>>> 'gcaws' problem from carlos -- Mon Jan  2 23:34:11 1989 <<<

terminal is busted
air conditioning failing again

>>> 'gcaws' problem from bob -- Tue Jan  3 10:28:55 1989 <<<

The gcaws is down for major service. It will require 3 days for this
previously scheduled maintenance, 1-3,4,5-89. It will not be useable
during this time.

>>> 'gcaws' problem from tom -- Fri Jan  6 18:17:21 1989 <<<

Problem: Major PM by Steve Hurtado.

Solution: Done.

>>> 'gcaws' problem from tom -- Mon Jan  9 13:50:47 1989 <<<

The wafer is not placed correctly by the fwafer handler.  Your alignment
mark does not come up in the field of view and the rotation is not enough.
The alignment mark is about 1 mm out .

>>> 'gcaws' problem from tom -- Mon Jan  9 16:22:57 1989 <<<

Problem: Alignment marks do not come up and rotation way out.

Cause: Overhaul by Steve Hurtado.

Solution: Adjusted theta and X-Y loading offset.

>>> 'gcaws' problem from tom -- Mon Jan  9 16:29:08 1989 <<<

See above.

>>> 'gcaws' problem from jiahua -- Thu Jan 12 10:33:47 1989 <<<

?
The camera can't be used.

>>> 'gcaws' problem from tom -- Thu Jan 12 10:43:48 1989 <<<

Problem: User reports the camera for aligning the mask doesn't work.

Cause: Camera not turned on.

Solution: Turned on camera.  It takes a minute to warm up.

>>> 'gcaws' problem from hoagland -- Tue Jan 17 16:41:18 1989 <<<

Due to overall user dissatisfaction with resolution the camera
on the stepper was removed and the original eyepiece restored.

>>> 'gcaws' problem from eskim -- Wed Jan 18 19:17:40 1989 <<<

The micromanipulator does not come down to grab the mask when
the spindle lock is rotated clockwise with vacuum off.
Did not force the lock further according to the instruction
on the wall next to GCA WS.

>>> 'gcaws' problem from marilyn -- Thu Jan 19 08:40:22 1989 <<<

Problem: A user reported that the micromanipulator failed to "grab"
         the mask for fine alignment.
Cause: Spindle lock "manhandled" and, therefore, not as responsive.
Solution: Aligned a test mask; micromanipulator OK now.

>>> 'gcaws' problem from hoagland -- Mon Jan 23 09:58:20 1989 <<<

The lamp on the stepper has been changed out and the replacement is
now burning in.  First level exposures are available today and upper
level use will be possible tomorrow after the new lamp has stabilized.

>>> 'gcaws' problem from marilyn -- Tue Jan 24 09:04:08 1989 <<<

Problem: digital VT100 screen printing "garbage" after wafer was
         exposed.

>>> 'gcaws' problem from marilyn -- Tue Jan 24 10:01:30 1989 <<<

Problem: Digital VT100 printing garbage on screen after wafer exposure
Cause: brief glitch
Solution: self-correcting/screen returned to normal

>>> 'gcaws' problem from eskim -- Fri Feb  3 16:11:06 1989 <<<

There seems to be some dirt on the lense for 10:1 reduction in GCA WS.
I get random shaped pattern on my wafer on every die in two wafers.
It is the second consecutive time that the shape appears on the wafers.
It happened last week, too.  
I checked the mask very carefully, and have not noticed any thing strange.

>>> 'gcaws' problem from marilyn -- Mon Feb  6 10:34:37 1989 <<<

Problem: LOW WAFER VAC light comes on when the wafer is on the chuck
         (before expose); system will not recover.

>>> 'gcaws' problem from marilyn -- Mon Feb  6 11:09:12 1989 <<<

Problem: weekend user reported that an irregularly shaped dirt
spot appeared on two separate wafers after expose/develop.
Solution: used the nitrogen gun to blow off the 10X reduction
          lens, plus cleaned the platen with methanol.

          exposed one wafer with a test mask
          examined wafer after develop
          no irregular "dirt" spot was visible

>>> 'gcaws' problem from tom -- Mon Feb  6 13:42:23 1989 <<<

Wafer chuck has problems.  The vac. alarm goes off when the wafer is placed
on the chuck 
and while this can be bypassed by switching off the vacuum for a second
the almt marks are not in focus at the same time and the pattern printed
is bad on one side of the wafer.  All this points to a problem with the
chuck, possibly a burr on it that needs to be polished off.  The wafer
doesn't seem to be flat on the chuck for some reason but I could not
see anything wrong with the chuck by visual inspection.

>>> 'gcaws' problem from bob -- Mon Feb  6 14:43:58 1989 <<<

Marilyn could not reproduce the vacuum problem with the wafer stepper.
It is know operating OK. If further problems are reported, they will
be looked into.
bob

>>> 'gcaws' problem from hoagland -- Thu Feb  9 16:56:20 1989 <<<

An important note about the VT100 on the stepper- after the
stepper is booted the console will not display ascii characters for several
minutes, just unintelligible symbols.  When everything has warmed up 5 or 10
minutes the terminal works normally .  At some point when time permits
the problem will have to be isolated and repaired.

>>> 'gcaws' problem from lsfan -- Sat Mar 18 03:14:16 1989 <<<

micromanipulator doesn't work.

>>> 'gcaws' problem from marilyn -- Mon Mar 20 08:23:53 1989 <<<

Problem: User reported that the micromanipulator does not lower
         onto the mask
Cause: Spindle lock not turned far enough
Solution: The spindle lock has to be turned much harder than usual
          in order for the micromanipulator to lower onto the mask.
          Most frequent gcaws users are aware of this.

>>> 'gcaws' problem from marilyn -- Wed Apr  5 15:02:38 1989 <<<

Problem: wafers will not exit the send cassette when a job is
         EXECuted.  The wafer stepper terminal displays the
         message that the end of the carrier has been reached.

>>> 'gcaws' problem from moazzami -- Wed Apr  5 17:06:33 1989 <<<

'floating wafer' syndrome: wafers float above the chuck after
leaving send cassette causing automatic wafer handler timeout.
Had to manually force wafers to stay on the chuck.
Wafer stepper still works but keep a tweezer handy.

>>> 'gcaws' problem from marilyn -- Thu Apr  6 16:34:24 1989 <<<

Problem: "Floating wafer syndrome" whereas wafers leaving the send
          cassette float above the prealign chuck
Cause: Intermittent
Solution: Self-correcting; this did not occur to anyone today.

>>> 'gcaws' problem from martin -- Wed Apr 12 23:46:40 1989 <<<

AWH is having problems
"AWH time out" 
"press continue when ready"
This occurs after each wafer is exposed and the next one is to
be loaded.  
When continue is pressed wafer is then transferred onto the stage
and exposed.

>>> 'gcaws' problem from bob -- Thu Apr 13 09:41:55 1989 <<<

Kim Chan is using the gcaws and will report on the AWH time out
problems reported by martin.

>>> 'gcaws' problem from kim -- Thu Apr 13 10:04:40 1989 <<<

AWH times out and it doesn't pick up wafers.

>>> 'gcaws' problem from hoagland -- Thu Apr 13 10:37:41 1989 <<<

problem:  User reports AWH will not pick up wafer.

cause:  Rejected Wafer has no major flat.  AWH requires major
        flat to position wafer prior to pick by TA arm.

solution:  AWH cannot be adjusted to compensate for this problem.
           Wafer must be manually loaded onto stage.

>>> 'gcaws' problem from eskim -- Tue Apr 18 18:18:23 1989 <<<

A huge systematic shift in y-direction occurs when a second-layer
is exposed with alignment to a first-layer.  The error is about
2 mm!!
One strange thing noted was that the alignment marks on a wafer
did not come out on the monitor after the wafer is loaded into
the chuck.  I had to move the wafer about 2 mm in y-direction just
in order to view the alignment marks.  It never happened before.

