>>> 'eaton' problem from rnorman -- Tue Jan  3 11:32:20 1989 <<<

Problem: Receive cassette doesn't index or jams up.

Cause: I could not duplicate this problem while running a total of
       about 50 wafers.

Solution: The hot plate was covered with PR and needed cleaning; so, I
          turned off the hot plate and cleaned it. The cool plate belt
          senser was a little out of adjustment; the belt was not turning
          on soon enough and the wafer would rotate. So, I adjusted the 
          senser. More wafers were ran and no problems occured. The eaton
          is up.

>>> 'eaton' problem from marilyn -- Thu Jan 12 09:43:03 1989 <<<

Problem: Error 51: Wafer not received by spindle when, in fact,
         there is a wafer there.

>>> 'eaton' problem from marilyn -- Thu Jan 12 09:59:52 1989 <<<

Problem: Error 51 (spindle not recognizing wafer)
Cause: Wafer chuck had photoresist on it
Solution: Soaked wafer chuck in acetone; tested several dummy
wafers.  The Eaton is up.

>>> 'eaton' problem from robin -- Tue Jan 17 13:10:31 1989 <<<

ERROR 44 - Carriage cannot reach "out" position.

Robert Norman is looking into the problem.

>>> 'eaton' problem from rnorman -- Tue Jan 17 13:51:09 1989 <<<

Problem: Error 44; carriage not reaching "out" position.

Cause: The carriage guide rods had some PR on them, and the carriage
       was sticking up.

Solution: The rods were clean with acetone and lubricated. The eaton was tested
          and is up.

>>> 'eaton' problem from weijie -- Sun Jan 29 14:26:34 1989 <<<


Wafer always stop on the belts right before entering the 120C softbake
oven while the temp of the oven is whithing range (120 +/- 0.2).
No alarm went off.  This happened for both prog. 8 and 10.

>>> 'eaton' problem from rnorman -- Mon Jan 30 09:21:10 1989 <<<

Problem: Wafers stop on belts before hot plate.

Cause: If the exit cassette is not down the wafers will stop before
       the hot plate, as in the problem above.

Solution: The eaton was tested and first got error 51; which was caused
          by PR stopping up the chuck vacuum. The system was tested again
          and no problem was found. The eaton is up.

>>> 'eaton' problem from jlou -- Mon Jan 30 16:45:46 1989 <<<

Problem: Error 33: elevator stuck
Note to rnorman: it IS stuck; I couldn't get it going either.  (MK)

>>> 'eaton' problem from jlou -- Mon Jan 30 21:17:57 1989 <<<

The sending cassette is stuck.

>>> 'eaton' problem from rnorman -- Tue Jan 31 08:44:11 1989 <<<

Problem: Send cassette was stuck.

Cause: Unknown, the worm gear was jammed.

Solution: I unplugged the send drive motor and moved the worm gear; I
          then went into the diag. mode and tested the indexer. The 
          cassette indexer now works well and the eaton is up.

>>> 'eaton' problem from robin -- Wed Feb  1 13:05:47 1989 <<<

Error 14:  Oven output buffer holding at least 5 wafers.

Tom Booth is working on this problem.

>>> 'eaton' problem from tom -- Wed Feb  1 16:46:48 1989 <<<

kError 14 keeps coming up: More than 5 wafers in output buffer.
I tried to reset the alarms but it does not work.  I changed the 
mode to disable alarm 14 but it does not work.  

	I noticed that the oven imput sensor is always on for both ovens.

>>> 'eaton' problem from rnorman -- Thu Feb  2 10:04:09 1989 <<<

Problem: Error 14; 5 wafers in output buffer.

Cause: It was a glitch in the electronics.

Solution: The main power to the electronics cabnet was turned off and the
          programs #8 and #10 were entered. I don't know program #17 and
         it is not in the Eaton wand manual, so I could not enter it in.
         Also, program #10 in the wand manual is wrong and #8 is not in
        there either. The eaton is up for use with program #8 and #10.

>>> 'eaton' problem from lyons -- Mon Feb  6 16:57:39 1989 <<<

could a list of the standard eaton programs and dedicated 
specialty programs be displayed with program number as is
now done with the mti (piece of paper in the service chase
window)?

a person with a short memory -- don lyons

>>> 'eaton' problem from marilyn -- Wed Feb 22 11:20:47 1989 <<<

No problem- hit the wrong key.

>>> 'eaton' problem from marilyn -- Wed Feb 22 11:21:28 1989 <<<

No problem- hit the wrong key.

>>> 'eaton' problem from robin -- Thu Feb 23 08:29:18 1989 <<<

Eaton spontaneously disabled itself, i.e., light on taurus box went off,
nitrogen purge shut off.  The computer continued to show the eaton as
enabled.  I disabled the eaton on the computer, then enabled it again.
This seemed to fix the problem.  I was running dummies at the time this
happened, but had I been running wafers, it could have been messy.  Any
ideas as to what could cause this??

>>> 'eaton' problem from phillip -- Thu Feb 23 08:35:40 1989 <<<

I was probably the cause of Robin's 'glitch' thru taurus.
I was working in the tauruschase and may have 'reset' the
incorrect function. Sorry if that caused any grief.
good grief!
pg

>>> 'eaton' problem from carlos -- Fri Feb 24 02:26:49 1989 <<<

The cassetes do not move at all

>>> 'eaton' problem from carlos -- Fri Feb 24 02:40:57 1989 <<<

it is workin fine now

>>> 'eaton' problem from jimmoon -- Mon Feb 27 10:20:54 1989 <<<

Entry cassette would not index down -- error #33.

>>> 'eaton' problem from rnorman -- Mon Feb 27 15:40:52 1989 <<<

Problem: The entry cassette would not index down.

Cause: The delron nut on the drive gear was jammed up; also, the
       system needed to be turned off to reset the electronics.

Solution: The entry drive gear, worm gear, was lubricated. The eaton
          was tested and is up for use.

>>> 'eaton' problem from eskim -- Mon Feb 27 18:07:58 1989 <<<

entry cassette does not index down.

>>> 'eaton' problem from eskim -- Mon Feb 27 19:26:27 1989 <<<

I tried Eaton again after about 5 min.  This time, the cassette was
loading the wafers fine initially.  Then after a while, it stoped
indexing the wafers down again.  Thus, I pulled out the cassette to
take out the wafers, at which time the cassette loader moved to the bottom
without any further upward movement.
Carlos had similar experience last Friday (the cassette loader working on
and off).  Looks like the problem does not exist all the time.

>>> 'eaton' problem from carlos -- Mon Feb 27 20:32:02 1989 <<<

same problem as outlined by eskim, but now neither cassete
moves. My guess is that there is a problem in the power supply
that drives the motors.

>>> 'eaton' problem from rnorman -- Tue Feb 28 13:23:08 1989 <<<

The wafer chuck sensor was adjusted down to 24" of Hg was around 25".

>>> 'eaton' problem from carlos -- Tue Feb 28 21:00:36 1989 <<<

vacuum alarm goes on after my 3rd wafer. Please repair this machine. 
It is driving me up the wall.

>>> 'eaton' problem from rnorman -- Wed Mar  1 11:56:05 1989 <<<

Problem: Vacuum alarm goes off.

Cause: The users wafer was not flat which caused a vacuum leak under
       his wafer.

Solution: I ran two cassettes of about 10 wafers with no problems.
         The eaton is up.

>>> 'eaton' problem from carlos -- Thu Mar  2 22:53:26 1989 <<<

Again, the cassetes do not register. This is the 4th time I 
report this problem.

>>> 'eaton' problem from jimmoon -- Fri Mar  3 07:29:40 1989 <<<

Same problem as Carlos reported -- cassette won't index down.  Sigh.

>>> 'eaton' problem from rnorman -- Fri Mar  3 08:38:05 1989 <<<

Problem: Cassettes not indexing down.

Cause: Unknown, it looks like we are having an intermittant problem
       with PCB that controlls the operation of the both cassettes.
       
Solution: I tested the eaton, but sorry to say I could not duplicate the
          problem. I will look into the problem further, but at this time
          the eaton is up. If and when it happens again try turning off
          the "POWER", the button on the left; if this fixes the problem
          it would tell me the PCB it latching up.

>>> 'eaton' problem from rnorman -- Fri Mar  3 11:59:38 1989 <<<

Problem: Cassettes not indexing down.

Solution: I went into the electronics cabnet and reset the PCB that
          controlls the indexers, 3 PCB's back. This should prevent
          the problem from occuring in the future. Let me know if 
          it happens again.  The eaton is up.

>>> 'eaton' problem from rnorman -- Fri Mar  3 16:46:03 1989 <<<

The eaton entry cassette is continuing to go up and down.
It is down hard. Sorry.
.

>>> 'eaton' problem from bill -- Fri Mar  3 16:48:17 1989 <<<

Cassette not feeding wafers to chuck,
the cassette indexes up and down with no trouble
but the belt does not turn on and advance the wafer
at the bottom of the cassette.
Already reported problem to Robert Norman.

>>> 'eaton' problem from bill -- Fri Mar  3 17:07:47 1989 <<<

Same problem - indexing up and down
Tom isolated trouble to stuck reset button

>>> 'eaton' problem from rnorman -- Mon Mar  6 09:33:37 1989 <<<

Problem: Start indexer goes up and down non-stop.

Cause: Tom Booth found the RESET button shorted out.

Solution: The RESET button was replaced and the eaton was tested.
          No problems were found, so the eaton is up.

>>> 'eaton' problem from jlou -- Mon Mar  6 22:37:19 1989 <<<

Eaton can not send the wafer to the right position(spinner).
                                                        jlou

>>> 'eaton' problem from jimmoon -- Tue Mar  7 07:48:45 1989 <<<

Error 82 -- "Illegal wafer on spindle".  This is presumably
the same problem as was encountered by jlou last night.
Tried turning off the power as suggested about a dozen times.
No luck.  There is not a wafer on the spindle, despite the
error message.  When the power is turned off the spindle retracts;
when turned on again, though, it pops right back up and you get
the same error message.  #*!%$@^ piece of junk.

>>> 'eaton' problem from rnorman -- Tue Mar  7 09:36:13 1989 <<<

Problem: Error; illegel wafer on spindle.

Cause: The chuck vacuum was clogged with PR.

Solution: I cleaned the chuck and the vacuum catcher bowl, which
          had alot of PR in it. I will keep an eye on the bowl to
          see how soon PR gets in it. The eaton was tested by running
          10 wafers with recipe 10 and no problems occured; it is up.

