>>> 'ee143' problem from phillip -- Wed Jan 25 12:48:12 1989 <<<

The 'IONICS' mixed d.i. resins have been picked up by the company.
Accounting has been notified to cease paying for demurrage on these
items. Continental water is the new vendor.

>>> 'ee143' problem from phillip -- Fri Jan 27 09:09:46 1989 <<<

Mr. Parrish apprises us that the Thermionics vacuum system is
in good working order.

Continental water should be here today to install resin tank
for the d.i. water.
I would still like to meet the ta's before Monday, if possible.

>>> 'ee143' problem from phillip -- Mon Jan 30 09:31:45 1989 <<<

The di water is on line and of acceptable resistivity.
The final rinse tank (Polymetrics) is operational.
A sticky mat has been installed by the door. All those
entering, please wear booties.

>>> 'ee143' problem from phillip -- Tue Jan 31 11:06:03 1989 <<<

Per Prof. Cheung's request: All furnace ball clamps have been replaced.
                            The stainless steel variety were used this
                            time.

>>> 'ee143' problem from phillip -- Mon Feb  6 08:01:05 1989 <<<

Several items this a.m.:
 a. Started the heat exchanger in the linberg furnace bank.
    #3 is having a tca clean and it made the lab HOT as a 
    pistol. The small air conditioning unit is operating but
    its not tremendously efficient for the size of the room.
 b. The glassware Prof. Cheung wanted cleaned or replaced was
    in use and very hot. It has been internally cleaned via the 
    tca clean in progress. All the carbon residue on the table
    was cleaned off.
 c. Added water to the recirc d.i. rinser (Prometrix) to start
    it flowing again. Remember: this machine is a recirculating 
    variety and  should be used for FINAL rinsing only. The filters
    in the unit will degrade rapidly if subjected to inordinate
    amounts of whatever your cleaning off wafers.
 d. The kasper is alive and well. If anyone has a problem with it,
    please contact me verbally today.
    (The kasper in the microlab is working normally also. The scope        
     lamps are turned down after use to extend bulb life. Simply turn
     up the knob labelled 'illuminator' to use it.)
 e. Furnace gases are in adequate supply.
 f. The miscellaneous chuck vacuum pump will be serviced this week.
From voros Mon Feb  6 08:45:24 1989
Received: by argon (5.57/1.16)
	id AA19262; Mon, 6 Feb 89 08:45:19 PST
Date: Mon, 6 Feb 89 08:45:19 PST
From: voros (Katalin Voros)
Message-Id: <8902061645.AA19262@argon>
To: ee143
Subject: processing
Status: R

TA's, please understand that the standard processing lab for the class
is the lab in 218. The Microlab should be used as back up only.
You should make ALL effort to get/keep the 218 lab in shape for the class.
Phil is here to take care of problems 6:30-3:00pm, make sure you
report them in time. Also, look/check ahead, anticipate what could go
wrong, like a good engineer.

Thank you for your cooperation.
Katalin

From voros Mon Feb  6 08:51:48 1989
Received: by argon (5.57/1.16)
	id AA19377; Mon, 6 Feb 89 08:51:36 PST
Date: Mon, 6 Feb 89 08:51:36 PST
From: voros (Katalin Voros)
Message-Id: <8902061651.AA19377@argon>
To: alex
Subject: request
Cc: ee143
Status: RO

At their Friday meeting Prof.Cheung and the TAs requested that the
push button lock be NOT removed from the door of 218. Pls cancel the
machine shop order. Pls discuss this with Prof. Cheung if you need to.
Thank you.
Katalin

From cheung@esvax.berkeley.edu Mon Feb  6 10:42:41 1989
Received: by argon (5.57/1.16)
	id AA22875; Mon, 6 Feb 89 10:42:35 PST
Received: by esvax.berkeley.edu (5.57/1.16)
	id AA03006; Mon, 6 Feb 89 10:35:36 PST
Date: Mon, 6 Feb 89 10:35:36 PST
From: cheung@esvax.berkeley.edu (Nathan Cheung)
Message-Id: <8902061835.AA03006@esvax.berkeley.edu>
To: alex@argon, alex@sesame.berkeley.edu, voros@argon
Subject: Re:  request
Cc: ee143@argon
Status: R

I see the conflict of the two lock systems.
If that is the case , we can solely depend on the card key.