>>> 'gcaws' problem from marilyn -- Wed Apr 19 09:14:31 1989 <<<

Problem: Large shift in Y direction
Soluion: A baseline correction brought it back into line

>>> 'gcaws' problem from marilyn -- Wed Apr 19 13:04:44 1989 <<<

Problem(s): AWH time-outs
            wafers are not sent into receive cassette with enough
            force, thereby causing more time-outs

>>> 'gcaws' problem from mats -- Fri Apr 21 22:59:00 1989 <<<

Several of my wafers got stuck on the edge of the loading track at the
alignment chuck. I. e. they were almost but not quite on the chuck, so
when the chuck lowered, they caught on the edge.

>>> 'gcaws' problem from mats -- Thu Apr 27 16:35:38 1989 <<<

(This is not a new problem, I suspect that it has been true for years.)
  The automatic coarse alignment (on the alignment chuck) doesn't really
align the wafer with the major flat parallel to the stepper coordinate
system, it is off by several degrees. This is a problem for sensor makers
using anisotropic etching.

  Until it is fixed, it may be a good idea to purposely "misalign" the first
layer in the +theta direction by 60-70% of the full range, using the
joystick.

      Mats

>>> 'gcaws' problem from martin -- Mon May  8 15:42:14 1989 <<<

Encountered two problems:

1)  Low wafer vacuum:  wafer is not placed on chuck/stage
                       
	a) checked back of wafers -  wafers are ok
        b) check whether vacuum switc is on - cacuum is on
        c) check to see if there is any debris on chuck - did not notice
           anything on chuck

2)  VDT for wafer alignment is scrolling; picture is distorted and
    vertical hold needs to be adjusted

    These two problems deem the wafer stepper inoperatable.

>>> 'gcaws' problem from carlos -- Tue May  9 02:49:12 1989 <<<

There is no video at all in the monitor. \

>>> 'gcaws' problem from hoagland -- Tue May  9 17:29:30 1989 <<<

The stepper is up for production.  Details regarding it's repair
will be posted tomorrow.

>>> 'gcaws' problem from hoagland -- Wed May 10 08:57:56 1989 <<<

problem:  Video display on alignment monitor dead.

cause:  Video display failed due to high voltage shutdown caused by
        blown fuse(F2) in horizonal scan section.  This monitor has a
        separate HV supply rather than flyback circuit.  Fuse blew
        due to noise on video signal which disrupted horizonal sync
        signal.  Monitor should run without sync, minus high voltage
        (there are no free running sweep oscillators).  Apparently a
        user reached up and powered the video chassis off/on hoping to
        correct another video problem, which killed the monitor.  To
        prevent this from happening again(fuse failure caused by sync loss
        was verified) F2 was increased from .5A to .75A .  Original video
        distortion was caused by noisy 12V supply in video chassis.  

solution:  Replace F2 in video monitor.  Replace C1 and C2 in zener
           reference circuit of 12V supply in video chassis.  The stepper
           is up for use.
        

>>> 'gcaws' problem from bob -- Fri May 12 08:24:06 1989 <<<

The N2 blow off gun on the gcaws had a new antistatic device installed this
AM. This renews the service of this gun for another year.

>>> 'gcaws' problem from jchung -- Fri May 19 16:20:19 1989 <<<

The gcaws was reporting low vacuum error even though the
lab vacuum pressure was high and all wafers were properly seated.
This error made alignment impossible.
After consulting with Steve Hoageland, it was determined that
the sensor circuit for the low-vacuum detection was faulty.
The sensor circuit was disconnected.
This disconnection will not have any effect on normal gcaws usage.

>>> 'gcaws' problem from tang -- Fri May 19 21:53:43 1989 <<<


The gcaws never got to the exposure step. Every step along the
way it stopped and asked for pressing Start/Continue. And then
it freezed up after the wafer got on the platform. Not usable.
The warning light about low wafer vac was not on, though.

>>> 'gcaws' problem from hoagland -- Mon May 22 13:03:49 1989 <<<

problem:  Stepper will not expose wafers.  AWH displays multiple
          retry/timeout errors.

cause:  Vacuum sensor for wafer chuck misadjusted.  
        Disabling vacuum switch allows wafers already on the 
        chuck to be exposed, but prevents new ones from being
        loaded.

solution:  Readjust chuck vacuum sensor.  Set screw on sensor
           was rotated 3/4 turn CCW.  Six test wafers were
           exposed without incident: the stepper is up for use.

>>> 'gcaws' problem from martin -- Wed Jun  7 21:33:41 1989 <<<

no light source for alignment.
Nothing appears on VDT, not even the alignment guides
I believe VDT is ok.

gca operational only for first level!

>>> 'gcaws' problem from marilyn -- Thu Jun  8 08:52:22 1989 <<<

Problem: user reported that the alignment marks did not show on the
         VDT terminal
Cause: lamp on button box turned off (counterclockwise)
Solution: lamp turned on (clockwise)

>>> 'gcaws' problem from marilyn -- Mon Jun 12 11:45:03 1989 <<<

Problem(s): Receive cassette not indexing properly; there's one 
            space between each wafer
            An occasional wafer will be dropped by the AWH at the
            rear of the platform
            A "time-out: then occurs.

>>> 'gcaws' problem from robin -- Fri Jun 30 10:08:44 1989 <<<

Temp by stepper quite high.  Alignment was poor.  Gave up, assuming
problems due to temp instability.

>>> 'gcaws' problem from mikeb -- Tue Jul 18 12:56:09 1989 <<<

gcaws may need a new baseline correction.  My alignment was >1 um off today.

>>> 'gcaws' problem from field -- Thu Jul 20 11:25:35 1989 <<<

got a "low wafer vac" problem with one of my two wafers.

>>> 'gcaws' problem from martin -- Thu Jul 20 13:35:10 1989 <<<

exit arm does not pick up wafer.
Exposed wafer remains on chuck waiting for incoming wafer to scratch it
operate at one's opwn risk!!

>>> 'gcaws' problem from hoagland -- Thu Jul 20 17:00:54 1989 <<<

The stepper receive transfer arm appears to have been bent slightly
causing the wafer to drag across the chuck as it is removed.
I adjusted the receive paddle set screws to minimize this effect
for the time being.  Tomorrow adjustments will be made on the 
transfer arm to correct this problem permanently.  The stepper
is up and working- the transfer arm should work OK.

>>> 'gcaws' problem from hoagland -- Fri Jul 21 15:27:52 1989 <<<

problem:  Stepper receive transfer arm bent; edge of wafer paddle 
          facing user bent down enough to scrape wafer on chuck
          as it is removed.  Send wafer paddle is level.

cause:  User stepped on transfer arm?  Arm is cast metal and would
        require significant force to bend.

solution:  A mica washer was bent in half and inserted between the
           arm and paddle to shim the high side.  Paddle is now 
           level.  Paddle clearance over chuck was reduced slightly 
           but a 25 mil wafer still fits cleanly under paddle on
           chuck.  A test run of 2 dozen wafers was exposed on the 
           stepper without a single hangup- the stepper is up and 
           available for use.

>>> 'gcaws' problem from hoagland -- Mon Jul 24 10:57:26 1989 <<<

At SVA's suggestion the send and receive wafer tracks were
checked for levelness to verify that the motor driving the T/A
arm is not skewed.  Both tracks measured very near level and could
not tilt the T/A arm sufficiently to effect wafer transfer.
At James convenience, a precision allen set needs to be utilized to
size the TINY set screws which set the front back inclination of the
wafer paddles(opposed to side to side). Should be a 1-72 or 0-80?
When sized these set screws need to be replaced with socket head
or button head screws for ease of adjustment.  The stepper is up
and available for use.

>>> 'gcaws' problem from jimmoon -- Wed Jul 26 07:44:37 1989 <<<

It seemed to be having difficulty with the pre-alignment.
Wafers would slide down the track to the pre-alignment chuck
then spin until the program timed out (AWH TIMED OUT).
The last several wafers ran through smoothly, though, so
perhaps the problem has resolved itself.  (There wasn't anything
unusual about the wafers themselves, since the last several wafers
that ran smoothly had timed out previously.)

