>>> 'hummer' problem from cleland -- Thu Feb  2 18:28:17 1989 <<<

It doesn't HUMMMM.... In other words, the high voltage indicator light
doesn't light up, the current meter doesn't register, the plasma doesn't 
ignite, and so on. 

>>> 'hummer' problem from evan -- Fri Feb  3 08:46:16 1989 <<<

problem: hummer high voltage not firing
cause:problem can not be recreated
solution: set up hummer by std. operating procedures. All went normally.
Hummer was left with HV control set at about 6. If this was the setting
used, it is too low to ignite plasma. If this was not the setting, I'm
not sure what might have happened.
The HV setting should be returned to 0 when leaving the machine.

Hummer is up.

>>> 'hummer' problem from bob -- Fri Feb  3 09:33:41 1989 <<<

The hummer had a broken HV wire at the chamber. This was fixed
by parrish early this AM after I requested he check the breaker.
This should have been reported on the wand ASAP howeve I was called
away and am reporting it now.
bob

>>> 'hummer' problem from phillip -- Tue Feb  7 14:12:57 1989 <<<

P: Mechanical pump motor has failed. Will not run on
   110 or 220vac. (This occurred as the machine was
   moved physically within the room it occupies.)
   It was running severely hot before the move.`

>>> 'hummer' problem from parrish -- Fri Feb 10 07:38:22 1989 <<<

problem:    motor on the mech-pump failed

cause:      bad bearings

solution:   replaced pump and motor with spare, system running (will have to
            repair or replace ole motor).

>>> 'hummer' problem from bob -- Fri Feb 17 07:38:29 1989 <<<

The mechanical pump on the hummer appears to be low on
oil. This report will be routed to parrish so he can check 
the level.

>>> 'hummer' problem from evan -- Thu Mar  9 11:57:18 1989 <<<

Completed 2 hr bake of pump trap.
hummer is up

>>> 'hummer' problem from evan -- Thu Mar 23 15:50:00 1989 <<<

hummer baked out for 2 hrs.

>>> 'hummer' problem from cleland -- Wed Apr 12 18:50:18 1989 <<<

Unable to pump to below 130mTorr in 20 minutes. I was careful to clean
the o-ring surface, to no avail.

>>> 'hummer' problem from evan -- Thu Apr 13 09:58:09 1989 <<<

I reseated the seal and got < 100mTorr but it seemed slow. I am baking out
the vacuum trap this morning.
hummer should be up after noon.

>>> 'hummer' problem from evan -- Thu Apr 13 14:58:54 1989 <<<

problem: chamber would not pump down
solution: baked vacuum trap for 2.5 hrs.  cleaned chamber top seal.
pumps down to < 50 mTorr in a couple of minutes
hummer is up and running

>>> 'hummer' problem from lyons -- Fri Apr 14 11:38:40 1989 <<<

pumps down very slow compared to a month ago.  seems to be 
somewhat related to the pressure control valve.  could not
get down to 100 mTorr.

>>> 'hummer' problem from evan -- Fri Apr 14 16:51:02 1989 <<<

replaced the pressure control valve with a spare from hummer in the
basement.  hummer pumps down to 80 mtorr.  it should get lower but
it might but outgassing from valve installation.  I will check it out
monday.  users may go ahead and try it over the weekend but I'm not
sure it will pump down.

hummer is up but iffy.

>>> 'hummer' problem from evan -- Mon Apr 17 16:15:58 1989 <<<

hummer still not pumping down and seems to be getting worse.  It
appears to be a problem with the pump.  I'll get parrish to check
it out on Tuesday.
hummer is down and out

>>> 'hummer' problem from evan -- Tue Apr 18 11:50:27 1989 <<<

the pump is receiving servicing from parrish.  It will be back up soon.

>>> 'hummer' problem from parrish -- Tue Apr 25 14:20:59 1989 <<<

problem:    chamber pressure at 200 mT 

cause:      mech-pump shaft seals leaking

solution:   replaced pump, system up 

>>> 'hummer' problem from kim -- Thu Apr 27 11:54:08 1989 <<<

The gold strips are not covering the whole target in the Hummer.