>>> 'eaton' problem from eskim -- Thu Mar  9 00:22:49 1989 <<<

Standard program for KTI820 has a problem in waiting time before
spinning photoresist.  Normally, it waits about 1 min. after
a wafer is loaded in the wafer chuck before dispensing photoresist,
so that there is enough time for 60 sec. soft bake.  Hoops!  It is
30 sec., not 1 min. in the above statement.  
But Eaton won't wait about 30sec. before dispensing photoresist and
spinning, and moves the wafer in hot plate even before 1 min. duration.

>>> 'eaton' problem from rnorman -- Thu Mar  9 14:37:03 1989 <<<

I checked out the program problem by eskim; it had a shorter delay
time on step 1, so it was reprogrammed. The bad news is when I was testing
the program the cassettes would not index down no matter what was done.
In short, it looks like we have a bad Indexer PC Board. Evan is looking
into it now. The eaton can be ran in "Manual" mode, but not auto; meaning
you can apply PR and spin, but no bake; the bake could be done in the oven.

>>> 'eaton' problem from evan -- Thu Mar  9 16:24:46 1989 <<<

problem with indexing still remains.  It also appears that the programs
are all gone.  I do not know how to restore them myself.
the eaton is down 

>>> 'eaton' problem from evan -- Thu Mar  9 16:59:44 1989 <<<

the last power-up brought all functions back to life.
tom re-programmed the standard programs and several test wafers
were successfully run.
the eaton is up (but the reoccuring cassette indexing is still a problem)

>>> 'eaton' problem from tom -- Thu Mar  9 17:26:17 1989 <<<

Wafer jumps when the hot plate goes down.  I think the puffer valve
might not be working or the vacuum is not turning off.

>>> 'eaton' problem from carlos -- Fri Mar 10 01:30:26 1989 <<<

I seems that it is not delivering enough resist. Please try 
a std lithography and check it out.

>>> 'eaton' problem from marilyn -- Fri Mar 10 13:53:59 1989 <<<

Problem: Wafers were flipping off the hot plate
Cause: 2 of the check valves in the pneumatic box were bad
Solution: The 2 valves were replaced by Robert Norman and dummy
          wafers run through; the Eaton is up.

>>> 'eaton' problem from jchung -- Sat Mar 11 14:42:32 1989 <<<

Wafer cassettes did not operate.
Am attempting to restore operation by turning eaton on/off.

>>> 'eaton' problem from gian -- Mon Mar 13 13:29:49 1989 <<<

Error Number 75, Track stops when wafer goes onto hot chuck.

>>> 'eaton' problem from evan -- Mon Mar 13 14:48:29 1989 <<<

problem: error 75
cause: possible warped wafer??
soln: dummy wafers were run through successfully. no reoccurence of
error 75, 'wafer not centered or vacuum not obtained.

eaton is up

>>> 'eaton' problem from robin -- Fri Mar 17 07:28:28 1989 <<<

First wafer of lot does not reach receiving cassette after leaving cold chuck.
After pushing this wafer into cassette, remaining wafers progressed all the
way into cassette as usual.  This happened twice.

>>> 'eaton' problem from rnorman -- Fri Mar 17 09:04:11 1989 <<<

Problem: The 1st wafer doesn't go all the way into the cassette.

Cause: Some cassettes are made a little differant then others; the 
       cassette in question belongs on the lams not the eaton.

Solution: I took the cassette back to the lam and took the cassettes
          with PR on them back to the eaton; all the cassettes now
          work on the eaton. The cassettes on the lams have been 
          marked "LAM"; this will also keep the lam cassettes clean
          and contamination free. 

NOTE: In the future do not mix cassettes between the LAMs and Eaton.

>>> 'eaton' problem from jchung -- Fri Mar 17 15:55:05 1989 <<<

The exit cassette can only accept 2 wafers before it refuses
to index.  The manual raise/lower mechanism still functions.

>>> 'eaton' problem from rnorman -- Fri Mar 17 16:38:13 1989 <<<

Problem: Exit cassette only accepting 2 wafers and makes a funny noise.

Cause: The worm gear, gear that drives the cassettes up and down, was
       sticking and not indexing up.

Solution: The gear was lubricated and indexed up and down manually a
          few times; then I ran 3 or 4 cassettes of about 6 wafers.
          The eaton is now up for the weekend.

>>> 'eaton' problem from bill -- Wed Mar 22 12:34:33 1989 <<<

Problem with chuckl height -
wafers having trouble loading and unloading 
from the spinner chuck - it seems a little high.
Bill

>>> 'eaton' problem from marilyn -- Wed Mar 22 16:27:53 1989 <<<

Problem: wafer chuck on a little too high
Solution: next user pushed it down; the EAton is up.

>>> 'eaton' problem from marilyn -- Tue Mar 28 10:56:37 1989 <<<

Problem: Error 75: wafer not centered or vacuum not attained
         (happens wafer after wafer)

>>> 'eaton' problem from rnorman -- Tue Mar 28 15:32:33 1989 <<<

Problem: Error 75, Vacuum not attained.

Cause: It looks like it was common only to 2 wafers.

Solution: I ran a stack of wafers and kept getting error 75 on the
          same 2 wafers, so I through them out. The eaton was tested
          and now works well.

>>> 'eaton' problem from rnorman -- Thu Apr  6 09:28:52 1989 <<<

The eaton will be down for an hour or so to install the new 
battery back-up board.

>>> 'eaton' problem from rnorman -- Thu Apr  6 12:11:41 1989 <<<

Problem: Programs lost when the system power is off.

Cause: Bad batteries on the back-up supply.

Solution: Installed new batteries and tested the eaton by turning
          off system power after programming in recipe #8 and #10; no
          programs were lost. Recipe #17 and #18 are not in the manual
          or in the log so I could not program them in. Also, the 
          recipe #10 in the lab manual is wrong; all the recipes
          should be in the manual, there was only #10. The eaton
          is up for use with recipe #8 and #10 only at this time.
          Output power from the Battery Back-up supply board is at
          approx. 13Vdc; from the battery board is approx. 10Vdc.
          The Saft Ni-Cad battery part number is 400701-37 from
          Energy Sales in Mt. View.

>>> 'eaton' problem from gian -- Thu Apr  6 16:59:01 1989 <<<

Wafers are not advancing onto the hot chuck.  
-David Giandomenico

>>> 'eaton' problem from rnorman -- Fri Apr  7 09:16:42 1989 <<<

Problem: Wafers not advancing onto the hot plate.

Solution: I could not duplicate the problem, but this is usually caused
          by the exit cassette being up; the cassette has to be down for
          the wafers to continue onto the hot plate. Eaton is up.

>>> 'eaton' problem from bob -- Mon Apr 10 08:41:03 1989 <<<

The eaton is alarming with an error 76, belt not home.

>>> 'eaton' problem from rnorman -- Mon Apr 10 09:16:28 1989 <<<

Problem: Error 76, belt not at home.

Cause: a random error, could not duplicate.

Solution: 5 wafers were ran through and no problem 
          occured; the eaton is up.

>>> 'eaton' problem from eminami -- Mon Apr 10 12:31:17 1989 <<<

Load/Receving carriages do not go down.  When the machine is 
enabled and sensor & purge supply is turned off, there is a hissing
noise from the machine which I have not notice before.
Vacuuum, track presure, etc. seems to be okay.

>>> 'eaton' problem from rnorman -- Mon Apr 10 14:54:08 1989 <<<

Problem: Cassette not indexing down.

Solution: Tested and found no problem; it probably was the N2/ Air 
          failure that caused the error. The eaton it up.

>>> 'eaton' problem from vilma -- Fri Apr 14 08:41:23 1989 <<<

esbelt stuck error #76

>>> 'eaton' problem from vilma -- Fri Apr 14 08:58:39 1989 <<<

I tested the eaton real quick and we have an error 35; indexer
not present. We had this problem before and we almost replaced
the indexer board; well maybe we should have. No matter what I
do to the eaton the indexers are not working; we have a latched
up chip or bad chip on the indexer board. Last time, after awhile,
it reset itself. So, I'll try it again; all eaton power is turned off,
even battery bake-up is off; this is in hope the chip will unlatch.

>>> 'eaton' problem from rnorman -- Fri Apr 14 16:26:52 1989 <<<

The eaton was given CPR all day but I'm afraid it is down hard. Steve and
I  checked it out but it is hard to troubleshoot a board with out an
extender card. The indexer card is just not responding to any commands,
even diagnostics is useless. I will shut-down all system power for the
weekend and next week we will begin again. Unless it "fixes itself" it
doesn't look good.

>>> 'eaton' problem from rnorman -- Mon Apr 17 09:47:15 1989 <<<

An exterder card and harness has been ordered for the eaton electronics
cabnet; extender PCB # 1135-00044, LSI 45 Service Harness # 506-35069-01.
Talking with Field Service they said they have seen this problem
before that the address chips went out; Z29, Z28 or Z21. Without the
extender card to troubleshoot we will replace these IC's and see what
happens. You will be informed of the progress.

>>> 'eaton' problem from hoagland -- Tue Apr 18 14:22:37 1989 <<<

The eaton is up.  A report on the repair will follow shortly.

>>> 'eaton' problem from mats -- Tue Apr 18 15:37:43 1989 <<< [No Comment]
>>> 'eaton' problem from mats -- Tue Apr 18 15:52:13 1989 <<<

Tried running program 10 on a test wafer. It would not advance onto
hot plate (error 73- oven too hot). I got the wafer out with program 0.
Now I can't run any program or reset either wafer carrier.

>>> 'eaton' problem from tom -- Tue Apr 18 16:05:06 1989 <<<

Problem: User reports wafers not going onto hot plate.

Cause: Unknown.  Could not duplicate problem.

Solution: Try it.  It works.

>>> 'eaton' problem from hoagland -- Tue Apr 18 16:46:49 1989 <<<

problem:  CPU does not recognize indexer card.

cause:  It appears a bad connection between Z30 pin and IC socket
        dragged D0 line low disabling input/output port.  Removal and
        reinsertion of IC corrected problem.  Note that SW9, address
        select switch on indexer card, is upside-down in schematic
        with respect to real switch, which is installed backwards.
        Switch number does seem to correspond to correct track select.

solution:  Remove and reinstall IC causing problem.  

>>> 'eaton' problem from lyons -- Sat Apr 22 17:26:15 1989 <<<

twice I have noticed a random error when the machine is not in use.
error 33 (elevator stuck).

>>> 'eaton' problem from rnorman -- Mon Apr 24 11:54:03 1989 <<<

Problem: Error 33, elevator not present.

Cause: This is the random or intermittant problem that has been
       effecting us for 2 or 3 month now. The system doesn't see
       the Indexer board, due to some chip latching up.

Solution: The problem was not repeatable and the eaton is up.
          

>>> 'eaton' problem from phillip -- Tue Apr 25 07:01:37 1989 <<<

This machine is 'alarming'.