MNC

From ferenc@janus.berkeley.edu Mon Feb  6 12:00:33 1989
Received: by argon (5.57/1.16)
	id AA25896; Mon, 6 Feb 89 12:00:26 PST
Received: by janus.berkeley.edu (5.57/1.34)
	id AA00921; Mon, 6 Feb 89 12:00:11 PST
Date: Mon, 6 Feb 89 12:00:11 PST
From: ferenc@janus.berkeley.edu (Ferenc Kovac)
Message-Id: <8902062000.AA00921@janus.berkeley.edu>
To: phillip@argon
Subject: 218 access
Cc: bob@argon
Status: RO

phil, sorry for any inconvenience you expressed experiencing.
i called chere with the card key number you just
gave me and she said she'd take care of it right away.
i have no control over chere,
but please let me know if you continue having problems.
	ferenc

From cheung@esvax.berkeley.edu Mon Feb  6 10:47:02 1989
Received: by argon (5.57/1.16)
	id AA23133; Mon, 6 Feb 89 10:46:55 PST
Received: by esvax.berkeley.edu (5.57/1.16)
	id AA03034; Mon, 6 Feb 89 10:39:56 PST
Date: Mon, 6 Feb 89 10:39:56 PST
From: cheung@esvax.berkeley.edu (Nathan Cheung)
Message-Id: <8902061839.AA03034@esvax.berkeley.edu>
To: alex@argon, ferenc@janus.berkeley.edu, voros@argon
Subject: Re:  request
Cc: ee143@argon
Status: RO

ok. decision is final - remove the combination lock.
Alex pointed out the conflict with the Police Department.

NC


>>> 'ee143' problem from phillip -- Wed Feb  8 08:21:46 1989 <<<

1. The vacuum pump that supplies miscellaneous chuck vacuum
has been serviced by James Parrish. It is again in good working
order.

2. The water in the final rinser has been replaced. Bath
resistivity has been restored to 18+ Mohms.

3. Organic waste wil be removed today from the chase.
From cheung@esvax.berkeley.edu Wed Feb  8 13:30:32 1989
Received: by argon (5.57/1.16)
	id AA19314; Wed, 8 Feb 89 13:30:23 PST
Received: by esvax.berkeley.edu (5.57/1.16)
	id AA22164; Wed, 8 Feb 89 13:23:12 PST
Date: Wed, 8 Feb 89 13:23:12 PST
From: cheung@esvax.berkeley.edu (Nathan Cheung)
Message-Id: <8902082123.AA22164@esvax.berkeley.edu>
To: ee143@argon
Subject: TA office hours
Status: R


I need to publicize your office hours and meeting place.
You are entitled to a desk somewhere in Cory.
jessie, can you ask mary williamson of scheduling to find out
the room.

I need your reply before the end of this week.
send me e-mail.

NC


>>> 'ee143' problem from phillip -- Thu Feb  9 07:52:12 1989 <<<

P: Mechanical pump (used to supply misc. chuck vacuum) leaking
   oil profusely .
S: Removed pump from service and chase. Placed a diaphram pump
   on line. (The new diaphram pump is plugged in and will run
   continously. There is no need to shut it down daily.)

>>> 'ee143' problem from phillip -- Thu Feb  9 08:44:29 1989 <<<

James Parrish has recinded his first instruction concerning
the diaphram pump.

UNPLUG the pump (labelled 'kasper pump') when not in use.
It is in the service chase in the position the mech. pump
used to be.

>>> 'ee143' problem from phillip -- Wed Feb 15 08:59:37 1989 <<<

The empty O2 cylinder that Carlos reported has been removed.
A new reserve O2 cylinder has been placed for eventual use.

The fans on the furnace heat exchanger were turned on. This should
make it yet cooler in the room. Carlos knows how to shut the fans
down if they are deemed too noisy. A conveniently located switch
for these will be installed when time permits.

A switch has been added to the line cord of the vacuum pump.
It is no longer necessary to 'pull the plug' on the pump.
Pls. remember to shut it off when not needed.
From carlos Tue Feb 21 00:39:50 1989
Received: by argon (5.57/1.16)
	id AA10651; Tue, 21 Feb 89 00:39:45 PST
Date: Tue, 21 Feb 89 00:39:45 PST
From: carlos (Carlos Mastrangelo)
Message-Id: <8902210839.AA10651@argon>
To: ee143
Subject: kasper problem
Status: RO


The gap between the mask and the wafer is too large; therefore 
we CANNOT see both the wafer and mask alignment keys at the 
same time with the same focus. Also, the magnification of the
right eyepiece under the split field is slightly larger than the 
left one. That means that features of the same size look larger on 
the right piece than on the left piece. This problem makes rotational
alignment of the mask very difficult. 