>>> 'gcaws' problem from gian -- Thu Aug  3 12:58:11 1989 <<<

There is a string coming out of a black box mounted on the
right front side of the stage.  I am concerned that it might
find its way into the stage mechanism.  I have no idea what the string
is from, and hesitate to pull it out.

>>> 'gcaws' problem from hoagland -- Thu Aug  3 16:47:39 1989 <<<

A belt driving the wafer chuck theta motion assembly disintegrated
today.  To permit continued use of the stepper 2 rubber bands have
been installed in it's place, until a new belt arrives next week.
The stepper remains usable, with a somewhat more difficult theta
adjustment of the wafer stage.

>>> 'gcaws' problem from carlos -- Wed Aug  9 21:49:59 1989 <<<

The gcaws has a lot of trouble locating the flat of the wafer. It 
keeps rotating until a time out error occurs. I need to push the
start/continue button several times (through several time-out erros)
until it finally finds the flat.

>>> 'gcaws' problem from jimmoon -- Thu Aug 10 11:11:01 1989 <<<

Same as Carlos -- wafers get on the merry-go-round at the pre-alignment
chuck and the stepper times out.  Repeated use of the S/C button
was eventually successful in all cases.

>>> 'gcaws' problem from hoagland -- Thu Aug 10 17:16:10 1989 <<<

Normally the wafer handler centers the wafer on the pre-alignment
chuck before seeking a flat.  All wafers I tested on the machine
today were centered and loaded without difficulty.  Two possible
causes for timeout of the flat finder might be failure to center
the wafer before seeking a flat(AWH out of sequence), or a wafer 
bouncing off the pre-alignment spindle due to excess send track speed.
The track air pressure was reduced to 18 PSI from 24 PSI in the hope 
this may slow the wafers down somewhat.  Tomorrow more wafers will
be tested to determine if the AWH is not operating properly.  The 
stepper remains up and available for use.

>>> 'gcaws' problem from carlos -- Fri Aug 11 06:16:34 1989 <<<

theta alignment nearly impossible

>>> 'gcaws' problem from rnorman -- Fri Aug 11 07:30:21 1989 <<<

The lamp has been turned off and will be replaced after cooling.

>>> 'gcaws' problem from hoagland -- Fri Aug 11 13:39:26 1989 <<<

The belts for theta adjustment were mailed to us August 9
from San Carlos.  One will be installed the moment they
arrive, hopefully later today or Monday morning.

>>> 'gcaws' problem from hoagland -- Fri Aug 11 16:28:09 1989 <<<

A new belt has been installed on the wafer chuck theta 
adjustment assembly.  The stepper is up and available for
use.

>>> 'gcaws' problem from carlos -- Tue Aug 22 13:04:27 1989 <<<

the exit arm does not pick up my wafer (bare Si with 3 layer PR)
and when the other end of the arm reaches the chuck, it scratches
my wafer.

>>> 'gcaws' problem from marilyn -- Fri Sep  1 10:06:40 1989 <<<

Problem: The gcaws gives a "time-out" after the pre-align step
          at the chuck (after the AWH has found the wafer flat.)
         The machine is technically UP, but this error makes
         exposing wafers time-consuming and tedious.

>>> 'gcaws' problem from hoagland -- Fri Sep  1 15:17:31 1989 <<<

problem:  Flat finder on AWH failing to find flat; leads to
          repeated timeouts.

cause:  Flat finder card in AWH chassis out of adjustment(AW21).
       
solution:  R52 on AW21 tweaked so TP3 reads 16V with no wafer on
           prealign chuck(was at 15V before).  This will require
           further adjustment in the future most likely, but the
           flat finder seems to work fine now.  The stepper is up
           and available for use.

>>> 'gcaws' problem from wongm -- Tue Sep 19 09:12:32 1989 <<<

Problem: Omniprise Controller showing Error # 1:
         Airflow reduced or blocked; damper disconnected.

         Chamber temp. is rising; set point is 20.5, but the
         temp. is 21.8

>>> 'gcaws' problem from wongm -- Tue Sep 19 09:18:18 1989 <<<

Was unable to use.  See problem report.

>>> 'gcaws' problem from rnorman -- Tue Sep 19 09:51:02 1989 <<<

Problem: Error #1, air flow reduced.

Cause: There is some maintenance being done on the  hood fans located
       on the roof, this effects air flow of the gcaws and other equipment.

Solution: Marilyn will reset the gcaws, but other then that we must wait 
          until the maintenance is done.  It was only suppose to take
          15-30 min.  The gcaws should be up with in a hour.

>>> 'gcaws' problem from marilyn -- Tue Sep 19 10:52:51 1989 <<<

Problem: Omniprise Controller shows Error #14; the mercury arc lamp
         will have to be changed out.

>>> 'gcaws' problem from marilyn -- Tue Sep 19 11:30:54 1989 <<<

Problem: Mercury arc lamp failed on Error #14 at the Omniprise
         Controller
Solution: Mercury arc lamp had to be changed out.

>>> 'gcaws' problem from wongm -- Wed Sep 20 13:52:56 1989 <<<

Wafers were having trouble going from the chuck to the receiving
cassette.  Had to manually take wafers off the chuck.

>>> 'gcaws' problem from marilyn -- Thu Sep 21 09:02:05 1989 <<<

Problem: User reported that her wafers had to be manually taken off
         the chuck.
Cause:   Temporary glitch.
Solution: I used the gcaws next, and could not duplicate the problem.

>>> 'gcaws' problem from hebert -- Thu Sep 21 15:15:34 1989 <<<

The right access door on the environmental chamber needs to have
the lower track guide placed in the door track.

>>> 'gcaws' problem from bob -- Thu Sep 21 16:05:31 1989 <<<

The door on the gcaws has been placed back in the glide. The machine
is up.

>>> 'gcaws' problem from bob -- Tue Oct  3 13:23:15 1989 <<<

A new hook was installed on the gcaws for the N2 destat gun.

>>> 'gcaws' problem from field -- Mon Oct 16 11:46:40 1989 <<<

AWH timed out on 2 of 6 wafers in one batch I ran.  They went
through OK when I tried them again.  The other 6 wafer batch I
ran went through with no problems.

I used the old F/E numbers, as I'm patterning in a trench and using
2 um PR and my pattern is coarse.  Note that a new F/E must still
be run as a new lamp was just put in on Friday.

>>> 'gcaws' problem from marilyn -- Wed Oct 18 11:15:39 1989 <<<

Problem: gcaws needs a new focus/exposure
         started on this Wednesday
         ran out of test wafers
         will continue on Thursday

>>> 'gcaws' problem from marilyn -- Wed Oct 25 10:10:13 1989 <<<

Problem: Alignment marks are not showing on video display; all
         bulbs have been checked out thoroughly.

>>> 'gcaws' problem from hoagland -- Wed Oct 25 14:04:50 1989 <<<

problem:  No image on TV monitor; impossible to align wafers.

cause:  TV/MIC selector on optical column not fully rotated 
        to TV position.  Switch obstructs camera image of 
        alignment marks.

solution:  Rotate switch to proper position.  The stepper is up
           and available for use.

>>> 'gcaws' problem from jimmoon -- Wed Nov 15 10:24:52 1989 <<<

Loading arm has developed a significant amount of loose swing.
This means that the wafer gets loaded randomly onto the stage.
Steve is looking into the problem.

>>> 'gcaws' problem from hoagland -- Wed Nov 15 11:16:14 1989 <<<

problem:  Transfer arm developed play in rotation, repeatable  
          positioning to within 1/2 in. only.

cause:  Bolts holding coupler in T/A arm drive drain loosened.

solution:  Tighten bolts.  Wafer positioning for alignment is 
           slightly affected but alignment marks still fall
           within initial screen on alignment.  The stepper is
           up and available for use.

>>> 'gcaws' problem from gian -- Sat Nov 18 12:49:12 1989 <<<

I cannot always focus on my wafers when aligning them.
The range of the focus control is sometimes inadequate.
Some of my  wafers are thicker than average (~600um instead of 525um) although
in the distant past (> 6months), the focus was not a problem.