>>> 'eaton' problem from lyons -- Tue Apr 25 12:59:25 1989 <<<

error 33 came up after I finished spinning my wafers.  the
unload elevator was bouncing up and down about an inch.  it
was in the fully up position then would start down but would
start back up after only going down 1" or so.  this was 
without me hitting reset or start to make it want to go down.
finally it made it all the way down and stopped.  the machine
appears to be operational but has this reoccuring (albeit
random) problem.

>>> 'eaton' problem from carlos -- Tue May  9 02:48:47 1989 <<<

The rubber band of the exit cassete does not move

>>> 'eaton' problem from rnorman -- Tue May  9 09:11:42 1989 <<<

The exit cassette belt drive motor is froze up; so wafer do not 
load into exit cassette. I am working on the problem and may need
to change to motor out. I don't know how long it will take at this
time, you will be informed. The good news is wafers can be processed
up to the exit cassette; at that time they will need to be removed
manually, if you can not wait for it to be repaired.

>>> 'eaton' problem from rnorman -- Tue May  9 10:07:51 1989 <<<

Problem: Exit cassette belts not unloading wafers.

Cause: The motor was froze up for a little bit, dragging.

Solution: I removed the motor, turned the spindle shaft a little,
          measured the voltage to the motor, 18Vdc and then
          reassembled. It works good now. I will order another
          belt drive motor to have on hand when the motor truly
          fails. The eaton was tested and is up for use.
v

>>> 'eaton' problem from robin -- Tue May  9 12:22:37 1989 <<<

Wafers still do not proceed all the way into exit cassette.  Must
be removed manually.

>>> 'eaton' problem from robin -- Tue May  9 12:28:52 1989 <<<

EATON GONE BERZERK!
The wafers were not proceeding into the exit cassette.  Then, suddenly,
the cassette began moving up and down erratically.  Alarm sounded
repeatedly and could not be stopped until the system was stopped.
Now the motor on the track from the delivery cassette is running
continuously, accompanied by an unhealthy ratcheting noise.

System unusable.

>>> 'eaton' problem from rnorman -- Tue May  9 12:50:52 1989 <<<

Problem: Erratically operating

Cause: I turned off the operator pannel power and turned it back on.
       Also, I found the exit cassette motor unpluged; I remeasured the
       motor voltage after I reported it up and did not plug it back in,
       sorry. 

Solution: The operator pannel "power" was turned off and then back on.
         And the power to the motor was restored. The eaton was tested
         by running 8 wafers through and no problem occured. IT is up.

>>> 'eaton' problem from robin -- Mon May 15 07:46:15 1989 <<<

ERROR 71 - WAFER DID NOT ARRIVE AT OVEN OUTPUT has occurred sporadically
over the past several days.  Removing the oven cover and sliding the wafer
forward a bit alleviates this problem.

>>> 'eaton' problem from rnorman -- Mon May 15 11:21:32 1989 <<<

Problem: Error 71, wafer did not arrive at oven input.

Cause: This error I have seen before, but I could not dupicate it
       this time. Sometimes this is caused by the exit cassette not being
       down and the wafers waiting at the transport track between the process 
       station and the oven. I'm not sure what caused it this time.

Solution: I ran 4 cassettes of 10 wafer each and did not duplicate the 
          problem. To help me in the future to find the cause please
          give more details, such as: were the wafer stopped when
          the error occured, which recipe was being ran, how many
          wafers were ran before failure, or any other pertinent information.
          The eaton is up.

>>> 'eaton' problem from bill -- Tue May 16 13:53:48 1989 <<<

Not serious but bothersome -
I did not see the random error 71 that Robert reported
but I received error 75 -
wafer not centered or vacuum not attained many times -
even when there was no wafer supposed to be on the chuck ??

>>> 'eaton' problem from rnorman -- Tue May 16 14:25:12 1989 <<<

Problem: Error 75, wafer not centered.

Cause: Intermittent hot and cold plate errors. The hot and
       cold plate randomly go up when no wafer is there; this
       is cause by the wafer sensor at each plate thinking a
       wafer is there.

Solution: I adjusted the hot and cold plate sensor sensitivity and
          also the N2 to the sensor tube. 20 wafers were ran and no
          problem was found. The eaton is up. Please keep me informed
          of this problem.

>>> 'eaton' problem from martin -- Wed May 24 11:42:26 1989 <<<

Error 33: elevator stuck/Eaton cannot be used.

>>> 'eaton' problem from tom -- Wed May 24 13:21:53 1989 <<<

Problem: Load elevator stuck.

Cause: Unknown.  Elevator went to high and jamed.

Solution: Manual turning of drive screw to loosen shaft.

>>> 'eaton' problem from jlou -- Wed May 24 17:08:19 1989 <<<

cassette can not send wafers out.

>>> 'eaton' problem from carlos -- Thu May 25 14:32:33 1989 <<<

The load cassete is not indexing.
please fix it asap.

>>> 'eaton' problem from bob -- Fri May 26 07:43:35 1989 <<<

The problem with the eaton reported by carlos, "load cassette is not
indexing" appears to be the result of the dispense heads being moved
out of position. carlos put them in the appropriate position and
reports the eaton up.

>>> 'eaton' problem from rnorman -- Tue May 30 14:49:03 1989 <<<

Problem: Error 71; wafer did not arrive at oven input.

Cause: I duplicated the problem! The wafer was not making it
       to the sensor tube, but was just short by 1/8". This
       shortness gives the error and was caused by the optical
       sensor on the hot/cool transport cables not being made.
       
Solution: The optical flag was twisted a little and was not making the 
          sensor every time. The optical flage on the hot plate was
          adjusted and 6 cassettes of 8 wafers were ran to test it.
          The problem was not duplicated, so the eaton is operational
          at this time.

>>> 'eaton' problem from rnorman -- Thu Jun  1 16:29:55 1989 <<<

The eaton is again having indexer problems. The exit indexer is 
driving up always and at times the transport belts inbetween the
process and hot plate comes on, along with the unload belts.
The exit indexer is always showing LED 6 on, the reset button; though
the reset button is not shorted. Along with #6 being on #4,#2,#1 and
#0 are on; #4 being the only unshure LED, because #5 was on earlier.
LED's #4 and #5 tell the "Indexer Type".
Also, we are getting error 33 continuously, even if the cable to the
exit indexer is disconnected, cable J33-D2. The eaton will be down for an
unknown amount of time, atleast late tomorrow.

>>> 'eaton' problem from rnorman -- Fri Jun  2 09:24:37 1989 <<<

Problem: Exit indexer giving error 33, indexer stuck; and the LED #6
         was stuck on, indexer reset button; the exit indexer and at times
         the start indexer was driving up continually.

Cause: The problem was most likly a latched up chip on the indexer board.

Solution: The eaton was reset by turning off the power and the cable under
          the exit indexer was disconnected. I don't know if any of this
          did anything to reset the problem, but the eaton is working now
          with no problems.  The real problem is that we have an intermittent
          chip on the Indexer board some place. The eaton is operational.

>>> 'eaton' problem from moazzami -- Sun Jun 11 15:03:02 1989 <<<

Deposited resist is very nonuniform especially at the center.
Some wafers also had streaks.

>>> 'eaton' problem from rnorman -- Mon Jun 12 09:10:37 1989 <<<

Problem: Nonuniform PR deposition, streaks.

Cause: The PR hose may not have been centered, could not 
       duplicate the problem.

Solution: Ran 6 wafer on program 10 and they looked good.
          the eaton is up.

>>> 'eaton' problem from mikeb -- Wed Jun 14 09:36:00 1989 <<<

Error 82, illegal wafer on spindle.  There is probably a photoresist
clog in the vacuum line leading to the spindle. 
Eaton is not functional.

>>> 'eaton' problem from martin -- Wed Jun 14 11:41:23 1989 <<<

repeated problem reported by m. burns
error 82  illegal wafer on spindle

>>> 'eaton' problem from rnorman -- Wed Jun 14 11:59:39 1989 <<<

Problem: Error 82, illegal wafer on spindle.

Cause: The chuck vacuum sensor was out of adjustment.

Solution: Adjusted chuck vacuum sensor and tested; the eaton is up.

>>> 'eaton' problem from kim -- Thu Jun 22 15:35:29 1989 <<<

When the wafers go on the spin chuck, they scrape the side of the 
shield.

>>> 'eaton' problem from parrish -- Fri Jun 23 09:49:40 1989 <<<

problem:   fumes from the oven

cause:     no exhaust hooked up

solution:  installed exhaust to existing port

>>> 'eaton' problem from kim -- Fri Jun 23 18:03:41 1989 <<<

The alarm keeps going on and the black belt on the receiving 
is turning all the time, yet it doesn't lower to receive wafers.

Kim

>>> 'eaton' problem from rnorman -- Mon Jun 26 14:09:11 1989 <<<

Problem: Keep getting error 33, Elevator stuck; and the belts
         on the receiving indexer are on all the time.

Cause: The indexer will not lower when the belts are on; so, thats
       why the indexer is stuck.  The belts turn on randomly due to
       a chip being latched-up.  I traced the signal back to Z35 a
       74LS273, "D" flip-flop with reset.  Talking to Steve he said 
       that these flip-flops do latch up at times.

Solution: Pin 15 on the Z35 was always high and without the correct
          equipment it is very hard to see if the "logic" to the
          chip is triggering the high output or if the chip is just
          latched-up; pin 15 turns on the exit belts. So, I just
          replaced the chip, $0.65, to see what happens.  After
          that problem went away; it's not possitive that the chip
          failed or that by pulling the board out reset the problem.
          The eaton is up for use for programs #8, #10 and #17; I
          don't know programs #16 and #18, so they will still need to
          be programmed in.

>>> 'eaton' problem from jimmoon -- Thu Jun 29 07:44:36 1989 <<<

Wafers are not being transported properly from the chuck to the
hot plate.  They stall before triggering the hot plate stage,
resulting in an Error 71 -- "Wafer did not arrive at oven input".
It is possible to continue by silencing the alarm, pressing START,
then nudging the wafer ahead until it is sensed at the hot plate,
at which time the stage will rise and the minute of hard bake will
be counted down.  One wafer at a time is advisable.

>>> 'eaton' problem from rnorman -- Thu Jun 29 11:55:58 1989 <<<

Problem: Error 71, wafer did not arrive at oven input; the wafer was
         stopping on the transport belts.

Cause: There were 2 causes: the transport belt speed was too slow and
       the wafer input sensor was always on, status 0 on oven function
       codes was always on.

Solution: The transport belt speed was incleased; turned R38 CCW on indexer
          I/O board. Also, the "Wafer Input Sensor" to the hot plate was 
          replaced, part# 3101-00206.  I ran 12 wafers with no problems,
          the eaton is up.