Katalin: please send someone to fix this machine before the class 
starts (9-12). I think Phil is on vacation.



						Carlos


>>> 'ee143' problem from kim -- Tue Feb 21 11:12:04 1989 <<<

Problem:  Seperation between mask and wafer was too large.
          The magnification between the left eyepiece and the
          right eyepiece on split field was different.

Cause:    The vacuum between the mask holder and the stage didn't come 
          on and the VISUAL ALIGN BUTTON didn't work?

Solution: Adjusted the seperation, but not sure problem is solved.  
          The magnification in the right eyepiece of the split field is 
          higher than the left eyepiece, but it is insignificant.

>>> 'ee143' problem from phillip -- Thu Feb 23 07:11:22 1989 <<<

Carlos: I will see what can be done to elevate the resistivity
        in the polymetrics b-4 Monday.

Clark : I checked out the kasper and find it o.k. Please
       call me when you arrive today and we can look at the 
       separation problem together. Sometimes when the problem
       you have arises, it turns out to be resist making the 
       mask and wafer adhere. That is why I am leary of adjusting
       anything before I see the problem.
        See you later this a.m.

>>> 'ee143' problem from phillip -- Thu Feb 23 13:20:06 1989 <<<

P: Kasper aligner will not 'separate' correctly.
S: Replaced solenoid#6. Defective solenoid was
   not allowing vacuum to pass at critical time
   for 'separate' mode to be effective. The
   143kasper is up and running.

>>> 'ee143' problem from phillip -- Thu Mar  2 11:58:41 1989 <<<

A. Replaced (temp.) n2 bottle to all lab functions.
B> Repalced spin on glass.

Both problems as reported by Clark are fixed.

>>> 'ee143' problem from phillip -- Fri Mar  3 08:25:20 1989 <<<

Carlos reports his card key does not access rm.218.

>>> 'ee143' problem from phillip -- Wed Mar  8 08:48:58 1989 <<<

The kasper in r. 218 (143lab) is in a state of disrepair.
It will be worked on between and around scheduled classes.
Use the kasper in the microlab if you need to until further
notice.

>>> 'ee143' problem from phillip -- Tue Mar 14 08:38:11 1989 <<<

The kasper is being worked on as of this writing.

>>> 'ee143' problem from phillip -- Tue Mar 14 14:34:36 1989 <<<

The kasper is in a state of repair. The work on it will continue
Wednesday. (Let us not forget that this machine took a high voltage
hit through its circuitry about 4 months ago.)

>>> 'ee143' problem from phillip -- Wed Mar 15 14:38:46 1989 <<<

The kasper is back on the air. Clark states it's working to
his satisfaction. 
 The tc on linberg tube2 has been fixed.
The spinner has to be disassembled and cleaned. This will be done 
tomorrow, a.m.
 The Thermionics vacuum system is ready to be turned on. It will 
be on (by Mr. Parrish) for Mondays first section, if noone has
turned it up prior to that.
Probably not needed but there is some new spin on glass in the
microlab refrigerator.

>>> 'ee143' problem from phillip -- Thu Mar 16 12:28:29 1989 <<<

The white light microscopes now both work.

The spinner now works (well) again.

Thanx to Evan Stateler for his assistance today.

>>> 'ee143' problem from phillip -- Tue Mar 28 09:46:12 1989 <<<

Pertaining to the trouble report by Clark:
 a. The n2 gun nozzle has been replaced.
 b. A faulty lamp socket on the white light scope
    has been repaired.
 c. A larger vacuum ballast tank is being sought.
    The wafer still tends to looosen from the chuck
    before it has come to a complete stop.
From jlou Thu Mar 30 00:39:58 1989
Received: by argon (5.57/1.16)
	id AA13473; Thu, 30 Mar 89 00:39:51 PST
Date: Thu, 30 Mar 89 00:39:51 PST
From: jlou (Jen Chung Lou)
Message-Id: <8903300839.AA13473@argon>
To: ee143
Subject: evaporation
Status: RO

1.We do good AL evaporation on Monday's and Tuesday's sections.
2.The working pressure is 2x10-5. It takes about 30-35 min to get this pressure.3.It takes about 1 hour to get 7x10-6.It needs over 2hours to get 1x10-6.