>>> 'hummer' problem from bob -- Mon May  1 14:50:22 1989 <<<

Gyula replaced the gold on the hummer target. It is operational.
There is not full coverage however the substrate is Al and does
not sputter. The hummer is up for use.

>>> 'hummer' problem from lyons -- Mon May  8 12:34:29 1989 <<<

I could not get a plasma going in the hummer.  The power
supply appears to have something wrong with it.  The light
would flicker on and off and I could not ever get any 
current on the gauge, although it would flicker.  It may
just be a switch problem, I'm not sure.

>>> 'hummer' problem from evan -- Mon May  8 13:26:39 1989 <<<

problem: no plasma
cause: high voltage cable disconnected
solution: reinserted banana plug into power supply

hummer is up and humming

>>> 'hummer' problem from jimmoon -- Tue May  9 21:57:09 1989 <<<

Extremely lousy contrast, as Tom said.  Sort of like looking
at a polar bear in a snowstorm.

>>> 'hummer' problem from jimmoon -- Tue May  9 21:59:01 1989 <<<

Disregard previous message.  It was intended for the cssem.
There is no problem with the hummer.

>>> 'hummer' problem from hebert -- Thu Jun  8 17:33:08 1989 <<<

The high voltage doesn't turn on. I can't coat SEM samples with
gold.

>>> 'hummer' problem from evan -- Fri Jun  9 10:06:57 1989 <<<

problem: no RF
cause: broken circuit breaker
solution: replaced control box with spare. Broken one will be repaired 
when I can locate a 1 amp breaker.

hummer is up

>>> 'hummer' problem from evan -- Wed Aug  2 18:21:16 1989 <<<

Trap has been baked for 5 hrs. Base pressure is < 20 mTorr.

>>> 'hummer' problem from evan -- Tue Sep  5 11:59:15 1989 <<<

Trap baked for two hours. 

>>> 'hummer' problem from evan -- Wed Nov 22 14:09:31 1989 <<<

Trap baked for two hours.
hummer is up

>>> 'hummer' problem from evan -- Thu Dec 14 11:54:53 1989 <<<

Baked trap for 2 hrs.

>>> 'hummer' problem from evan -- Tue Jan  9 16:54:48 1990 <<<

trap baked for 3 hours.

>>> 'hummer' problem from voros -- Tue Feb  6 16:01:56 1990 <<<

symptom problem on hummer from voros (06-feb-1990 15:57)

User Comments:
Does not pump down. Test - ignore.

>>> 'hummer' problem from voros -- Tue Feb  6 16:05:58 1990 <<<

symptom problem on hummer from voros (06-feb-1990 15:57)

User Comments:
Does not pump down. Test - ignore.

Diagnosed as fault (Equipment fault) by voros (06-feb-1990 16:05:30)

Comments from voros at 06-feb-1990 16:05 :
fixwd, machine is up

>>> 'hummer' problem from tom -- Wed Feb 21 11:57:17 1990 <<<

Would not pump down below ~150 mTorr. 

>>> 'hummer' problem from parrish -- Wed Feb 21 14:19:49 1990 <<<

problem:     chamber pressure at 150 mtorr

cause:       roughing-pump pumping at high pressure, proberly bad seal

solution:    removed pump and replaced with a spare. foretrap is being
             bakeout.

>>> 'hummer' problem from bob -- Wed Apr  4 15:18:19 1990 <<<

The High Voltage fails to come on. Hummer down until fixed.

>>> 'hummer' fix from evan -- Fri Apr  6 15:55:20 1990 <<<

problem: no high voltage
solution: reseated all cables and plasma ignited with no problem

baked trap for 2 hours.
hummer is up

>>> 'hummer' problem from raicu -- Tue May  8 14:16:47 1990 <<<

The base pressure is about 80 millitorr and sometimes increases.
There may be a leak.