>>> 'eaton' problem from jchung -- Mon Jul  3 14:11:53 1989 <<<

Suggested modification to program 16 (Hunt PR):

Add about 50% more to the automatic deposition.
This will insure complete coverage of the wafer.

>>> 'eaton' problem from jlou -- Mon Jul  3 22:11:26 1989 <<<

Everything is O.K. after I coat the first 25 wafers. WWafers are stuck
on the spin chuck after I load 2nd 25 wafers.
                                               Jlou

>>> 'eaton' problem from jlou -- Tue Jul  4 17:16:17 1989 <<<

I found some mess on the spin chuck.After I clean it ,wafers still can't
move to the hot plates but spin on function is O.K..
                                                     Jlou

>>> 'eaton' problem from jimmoon -- Wed Jul  5 08:14:35 1989 <<<

Error 76 -- "Belt not home, belt not out, or belt stuck."
I was able to at least get the PR spun on by leaning CONTINUALLY
on the start button.  My thumbs will never be the same.

>>> 'eaton' problem from rnorman -- Wed Jul  5 10:49:13 1989 <<<

Problem: Error 76--Belt not home. Also, the exit cassette was not 
         indexing down.

Cause: "Belt not home" was caused by the hot plate belt sensor flag
        being tilted below the "home" sensor.  And , of course, the
        cassette not indexing down was caused by the "Indexer Board"
        latching up.

Solution: The belt sensor flag was adjusted back into possition. And the
          operator pannel "power" was turned off for 10 sec. to reset the
          Indexer Board, this DOES NOT remove any program memory.  The
          eaton was tested and is operational at this time.

>>> 'eaton' problem from marilyn -- Wed Jul  5 11:46:48 1989 <<<

Problem: Error 75: Wafer not centered, etc.
         The wafer will not move onto the hot plate
         Also, the receive cassette keeps moving up and down.

>>> 'eaton' problem from rnorman -- Wed Jul  5 16:44:27 1989 <<<

Problem: Error 75 and the exit cassette is moving up and down.

Solution: All the above was not repeatable, but I sure the cassette problem
          was caused by the indexer board latching up again.  The eaton
          is up.

>>> 'eaton' problem from tom -- Thu Jul  6 14:11:51 1989 <<<

Adjusted the nozzle position and dispense ammount to insure complete
coverage of the wafers with Hunt PR.

>>> 'eaton' problem from rwilliam -- Mon Jul 10 15:00:08 1989 <<<

seems ok now, but...

Came in and it was howling, as the receiving cassette did the
hokey-pokey.  UYh, that is to say it went up and down about
a centimeter maybe three times a second.  I reset the casette,
it continued; reset again, continued; third reset "fixed" it.
It listed error #33, elevator stuck; but now it seems happy...

>>> 'eaton' problem from marilyn -- Wed Jul 19 11:34:40 1989 <<<

Problem: Encountered 2 errors:
         70: wafer lost from oven output
         71:   "   did not arrive at oven input
Error 71 occurred first.

>>> 'eaton' problem from rnorman -- Wed Jul 19 13:22:16 1989 <<<

Problem: Error 71, wafer did not arrive at oven input

Cause: this is one of the random errors; but I did find the hot
       plate sensor tube off center, which could cause an error.

Solution: Adjusted sensor tube to center of hot plate.
          The eaton is up.

>>> 'eaton' problem from field -- Wed Jul 26 13:12:06 1989 <<<

I see a bubble in the photoresist after it is deposited, before
it is spun, on each wafer.  There may be air in the PR line?

>>> 'eaton' problem from marilyn -- Wed Jul 26 15:10:50 1989 <<<

Problem: A user reported that the resist line had an air bubble
         in it which in turn caused another bubble on the wafer
Cause: A large bubble was removed from the line the day before;
       apparently there was a bubble left in the line where it
       couldn't be seen
Solution: Adjusted suck-back; spun 10 dummy wafers using Program 8.
          No bubbles appeared; the Eaton is up.

>>> 'eaton' problem from rnorman -- Mon Jul 31 13:18:36 1989 <<<

Problem: Error 82, illegal wafer on chuck.

Cause: I over adjusted the vacuum switch for a user.

Solution: The eaton thought a wafer was on the chuck because
          the vacuum switch was met.  So, I readjusted the 
          switch and tested the eaton.  It is now up for use.

>>> 'eaton' problem from tom -- Wed Aug  2 10:53:10 1989 <<<

Exhaust not as good as can be.  There are some panels that are meant 
to insure proper exhaust in the ovens. They need to be screwed on.
Robert Norman knows which ones.

>>> 'eaton' problem from kim -- Wed Aug  2 14:49:06 1989 <<<

Problem:  error C 75; vacuum leak on the cold plate.

>>> 'eaton' problem from rnorman -- Thu Aug  3 11:49:04 1989 <<<

Problem: Error 75; vacuum leak on cold plate.

Cause: There was a little glob of PR on the cold plate which
       caused a vacuum leak under the wafer.

Solution: I cleaned the cold plate and tested; no further problem.
          The side panels under the hot/cold plate area were also
          attached; this will inclose the hot plate so that the 
          fumes from baked PR may be vented up the vacuum exhaust more
          efficiently. The eaton is up.

>>> 'eaton' problem from eskim -- Thu Aug  3 14:50:40 1989 <<<


The vacuum for the wafer spindle is turning off very slowly.  It seems
like taking about 5 seconds to turn off completely.  Robert Norman has
pinned down the problem to the solenoid that controls the vacuum on and off.
He said it would have to be ordered, which might take a day or so.
Meanwhile, you can try to run it manually, giving enough time for the 
vacuum to turn off completely.

>>> 'eaton' problem from eskim -- Thu Aug  3 16:27:34 1989 <<<

The vacuum problem that I reported about an hour ago seems to be
gone now.  Robert Norman will verify this tomorrow.  Meanwhile,

>>> 'eaton' problem from rnorman -- Fri Aug  4 07:28:59 1989 <<<

Problem: The wafer was not being released from the chuck and
         and alarm error occurred.

Cause: The Chuck Vacuum Solenoid, eaton #0101-00191, a 24Vdc 3-way solenoid,
       was sticking and not venting the chuck quickly; like it was gummed up.

Solution: According to users it freed itself. I tested the eaton by
          running 5 dummy wafers and no problem occurred. The eaton
          is up.

>>> 'eaton' problem from rnorman -- Fri Aug  4 10:37:16 1989 <<<

Problem: The solenoid valve for the vacuum chuck was sticking.
         
Cause: I took the valve apart and found it full of PR.

Solution: The valve was disassembled and cleaned of all PR
          residue.  The valve was installed and tested in the 
          eaton; it is up for use.
:wq

>>> 'eaton' problem from jsanchez -- Fri Aug  4 11:26:15 1989 <<<

Vacuum sensor for eaton is misadjusted, so that machine thinks a wafer is there when there isn't.  Is there a correlation between this intermittent problem and 'nonstandard' wafer processing (ie wafers requiring special vacuum sensor settings)?
john

>>> 'eaton' problem from jsanchez -- Fri Aug  4 11:55:44 1989 <<<


Vacuum sensor on chuck was malfunctioning, but RNorman fixed, and it is working fine.
john

>>> 'eaton' problem from rnorman -- Fri Aug  4 12:39:58 1989 <<<

Problem: error 82; illegal wafer on chuck.

Cause: Due to me cleaning the chuck vacuum solenoid there was more
       vacuum on the chuck; so it looked like a wafer was on the chuck.

Solution: The chuck vacuum sensor was adjusted for the increased vacuum
          now to the chuck. The eaton was tested and is up.

>>> 'eaton' problem from moazzami -- Mon Aug  7 12:42:46 1989 <<<

Error 33: Elevator stuck  (one of the receive elevator belts is moving
continuously).

>>> 'eaton' problem from carlos -- Mon Aug  7 16:18:45 1989 <<<


The alarm doesn't stop beeping

>>> 'eaton' problem from bob -- Tue Aug  8 13:51:10 1989 <<<

Tried our reset procedure on the eaton and this fails to solve
the alarm problem reported byb Carlos. Steve Hoagland has been 
assigned the problem and Tom Booth is helping him.
>>> 'eaton' problem from hoagland -- Tue Aug  8 16:24:42 1989 <<< [No Comment]

>>> 'eaton' problem from hoagland -- Tue Aug  8 16:26:33 1989 <<<

Work continues in the effort to repair an intermittent problem
with the eaton's indexing system.  Because the failure is so random,
most often the system remains operational.  Any users wishing to
use this equipment are welcome to do so during this on going repair
effort.  Simply notify the technician at the machine of your schedule
and we will do our best to accomodate your process needs.  

>>> 'eaton' problem from hoagland -- Wed Aug  9 16:59:53 1989 <<<

The consensus of techs both here and at Eaton is that our
machine has a bad indexer I/O card.  Eaton is sending us 2
replacement microcontroller IC'ss; one of the current version,
and an earlier rev. which exhibited higher tolerance to noise.
(should be here in a couple days).  In the meantime a speed fluctuation
of the receive cassette belt drive motor was traced to a
flakey output transistor.  All the earlier spontaneous episodes
where it ran for hours unattended may have overheated the part-
it has been replaced before and the board is discolored.  That
transistor will be ordered tomorrow and replaced ASAP.  The eaton
remains up for use- please see staff technician before attempting
to use it.

>>> 'eaton' problem from rnorman -- Thu Aug 10 11:19:45 1989 <<<

The micorcontroller IC's have arrive for the eaton I/O board.
I gave them to Steve for his diagnostics.  If you wish to
use the eaton durring this time see Steve for schedualed time.

>>> 'eaton' problem from hoagland -- Fri Aug 11 11:09:33 1989 <<<

The 2 swap microcontroller IC's were tested today.  The version1
component failed to operate completely, causing an error 21 on the
console- "memory loss".  The version4 worked fine and remains installed
for testing over the weekend.  The eaton is up and available for
use.  Ali of eaton will send us another version1 part because he feels
that version is compatible with our system and the present IC may
be bad.

>>> 'eaton' problem from eskim -- Mon Aug 14 12:40:48 1989 <<<

Temperature control for high temperature plate was bad.
Due to the high temperature and low temperature, the process was stopped
several times.  However, waiting for a few minutes restores temperature
around 120 C and allows process be continued.

>>> 'eaton' problem from carlos -- Mon Aug 14 23:50:58 1989 <<<

the temperature control is not working correctly. The hot plate
temperature reads 123C when it is supposed to be 120C; hence the
program stops just before the wafer gets to the hot plate.