4.I replaced new W wire. If next time you have the chance to replace new W wire, I suggest bake W wire with 20 AMP for 5 min.,40 AMP for 5 min and then 60AMP 
for 5 min to outgas some mess before we do evaporation.
5.I think we better add new AL for each evaporation run.
6.If you can't get LN ,try that big LN tank near the backdoor of heasrt mining
building.
                                                                      jlou


>>> 'ee143' problem from phillip -- Thu Mar 30 09:16:29 1989 <<<

P: Kasper will not focus.
   Spinner loses wafer from chuck before 0 rotation  is achieved.

S: Realigned lense within focusing tolerance for the split field
   function on the microscope. The kasper is fixed.

   Replaced local vacuum pump to allieviate the 'airborne wafer'
   phenomenon on the spinner.

   Mario brought a full large dwar on ln into the lab. 
   The best source of ln is still the microlab.

All reported problems are resolved.

>>> 'ee143' problem from phillip -- Fri Mar 31 08:54:51 1989 <<<

P: Spinner loses wafer from chuck when decelerating from < 4k rpms.
S: Replaced chuck temp. The original chuck is being repaired.
   The spinner is operational.

>>> 'ee143' problem from phillip -- Mon Apr 10 09:43:35 1989 <<<

P: Headway spinner allows wafers to become airborne towards
   end of its cycle.

S: Cleaned and resealed (as well as possible) internal vacuum
   line. Wafer held on chuck to complete stop 10 of 10 times.
   (This unit will be dismantled and ultrasonically cleaned @
    the end of the semester.)

>>> 'ee143' problem from phillip -- Wed Apr 12 11:45:31 1989 <<<

Carlos reports the kasper is acting up. It will be checked
before the 2:00 section today.

>>> 'ee143' problem from phillip -- Wed Apr 12 13:03:05 1989 <<<

The kasper is back to its normal self. It is working to 
Clark's satisfaction.

>>> 'ee143' problem from phillip -- Fri Aug 11 07:01:45 1989 <<<

I am temporarily borrowing 1 of the 2 Freeedom terminals
in rm.218.  It will be returned shortly.

>>> 'ee143' problem from phillip -- Fri Aug 11 08:46:02 1989 <<<

Terminal restored.

>>> 'ee143' problem from phillip -- Mon Aug 28 11:58:17 1989 <<<

Refurbished inner mechanism of Headway spinner.
Turned up all known apparatus except furnaces.
Toured all 4 ta's thru lab.
Still awaiting the LN2 gas service dewar from Amerigas.

>>> 'ee143' problem from phillip -- Tue Aug 29 12:48:02 1989 <<<

The problem with the air conditioner in rm.218 is being 
looked into.
pg

>>> 'ee143' problem from phillip -- Mon Sep 11 11:14:35 1989 <<<

Connected 'nanospec aft' in the photolith area.
This instrument is working to Weijie's satisfaction.,

The kasper is up and running also.

>>> 'ee143' problem from phillip -- Fri Sep 15 14:15:15 1989 <<<

I wish to thank Bill Flounders for his assistance
in a ta tutorial on linberg furnace operation.
Bill took everyone through furnace cleaning and operational
procedures today.
 Thank you, Bill.

pg   

>>> 'ee143' problem from phillip -- Mon Sep 18 07:52:10 1989 <<<

Per conversation and observation:
1. The 'Polymetrics' recirc d.i. bath has been sterilized.
   The difference now between the 'cell 1' setting (input bath
   water) and the 'cell 2 ' setting (d.i. bath output) is
   contaminants in the air.
2. The 4 pt. probe in the photolith room is in good working
   order. The current source 'S1' switch MUST be in the 'off'
   position to raise or lower the probe itself.
3. Another yellow filter for the scope lamp source will be in
   place before the 2pm section today.