>>> 'gcaws' problem from jiahua -- Sun Nov 19 11:28:37 1989 <<<


The light in the microscope isn't on.


From voros Tue Nov 14 12:08:01 1989
Received: by argon (5.57/1.16)
	id AA15676; Tue, 14 Nov 89 12:06:35 PST
Date: Tue, 14 Nov 89 12:06:35 PST
From: voros (Katalin Voros)
Message-Id: <8911142006.AA15676@argon>
To: allgroups
Subject: wafer stepper upgrade
Cc: cheung@esvax, hodges, howe, microstaff, muller, neureuth@esvax, oldham,
        pgray, spanos, tvd@janus, white
Status: RO

Through a generous donation from HP we are able to upgrade our
GCA wafer stepper to an I-line, thereby improving resolution
by about 30%. This will involve replacing the lens, the illuminator,
and the auto-focus module. The items are as follows:

I-line lens, GCA#107848, .7u resolution, na=.42
Illuminator has been changed from a Maximus600 to a Maximus1000

Silicon Valley Associates, our GCA service company, will be doing
the work, which will commence on Monday, November 27th. It is
estimated that it will take about one week; thus, there will be
no 4" Si photolithography from Nov. 27 - Dec. 1.

Thank you very much for your understanding and cooperation.

       Katalin


>>> 'gcaws' problem from rnorman -- Mon Nov 20 10:28:32 1989 <<<

Problem: light in the microscope not on.

Cause: If the gcaws is not enabled the light will not turn on.

Solution: A user tested the gcaws and it worked good.  The
          gcaws is up.

>>> 'gcaws' problem from rnorman -- Mon Nov 27 07:16:33 1989 <<<

The gcaws is now being shutdown for the stepper upgrade.  Work
is scheduled for one week, being operational next monday.  You
will be informed of the progress.
From hoagland Wed Nov 29 17:15:27 1989
Received: by argon (5.57/1.16)
	id AA15481; Wed, 29 Nov 89 17:15:26 PST
Date: Wed, 29 Nov 89 17:15:26 PST
From: hoagland (Steve  Hoagland)
Message-Id: <8911300115.AA15481@argon>
To: voros
Subject: stepper
Status: RO

Efforts to strike the new "DP" bulb failed repeatedly.
In order that Steve of SVA can continue his exposure tests
tomorrow the old "DS" bulb was reinstalled and lit(bulb 
needs 12 hours to stabilize).  For some as yet undetermined
reason the new bulbs seem incompatible with the Omniprise
controller.  This can probably be worked out with a little
more time.


>>> 'gcaws' problem from voros -- Fri Dec  1 15:02:19 1989 <<<

The upgrade to the wafer stepper has been completed.  The new process
is as follows:

- Prime wafers in HMDS vapor 1-3 minutes

- Standard resist coating with KTI 820 using Eaton, Program 10

- Expose at the following settings:
	
	Foc:  262
	Exp:  1.7

- Develop using a diluted 934 (1:1) as follows:

	Use left tank in sink5

	Measure 1400 ml 934 (1:1)
	Add 700 ml DI water

	(This results in a 1:2 dilution of 934:water.)

  *We will be receiving premixed 934 (2:1) (water:934) next week.

- Rinse

We are now successfully developing out 0.8 um lines.  We expect to see
improvement over that as we fine-tune this process.  Note that the new
maximum area for a die is slightly under 9 mm.  

Thank you for your patience.

>>> 'gcaws' problem from rnorman -- Tue Dec  5 08:51:48 1989 <<<

The upgrade in completed and the gcaws has been tested to 0.8 micron
lines.  The new process has been listed in the "problems log" of Dec. 1.
The gcaws is up for use.

>>> 'gcaws' problem from marilyn -- Tue Dec  5 14:24:08 1989 <<<

Problem: New loading correction needs to be determined.
Cause: GCAws modification
Solution: Loading correction factor has been modified to be
consistent with the load point prior to the GCAws modification.
New loading correction is:
in X: -0.53400
in Y: 0.96900

>>> 'gcaws' problem from robin -- Thu Dec  7 11:18:09 1989 <<<

Fiducial marks are not level.  This does not seem to affect alignment
to the wafer.

Micromanipulator movement is problematic, i.e., movement in the X direction
has a Y component and vice versa.  This makes aligning the reticle rather
more difficult that previously.
>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>
From marilyn Thu Dec  7 14:18:27 1989
Received: by argon (5.57/1.16)
	id AA19260; Thu, 7 Dec 89 14:18:21 PST
Date: Thu, 7 Dec 89 14:18:21 PST
From: marilyn (Marilyn Kushner)
Message-Id: <8912072218.AA19260@argon>
To: voros
Subject: aligning the resolution mask
Status: R


Sorry, but I just aligned it perfectly in less than 15 seconds.
I don't see a major problem there; the X-Y-theta adjustments
are not much changed.

MK


>>> 'gcaws' problem from hoagland -- Fri Dec  8 09:16:46 1989 <<<

problem:  The old flexible exhaust pipe on the stepper light
          source is too rigid; vibration is coupled to the lamp
          head through it.

cause:  The hose material was too stiff.

solution:  A more flexible paper hose has been installed to 
           replace the original unit.  The stepper is up and
           available for use.

>>> 'gcaws' problem from hyeh -- Sun Dec 10 00:28:09 1989 <<<

The fiducials marks are not level.

>>> 'gcaws' problem from marilyn -- Mon Dec 11 11:19:18 1989 <<<

Problem: A user reported that the fiducial marks in the eyepiece
         are not level
Cause:   The GCA retrofit
         This DOES NOT affect alignment

>>> 'gcaws' problem from marilyn -- Fri Dec 22 07:50:31 1989 <<<

Problem: With the Ushio 350DP lamp, the Omniprise Controller showed
         the following error:
         Error #9: Lamp aged or wrong limits.  Check lamp type, limits.

>>> 'gcaws' problem from hoagland -- Fri Dec 22 10:55:43 1989 <<<


Steve Wise is no longer with Embedded Control Inc(formally Pi Tech Inc. 
I believe).  Our contact is an engineer named Gear, who actually designed
the omniprise controller.  According to Gear there are no PLS-1000s used
with I-line illuminators; the controller is last generation equipment
used by industry with G-line steppers only(Omniprise has been out of
business for a while).  He believes it should be possible to run a Ushio
DP lamp with the omniprise, but the reduced bulb clearance will require
substanial reduction of exhaust air flow to maintain the same comstant air
velocity across the bulb surface.  Gear is sending us a GCA 4 in.  iris to
install in the exhaust line (free of charge) which will permit much more
precise control of air flow.  In the meantime an older DS bulb has been 
installed which will provide reliable service over the holidays.

>>> 'gcaws' problem from hebert -- Fri Dec 22 12:21:26 1989 <<<

The Taurus box is not ON EVEN THOUGH THE LAB IS ON MANUAL OVERRIDE,

>>> 'gcaws' problem from carlos -- Mon Dec 25 16:55:28 1989 <<<

The stepper lamp is off

>>> 'gcaws' problem from bob -- Wed Dec 27 09:10:25 1989 <<<

The gcaws/Omniprize shutdown a 350DS lamp after 31 hrs of operation.
In order to return the stepper to service and to try and stabilize
a 350DP lamp as specified for the Maximus1000 illuminator
the Omniprize has been key switched into the alignment mode.
This locks the Omniprize into the wide latitide startup
mode and prevents the controller from tightening the
parameters. This should allow the lamp to operate without
interruption. The gcaws has been rebooted and is ready for
use. The lamp was started on 12/27/89@9:00AM.

The Omniprize manual cannot be located. Anyone knowing its
whereabouts should return it to Bob. It was on my desk as of
12/22/89 just befroe leaving for the Holiday.

>>> 'gcaws' problem from bob -- Wed Dec 27 09:19:06 1989 <<<

The lamp on the gcaws has been restarted @ 9:00AM 12/27/89.
The stepper is up.