>>> 'eaton' problem from jimmoon -- Tue Aug 15 07:57:29 1989 <<<

Same as Carlos -- over temp (error #73).

>>> 'eaton' problem from rnorman -- Tue Aug 15 08:20:32 1989 <<<

The hot plate temperature is not stable but varies from 119 to 124~C;
it is usually constantly at 120~C.  Also, we are getting 2 other errors
#33, elevator stuck, and #38, Board communication error; both are due
to the indexer board acting up.  The new microcontrol IC for the board
has arrive and will be installed ASAP; this will solve some of the problems.
I will help Steve to solve these troublesome problems.

>>> 'eaton' problem from rnorman -- Tue Aug 15 11:25:43 1989 <<<

I switched the RTD temperature sensors between the hot and cold
plates, but there it still the same unstable temperature control.
The temp control board look like is having problem; I will check the 
5Vdc reference on Z5 pin 6 to see if it is fluctuating; also, reset the
pcb.  I will continue after lunch.

>>> 'eaton' problem from rnorman -- Wed Aug 16 14:47:06 1989 <<<

The temperature control problem is a problem on the Temperature
Control board.  After connecting the board to the extender card
the problem will not duplicate; but with the board pluged back into
the electronics cabinet the problem occures again.  So the temperature
control board is on the extender card and operating well.  Tomorrow
I will continue to test the board by heating various IC to see if
a failure will occure.  THE EATON IS OPERATIONAL AS IS at this time.

>>> 'eaton' problem from gian -- Wed Aug 16 16:40:22 1989 <<<

Elevators are stuck and the alarm runs continuously.  I muted the
alarm with a piece of tape.
-David

>>> 'eaton' problem from eskim -- Wed Aug 16 16:53:47 1989 <<<

The elevator for the entry cassette is stuck.

>>> 'eaton' problem from rnorman -- Thu Aug 17 06:38:23 1989 <<<

The problems with the elevators sticking or any other 
related problem is due to the Indexer Card.  The EPROM was changed
out with a new REV model to see if that was the problem, but 
will be replaced when we receive it back from Eaton.  What we need
is to send out the Indexer Card for repair or buy a new card; due
to this on going problem being intermittent, it is very hard to pinpoint
and everyone looses time. 

A temporary fix is to TURN OFF THE OPERATOR PANNEL ON/OFF SWITCH, as
stated on the "header measage" when the eaton is enabled.

As for the temperature control problem, it looks like it is
temperature related. I am waiting for some hard to get chips from Eaton
that should be here hopfully today.

Sorry for the on going head aches with this system we are doing what
we can.

>>> 'eaton' problem from rnorman -- Fri Aug 18 13:58:32 1989 <<<

Problem: Entry cassette not indexing up and the hot plate
         temperature varies.

Cause: The problem with the indexing was a bad transistor on the
       Indexer board; the temperature problem was due to bad contact
       between the mother board and the Temperature Control board.

Solution: While troubleshooting the indexer card I found the schematic
          to be misleading, in that, the circuit to index the "elevator up"
          was actually for the "elevator down"; there was a misprint on the 
          schematic.  After finding this out the problem was easily traced
          to a bad transistor, Q8 a LM395H.  We had none instock so an 
          unused LM395H was taken from another part of the PCB.

          The only fix for the temperature control problem was to move the
          control board to another location on the mother board, because of
          this all the cards had to be switched from "Track 2" to "Track 1"
          and the cables switched around in the back of the electronics
          cabinet.  NOTE: WE NOW USE TRACK 1 not track 2. The eaton was
          tested and wafers were ran, the system is up for use.

>>> 'eaton' problem from moazzami -- Sat Aug 19 21:12:30 1989 <<<

Last user had left the eaton in manual mode. Also, all programs
were erased from memory.  I typed in program 10 from the on-line
manual. However, when pressing the START button, I kept getting
error 84 (manual says this number is not assigned to anything).
There were no other errors. But I did notice that one of the belts
for the receive elevator is continuously moving (same problem as
earlier).

>>> 'eaton' problem from carlos -- Mon Aug 21 03:11:36 1989 <<<

eaton not working. same problem as reza reported, except that 
the last user before him (me) did not leave the machine in maunal 
mode. It sets itself to manual mode after 5 minutes that the machine 
is unused.

>>> 'eaton' problem from phillip -- Mon Aug 21 07:15:25 1989 <<<

The usual morning alarm is AUDIBLY ON .

>>> 'eaton' problem from rnorman -- Mon Aug 21 11:56:54 1989 <<<

Problem: Cassette belts on exit continuously on, alarm sounding in
         the mornings, program 10 erased and goes into manual by
         itself.

Cause: Any cassette or belt problem, along with the alarm in the
       mornings, is cause by the Indexer board.  The program being
       erased and going into manual by itself are unknown.

Solution: I ran 13 cassettes of 10 wafers each, 130 wafers, and had no
          problem except for the cold plate doing a double take; which
          may be do to a bad vacuum check valve that was ordered, p/n
          4LD-063-D01 from Bay Pneumatics.  The eaton is up; could
          not duplicate the "going into manual" problem.
:

>>> 'eaton' problem from moazzami -- Mon Aug 21 12:55:53 1989 <<<

The wafers get scratched by the sensor on top of the hot plate (I think)
as they are leaving the hot plate.

>>> 'eaton' problem from gian -- Mon Aug 21 17:13:23 1989 <<<

The hot chuck is popping wafers up like tiddly winks.
Cleaning the chuck and track cables will probably fix it.

The Wafers leaving the cold chuck often hesitate and reverse direction.

>>> 'eaton' problem from rnorman -- Tue Aug 22 08:33:34 1989 <<<

Problem: The hot plate was popping wafer up and scratching them.
         Also, the wafers leaving the cold plate does a double-take,
         reverses direction and then goes into the cassette.

Cause: The pop-up problem was due to the puffer valve in need of adjustment;
       this is the valve that vents the back of the wafer after baking is
       complete.  The double-take on the cool plate is due to, I believe,
       a check valve problem in cold plate pneumatics box; the check valves
       are on order.

Solution: The puffer valve was rebuilt by cleaning and replacing all
          its o-rings, after which the puffer valve for the hot plate
          was adjusted.  When I receive the check valve for the cold
          plate they will be installed.  30 wafers were ran to test the
          puffer valve on the hot plate and no problem occurred; the
          eaton is up.

>>> 'eaton' problem from rnorman -- Tue Aug 22 14:50:11 1989 <<<

I am still working on the double replay on the cool plate; the problem
occures when the wafer leaves the cool plate and the exit cassette belts
do not turn on in-time.  Also, the hot plate is still flopping the wafer
up on recipe 10, but not on recipe 0; could this be a program problem?
I think the flopping of the wafers is due to a bad check valve, which
is on order.  Use care when operating.

>>> 'eaton' problem from rnorman -- Wed Aug 23 10:45:11 1989 <<<

Problem: Wafers on hot plate popping up and getting scratched.

Cause: After a thorough inspection of this problem it was found that
       the Hot Vac 3-way solenoid valve was sticking;
       this resulted in the Puffer valve delaying in venting the wafer 
       from the hot plate when baking was completed.

Solution: The Hot Vac valve, delivers vacuum to hot plate, was
          removed and rebuilt.  A new 24Vdc 3-way valve, Teco #31E1, 
          is on order for spare. I will continue to look into the
          double-take problem on the cool plate; this problem does
          not effect bake time just the cool time is doubled. 
          The eaton is up for use.

>>> 'eaton' problem from rnorman -- Thu Aug 24 08:01:22 1989 <<<

Problem: Wafers on cool plate doing a double-take; after the cool
         down of the wafer, the cold plate lowers, the belts turn
         on and the wafer heads toward the cassette, but then stops
         and comes back to the cold plate cooling for another time.

Cause: At the point after the cold plate lowers the system tells the
       indexer to turn on the indexer belts and index up one, if this
       step is delayed the system will think a wafer has been loaded
       into the cassette and re-cool the wafer on the cold plate.
       The system will not repeat the problem a 3rd time due to the cassette
       has already moved up one slot when the 2nd cool time is compleated.
       The cause of the problem being the sensor on the indexer was
       too sensitive, sensing the wafer for too long a period while the
       cassette indexed up one.

Solution: The Cassette "wafer on track" sensor was adjusted to be
          less sensitive by turning down the N2 supply to the 
          sensor; each sensor has its own N2 supply adjustment.
          More then 100 wafers were ran and no "double-take"
          problem occurred. The eaton is up, again.

>>> 'eaton' problem from rnorman -- Mon Aug 28 08:43:36 1989 <<<

Problem: Random indexer and belt problems.

Cause: The indexer PCB, a very strong possibly is Z30 the ROM.

Solution: The eaton was shut down and the indexer card was
          pulled replacing the ROM, Z30; Intel D8286 was replaced
          with NSC B8604.  Also at that time Z25 and Z31 was replaced
          with new Intel P8287's, these are the IC's before and after
          the ROM IC.  We will keep a close eye on the eaton for the 
          next week or so to see if it has any more random indexer
          problems; your observation and input would be very helpful.
          The eaton is up for use.
     

>>> 'eaton' problem from gian -- Mon Aug 28 15:54:14 1989 <<<

Errors 75 and 34 occur sporadically with no apparent cause.
Otherwise, the eaton works OK.

>>> 'eaton' problem from rnorman -- Tue Aug 29 14:44:49 1989 <<<

Problem: Error 75 and 34 occur ocationally.

Cause: Error 34 was due to the cassette getting bumped by the wafers
       when entering, tilting the exit cassette.  Error 75 is due to
       problems with cool plate/exit cassette. The exit cassette does
       not index up all the way, about halfway, causeing the cool plate
       to do a double take with the wafer; and at times the exit cassette
       belts do not turn on possibly also due to the cassette not indexing
       up all the way.

Solution: Error 34 was corrected by adjusting the cassette hight on the 
          cassette assembly; centering the wafer in the cassette clot.
          Error 75, vacuum not attained, this time looked to be caused
          by the cassette indexing screw getting jammed which caused
          the cassette to only index halfway. This was hopefully
          corrected by lubricating the indexing screw. I ran uncounted
          cassettes, and the errors would not repeat again. Please
          keep me informed of these problems.
         

>>> 'eaton' problem from jimmoon -- Wed Sep  6 16:12:00 1989 <<<

Wafers would not transport from chuck to hot plate.  Hot plate
to cold plate was OK.  

>>> 'eaton' problem from rnorman -- Thu Sep  7 07:18:04 1989 <<<

Problem: Wafer not going from chuck to hot plate.

Solution: jimmoon and I both could not duplicate the problem.
          The eaton is up.