>>> 'ee143' problem from phillip -- Mon Sep 18 08:04:40 1989 <<<

Addendum:
 The 'contaminants' referred to that reduce the resistivity
 of the d.i. bath is CO2 in the air. 
From weijie@janus.Berkeley.EDU Tue Sep 19 23:08:56 1989
Received: by argon (5.57/1.16)
	id AA24824; Tue, 19 Sep 89 23:08:51 PDT
Received: by janus.Berkeley.EDU (5.57/1.34)
	id AA15356; Tue, 19 Sep 89 23:04:57 PDT
Date: Tue, 19 Sep 89 23:04:57 PDT
From: weijie@janus.Berkeley.EDU (Weijie Yun)
Message-Id: <8909200604.AA15356@janus.Berkeley.EDU>
To: ee143@argon
Subject: oxidation update
Status: R


I did the gate oxidation this afternoon, 800A targeted thickness.
I used 40 min. dry O2 and 10 min. in N2, as described in the menu.
The thickness measured from nanospec were only  600A  ( 596 - 612A ),
while the calibration test is 1086A  on 1100A sample.  The gate oxide
thickness is confirmed later using the new Nanospec in the microlab.

Note: 1. the furnace temperature was 1046C+ right before loading the wafers
      2. O2 flow meter was turned all the way up to ensure sufficient O2
      3. No TCA was used during the oxidation
      4. 10% of O2 flow during loading the wafers.

Now, I've confirmed the Nanospec read-out is not a problem. Could anyone
think of any reasons for it ? 

Temporary solution:  use a little of TCA during the oxidation 
                     increase the time,  to 1 hour probably

Any other suggestions ? 

Weijie


From magneton Wed Sep 20 09:53:10 1989
Received: by argon (5.57/1.16)
	id AA29290; Wed, 20 Sep 89 09:53:06 PDT
Date: Wed, 20 Sep 89 09:53:06 PDT
From: magneton (Sam Osofsky)
Message-Id: <8909201653.AA29290@argon>
To: ee143, weijie@janus.Berkeley.EDU
Subject: Re:  oxidation update
Status: R

Weijie,
   I looked at some curves in Muller and Kamins for the dry oxidation
 and I think that my numbers 660 at 1050 for 0.6666 hours came out to
be pretty close to what it should be!!  Maybe at our 1:30 meeting we
 can go over what it really should be.
Sam


>>> 'ee143' problem from phillip -- Thu Sep 21 08:31:48 1989 <<<

P: Resistivity in 'polymetrics' bath not meeting desired
   output .
S: Sterilized  tank. Replaced water. When last checked,
   input h2O was 18+Mohms;return was 12Mohms.

>>> 'ee143' problem from phillip -- Wed Oct  4 08:28:54 1989 <<<

Restored 'polymetrics' recirc system to normal operation.
If any wafer particles made it into the system, it is
not affecting operation.

>>> 'ee143' problem from phillip -- Thu Oct  5 06:38:01 1989 <<<

Stereoscope illuminator bulbs have arrived. The 3rd
microscope is now available for use.

>>> 'ee143' problem from phillip -- Wed Oct 11 12:53:36 1989 <<<

Replaced 'nanospec' z29a terminal with 'ADM' type terminal.
The nanospec is available for use.

>>> 'ee143' problem from bob -- Thu Oct 19 14:49:37 1989 <<<

A new Ln cylinder has been installed in ee143. In addition the spike 
tc's were inspected and inserted to a proper depth. The calibration 
tc was rejunctioned and returned for use.

A check of the set point on tube2's  controller and the cal tc temp.
yields about 5 degrees difference with the mouth of the tube open. 
There appears no obvious problem with this furnace. Weijie has reported 
control parameters and oxidation yields are errant from past runs. A 
class is in progress now and if there are more problems, they will be 
further investigated.

The furnace system is considered up pending Weijie's report.

>>> 'ee143' problem from kim -- Tue Oct 24 10:12:30 1989 <<<

There may be an optic problem on the split field position on the
Kasper, because adjusting the split field from one position to another
the focus changes drastically.  The split field mode should be fixed
at one position for now to avoid focus adjustments?  Katalin will send 
someone to look into it later.  The focus from the separation mode to
the contact mode varies too much.  I defocus the focus on the separation
mode and the contact mode to compromise for its problem.

