>>> 'heatpulse1' problem from gian -- Tue Jan 10 15:10:58 1989 <<<

The drawer does not move in smoothly.  I have not used the machine
since it was reinstalled, but the drawer used to move in much more
smoothly.

By the way, I noticed there was a calibration chart for the gas
flow at a standard pressure. Is this pressure (14.7psi) to be measured
at the gas cylinder, or at the intake to the flow meter. I notice
also there is a check valve marked "1 psi".  I expect that this causes
a 1 psi drop in the line so it is important to know how the flow
meter was calibrated.

-David

>>> 'heatpulse1' problem from rnorman -- Thu Jan 12 11:46:02 1989 <<<

Problem: The drawer doesn't move in smoothy.

Solution: I check out the heatpulse and the drawer is not real smooth,
          but it is not a problem. A tie-wrap was hitting on something;
          the wrap was rotated and doesn't hit anymore. The HP1 is up.

>>> 'heatpulse1' problem from rnorman -- Wed Jan 18 16:46:31 1989 <<<

The HP! will be down to install a "T" type thermocouple.

>>> 'heatpulse1' problem from hing -- Fri Jan 20 13:02:28 1989 <<<

the new thermal couple burned at 900c. I put in another
one. It simply does not work. Give up.

>>> 'heatpulse1' problem from rnorman -- Fri Jan 20 14:09:16 1989 <<<

Problem: New TC burned out.

Cause: TC wires touching or not made properly.

Solution: Installed another "home made" T-type thermocouple and tested.
          Tested at 800~C with no problem. The hp1 is up.

>>> 'heatpulse1' problem from weijie -- Fri Feb 17 22:28:11 1989 <<<


Pen for the plotter is running out of ink. 

>>> 'heatpulse1' problem from rnorman -- Tue Feb 21 13:01:07 1989 <<<

There is an extra plotter pen on top of the chart recorder when the other
goes out or low. We will have a new TC comming in on thursday; I beleave
this is what is causing the temp control error at 1200~C. 

NOTE: Usage at or below 1000~C has not problems, just above 1100~C.

>>> 'heatpulse1' problem from rnorman -- Fri Feb 24 13:49:14 1989 <<<

I have been informed by SensArray that out Thermocouple was lost again and
will be here on tuesday, 2/28. After which I will install it, in
hope to reach temps. at 1200~C.

Note : The hp1 is operational below 1000~C.

>>> 'heatpulse1' problem from voros -- Thu Mar 23 07:56:40 1989 <<<

test

>>> 'heatpulse1' problem from weijie -- Sat Apr  1 16:02:26 1989 <<<


It shows " interlock open " when you do the annealing. 
This may be related vaccum system or something like that,
because all the sinks are down at this time.

>>> 'heatpulse1' problem from dchin -- Mon Apr 17 23:37:52 1989 <<<

 It gives me "interlock open" messege consistently. I tried to
close the door more tightly and make sure that the connections are OK.
But nothing works. I wasted good one hour on it.

A frustrated lab user

>>> 'heatpulse1' problem from bob -- Tue Apr 18 09:51:19 1989 <<<

Checked over heatpulse1. Unit down due to tripped breaker. 
Only 208v was lost therefore panel lights remained on. 
Reset breaker and ran lamps in maual. Everything seems 
OK. I will cc this message to dchin and ask him to repeat 
his automatic program and report of there are problems. 
The heatpulse is up, tested in the manual mode only.
. 

>>> 'heatpulse1' problem from bill -- Tue May  9 11:23:19 1989 <<<

I noticed that the plastic housing around the door
needs to reattached - it has almost completely
fallen off.
It will need to be screwed on rather than held
with adhesive pads in the future.
Robert Norman is familiar with the problem.
I don't know why the last user did not report the trouble -
I will ask.

>>> 'heatpulse1' problem from qian -- Wed May 10 16:57:49 1989 <<<

The plastic door was off, which needs to be fixed.

>>> 'heatpulse1' problem from rnorman -- Thu May 11 09:37:38 1989 <<<

Problem: Plastic door very loose, falling off.

Solution: The door was removed and holes were drilled in both
        the door assemble and the heatpulse frame. The plastic
        door was then mounted with screws onto the heatpulse frame.
        The hp1 is now ready for use.

>>> 'heatpulse1' problem from bill -- Fri May 19 16:35:59 1989 <<<

Thermocouple not reading correctly.
Robert and I did some thermocouple comparisons and had
no trouble.

I did a number of tests with the tc and tc calibrator hooked
up and had good agreement and no trouble.

I disconnected the calibrator, and now the tc reads as if
the wires have been reversed - yet I checked a number
of times and the tc wires are correct ?

I will discribe the situation further to Robert on Monday.
Do not use the heatpulse until then

>>> 'heatpulse1' problem from rnorman -- Mon May 22 07:44:06 1989 <<<

Problem: It is reading like the tc wires are reversed.