>>> 'gcaws' problem from field -- Thu Dec 28 12:34:39 1989 <<<

micromanipulator would not make contact with mask.  Bob Hamilton
showed me how to gently press it the rest of the way down with
a tweezer.

>>> 'gcaws' problem from phillip -- Wed Jan  3 08:27:31 1990 <<<

P: No lamp on taurus box per Dave H.

S: The taurus feature is in good order on this machine.
   The local controller 'enables/disables' with a visual 
   indication.

>>> 'gcaws' problem from evan -- Wed Jan 10 10:19:54 1990 <<<

enabled to borrow a 32 board for testing gcapg pdp-11.

>>> 'gcaws' problem from bob -- Fri Jan 26 08:54:48 1990 <<<

Problem:  Omniprize shuts down Ushio 350P lamos as used by the new
          Maximus 1000.

Cause:    The house exhaust was excessive making the temp regulation
          outside the dynamic range of the Omniprize.

Solution: The manual galvenized damper was already at
          minimum. The servo damper was found to be fully
	  closed most of the time. A call to:
		Gary Gear (PLS-1000 designer)
 		Embedded Controls
		7320 E Butherus, Suite 200A
		Scottsdale, AZ 85260
		1-206-951-2713
	  was made and he donated us a precision iris.
          This was installed after a Cory Hall power
          shutdown and set to a setting that produced good 
	  servo damper control. The Omniprize will be
	  returned from the "A" mode to the automatic mode
          on Jan 29th and tested.

Current parameters are as follows:
V = 57-58.5    (Controller allows +-2V fluctuations)
I = 6-6.2 amps (+.4,-1.5 allowed)
T = 172-175C   (+-5 degrees C)
W = 350-353    (+- 5 watts)

Steve Hoagland has set the first hours operating parameters
at their maximum tolerances:
V = 50-69, I = 5-7.4, T = 165-180
Since the controller attempts to regulate temp to the mid
point of the initial band and the manufacturer recommends
160-170 C for a Maximus1000 housing, the temp band should be
narrowed before the next lamp replacement. 

For more information on the controller consult the manual on
file.


.

>>> 'gcaws' problem from field -- Sat Jan 27 18:25:48 1990 <<<


Video screen for wafer alignment completely dark - lamps were
on in the lamps illuminating the wafer, so that's not the problem.

Therefore - wafer stepper can be used for first level exposure ONLY
until the video/camera is fixed.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 08:51:53 1990 <<<

The Sierra video monitor is not displaying an image after the
tone.  The monitor is blank.  This problem is being looked into,
and you will be informed of progress.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 11:35:57 1990 <<<

After checking the "Output Video" of the CCU it was found that
a video signal was getting to the Sierra Monitor.  If no signal
was found the "Input Video" of the CCU would have been checked,
if a signal was there the CCU would have been bad. As such, 
the Sierra Monitor is bad and will need to be repaired. We
have another monitor that is being pick-up from SVA at this time.
When the monitor arrives this after noon it will be install ASAP.
The gcaws should be up for full operation by mid-afternoon, 3PM.

NOTE: The gcaws is up at this time for FIRST LEVEL only.

>>> 'gcaws' problem from rnorman -- Mon Jan 29 14:39:51 1990 <<<

Problem: Sierra Monitor blank/no video.

Cause: The monitor went out, looks like the high voltage section.

Solution: Took out Sierra and replaced with the older spare; 
          was repaired by SVA.  The bad monitor will be repaired
          shortly and put back in ASAP.  The gcaws is up for full
          operation.

>>> 'gcaws' problem from carlos -- Mon Jan 29 16:55:41 1990 <<<

I've got about 1um misalignment even though the mask looks perfect
under the gcaws microscope. Can this be related to the camera ???

>>> 'gcaws' problem from marilyn -- Tue Jan 30 08:34:32 1990 <<<

Problem: Error #2: Possible bad lamp or incorrect set-up limits.
         234 hours
         System has been powered down for a lamp change.

>>> 'gcaws' problem from marilyn -- Tue Jan 30 11:24:31 1990 <<<

Problem: Error #2 Possible bad lamp or incorrect set-up limits
Cause: Omniprise Controller was changed from MANUAL to AUTO mode
Solution: System was powered down
          Robert Norman reset the limits
          System powered up again

>>> 'gcaws' problem from field -- Tue Jan 30 12:30:51 1990 <<<

Wafer stepper showing "low wafer vac"

>>> 'gcaws' problem from field -- Tue Jan 30 12:31:31 1990 <<<

And now not showing "low wafer vac" - seems to have been specific
to that wafer...?

>>> 'gcaws' problem from bob -- Wed Jan 31 08:07:30 1990 <<<

An attempt to run the Omniprize in the automated mode shut
the lamp off. Prior to this, the lamp appeared to be stable 
within the acceptable parameters as spec'd by Omniprize. 
Robert Norman has tightened the temperature band from 165-185 
to 165-175. The Omniprize will now seek the mean value between 
three numbers (170).

We will run the Omniprize again in automatic at the end of the
present bulbs life. This will allow us to test a new set up
and not significantly effect the users. We will also need the 
Omniprize left on and not reset when/if a shutdown occurs.
This preserves the shutdown parameters. In other words please
don't zero out the hours when the lamp is shutoff without checking
with Robert Norman or myself. We can return to normal
shutdowns after this test.

s
,

>>> 'gcaws' problem from marilyn -- Thu Feb  1 08:10:55 1990 <<<

Problem: Last user left the left chamber door open overnight; the
         chamber temperature is now at 21.6.  Set point is 20.5.
         Fine alignment not recommended until temperature
         stabilizes.

>>> 'gcaws' problem from rnorman -- Thu Feb  1 12:26:57 1990 <<<

Problem: Chamber temperature is high at 21.6~C

Cause: The chamber door was open a little.

Solution: The door was closed and waited for the temp
          to stablize to 20.5~C.  It has been 4 hrs, so
          the temp is stable and the gcaws is up for use.

>>> 'gcaws' problem from marilyn -- Tue Feb  6 15:32:42 1990 <<<

Problem: Waste oil is not draining into the waste oil bottle; instead,
it is puddling up into the keys/ways reservoir, and spilling over
onto the flat surfaces surrounding the stage.
Cause: Possible kink in the upper part of tubing.  The lower part
of the tubing looks all right.

>>> 'gcaws' problem from bob -- Tue Feb  6 16:27:56 1990 <<<

The gcaws has oil accumualting on the ways due to a plugged drain
hose. It will be fixed in the morning and doesn't effect the
user or the machine's capability.
The gcaws is up for use.

>>> 'gcaws' problem from marilyn -- Fri Feb  9 07:51:03 1990 <<<

Problem: Omniprise controller shows Error #10:
         Possible leaker; check lamp type/limits.  Replace lamp.
Cause:   Exhaust work.
Solution:Replace lamp.

>>> 'gcaws' problem from rnorman -- Fri Feb  9 12:41:30 1990 <<<

Problem: oil from the ways & means over flowing, not going down
         over fill hole.

Solution: The most of the excess oil was cleaned up; but I could
          not find the "over flow hole", it is located in the
          center of the stage.  The only way to check the hole
          would be to pour acetone in the track and see if
          the over fill bottle fills up.

>>> 'gcaws' problem from rnorman -- Fri Feb  9 12:52:52 1990 <<<

The lamp is not starting. I have just changed the parameter 
limits and will install another lamp.  You will be informed
of progress.
*************DO NOT OPERATE ***********************

>>> 'gcaws' problem from rnorman -- Fri Feb  9 14:08:37 1990 <<<

Problem: Lamp not starting, getting errors 7, 10 & 14.

Cause: Originally the lamp failed due to the air flow being shut down
       to install filters.  Then after that we just could not get
       the lamps to stay on.

Solution: The original lamp was replaced with a new "P" lamp, it would 
          not stay on after starting 3 times. We then installed an
          older lamp that had 10 hours on it that also failed due to
          the same problem, voltage < limit; the lower limit was at
          50 volts.   We then changed the TEMP limits to 180/160 and
          the lower volt limit to 47.  A new USH-350DS, #981271, was
          then installed and stabilized at 61 volt, 5.8 amps with
          a temp of 170.  After watching the lamp for 15 min. it
          looked very stable.  The lamp will be on for 1 hour at 2:50.
          The lamps needs to be on for 24 hours for critical steps,
          but until then it can be use for non-critical masks.  
          The gcaws is up.