>>> 'ee143' problem from parrish -- Tue Oct 31 14:30:30 1989 <<<

problem:   1. pressure gauge not working
           2. high vacuum valve will not close
           3. the oil filter on the roughing-pump is completely saturated
           4. there is no exhaust conneted to the roughing-pump
           5. the bell jar has a chip in it.

cause:     1. bad tube in the electronics
           2. loose screw in the valve itself
           3. chip in the bell jar,resulted in long pumping time
           4. there were never one connected
           5. unknown,by whome or when

solution:  1. Ferenc replaced the electronic tube
           2. removed the valve, adjusted, tighten the set screw,
              cleaned and replaced the valve
           3,4,and 5 are still in process of being corrected.
 




>>> 'ee143' problem from parrish -- Wed Nov  1 13:18:08 1989 <<<

problem update:    as reported yesterday, we had a chipped Bell Jar
                   and there was no exhaust connected, and the filter
                   was clogged.

solution           the Bell Jar was repaired by epoxi-patch, and the
                   exhaust was corrected by installing a Balston Filter
                   with a 5 micron element, which eliminates the need
                   for an exhaust line.
                   System is up at a chamber pressure of 1x10-6

>>> 'ee143' problem from bob -- Thu Nov  2 13:59:32 1989 <<<

The evaporator in ee143 wouldn't vent on 1 occasion. Cycling again
and it worked fine. The evaporator is considered up and Weijie will
report any further problems.

The LN dewar in ee143 is empty and needs filing. Jules can do this 
first thing tomorow morning (Friday, Oct 3rd).

>>> 'ee143' problem from bob -- Fri Nov  3 08:38:06 1989 <<<

The N2 tank for the ee143 lab has been filled and returned to the
ee143 for use.
ee143 is up!

>>> 'ee143' problem from bob -- Mon Nov  6 07:46:56 1989 <<<

The ee143 lab was checked over and the kasper lamp restarted this morning
after the power shutdown on Sunday. Everything in the ee143 appears 
operational. The small evaporator is currently off.

>>> 'ee143' problem from phillip -- Fri Dec  1 06:40:39 1989 <<<

The 'freedom' terminal to the right hand side is not working.

>>> 'ee143' problem from phillip -- Fri Dec  1 07:15:26 1989 <<<

The 'kasper' has been rendered inactive for the duration 
of the semester.

>>> 'ee143' problem from phillip -- Fri Dec  1 13:54:30 1989 <<<

The exhaust fan for rm.218 has been serviced by Scott McNally.

>>> 'ee143' problem from phillip -- Mon Dec  4 09:47:55 1989 <<<

The SUPREM program problem was allieviated by Professor Howe.

>>> 'ee143' problem from phillip -- Mon Jan 22 10:51:03 1990 <<<

One of two port selector terminals is absent from the lab.
The trouble log indicates it was removed approx. 12/1/89
This needs be returned by the opening on instruction.

>>> 'ee143' problem from phillip -- Thu Jan 25 07:43:29 1990 <<<

P: "FREEDOM" port selector terminal gone from lab.
   Is there an ETA for when this terminal will be
   back on-line?

>>> 'ee143' problem from phillip -- Thu Jan 25 08:51:36 1990 <<<

There is no ICW currently in rm.218.  Scott McNally, the stationary
engineer, will be notified thru Eleta.
 Eleta, this is the 143lab (rm.218). Please have Scott check the
source of the water shutdown. Have him see me if access is required.
Thank you.

>>> 'ee143' problem from bob -- Thu Jan 25 15:05:58 1990 <<<

We are investigating improvements in the Kasper mask aligner.
There are several possibilities. We can upgrade the present tool
for easier use and more reliability or secure another tool.
One possibility is a Canon PLA500-501 FA contact/proximity aligner.
Tony Ha of Canon is looking into the availability of this machine.
Progress will be reported when more information is available.

>>> 'ee143' problem from bob -- Fri Jan 26 07:24:59 1990 <<<

A problem has been reported reagarding the loss of water pressure
for Rm 218. It is imperative that water be available. A phone call
will be placed to Eleta (Adm. Assistant for the Dept. Eng.)
as to the status of this repair. Urgency will be requested.

>>> 'ee143' problem from phillip -- Mon Jan 29 08:25:51 1990 <<<

ThThe Industrial Cold Water has been restored to rm.218.
Thanx to Eleta for her assistance.