>>> 'eaton' problem from martin -- Mon Sep 11 16:44:43 1989 <<<

photoresist does not dispense: error 57

Prior to failure, two wafers were processed with minimal photoresist. 
(approx. 1/2 of the normal amount)  This amount does not sufficiently coat
the wafers.

>>> 'eaton' problem from tom -- Mon Sep 11 16:58:25 1989 <<<

Problem:   Not dispencing PR.
Cause:     Unknown. Pump not resp onding to command from comuputer as if
           there was a loose connection.
Solution:  Wiggled the wires. Pump started working.

>>> 'eaton' problem from kim -- Fri Sep 15 08:16:14 1989 <<<

Problem:  The sending cassette on the Eaton makes a grinding noise 
          whenever it indexes down.

>>> 'eaton' problem from rnorman -- Fri Sep 15 12:51:14 1989 <<<

Problem: Send cassette on the eaton makes a grinding noise when
         loading a wafer.

Cause: The motor was on the exit cassette, but when I was having problems
       with the wafers loading into the cassette I switched motors, for
       the sake of troubleshooting.

Solution: The motor bearings are making noise due to age.  I have a spare
          motor on hand if the noisy motor goes out.  The eaton is up.

>>> 'eaton' problem from gian -- Fri Sep 22 10:38:58 1989 <<<

I would like to recommend that the taurus disconnect something other
than the Nitrogen on the eaton.

This morning, when the eaton was disabled as the taurus override was
turned off**, the exit cassette nearly dumped my wafers into the bowels
of the machine. The wafer that was spinning on the chuck had to be
reworked.

As an alternative, how about if the taurus disabled the entry cassette
motor rather than the nitrogen.

**I understand that a warning message was broadcast, but I never heard 
anything (uninteligible or otherwise).  Perhaps there is something wrong
with the broadcast system in the gcaws room.  In any event, disabling
a machine should not result in the destruction of one's wafers.

-David Giandomenico

>>> 'eaton' problem from rnorman -- Mon Oct  9 09:54:34 1989 <<<

The eaton is down with random LED's flashing.  The cassettes are
acting funny and the belts turn on randomly.  It acts like a connector
is intermittant.

>>> 'eaton' problem from bob -- Mon Oct  9 16:02:07 1989 <<<

Service on the eaton is being done by Steve Hoagland as Robert Norman
had a Dr's appt this afternoon. Every effort will be made to make the eaton
operational ASAP. It is not possible to predict how long this might take,
work is in progress.

>>> 'eaton' problem from hoagland -- Mon Oct  9 16:28:41 1989 <<<

The indexer card appears to have failed.  With the card removed
the system boots normally and will run diagnostics.
With the card installed the system boots with belts and indexers
running randomly and out of control.  This condition persists
through all operations including diagnostics.
Tomorrow the card will be isolated and more tests run, hopefully
leading to a repair before 5PM.

>>> 'eaton' problem from hoagland -- Tue Oct 10 17:05:17 1989 <<<

The indexer card is reading and responding to non-existant sensor
conditions.  It is also sending random instructions to the output
actuators.  The main system CPU is working fine, and all problems
have been isolated to the indexer card itself.  It appears the failure
is either with the indexer microcontroller IC or the octal
transceiver/driver ICs which connect it with the input and output
circuitry.  The port decoders, which select various input/output channels,
were replaced with new ICs and no improvement was noted.  Replacement
parts will be ordered tomorrow for the remaining suspect ICs and the
system should be up by Thursday afternoon.

>>> 'eaton' problem from rnorman -- Thu Oct 12 12:12:10 1989 <<<

Problem: Indexers not working properly.

Cause: The indexer PCB was acting up.

Solution: A new Indexer PCB was purchased due to the excessive problems
          we have had previously.  We still have the old Indexer card that
          will be repaired to be used as a back up, just in-case.  The chips
          for the old card were ordered and will be installed on the old PCB
          when they arrive;  at that time our old card will be tested and 
          repaired.  75 wafers were ran through the eaton with our new PCB
          and programs #8, #10 and #17 were programmed in for use. Any other
          programs will need to be installed by Tom.  The eaton is up for use.

>>> 'eaton' problem from field -- Mon Oct 16 11:07:35 1989 <<<

The eaton unloaded wafers incorrectly, cross-threading two of them
so that the PR was scratched.

>>> 'eaton' problem from hoagland -- Tue Oct 17 14:48:13 1989 <<<

problem:  Original indexer card exhibited random errors; various
          output devices would go on/off randomly.  Eventually 
          status sensors also suffered random failures.

cause:  Bad TTL IC in decoding circuit on indexer card, which
        corrupted instructions sent from CPU card to indexer
        microcontroller.

solution:  Replace TTL IC's.  The eaton is up and working.  Since
           a second indexer card was purchased, we now have a spare.
           Final note: the new "upgraded" card is electrically
           identical to the old one- some parts mounted on the back-
           side of the old unit were simply mounted on the front of
           the new one.

>>> 'eaton' problem from dcarl -- Thu Oct 19 17:11:44 1989 <<<


ran program "0" during a qualification; receiving wafer holder
did not advance up during run.
>>> 'eaton' problem from dcarl -- Fri Oct 20 09:27:19 1989 <<< [No Comment]

>>> 'eaton' problem from tom -- Fri Oct 20 14:52:55 1989 <<<

Problem:    User reports exit cassete not indexing.

Cause:      Unknown. Could not duplicate problem. Ran cassette of wafers
            with Program #6 and it ran fine.
Solution:   Declare machine up.

>>> 'eaton' problem from robin -- Wed Nov  1 13:26:57 1989 <<<

Exit cassette misaligned: i.e., cassette must be jiggled (read 'adjusted')
to allow wafer to enter slot.

>>> 'eaton' problem from field -- Wed Nov  1 14:00:45 1989 <<<

I had the same problem Robin just reported.

>>> 'eaton' problem from rnorman -- Wed Nov  1 15:00:32 1989 <<<

Problem: Wafer not entering the exit cassette all the way.

Cause: The cassette base is no completely level.

Solution: I ran 2 cassettes of 16 wafer and has no problems.
          But I did see the wafer loading in crooked.  Tomorrow
          when I have more time I will try to level the cassette
          base.  The eaton is up.

>>> 'eaton' problem from rnorman -- Thu Nov  2 08:41:22 1989 <<<

I shimmed the base of the cassette to help make the wafers enter
the cassette more level.  Let me know if you have any more problems
with wafers entering the cassette and if so please give details;
such as, which slot and how far the wafer entered into the cassette.
The eaton is up for use.

>>> 'eaton' problem from field -- Fri Nov  3 16:16:01 1989 <<<

same old problems - eaton cross-threads the 5th wafer out on the
exit cassette.  ie, the 5th wafer from the top goes in crookedly.
also, it gave an alarm on my very last wafer (12th) as it couldn't
unload it properly.  as I'd been manually unloading some of the
wafers as it went along, to avoid their being scratched by the
cross-threading in the exit cassette, this wafer that alarmed and
couldn't be unloaded was trying to go into the 3rd from the top
position in the exit cassette.

>>> 'eaton' problem from rnorman -- Mon Nov  6 12:06:36 1989 <<<

I adjusted one cassette to work, but the other still gives us problems.
The cassettes have been labled "Send" and "Receive".  I will look into the 
problem further.  Please let me know it you have any problems.  The eaton
is up for use at this time.

>>> 'eaton' problem from hyeh -- Mon Nov 13 17:43:41 1989 <<<

The sending station does not want to go down.
There are no error meaasges.

>>> 'eaton' problem from marilyn -- Tue Nov 14 11:00:40 1989 <<<

Problem: User reported that the send cassette does not lower
Solution: Ran 10 dummy wafers through without duplicating the
          problem; the eaton is up

>>> 'eaton' problem from kim -- Tue Nov 14 13:28:35 1989 <<<

the mechanism that centers the wafer on the spinner doesn't work for
the first wafer in a cassette! It seems to work for all subsequent
wafers however. 
When programming, the display flashes, it will still accept modifications
to programs though.

>>> 'eaton' problem from rnorman -- Tue Nov 14 14:28:59 1989 <<<

Problem: The mechanical arm that pushes the wafer onto the chuck did
         not push it onto the chuck.

Cause: There was some PR on the carriage anf the mechanical arm that
       was cleaned off.  Other then that I could not duplicate the
       problem after running more then 25 wafers.

Solution: Cleaned the PR from the carriage and mechanical arm and
          tested. The eaton is up.

>>> 'eaton' problem from marilyn -- Mon Nov 27 15:16:27 1989 <<<

Problem: While coating 25 wafers, the strong smell of photoresist
         was obvious.  Perhaps the Eaton is not venting. Otherwise,
         the machine works fine.

>>> 'eaton' problem from rnorman -- Tue Nov 28 10:41:51 1989 <<<

Problem: Strong smell of PR.

Cause: One of the containment side panels was off.

Solution: The side panel was replaced and the exhaust
          on the hot plate was checked.  The eaton is up.

>>> 'eaton' problem from tang -- Mon Dec 11 21:13:07 1989 <<<

The receive cassette does not index correctly. After the 4th
wafer, it refuses to index up. The reset button does not
bring it all the way down, either.
From debra Tue Dec 12 16:15:59 1989
Received: by argon (5.57/1.16)
	id AA04060; Tue, 12 Dec 89 16:15:29 PST
From: debra (Debra Hebert)
Message-Id: <8912130015.AA04060@argon>
To: eaton, msgs
Cc: debra, voros
Subject: Eaton Indexer
 
    The eaton is experiencing problems with the
    index motor. It will not index automatically
    and if you must use it here is the procedure
    to follow for manual indexing:
     1-Place receive index on elevator and press
       the RESET button on the receive indexer to
       lower the cassette
Date: Tue, 12 Dec 89 16:15:21 PST
Status: R

     2-Run your program and when the first wafer
       is sent into the receive cassette press
       the RESET button on the receive indexer
       to raise the cassette to its highest 
       position

     3-Remove the cassette ,remove your wafer, and
       CAREFULLY replace the cassette on the receive
       elevator. 

     4-Press the RESET button on the receive indexer
       to lower the cassette to its lowest position
       in order to receive the next wafer.

     5-Repeat steps 2-4 until all your wafers are
       processed.

    
    You have 60 seconds to remove the cassette and
    wafer and replace the cassette on the indexer.
    It can be done but you need to be careful and
    watch it closely. The index motor will be worked
    on tomorrow and hopefully we'll have come up 
    something better then.
--------


>>> 'eaton' problem from rnorman -- Wed Dec 13 09:50:00 1989 <<<

The cassette drive motor is acting intermittently.  We do not have
a spare, but the motor was cleaned and tuned up temperarily until
the spare arrives.  James Parrish is in the mechine shop working
on the motor at this time.  You will be informed when the eaton is
up.

