>>> 'flatgage' problem from hoagland -- Thu Jan 19 15:38:58 1989 <<<

re: computer hookup
The flatgage had as an option at it's date of manufacture a SECS
interface package, which would meet your requirement of uploading
data to a host computer perfectly.  Tencor has "obsoleted" this
machine as well as all it's parts and has no immediate information
about price or availability of this product, however they are
searching for this information and will get back to me in a day or
so.  Any further developments will be posted as they arise.

>>> 'flatgage' problem from hoagland -- Thu Jan 19 16:25:45 1989 <<<

Please ignore my last message.  Though our records do not reflect the 
fact, our flatgage was purchased with the SECS interface and it is
available for use.   I will get together with Dave Mudie and see 
what needs to be done to connect a SECS compatible computer port
to the flatgage for data collection.  After I speak with Dave an 
estimate will be posted of the time needed before you can begin
uploading data for analysis.

>>> 'flatgage' problem from jiahua -- Fri Feb 17 13:34:54 1989 <<<

Data transfer is in error.

>>> 'flatgage' problem from mudie -- Fri Feb 17 14:32:02 1989 <<<

P: 'flatget' losing data

C: program losing bytes as load on argon increases

S: program now increases system priority before reading data

>>> 'flatgage' problem from hebert -- Tue Apr 25 14:44:00 1989 <<<

The right front air shock on the table isn't pressurized.

>>> 'flatgage' problem from nam -- Thu Feb 15 13:59:13 1990 <<<

A wafer was broken during measurement causing equipment not functioning
properly.  Sonic head stucks at the 1/3 of the its trip toward center and stay here for a while before it gets to the center position.  This maybe due
to some mechanical problem caused by broken pieces of wafer.
I vacuumed wafer pieces.

>>> 'flatgage' problem from rnorman -- Fri Feb 16 09:12:22 1990 <<<

Problem: The sonic head did not start at the edge, but about 1/3 inward.

Cause: During a tutoring lesson from hebert, it was found that the string
       was off a pulley.

Solution: With hebert's assistance the string was placed back on the pulley.
          The flatgage is up.

>>> 'flatgage' problem from nam -- Tue Feb 20 12:30:20 1990 <<<

The wafer on the chuck was weaving, so I pushed stop button.
It stop scan a few seconds after, and gave error messages "Data collection error" and "Head position error".  When pushed 'start' button, sonic head stuck at
the edge of the chuck.  By pushing 'stop', head motion stopped at the edge of
chuck.

>>> 'flatgage' problem from rnorman -- Wed Feb 21 08:49:02 1990 <<<

The string on the sonic head is broken and will need to be replaced.
As soon as I find a spare string one will be installed.  The flatgage
is down.

>>> 'flatgage' problem from rnorman -- Thu Feb 22 12:17:11 1990 <<<

Problem: String on sonic head was broken.

Solution: With tom's help we installed another string, size 000.
          The head was adjusted to 50.9 -/+ .1 on each of the 
          three corners and a calibration was ran.  The unit is up.

>>> 'flatgage' problem from jiahua -- Tue Mar  6 14:56:56 1990 <<<


When I did calibration, it didn't work. Tom helped me to check it, found the
drive string was brocken.

>>> 'flatgage' problem from bob -- Wed Mar  7 12:43:08 1990 <<<

Spare thread for the flatgage has been secured from a surgical supply.
It will be kept in the flatgage parts drawer.

>>> 'flatgage' problem from rnorman -- Thu Mar  8 07:21:23 1990 <<<

The flatgage will be down to install the new string.

>>> 'flatgage' problem from rnorman -- Thu Mar  8 08:45:36 1990 <<<

Problem: Broken sonic head pull string.

Solution: A new sting was ran and the flatgage was tested
          and leveled between 50.4 and 50.3 microns.
          The unit is up.

>>> 'flatgage' problem from nam -- Mon Apr 16 17:18:08 1990 <<<

Head and string are getting stucked at the end of a measurement cycle, i.e aboutat the center area of wafer.  Disable and enable again solves this problem, but
I think it needs attention before it gets serious.

>>> 'flatgage' fix from rnorman -- Wed Apr 18 14:53:33 1990 <<<

Problem: head and string are getting stuck at about the end of the 
       measurement cycle.

Solution: After doing a calibration 4-5 time I did not notice
         any problem.  I will take with nam concerning her problem.
         The flatgage is up.