>>> 'ee143' problem from phillip -- Mon Jan 29 09:33:41 1990 <<<

rm.218 update:

 1. All equipment (except furnaces) tested and operational
 2. The 'polymetrics' final d.i. rinse is recircing at 18Mohms.
 3. All gases replenished.
 4. The video cart and movie are in place per Prof. Cheung's request.
 5. Only one computer terminal in place. No status on
    the missing Freedom terminal.


Bill Partlo, I need to meet with you concerning daily
operation. Please contact me soon.

>>> 'ee143' problem from phillip -- Thu Feb  1 08:27:52 1990 <<<

Would the ta who last uses the video cart and movie please
let me know. I will retrieve the tv when you are done.

>>> 'ee143' problem from phillip -- Tue Feb  6 10:32:48 1990 <<<

Problem:  The small, free standing air conditioner in the 
          service chase of rm.218 is not working.

          Eleta, can you please have John Tusting check
          this out this week? The furnaces go on Monday
          morning and it will be unbearable then without
          the a.c.

>>> 'ee143' problem from phillip -- Tue Feb  6 11:35:00 1990 <<<

The air conditioner has been checked and found operating.

(Eleta, thank you for the timely service call)

>>> 'ee143' problem from phillip -- Wed Feb  7 06:38:16 1990 <<<

Al foil replenished per Ben Costello's request.
The hf sink aspirator will be checked.

>>> 'ee143' problem from bob -- Wed Feb  7 16:12:53 1990 <<<

The kasper chuck will not raise to the plate level. Likely the
bearing needs to be cleaned and oiled. This pm typically is
done at 6 mos. The hoses under the bearing are jamming the
chuck and preventing it from making the lower limit. These
will be rerouted when the bearing is oiled in the morning.

>>> 'ee143' problem from phillip -- Thu Feb  8 07:21:04 1990 <<<

P: kasper *not* working .
S: Replaced defected input air regulator.
   Reseated SV supply tubing. Set all
   internal regulators to correct values.
   Features tested.

The kasper is up and available for use.

>>> 'ee143' problem from phillip -- Fri Feb  9 09:03:29 1990 <<<

P: Poor exposure on part of wafer. (Perhaps the shutter is
   not opening?)

S: Shutter found in good working order.
   Replaced u.v. bulb. Aligned bulb intensity
   to view window.

The kasper is up.

p.s.  The furnaces have been turned on.

>>> 'ee143' problem from phillip -- Tue Feb 13 06:10:42 1990 <<<

P: Nanaospec terminal does not work (per Bill).
S: Reset terminal. When turning on the printer,
   instructions will print on the paper tape 
   prompting user for a 'yes' or 'no' on terminal
   use. 
   The nanospec and remote terminal are up and available
   for use.

(There is a nanospec manual located near the machine.)

>>> 'ee143' problem from phillip -- Fri Feb 16 09:02:01 1990 <<<

per cjkim's report:

1. There are 'scavenger ducts' at the front of each furnace
   tube. These are under negative pressure to the room. 
   The duct covers were closed. I slid them open.
   The tube exhaust is vented in this fashion.
2.The vacuum for the spinner has been repaired.
3.The sink aspirator on the right now works.

T.A.'s ,
 After rinsing and scratching bottle labels off
the empty bottles, put them in the trash containers
and the custodian will remove them.

Christine,
 Bill Partlo cleaned out the chemical c-lockers.
This created a one-time abundance of empty bottles.
There are discardable bottles in front of the c-lockers
and in the service chase.
 Please remove these to the microlab and dispose of them
accordingly.This should be a one-time task.
Thank you very much.

>>> 'ee143' problem from bob -- Tue Feb 20 10:55:35 1990 <<<

The spinner has problems with its vacuum control. I will discuss
with Phillip, a possible solution. In the meantime the spinner
is working and available. The foot pedal may require a couple
of actuations for operation.

The chuck is badly worn and needs replacing. An order for
a new one is bsing submitted.

>>> 'ee143' problem from phillip -- Tue Feb 27 10:29:52 1990 <<<

P: No n2 in dewar.
S: As is the plan, the n2 regulator was switched to 
   a reserve bottle directly next to the LN2 dewar.
The 143lab is up for use.

>>> 'ee143' problem from phillip -- Wed Feb 28 13:53:59 1990 <<<

P: Spinner will not spin.
   Furnace controls unmarked.