>>> 'eaton' problem from rnorman -- Wed Dec 13 15:00:11 1989 <<<

The cassette motor has been ordered and will be here the 12/14 or 12/15.
It can be operated by placing you wafer on the transport between the
cassette and the process station and pressing "start".  If you have
any questions see me.  As soon as I get the new motor it will be
installed.  Sorry for the temporary inconvenience.

>>> 'eaton' problem from rnorman -- Fri Dec 15 14:40:29 1989 <<<

Problem: Cassette indexing motor want out.

Solution: A new motor, P/N 50133981-01 from Eaton, was installed and
          was tested by running 15 wafers with no problem.  The eaton
          is fully operational and ready for use.

>>> 'eaton' problem from rnorman -- Mon Dec 18 09:55:52 1989 <<<

Problem: Load cassette not sensing every wafer when indexing down.

Cause: Sensor on platform out of adjustment slightly.

Solution: Adjusted sensor to be more sensitive.  The eaton is up.

>>> 'eaton' problem from hebert -- Thu Jan 11 07:32:48 1990 <<<

I coated 4 wafers using program 10. All but one has a "bulls eye"
pattern on it after P/R coat.

>>> 'eaton' problem from rnorman -- Thu Jan 11 09:51:18 1990 <<<

Problem: Coated wafers had a "bulls eye" pattern in the center.

Cause:  Either, the suck back was out of adjustment or there was
        too long a delay between the PR deposit and the spin.
        
Solution: The such back was out of adjustment and was applying
          a bubble on the wafer. Also, there was about a 3 sec.
          delay after the deposit of PR; this time included a
          small delay between application of PR and descend to the 
          lower position, the descend time, and a small delay
          after descend before spin.  By experiment it was found
          that applying PR when the wafer is in the down position
          decreases the delay time to 1 sec.  Tom made a new program
          at recipe #5 that is just like recipe #10, except the PR
          is applied in the down position.  Dave Hebert ran some
          good wafers and they turned out great! The eaton is up.

>>> 'eaton' problem from spence -- Fri Jan 19 16:34:51 1990 <<<

first wafer runs ok up to the hot plates, then the track hangs up.
I tried moving the wafer around to see whether it was a sensor problem,
but it didn't help. After a couple of minutes of playing around like this the 
problem 'cleared' and the rest of the wafers ran without problems.
This problem, i.e. the track hanging up during the passage of the first
wafer happened to me twice today.

>>> 'eaton' problem from rnorman -- Mon Jan 22 09:39:17 1990 <<<

Problem: Wafer stopping before hot plate.

Cause: Either the sensor at the entry to the hot plate is not
       sensing the wafer or the exit cassette was not in the 
       down position; wafers will not go onto the hot plate
       if the exit cassette is not in the down position.

Solution: I could not duplicate the problem after running
          3 cassettes.  The eaton is up.

>>> 'eaton' problem from weijie -- Thu Jan 25 21:46:18 1990 <<<


First the sending cassette wouldn't go down regardless of the position,
contact, etc.  After cycling the power, error msgs 16 is given indicating
programs were lost.   

>>> 'eaton' problem from rnorman -- Fri Jan 26 07:19:27 1990 <<<

Problem: Send cassette would not go down and error 16, empty program.

Solution: I did find the system in manual, but it should be in AUTO
          to operate properly.  After putting it in auto there was
          no problem with the cassettes indexing down.  As for the
          "empty program" error, every program was GONE.  I could only 
          enter in 8, 10 and 17, since they were the ONLY ONES in the
          eaton manual; #4, 5(hebert's), 16 and 18 ARE NOT in the
          manual so I could not enter those into the eaton.
          The eaton is up for use with recipe 8,10 and 17 ONLY.

         NOTE: ALL programs should be in the manual, I have many times
               said this!

>>> 'eaton' problem from jiahua -- Fri Jan 26 10:08:59 1990 <<<

Sometimes the reciving cassette switch didn't work very well.

>>> 'eaton' problem from debra -- Fri Jan 26 13:12:43 1990 <<<

Programs 4, 16, 18 have been re-entered. The receiving cassette
reset switch must be pressed firmly to operate. eaton is up.

>>> 'eaton' problem from carlos -- Thu Feb  1 22:34:49 1990 <<<


The alarm beeps all the time, but it is working ok.

>>> 'eaton' problem from rnorman -- Fri Feb  2 07:22:52 1990 <<<

The eaton is making beeps like a random code.  The LEDs are
flashing randomly, which seems to amplify the beeps.  This 
could be related to a intermittent cable/wire or a ground
problem. Also, the interface panel was pulled out.
Does anyone know when this random beeps started, was it all
at once or did someone do something and then it started?

>>> 'eaton' problem from bob -- Fri Feb  2 09:57:01 1990 <<<

The eaton is experiencing CPU problems. Robert Norman has left for
Eaton Corp. to pick up some loaner boards to try and fix this 
problem before the weekend. He will be back this afternoon.
The eaton is up with mixed results.

>>> 'eaton' problem from rnorman -- Fri Feb  2 14:21:58 1990 <<<

Problem: LED's randomly flashing with random beeping noise.

Cause: The Operator CCU board was causing the static display.

Solution: Eaton Loaded use for the weekend the CCU and the CPU
         board for testing and use until next week.  After installing
         the barrowed CCU board the eaton operates fine with not
         other noticeable problem.  Recipes 8, 10 and 17 were programmed
         in from the wand and Tom programmed in the rest.  The eaton
         is up for use at this time.

>>> 'eaton' problem from kim -- Fri Feb  2 17:08:47 1990 <<<

Error 33: cassette is not descending.
Can no spin R. Ferguson's wafers.

>>> 'eaton' problem from ried -- Fri Feb  2 23:28:27 1990 <<<

After Carlos showed how to loosen the big screw on the sending
cassette, I was able to overcome the problem reported by Kim.
The sending cassette sensor is very finicky - it takes many 
cassette adjustments to get the eaton to start.

>>> 'eaton' problem from rnorman -- Mon Feb  5 07:24:46 1990 <<<

Problem: Send cassette stuck; error 33.

Cause: By the previous problems report the send cassette drive
       got stuck, displaying error 33.

Solution: After running 2 cassettes I could not duplicate the 
          problem. I have seen the cassettes get stuck, possibly
          by driving the cassette down too fast.  If you get
          error 33: first try pushing the reset button, on top
          next to the cassette, this should cause the cassette
          to move.  If you still get error 33 move the indexing
          screw on the bottom backside of the cassette platform;
          this should loosen up the jammed mechanical movement. 
          Please do not do the latter, enless necessary, such as
          late at night or weekend; look me up during the mean time.
          The eaton is up.
~
          

>>> 'eaton' problem from liew -- Sun Feb 18 19:22:35 1990 <<<

The arm often fails to catch the first wafer (before the spinner) when
N2 is turned on the first time. It has no problem with the next wafer. So always
send a dummy wafer after you turn on N2.

>>> 'eaton' problem from field -- Tue Feb 20 15:32:50 1990 <<<

As Debra reported, I saw the eaton refusing to pick up the
first wafer of a batch.  However, it did not happen on
the first batch of wafers I processed, using program 9
to spin photoresist, despite the fact the N2 had been off.

It did happen on the second and third batch of wafers I processed,
using program 4, once where the N2 had not been off and
once where I had deliberately left the N2 on to see if
that really would fix the problem.

>>> 'eaton' problem from tom -- Tue Feb 20 16:49:40 1990 <<<

The wafer centering arm is moving down into position very slugishly and 
is not always catching the wafer in time. This is causing the problem
with the first wafer (it must loosen up after the first wafer) 

	The cause of this is a leak in the compressed air line. It is
damaged (worn) right where it connects to the cylinder and needs to berr
replaced.

>>> 'eaton' problem from rnorman -- Wed Feb 21 08:21:16 1990 <<<

Problem: Wafer centering arm moving slugishly.

Cause: Possibly a leak in one of the air lines connected to the 
       drive cylinder.

Solution: Re-plumbed pneumatic air line and ran 4 cassettes with
          no problems.  The eaton is up.

>>> 'eaton' problem from rnorman -- Mon Feb 26 10:45:45 1990 <<<

Problem: The Operator CCU card was set out to repair a static 
         problem caused by the board; the LEDs flickered and
         beeps occurred randomly.

Solution: Eaton Service in Tex. repaired/replaced: CR1, CR3(diodes),
         C36(large cap), Z16(IC L2046391), VR1(Power Transistor) and 
         K1(relay).  We do not have a service report, but this was
         conferred by talking to Troy @ Eaton, Tex. Field Service.
         The repaired board was installed and the loaned boards will
         be sent back to Eaton, Santa Clara; we have had the boards for
         approx. one month.  The eaton was tested and is up.

>>> 'eaton' problem from bill -- Mon Feb 26 16:09:02 1990 <<<

An old problem has reappeared :
the wafer will not advance from the post spin station,
to the hot plate.

An old fix was performed :
Turn it on and off and keep your fingers crossed.

Wafers now advancing with no problem...

All other eaton functions seem fine.

>>> 'eaton' problem from marilyn -- Tue Mar  6 11:37:16 1990 <<<

Problem: Receive cassette elevator jammed; does not reset.

>>> 'eaton' problem from debra -- Tue Mar  6 11:51:53 1990 <<<

I was able to clear the jammed cassette. I noticed that one of
the belts had slipped off, so I replaced it. However, the
cassette is not adjusted to the right height. When a wafer
is loaded into the receive cassette, it pushes the cassette
up and backwards, thus causing a system alarm. the cassette
needs to be adjusted before running more than one wafer.

>>> 'eaton' problem from rnorman -- Tue Mar  6 14:02:55 1990 <<<

Problem: Wafers pushing receive cassette over causing an error.

Cause: The cassette indexer height set too high causing wafers to
       hit the bottom side of the cassette slot.

Solution: The height of the cassette was way off!  Someone must have
          adjusted this out resently.  I had the adjust the set screw
          about 1 1/2 turns, this is a long ways.  Also, the belt drive
          motor pulley was loose, causing the belt to pop off, and way
          off center; it was adjusted and set into position.  The eaton
          was tested and is up.

>>> 'eaton' problem from hebert -- Tue Mar 13 12:11:19 1990 <<<

The wafer gets stuck on the belt at the unload cassette.

>>> 'eaton' problem from hebert -- Tue Mar 13 15:16:04 1990 <<<

Problem: Wafer getting stuck on the belt in front of the unload
         cassette.