Cause: Once the wires are connected to the connector, if the connector is
       not pluged into the TC Box all the way the readout will we negitive;
       like an open TC.

Solution: The TC wires were connected right, so I tightened them down
          and pushed the connector fully into the TC Box. A temperature was
          set at 300~C and the TC was tested. The hp1 is up.

>>> 'heatpulse1' problem from gian -- Wed May 31 15:10:54 1989 <<<

The thermocouple is not bonded (broken off) the backside of the wafer.

>>> 'heatpulse1' problem from bob -- Fri Jun  9 09:20:45 1989 <<<

RObert will attempt to recement the tc in the heatpulse1. A new tc
is on order but has not arrived. Reasons for the high rates are
likely to be solved by requiring users to purchase tc's for processes
that operate at the upper extremes for this machine. A report will
be sent as to progress with the loose tc and at the arrival of a 
spare.

>>> 'heatpulse1' problem from rnorman -- Mon Jun 12 10:34:26 1989 <<<

The ceramic cement for the thermocouple bond to the wafers was dry; I
could not repair the SensArray TC.  I will order more ceramic cement
to repair the TC.  The old style T-type TC will be installed; it was
found out that this type of TC is about 70~C low in temperature,
see Bill Flounders comments.

>>> 'heatpulse1' problem from rnorman -- Wed Jun 14 15:30:32 1989 <<<

Problem: SensArray TC broke.

Solution: The SensArray TC was removed for repair and 
          a T-type TC was just now installed.  I ordered some
          ceramic cement to repair the SensArray and when repaired
          I will reinstall it.  The HP1 is up for use.

     NOTE:  This T-Type TC that is installed is 70~C off above 
            600~C.  At 1000~C it was 70~C lower then the SensArray.

>>> 'heatpulse1' problem from qian -- Fri Jun 16 14:07:53 1989 <<<

The temperature is unknown, may be 100 C off.

>>> 'heatpulse1' problem from rnorman -- Fri Jun 16 15:01:09 1989 <<<

The temperature at this time is unknown and may be off by as much as 
110~C, but not much more then that.  Monday I will be getting a new
"T-type" TC from AG and will be installed ASAP. USE AT YOU OWN RISK.

>>> 'heatpulse1' problem from qian -- Wed Jun 21 20:40:44 1989 <<<

A new thermal couple is needed. Otherwise it works fine.

>>> 'heatpulse1' problem from rnorman -- Thu Jun 29 08:51:35 1989 <<<

I have called Ag and the thermocouple we ordered, T-type, will be shipped
out friday. When I receive it on monday it will be installed.

>>> 'heatpulse1' problem from rnorman -- Wed Jul  5 12:04:55 1989 <<<

Problem: No TC for the heatpulse1.

Solution: A TC arrived for the HP1 and it was installed and tested.
          The heatpulse1 is up for use.

>>> 'heatpulse1' problem from gian -- Sat Jul  8 10:08:37 1989 <<<

The thermocouple has peeled away from the silicon chip, resulting in
erratic temperature control.

Also, some previous user failed to replace the cap on the chart recorder
pen.  

>>> 'heatpulse1' problem from qian -- Sat Jul  8 16:04:05 1989 <<<

a new TC is needed.

>>> 'heatpulse1' problem from rnorman -- Fri Jul 28 07:19:29 1989 <<<

Problem: No thermocoupl readout.

Cause: None installed.

Solution: I install a "T"-type TC, but it is not calibrated.
          The SensArray Calibration TC is on the shelf above
          the heatpulse1, this will ONLY be used for calibrating TC.
          (Thanks David for the TC)  The hp1 is up.

>>> 'heatpulse1' problem from qian -- Fri Aug 25 10:28:12 1989 <<<

I noteced a negative temperature reading, an indication of broken TC.

>>> 'heatpulse1' problem from rnorman -- Mon Aug 28 14:24:19 1989 <<<

Problem: Negative temperature reading.

Cause: The TC was not connected well to the screw contacts in the chamber.

Solution: The TC was tested and no problem was found, then it was reconnected
          and worked fine.  The chamber was ran to 400~C and operated well;
          the hp1 is up.

>>> 'heatpulse1' problem from gian -- Wed Aug 30 10:37:26 1989 <<<

Thermocouple appears to be intermittant and should be replaced before
use. (I used the heatpulse for a demo only).

>>> 'heatpulse1' problem from rnorman -- Wed Aug 30 11:03:26 1989 <<<

Problem: TC readout is intermittent.

Cause: One on the TC wire got pushed against the metal frame
       causing the readout to be intermittent.

Solution: The excess TC wire was cut to the proper length.
          The heatpulse1 was tested and is up.

>>> 'heatpulse1' problem from kim -- Thu Oct 26 10:41:42 1989 <<<

Problem:  While I was running the third dummy run, the temp. had
          a negative read out.