>>> 'gcaws' problem from hebert -- Mon Feb 12 11:55:35 1990 <<<

Problem: Mask alignment is extremely difficult. There is "crosstalk"
between: X and theta adjustment; theta and Y adjustment; and
the y adjustment does NOT move the mark equally in both fields.

I spent 25 minutes trying to get good alignment. This is my first
real experience with the GCA since it got converted to an i-line.

With the g-line set-up, the X adjustment was rock solid: no crosstalk
or backlash. There was some theta backlash and some y backlash,
but no crosstalk between theta and Y and X.

As a result of my frustration with this, I gave up trying to
align my mask. This really needs to get fixed!

>>> 'gcaws' problem from bob -- Mon Feb 12 13:53:04 1990 <<<

There is crosstalk between axis when the joystick on the gcaws is moved.
This makes alignments difficult. Our support company has been consulted
and feels it is a problem in the servo circuits. We will not be able to 
service this problem until the morning. Until then, using
the gcaws will be problematic.
.

>>> 'gcaws' problem from hebert -- Mon Feb 12 16:05:25 1990 <<<

The theta, X, and Y backlash and crosstalk problem that I reported
earlier was with reticle alignment. 

Besides this problem, the mask manipulator does NOT always make
contact with the reticle.

After reticle alignment is achieved, the CRT alignment marks are
found to be scewed. This may be due to a misaligned camera.

>>> 'gcaws' problem from marilyn -- Tue Feb 13 08:41:45 1990 <<<

Problem: Theta turn screw not centered
Solution: Adjusted it back to the center of its travel

>>> 'gcaws' problem from bob -- Tue Feb 13 09:41:51 1990 <<<

The problem with the gcaws involves the mechanical plate holder
only. There are no servo or stage motion problems. These were
reported in error due to a communication problem.

The problems currently reported are:

1. Cross talk and play in the theta, x-axis and y-axis mechanical
   adjustments.

2. The plate holder requires assistance in meeting the plate.

3. The exposure times are ~2X longer than the I-line data sheet
   suggests.

All of these problems are a nuisance:however, the gcaws is up and running
with only minor inconvenience to the user. Centering the adjusting screws
prior to installing a plate minimizes crosstalk.

SVA will be requested to service the plate holder at their expense as it
is a new unti installed at the time of the I-line conversion and should
have been better adjusted.

The I-line exposure times will be further characterized upon arrival of
an I-line power probe which has been ordered.

The gcaws is up!

>>> 'gcaws' problem from liew -- Tue Feb 13 22:54:07 1990 <<<

The mask micromanipulator did not reach the mask when spindle lock
is tightened. As a result, X, Y and Theta alignment can not be performed.

>>> 'gcaws' problem from rnorman -- Wed Feb 14 08:30:26 1990 <<<

Problem: Micromanipulator not reaching the mask when spindle lock
         is tightened down.

Cause: An existing intermittent mechanical quark.

Solution: At the expense of SVA, our service reps, the micromanipulator
          will be adjusted at their convenience.  During the mean time,
          this problem can be overcome by: after tightening the spindle
          lock and the manipulator does not reach the mask, lightly
          press the manipulator to the mask.  This has been the fix
          ever since the problem occurred.  The gcaws is operational.

>>> 'gcaws' problem from hebert -- Wed Feb 14 12:58:38 1990 <<<

The wafer cassette elevators are noisier than usual.

The CRT image has a waviness to it. This may be due to a
fluctuation in voltage.

>>> 'gcaws' problem from bob -- Wed Feb 14 16:24:50 1990 <<<

The wafer cassette elevators were checked over. The lead screw,
recirculating ball bearings and the drive gears were lubed. The noise
reported by Dave Hebert is much better. The gcaws will be checked over
in a few days to see if further work is needed.

>>> 'gcaws' problem from hebert -- Fri Feb 16 08:13:40 1990 <<<

The lighting in service chase CV1 is white light. The plexy doors
on the GCAWS environmental cabinet do not seal tightly, leaving
about a 1/4 inch gap for white light to enter the envirn chamber.
The gap in the door is just above the load/unload cassettes. It
would be a good idea to put yellow lights in the service chase
and modify the door in a way that it seals better wnen closed.

>>> 'gcaws' problem from bob -- Fri Feb 16 08:39:39 1990 <<<

Problems with light leakage from the service chase cv-1 into
the gcaws have not been noticed in the 6 years of operation
of this machine. The bulbs in the service chase will be
changed to yellow to protect users in the event someone turns
them on during an exposure. It is on techjob.

>>> 'gcaws' problem from hebert -- Fri Feb 16 09:20:41 1990 <<<

I taped the environ door closed. The gap is actually about 1/2 inch
and is caused by positive pressure in the chamber.

>>> 'gcaws' problem from hebert -- Fri Feb 16 10:07:39 1990 <<<

Problem: Y-axis stepping error. Our mask set uses an "interchip"
mask to expose between fields. Our mask set is designed to use
a y-axis stepping distance of 10.32 mm. The actual stepping
distance when y-axis step is programmed 10.320 mm is 10.445 mm,
using to Vickers to measure interchip spacing. Changing the
program to 10.230 mm gives a y-axis interchip spacing of 10.320 mm.

>>> 'gcaws' problem from hebert -- Fri Feb 16 11:06:51 1990 <<<

There is NOT a problem with y-axis stepping. After reviewing
Vickers measurements with the circuit layout, we have concluded
that the problem that we are having is due to the i-line field
size.

Our circuit layout was for a 10.00 mm x 10.00 mm field. We are
printing two 5.00 cm x 5.00 cm chips along the y-axis field
center line. We then extend the size of our chip for cryogenic
test purposes using an interchip mask that exposes between fields.
This is necessary as our testing is done in liquid helium using
an alignment jig that aligns chip contact pads with test card probes.
To do this, our chips must be cut to 5.0 x 5.0 sqcm, and our chip
size including scribe lines must be 5.16 cm x 5.16 cm. 

The i-line field is NOT 10.00 mm x 10.00 mm. It is 9.80 mm x 9.80 mm.
This accounts for what appeared to be y-axis stepping error. 

>>> 'gcaws' problem from rnorman -- Fri Feb 16 13:12:26 1990 <<<

Problem: The field is not 10.0 mm x 10.0 mm, but is 9.8 x 9.8 mm.

Solution: The I-line not being 10.0 mm x 10.0 mm is not new this was
          known from the start of the installation.  By test hebert
          has confirmed that the field is 9.8 mm x 9.8 mm.  Please
          make note of this if you have not already. The gcaws is up.

>>> 'gcaws' problem from bob -- Fri Feb 16 15:31:41 1990 <<<

Black deposits on the front of poly boats occur after doped
runs. This doesn't seem to hurt anything. The doped poly on
the wafers is good. It is speculated that the color is
produced by the lack of reflectivity associated with the
crystal shape of this deposit.
tylan11 is up
>>> 'gcaws' problem from hebert -- Thu Feb 22 09:02:10 1990 <<< [No Comment]

>>> 'gcaws' problem from hebert -- Thu Feb 22 09:08:23 1990 <<<

Bad focus at 268. Good focus appears to be 280.

>>> 'gcaws' problem from marilyn -- Thu Feb 22 15:17:59 1990 <<<

Problem: old focus no longer usable/it has drifted
Solution: f/e matrix test new focus: 280  new exposure: 1.5

>>> 'gcaws' problem from hebert -- Wed Feb 28 09:40:42 1990 <<<

The right fiducial is not entirely visable. About 1/3 of the
fiducial is not within view.

>>> 'gcaws' problem from hebert -- Thu Mar  1 08:46:55 1990 <<<

Problem: Only 1/2 of right fiducial is in view.