S: Activated supply air for vacuum eductor for spinner.
   Marked O2 supply furnace tube.

The problems as reported by Klaus are remidied.

>>> 'ee143' problem from phillip -- Mon Mar  5 08:04:36 1990 <<<

Per Ben Costello: A new apron has been placed in the process room.
Per Bill Partlo : The d.i. deck gun on the right hand sink that leaks
                  has been repaired.

>>> 'ee143' problem from phillip -- Tue Mar  6 14:05:36 1990 <<<

Replaced new washers in Galtek d.i. deck gun (per
cjkim's request).

A new pen has been placed on the blackboard.
More pens have been ordered (per cjkim's request).

>>> 'ee143' problem from phillip -- Wed Mar  7 08:09:30 1990 <<<

A short push/pull quartz rod has been placed on 
the furnace per Ben's request.

>>> 'ee143' problem from phillip -- Fri Mar  9 09:02:26 1990 <<<

(per cjkim's report)
P: The Headway spinner tosses wafers at the end of 
   the spin cycle.
S: Cleaned out/off much resist from in and around
   the vacuum port. Cleaned chuck and replaced o-rings.
   The spinner is up.


ta's please note: please TRY not to deluge resist
                  onto chuck or into spinner vacuum port.

>>> 'ee143' problem from phillip -- Tue Mar 13 08:08:55 1990 <<<

Turned off fans to (previoously turned off) furnaces.
Replenished glove supply.

The problems as reported by Bill are fixed.
From phillip Tue Mar 13 13:30:44 1990
To: ee143
Subject: polymetrics rinse tank
Cc: $pf/ee143-p


The cell selector switch works as follows:

Setting#1 is the input water. This should always be high ~14Mohms.
Setting#2 is the return water. Set the switch here while rinsing
wafers. You will see a dip. When this comes back to around 10Mohms
the wafers afre as clean as this tank will make them.

This is in answer to a question asked today.


>>> 'ee143' problem from phillip -- Tue Mar 13 14:34:43 1990 <<<

P: The spinner will not hold wafers. The analytical area is being
used so the problem will be repaired early tomorrow a.m.

>>> 'ee143' problem from phillip -- Wed Mar 14 07:34:59 1990 <<<

Replaced several parts of spinner chuck vacuum system.
The pr spinner is up and available for use.

>>> 'ee143' problem from phillip -- Mon Mar 19 06:46:06 1990 <<<

1. The sintering furnace (linberg#1) was turned on today.
   It should be ready for use after it stabilizes (by tomorrow).
2. Paper towels and kleenex have been supplied.
3. More AL staples and new evaporation boats have been ordered.

All requests by the ta's (for this lab) have been fulfilled.

>>> 'ee143' problem from parrish -- Tue Mar 20 10:43:45 1990 <<<

problem:    pirani gauge not showing pressure

cause:      the valving sequence not operating

solution:   took system out of automatic, manuelly operated the valves
            returned to automatic and sequenced the valving system.
            valves are opening and closing properly.

>>> 'ee143' problem from phillip -- Tue Apr  3 09:24:45 1990 <<<

P: kasper 'load manual' switch has no effect.
S: Restored air supply to machine.
   Replaced broken 'loaded manual switch
   cap. The kasper is up and available for use.

The lab session in progress was able to use this machine
and  DID NOT have to come to the microlab for their section.

>>> 'ee143' problem from phillip -- Thu Apr  5 07:00:30 1990 <<<

P: kasper exposure parameters are lacking in 
   uv lamp intensity.
S: Replaced exposure bulb. Collimated and
   adjusted exposure settings for maximum
   uniform intensity.
The problem as reported by Ben is repaired.
The kasper is up and available for use.

>>> 'ee143' fix from voros -- Mon Apr 30 08:41:32 1990 <<<

Jeff Lane from Quintel will be here tomorrow to pick up the Kasper
for the rebuild. Phil has been notified and will handle it.

>>> 'ee143' fix from phillip -- Tue May  1 06:52:01 1990 <<<

The kasper is 'bagged up' and ready for transport to
the factory for a retrofit. It is therefore OUT OF SERVICE.

>>> 'ee143' fix from phillip -- Wed May  2 07:23:46 1990 <<<

The kasper was picked up yesterday by Quintel and brought
to their factory. It is receiving the stage/loading retrofit.
It will be gone 4 to 6 weeks.