Solution: I lowered the optical encoder strip at the unload station
          to align wafer with the cassette slot. The optical encoder
          is at its lowest possible position. The first wafer unloads
          very smoothly. The second wafer unloads smoothly but tended
          to cause the cassette to tilt from the top to the bottom of
          the cassette. I added a couple of layers of tape to the 
          left rear cassette table shim to prevent the cassette from
          tilting.

          Six wafers were then run through the Eaton using PRG "0."
          All six unloaded smoothly without the cassette tilting.

          The Eaton is UP.

>>> 'eaton' problem from rnorman -- Thu Mar 15 07:43:50 1990 <<<

The eaton will be down to adjust the exit cassette and other problems.
It will be down for about 1-2 hours from this time.

>>> 'eaton' problem from rnorman -- Thu Mar 15 08:29:19 1990 <<<

Problem: Wafer not entering receive cassette properly causing
         cassette to tilt.

Cause: Indexer screw a little out of adjustment.

Solution: After adjusting indexer screw initially 30 wafers were ran
          before a problem occurred; wafer hit front on cassette and
          did not enter in.  Re-adjustments were made and 65 wafers
          were ran with no indexing problems.  The eaton is up.

>>> 'eaton' problem from jiahua -- Fri Mar 16 05:01:45 1990 <<<

The receiver doesn't work.

>>> 'eaton' problem from rnorman -- Fri Mar 16 06:25:51 1990 <<<

Problem: The receive cassette platform jammed in the up
         position.

Solution: I turned the indexing screw, worm gear, to un-stick the
          platform.  Sometimes this happens, it just indexes up too
          far; I will keep my eye on this problem to see if it reoccurs
          often.  The eaton is up.

>>> 'eaton' problem from ling -- Mon Mar 19 21:18:14 1990 <<<

wafer receiver doesn't come down.

>>> 'eaton' problem from rnorman -- Tue Mar 20 07:07:31 1990 <<<

Problem: The exit indexer station does not index down.

Cause: The indexer station was jammed up top; hit the top plate.

Solution: The indexer was totally readjusted.  It was adjusted
        down a whole slot and adjusted there for the wafers.  This
        will/should leave some space at the top for an error factor
        while indexing to the upper limit.  2 full cassettes were ran
        and the eaton is up.

>>> 'eaton' problem from ling -- Wed Mar 21 17:16:00 1990 <<<

receive cassette doesn't go up, before I start to run.

>>> 'eaton' problem from rnorman -- Thu Mar 22 14:50:30 1990 <<<

Problem: The receive cassette got stuck at bottom.

Cause: The optical sensor was not seeing the stop point on the 
       encoder strip.

Solution: The encoder strip was adjusted horizontally to help
          the sensor see the stop slot.  I am in the process of
          ordering parts for the indexer to help make it more
          relyable; such as, new sensors, Bushings, lead screw,
          ball bearing, timing belt and spacers to prevent slack
          while indexing.  You will be informed when these parts
          arrive for the eaton indexer to be rebuilt.  The eaton is
          up for use.
From bob Fri Mar 23 08:36:00 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA07136; Fri, 23 Mar 90 08:35:57 PST
Date: Fri, 23 Mar 90 08:35:57 PST
From: bob (Robert M. Hamilton)
Message-Id: <9003231635.AA07136@argon.berkeley.edu.>
To: rnorman
Subject: eaton
Cc: voros
Status: R

Ali called from Eaton, He has some of the parts you need, Austin has
some and some are on 4-6 weeks back order. He suggests you stop in and
he can get you some used parts in like new condition for very good
price and go over the indexer with you. For instance, the indexer
module harness whcih contains the sensor is $800.00 per and 5-6 week
delivery! The bearings are available form King Bearing stock and
he can gice you the bearing number. Eaton wants $22.46 each for these.

Ali is out on a service call and will be back in around
1:00. Give him a call.

Bob


>>> 'eaton' problem from kpister -- Fri Mar 30 10:09:09 1990 <<<

the usual cross threading around wafer 5 or six was occurring, but
there was an additional problem I haven't seen before:  As wafer
seven is about to enter the receive cassette, the cassette is raised
to HIGH (!) and the wafer hits the nub between slots, preventing it
from entering, and halting the machine.

>>> 'eaton' problem from field -- Fri Mar 30 18:12:03 1990 <<<

As did Kris Pister, I'm having problems with the Eaton receive cassette.
It wouldn't receive a wafer (any out of 3 tries) - the slot seems to
be offset from where it could receive a wafer.  Furthermore, the
cassette wouldn't come up when I pressed the reset button.  I manually
removed it (it wasn't jammed), but the drive still won't come up
on the receive side.

>>> 'eaton' problem from mwei -- Fri Mar 30 19:18:52 1990 <<<

es
Wafers are not being loaded into the receiving cassette properly.
Something is off with the receiving cassette alignment and its elevator stand.
See also previous two problem comments for eaton.

>>> 'eaton' problem from rnorman -- Mon Apr  2 08:08:39 1990 <<<

Problem: Wafer were not being loaded into the recieve cassette
         properly.

Cause: The receive cassette encoder was a little out of adjustment.

Solution: The encoder on the receive cassette was adjusted.  The 
          eaton is up.

>>> 'eaton' problem from rnorman -- Tue Apr  3 07:04:35 1990 <<<

The eaton will down to rebuild both indexers.  You will be notified
when it is up for use.  The rebuild may be done by noonish, if all
goes well.

>>> 'eaton' problem from bob -- Tue Apr  3 10:17:45 1990 <<<

The eaton is down. It should be up and available for use right
after lunch. 

>>> 'eaton' problem from rnorman -- Tue Apr  3 14:42:20 1990 <<<

Problem: Down for indexer rebuild.

Solution: The right or receive indexer was removed and rebuilt
         as follows:
          -all 3 optical sensors were replaced
          -the lead screw or worm gear bearings and delron boshing
           was replaced.
          -The teflon bushng for the guide rod was replaced
          -all the drive belts were replaced
     
     The indexer was installed and adjusted. 50 wafers were ran with
     no problems.  Tomorrow I will rebuild the left indexer.  The eaton
    is up for now.

>>> 'eaton' problem from rnorman -- Wed Apr  4 07:56:12 1990 <<<

The eaton will be down to rebuild the send indexer.  You will be 
notified when it is up.  You may use the eaton in "manual" until
I re-install the indexer.

>>> 'eaton' problem from rnorman -- Wed Apr  4 12:18:27 1990 <<<

Problem: Down for send or left indexer rebuild.

Solution: The indexer was removed and the following was done:
       -replaced all optical sensors, #1990-00023.
       -replaced ball bushing in the lead screw block, Thomson
        part number A61014, eaton # 1410-00084.
       -replaced teflon bushing for guide rod, #400-36273-01.
       -lower lead screw bearing was replaced, #1410-00224.
       -large indexer belts were replaced, #0905-00158.
       -motor drive belts were replaced, #0905-00151.
       -replaced lead screw timing belt, #1500-00105.

    The lead screw and large guide rod was cleaned and coated with
    molyCote for dry lubrication.  I ran out of the small indexer
    belts, because we use 6 for both indexers; I will order some
    for spares and then replace the 2 old ones on the send indexer,
    eaton #0905-00155.  The indexer was installed and adjusted.  The
    system was tested and is up for use.

>>> 'eaton' problem from carlos -- Tue Apr 10 20:43:18 1990 <<<

I can't get prog. 10 running. The loading cassete will not go down 
and the chuck is up no matter what. Has the program been erased ?

>>> 'eaton' fix from debra -- Wed Apr 11 10:23:43 1990 <<<

Problem was traced to dispense nozzle assembly. If this assembly is
not pushed to left as far as it will go in order to "make" the limit
switch. If it is not in this position, you will be unable to run any
processes.
From debra Wed Apr 11 11:30:13 1990
Return-Path: <debra>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA06691; Wed, 11 Apr 90 11:30:10 PDT
From: debra (Debra Hebert)
Message-Id: <9004111830.AA06691@argon.berkeley.edu.>
To: voros
Cc: bob, debra
Subject: eaton
Date: Wed, 11 Apr 90 11:30:08 PDT
Status: RO

   Katalin, After fixing one problem with the eaton, a new
   one ocurred. I was unable to change programs on the eaton,
   even after resetting the system by powering if off and on.
   Robert and I traced it to a key on the purge/sensor panel
   which had been turned off by someone. This key disables
   the controls when turned, which makes it impossible to
   change programs. I have a feeling it might have been Carlos
   who turned it in an attempt to get program #10 to run last
   night. I have removed the key, and will label it Eaton Control
   Panel and give it to Rosemary(?). Should I communicate with
   Carlos about this?   Debra
--------


>>> 'eaton' problem from field -- Wed Apr 25 13:04:36 1990 <<<

eaton tending to put wafer off-center on belt after PR spin station.
This results in sporadic alarms when the machine attempts to
transport the wafer to the hot-plate.

>>> 'eaton' fix from rnorman -- Wed Apr 25 13:40:20 1990 <<<

Problem: Giving errors after the spin station before the hot plate.

Solution: After running 50 wafers, half with a spin and half not, no
        errors were found.  Sorry.  The eaton is up.

>>> 'eaton' fix from rnorman -- Thu May  3 07:56:33 1990 <<<

Problem: Temp. on cold plate fluctuating. Also, ate a wafer at send cassette.

Cause: The cool plate, if the heater was on, can only go to about 70~C; so,
       temperature readings of 300~ are erroneously caused mostly by the
       RTD temperature probe.  The 2nd problem looks like to be cause by the
       carriage jamming up/sticking as it moves wafers from the cassette to the        chuck, this was the only problem I noticed.

Solution: The guide rods of the carriage were cleaned and lubricated; after 
         testing it did not stick.  Another RTD may have to be ordered and 
         replaced in the cool plate.  Until then ignore the erroneous 
         temperature readings, they are not correct.  The eaton is up for use.

>>> 'eaton' problem from hebert -- Mon May  7 15:39:52 1990 <<<

The wafer transport failed several times just as the wafer was
approaching hotplate #1, and just before unload.

>>> 'eaton' fix from rnorman -- Tue May  8 07:50:24 1990 <<<

Problem: Wafer failed just before hot plate, and just before the receive side.

Cause: The exit cassette was sticking a little, not indexing up or down all
       the way.

Solution: The drive gear was lubricated at both ends, where the bearings are.
          It was tested manually and then by running 15 wafers with no problem.
          The eaton is up for use

>>> 'eaton' problem from judy -- Mon May 14 14:46:10 1990 <<<

Cold plate temperature rises very rapidly when a wafer is placed on it.
For example the TC reads 23.1 C before the wafer is put on the cold
plate and around 300.0 C after!?!  Maybe the water which is supposed to
keep the cold plate cool is off?