Solution: I adjusted the mechanical stop so that all of
the right fiducial and all of the left fiducial for mask
alignment to column are in view.

The problem may be cleared from the job list.

>>> 'gcaws' problem from hebert -- Thu Mar  1 09:22:34 1990 <<<

The focus at 280 is not very good for features up to 10 microns
using KTI 820-27 P/R (Eaton Pgm 10). A focus/exposure test needs
to be done.

>>> 'gcaws' problem from marilyn -- Thu Mar  1 14:27:03 1990 <<<

Problem: focus shifted
Solution: performed f/e matrix test
          new focus: 275   new exposure: 1.5

>>> 'gcaws' problem from aplee -- Mon Mar  5 02:43:06 1990 <<<

manipulator does not come all the way down after I turn the spindle lock clockwise, that makes it impossible to align the mask. I think the vacuum tube on the
manipulator is pulling on the manipulator.

>>> 'gcaws' problem from rnorman -- Mon Mar  5 14:05:09 1990 <<<

The gcaws lamp, USH-350DP, was installed and has stabilized.  When
it switched into "operate" I switch the omniprise to the "A" mode.
While the lamp was off, failed due to error 2, I changed a AMP
parameter from 7.4-5.0 to 6.4-5.0.  The operating parameters at this time
are: Volt @ 57.0, AMP @ 6.2 and temp @ 170.
The gca is operational.

>>> 'gcaws' problem from rnorman -- Wed Mar  7 11:44:31 1990 <<<

Problem: Newly connected printer not printing data from Omniprise.

Cause: Phil found wires 2&3 crossed in the RS232.

Solution: The wires were switched around.  The printer now
          prints out date from the omniprise.

>>> 'gcaws' problem from hebert -- Wed Mar 14 10:13:34 1990 <<<

On 3/13, focus of 276 and exposure of 1.1 sec worked well for
submicron litho using Olin-Hunt 6512 P/R. Today, focus is poor
for features below 6.0 microns on a side. A focus/exposure test
matrix was run varying focus from 260 to 290 and exposure up
to 2.0 seconds. This was done with both Olin 6512 and KTI 820-27.
No "good" focus was found and long exposure (about 2.0 sec) is
needed to get P/R to clear using std develop cycles.

Lamp has over amped and "Err 2" is flashing on the display. Could
there be a parallel short to the lamp? That might explain the over amp
and possible decreased dosage from lower bulb intensity.

>>> 'gcaws' problem from bob -- Wed Mar 14 11:20:48 1990 <<<

Problem:  gcaws users report exposure times are excessive.
Cause:    currently no cause has been found. Inspection 
          reveals no problems with the lamp.
solution: the lamp has been replaced and is now stabalizing
          and requires 24 hrs prior to a focus/exposure test. Users
          are cautioned to use it only for course alignment.
        

>>> 'gcaws' problem from bob -- Wed Mar 14 14:06:20 1990 <<<

test

>>> 'gcaws' problem from bob -- Wed Mar 14 14:06:47 1990 <<<

The gcaws has a new lamp in it. It is useable for course faetures
only until a focus/exposure matrix is run. This is scheduled for
3-15-90 in the AM.

>>> 'gcaws' problem from bob -- Fri Mar 16 16:40:21 1990 <<<

The lamp power supply is reporting error messages for the lmap.
It is currently operating and it's parameters are within normal
boundries. Further work on the controller will be done next week.

The gcaws is up for use.

>>> 'gcaws' problem from rnorman -- Mon Mar 19 09:55:14 1990 <<<

Looking at the lamp failure diagnostics print out on 3/16 there
was a major power drop from 6.3 amps, 56.0 volts, 171 temp @ 52.548
hrs to 0.6 amps, 20.5 volts, 168 temp at 52.548 hrs. causing lamp
failure. The lamp was re-started.  Talking to Steve Wiseman(omniprise engineer) 
he said the cause could be: 1) power line drop, which we have had on a regular
basis, according to bob. Or 2) a bad connection, like the spider 
connector in the lamp assembly.

When inserting the lamp into the spider there should be the feel
of resistance, a noticeable pressure that the lamp is in the spider
connector.  It looks like our "spider" connector is worn out and
in need of replacement, because you hardly notice the lamp is being
inserted into the spider connector.  A new connector will be ordered
and the power line will be monitored. NOTE: THE GCAWS IS UP AND
OPERATING in the "A" mode until further notice.

>>> 'gcaws' problem from nam -- Mon Mar 26 12:24:34 1990 <<<

Cassette indexing problem; When started, cassettes indexed down and without
                           transfering wafer to the centering chuck, cassettes
                           raised again.  No exposure happened of course.

>>> 'gcaws' problem from ling -- Fri Mar 30 16:04:35 1990 <<<

wafer after exposure does not go to the receiver cassette. 
Problem is solved by jimmon.

>>> 'gcaws' problem from field -- Fri Mar 30 18:03:35 1990 <<<

Wafer stepper didn't load the wafer in the top-most position
of the input cassette.  Worked fine when I put the wafer
in the 3rd slot down and tried again.

>>> 'gcaws' problem from rnorman -- Mon Apr  2 08:19:27 1990 <<<

The gcaws is down for a lamp change and maintenance.  You will be
notified when it is up for use.

>>> 'gcaws' problem from rnorman -- Mon Apr  2 09:48:40 1990 <<<

Scheduled maintenance this morning was to replace the "spider" or the 
anode connection of the lamp, but after looking at the housing it would
be very tricky to remove and meticulous to realign.  The spider pins
do not seem to be making sufficient contact with the anode of the
lamp, so for a temporary fix the pins were adjusted for a firm fit.

A new 350S was installed and the omniprise limits were changed as
follows:
       Amps:  6.5, 5.1
      Volts:  68.5, 54.0
       Temp:  175, 185

When the Lamp is started the light monitor will be installed and the
lamp will be adjusted for max. output light.

>>> 'gcaws' problem from debra -- Mon Apr  2 16:19:33 1990 <<<

gcaws still needs focus/exposure test following lamp change. This
will be done first thing 4/3. 

>>> 'gcaws' problem from bob -- Tue Apr  3 10:16:12 1990 <<<

The wafer stepper is ready for use however a focus/exposure has
not been run. This will be done first thing this am and the results
reported.

>>> 'gcaws' problem from marilyn -- Tue Apr  3 15:57:22 1990 <<<

Problem: Double doors on the side of the wafer stepper facing the
         reichert bulge outwards
Cause: Metal "stop" on floor broke loose; therefore, doors fail to
       catch and hold into place. The "stop" needs to be reattached
       ASAP so the the temperature stability of the gcaws is not
       compromised.

>>> 'gcaws' problem from field -- Wed Apr  4 16:25:00 1990 <<<

awh timed out a couple of times
machine still operable

>>> 'gcaws' problem from judy -- Wed Apr  4 19:11:24 1990 <<<

Tried to use settings for I-line resist (1.1um) of 0.8 sec and focus 268
I was aiming for <2um features - results WAY OVER EXPOSED!!!! It was a
light field mask and the underlying film was polysilicon.  Do you have
any suggestions?  I tried to reduce the exposure time (0.7) but little changed.
I also tried to develop twice, but it didn't seem to help any either.
Yes, I did do a post exposure bake.

I earlier tried a focus/exposure test, but on eaton dummies which weren't
dehydrated so I had horrible adhesion problems.  

Mike

>>> 'gcaws' problem from debra -- Thu Apr  5 15:27:22 1990 <<<

Mike and I have done some focus/exposure test using poly dummies,
and have found that for the 1.1 micron resist, the .80 sec exposure
time with a focus of 268 is good down to .5 microns. It appears that
dummies which are used to do this test must be: acetone stripped of
any previous resist, piranha cleaned, and lightly plasma cleaned in
technics-c at 50Watts, O2, for 5-10 minutes, dehydrated, HMDS, spin-
coated. Failure to do the plasma clean will result in poor adhesion, 
and misinterpretations of the best focus/exposure parameters. Improper
cleaning of device wafers will also lead to photo problems.
 Debra

>>> 'gcaws' fix from evan -- Wed Apr 11 14:33:15 1990 <<<

problem: can't enter new student accounts
cause: too many files
solution: when old user id's are removed using ACNT, they still continue
to exist until all their files are deleted using: DELETE $XX$DX1 * *
The XX should be the old user's id.  Include the *'s to remove all their files.

