmill' problem from rosal -- Fri Mar 23 11:58:28 1990 <<<

Cooling water line sprung a leak when the substrate cooling switch was
turned off.  The Argon flow was unstable and the gas flow controller
shut off a few times.  It would not last long enough to do milling.

>>> 'ionmill' problem from bob -- Fri Mar 23 14:54:11 1990 <<<

The o-rings in the rotary feedthrough for the substrate rotation
were replaced and lubricated. This should fix problems that 
were reported for poor argon control.

The proteus interlock plastic case fractured and our spare was installed.

The valves that control the fas into the machine are facing backward and 
need to be rotated.

The ionmill is tested and up. The valve rotation will be done next week.

The ionmill is up.

>>> 'ionmill' problem from bmartin -- Mon Apr  2 19:45:42 1990 <<<

Cryopump needs regeneration.  Turned off to let it warm up overnight.

>>> 'ionmill' problem from parrish -- Tue Apr  3 11:42:13 1990 <<<

problem:   cryo-pump reported to need regenerating

cause:     no cause was given,the compressor was turned off.

solution:  ran N2 for 2.5 hours and regenerated system
           cold-heah temp.18K chamber press.3x10-7
           system is up for use.

>>> 'ionmill' problem from parrish -- Tue Apr  3 12:43:05 1990 <<<

problem:   valves facing backwards

cause:     retighten of the valve block, no slot for the electrical connection

solution:  removed the base holding the valve block and machined in a slot for
           the electrical connection.

>>> 'ionmill' problem from bmartin -- Wed Apr  4 17:42:29 1990 <<<

Cryopump needs regeneration.  Turned it off to let it warm up.

>>> 'ionmill' problem from parrish -- Thu Apr  5 07:27:02 1990 <<<

update:   system is being regenerated and should be up by noon today.

>>> 'ionmill' problem from parrish -- Thu Apr  5 15:02:23 1990 <<<

problem:    system need regenerating

cause:      high base pressure

solution:   regenerated cryo-pump, system is up

>>> 'ionmill' problem from bmartin -- Thu Apr  5 20:31:19 1990 <<<

Three runs on the ionmill.  During shutdown procedure, the pressure
and the temperature of the cryopump were too high, so I turned off
the cryopump to allow it to warm up overnight.

>>> 'ionmill' fix from evan -- Fri Apr  6 16:07:49 1990 <<<

parrish has regenerated the cryopump.
ionmill is up

>>> 'ionmill' problem from rosal -- Fri Apr  6 18:30:12 1990 <<<

the the hydrogen bottle used for the torch is empty.

>>> 'ionmill' problem from kuchta -- Wed Apr 11 16:22:37 1990 <<<

high voltage unable to turn on due to problem with water flow interlock.
James Parrish is cognitive of the specifics of this problem
Dan

>>> 'ionmill' fix from parrish -- Fri Apr 13 07:58:34 1990 <<<

problem:    no high voltage

cause:      low water flow

solution:   adjusted water flow, interlock is working. 