>>> 'heatpulse1' problem from kim -- Fri Oct 27 09:47:37 1989 <<<

By tapped the digital readout as suggested by Jim Moon, the temp. read 
out went back to positive.  The left bottom knob for closing the chamber door 
couldn't lock.

Kim

>>> 'heatpulse1' problem from rnorman -- Mon Oct 30 08:29:08 1989 <<<

Problem: Intermittent readout; sometimes shows a negative temp.

Cause: The TC was intermittent.

Solution: A new TC was installed and tested.  The hp1 is up.

>>> 'heatpulse1' problem from bill -- Tue Nov  7 14:39:00 1989 <<<

I qualified Boom-Kim Liew today.
I watched to assure that the door was closed correctly -
but we still had a very strong ammonia smell in the VLSI.

Also the "drawer" does not slide smoothly any more
and the door nuts do not always hold.

I know that this system is poorly designed and has
been a frequent headache - but I have used NH3 before
and never had any smell in the lab.

I told him to go ahead with non NH3 processing
and that I would report the problems.

>>> 'heatpulse1' problem from bill -- Tue Nov  7 14:57:17 1989 <<<

Recommendations to solve previously reported problems :

1) The chamber could use a cleaning - just removing it
   and reinstalling it should serve to solve most of the
   drawer and door problems - it's been over 8 months
   since the last chamber clean.

2) Please update the activation message to include either
    a) a restriction on NH3 use or
    b) a reminder to load and unload in inert ambients only.

>>> 'heatpulse1' problem from rnorman -- Wed Nov  8 11:17:54 1989 <<<

Problem: NH3 leak and dirty chamber.

Solution: The chamber was removed and cleaned in HF/H20.  The sticky
        door was caused by a loose screw that was tightened up. Also
        one of the latches on the door was not locking in place, due to
        the locking tab broke; the tab was temporarily fixed, but a new one
        will need to be ordered.  I ran NH3 for a test and no leak was
        noticed, enless you open the exhaust box door while NH3 is in the
        chamber.  NOTE: The exhaust box was put on for a reason to confine
        leaking NH3.  DO NOT OPEN THE BOX WHEN NH3 IS IN USE!!  Purge with
        N2 at least 2-3 minutes after NH3 use; this is for your safety and
        others in the VLSI.  The hp1 is up.

>>> 'heatpulse1' problem from kim -- Fri Dec 15 13:15:20 1989 <<<

Problem:  I annealed ZnO today.  R. Norman will clean the chamber
          for the contamination.

>>> 'heatpulse1' problem from rnorman -- Mon Dec 18 09:51:36 1989 <<<

Problem: The chamber was dirty/contaminated.

Cause: User annealed ZnO, per Katalin's OK.

Solution: Removed the chamber and cleaned in HF.  The chamber
          was installed and tested.  The HP1 is up.

>>> 'heatpulse1' problem from seh -- Wed Jan 24 13:19:32 1990 <<<

Did three runs, 3 minutes at 1000C plus a couple of test runs with Bill.
Did a 1100C, 30 second run during which the sensarray t.c. failed.
The connecting wire near where the wire comes out from under the wafer
is visibly vaporized.

>>> 'heatpulse1' problem from rnorman -- Thu Jan 25 10:48:51 1990 <<<

Problem: T.C. failed

Cause: TC fried on the substraight wafer, sensarry.

Solution: The SensArray TC was repaired by spot-welding the wire
          back together.  Also, a new T-type TC was made and installed.
          The hp1 was tested and is up for use.

>>> 'heatpulse1' problem from liang -- Tue Feb 20 20:27:30 1990 <<<

Someone did not close all three volve on both Ar bottle and 
the flow meter,  the heatpulse is run out of Ar gas now. 
I use NH3, so no problem for me, but next user may want to use
Ar, so please replace.

>>> 'heatpulse1' problem from rnorman -- Wed Feb 21 13:10:23 1990 <<<

Problem: Ar bottle empty and possibly a leaky regulator valve.

Solution: Evan must have replaced the bottle because a full one
          is now there.  I cheched out the valve and it is not 
          leaking.  The hp1 is up.

>>> 'heatpulse1' problem from rnorman -- Fri Mar 23 12:51:07 1990 <<<

The heatpulse1 will be down for a chamber clean.

>>> 'heatpulse1' problem from rnorman -- Fri Mar 23 14:21:14 1990 <<<

Problem: Chamber contaminated with GaAs with Katalin's OK.

Solution: The chamber was removed and clean with HF and H2O.
          When the chamber was installed and new TC was installed.
          The hp1 was tested and is up with a clean chamber.
 

>>> 'heatpulse1' problem from qian -- Tue Mar 27 12:36:56 1990 <<<

I didn't use it. Could you change the chamber for Si?