The list of all files using LISTF should be checked and the id's of former
users noted.  These files should be deleted using the above method.

I did this for an old ES file of my own.  I was able to add a dummy new user id
ok.
This should free up alot of disk space.
gcaws is up
From bob Thu Apr 12 15:26:08 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA19546; Thu, 12 Apr 90 15:26:05 PDT
Date: Thu, 12 Apr 90 15:26:05 PDT
From: bob (Robert M. Hamilton)
Message-Id: <9004122226.AA19546@argon.berkeley.edu.>
To: debra, evan, rnorman, voros
Subject: GCA
Cc: bob
Status: R

SVA has been contacted and an appointment set up for GCA service
on April 24th. This is close to the 600 hours on the current
lamp.

Dick Ziegra will be here to:
install a new maximus lamp connection (spider)
replace the maximus dichroic mirrors
align the fibre optic bundle

Parking will be arranged by Susan the day before.

I have also scheduled a shutdown of the new lab exhaust with
DOFM at 7:00 am. The lamp should be shut off and not restarted 
until this work and Dick Ziegra are finished.

I'll reserve the gcaws from 7:00am-12:00.

Bob



>>> 'gcaws' problem from field -- Thu Apr 12 16:34:53 1990 <<<

AWH timed out on my second wafer.  When I reran it, it
was OK.

>>> 'gcaws' problem from field -- Mon Apr 23 13:13:32 1990 <<<

AWH timed out on me three times.  Eventually was able to run my
wafers.

>>> 'gcaws' fix from marilyn -- Mon Apr 23 14:47:15 1990 <<<

Problem: user experienced AWH "time-outs"
Solution: should not have been reported as a problem/this happens
          sporadically

>>> 'gcaws' problem from bob -- Tue Apr 24 10:22:47 1990 <<<

The gcaws is down for a lamp change and lamp parameter set up.

>>> 'gcaws' fix from bob -- Tue Apr 24 16:00:15 1990 <<<

A new lamp has been installed on the gcaws. New focus/exposure fiqures
are posted on the machine. The lamp power supply is periodically alarming
as we have installed a new style lamp who's parameters have not yet
been established. These alarms can be ignored and do not effect the user.
Current lamp is a Ushio 350DP.
The gcaws is up and ready for use.

>>> 'gcaws' problem from hebert -- Wed Apr 25 10:13:07 1990 <<<

Unstable lamp temp. The lamp reached 181 deg C during my reservation.

Error 10 on Omniprise: "Volt<min  -  possible leaker. Check lamp type/limits.
                        Replace lamp."

Olin Hunt 6512 best focus: 0.8 sec and 268. Posted as 0.8 sec and 266 on 4/24.

G-line resist focus also higher than on 4/24: 270 vs 266. 

The change in focus may be related to lamp problem.

>>> 'gcaws' problem from hebert -- Thu Apr 26 10:46:32 1990 <<<

I tried to rework the litho that didn't turn out good on my wafer
on 4/25. I used the Olin-Hunt i-line P/R and ran a focus/expos test
on a thermally oxidized silicon wafer. Today the best F/E was at
268 and 1.2 seconds (dark field mask). On 4/25 it was 268 and 0.8 sec
for the same mask.

On my wafer, the contact vias did not clear after 2.5 develop cycles.
As reported on 4/25, 5 x 5 micron features do not look as good as they
did before the lamp change on 4/24. Two micron features look somewhat
square. 

There may be a problem with lamp intensity: on 4/25 an exposure time
of 0.8 seconds allowed features to clear upon developing. Today, 1.2 seconds
is not enough to get the same features to clear (i.e. same P/R with
post expos bake and same mask as used on 4/25).

>>> 'gcaws' problem from marilyn -- Fri Apr 27 10:50:18 1990 <<<

Problem: Excessive AWH "time-outs" from which the system does not
         recover.  Wafers stack on top of each other; they must
         then be manually removed and the jog terminated/restarted

>>> 'gcaws' problem from jiahua -- Fri Apr 27 11:03:56 1990 <<<

Sometimes the wafers couldn't be moved to the reciever.

>>> 'gcaws' fix from marilyn -- Fri Apr 27 11:13:46 1990 <<<

Problem: Excessive AWH "time-outs" from which the system does not
          recover. Wafer stack at the chuck; job must then be
         terminated/restarted
(Temporary) solution: aborting job/resetting the elevators/then
         restarting the job provides a temporary fix.

>>> 'gcaws' problem from rnorman -- Fri Apr 27 12:51:09 1990 <<<

The gcaws will be down for a lamp change, to fix the exhaust hose and to change
some omniprise parameters.  You will be informed when it is up for use.

>>> 'gcaws' fix from rnorman -- Fri Apr 27 14:00:33 1990 <<<

The DP lamp was replaced with a new 350-DS, #9Y0175, and has been started.
The Omniprise printer in also on printing data.  The hole in the exhaust hose
was removed and the hose reconnected.  I did not change any parameters since
the ones at this time were originally set-up for a DS lamp; though the orifice
may need adjusted to get minimum lamp temperature fluctuation.  Debra will
connect the "light probe" and adjust for max. output in one hour; she will
inform you after that point of the status.

>>> 'gcaws' fix from bob -- Mon Apr 30 08:52:06 1990 <<<

Dick Ziegra of SVA will be here first thing, May 3rd. to service
the Maximus1000 light source. He will replace dicrhoic mirrors and
align the source. This should increase the energy output. The
gcaws is reserved for this service from 8:00-16:00.

>>> 'gcaws' problem from nam -- Mon Apr 30 13:04:28 1990 <<<

I had several "AWH time out".  I had to reset the job to unjam it.
For last 9 wafers, it worked fine without time out.

>>> 'gcaws' fix from marilyn -- Mon Apr 30 13:25:44 1990 <<<

Problem: AWH "time-out"
Cause: Receive cassette was not seated on the platform correctly
Solution: Reseated cassette; the gcaws is UP

>>> 'gcaws' fix from rnorman -- Fri May  4 14:04:29 1990 <<<

The lamp was still not operating in the "I-line" region well enough, so
the lamp temperature limit was raised to 190-200; operating at 195~.
The operation parameters are now at 6.0-6.1 amps, 57.5-58.5 volts.
After increasing the operating temp from 185 to 195 we had an increase in 
peak intensity by about 20%; as monitored by D.Hebert and CO.  Debra is now 
testing the lamp and will inform you of progress. The omniprise is controlling
the lamp temp. by fluctuating the damper between 25% to 65% of full open.
The gcaws will be up for use after Debra's tests.

>>> 'gcaws' problem from hebert -- Tue May  8 10:40:04 1990 <<<

The lamp temp fluctuates between 194 and 196 deg C. Focus of 
2.0 micron x 2.0 micron features using -DP lamp at higher operating
temp is slightly better than when the lamp was being operated at 184 
deg C. Focus of these features is still not as godd as with the -DS
lamp. Maybe further increase of lamp temp would help.

The GCAWS needs baseline correction. 

>>> 'gcaws' fix from rnorman -- Tue May  8 12:59:34 1990 <<<

Problem: Focus of 2.0 micron features better but still not as good
         as the "DS" lamps even with the increase of lamp temperature
         from 185 to 195.

Solution: During the next lamp change we will increase the lamp
temperature to operate at 200~C.  This is the maximum lamp temperature
that we can operate safely.  According to Steve Wiseman, the Engineer of the
Omniprise, there will be a temp. point where the "I-line" will spread out
and not be sharp, which we do not want.  Steve said we may be at that
point or approaching it.  If all else fails we may have to use the "DS"
lamps.  Please have patience with our lamp problems, we are trying to
resolve them as fast as we can.  We do appreciate your comments and
input.
