>>> 'dw' problem from hebert -- Fri Jan  6 17:13:26 1989 <<<

Base pressure was high this morning due to shifted boot seal
on bottom of quartz cylinder. I removed the cylinder and
adjusted the boot. THE SYSTEM IS NOW UP.

>>> 'dw' problem from hebert -- Wed Jan 11 11:10:37 1989 <<<

The mechanical pump is very loud. I unplugged it.

>>> 'dw' problem from hebert -- Wed Feb  1 13:07:43 1989 <<<

N2 purge through copper shroud causes excess N2 usage in lab.

Solution: Convert to clean air purge.

>>> 'dw' problem from hebert -- Wed Feb  1 13:08:44 1989 <<<

The system is in need of a major clean. I'm cleaning the
system today. It should be back up tomorrow morning.

>>> 'dw' problem from phillip -- Wed Feb  1 13:24:44 1989 <<<

Reworked n2 purge to air purge per heberts request. This was
prompted by major leak found during todays power outaqe.

>>> 'dw' problem from hebert -- Fri Feb  3 11:49:48 1989 <<<

No water flow through e-gun. The water pump isn't turning on.

>>> 'dw' problem from hebert -- Fri Feb  3 14:46:58 1989 <<<

Problem: No e-gun water flow.

Solution: Increase water pressure at pump from 75 PSI to 85 PSI.

The system is up.

>>> 'dw' problem from phillip -- Mon Feb 13 11:36:18 1989 <<<

The dw is on taurus this day & hour.

>>> 'dw' problem from hebert -- Mon Feb 13 15:22:44 1989 <<<

Alarm sounds when closing the high vac valve prior to venting
the chamber.

>>> 'dw' problem from hebert -- Thu Feb 16 16:02:06 1989 <<<

The alarm problem has disappeared and can be removed from the 
joblist/equipment enable header.

>>> 'dw' problem from vallath -- Fri Feb 24 12:41:01 1989 <<<

While Phil was inspecting the water lines behind the dw,
there was a flash.  Power to the dw was cut off at the
main breaker in the red box.
Source of flash unknown.
Cryo is being regenned, since it warmed up.
VN

>>> 'dw' problem from parrish -- Mon Apr  3 12:53:52 1989 <<<

the mech-pump seized up

>>> 'dw' problem from hebert -- Mon Apr  3 14:03:05 1989 <<<

I have several wafers that need to be processed in the dw.
If it is going to very long to fix the mech pump, can we
swap in another pump. We could even use the mech pump from
the v775 for 2-3 days. I won't need the v775 until late
Wed/early Thursday.

>>> 'dw' problem from parrish -- Tue Apr  4 10:32:45 1989 <<<

problem:    mech-pump seized

cause:      unable to determine the cause until the pump is taking apart

solution:   replaced the pump with a spare until rebuilding of the orginal 
            pump is completed.

>>> 'dw' problem from hebert -- Thu Apr 13 12:20:35 1989 <<<

The power outlet problem reported for the v775 also effects
the dw. The Taurus box to the dw had to be jumpered to
turn on the dw. The Taurus interlock has been defeated at
the Taurus box itself.

>>> 'dw' problem from hebert -- Wed Apr 19 15:11:45 1989 <<< [No Comment]
>>> 'dw' problem from hebert -- Tue May  2 18:48:25 1989 <<<

The Airco Dep Rate Controller isn't giving the proper film
thickness even though the program parameters are OK. For
example, an 1800 A SiO film (by the crystal) actually measured
2600 A with the as200. 

>>> 'dw' problem from hebert -- Thu May  4 21:00:42 1989 <<<

Problem: Cryo saturated and dumped.

Solution: I turned off the cryo compressor to regen overnight.


BOB: Can you get someone to rough out the cryo and turn the compressor
back on first thing in the morning? The compressor cools down very
slowly (e.g. it takes about 6 hours for the pump to get cold again).
That way the system will be usable in the afternoon. Thank you!

>>> 'dw' problem from bob -- Fri May  5 10:08:13 1989 <<<

The cryo on the dw has been roughed out and is cooling down. The dw should
be up for use latter this afternoon.

>>> 'dw' problem from hebert -- Wed May 10 20:46:34 1989 <<<

Problem: Elevated base pressure (i.e. 3.0 x10 E-7 Torr).

Normal base pressure is 4 - 7.0 x10E-8 Torr.

Solution: 1) He leak checked system, except for xtal monitor
             and copper shroud. No leaks were detected.
          2) Cleaned chamber. There was a lot of SiO peeling
             from the copper shroud. There were SiO flakes near
             the e-gun filament. Four SiO pieces were outside of
             the crucible and near the anode plate. This could have
             caused the e-beam to spread and be difficult to control.
           3) The SiO liner had a chip in it. It was replaced with a
              new graphite liner.
           4) The SiO crucible was filled with about 60% ash. New
              SiO was added and the ash was removed.
           5) The high voltage insulators were coated with metal/SiO.
              I cleaned them.

The chamber is baking out at this time. It will be 12 - 18 hours before
the lamps can be turned off and the ultimate base pressure observed.

The SiO that was all over the chamber was probably from high SiO dep
rate/ SiO source spitting (explosion) as a result of the problems
with the FDC-8000 dep rate controller.

>>> 'dw' problem from parrish -- Thu May 11 14:02:29 1989 <<<

I found the system at 1.7 TORR with the high vacuum valve open, and the
cryo-compressor on. I turned off the compressor and the heat lamps and
begin to vent the system for regeneration. I don`t know what happen to
the system.

>>> 'dw' problem from parrish -- Fri May 12 15:22:17 1989 <<<

The leak in the fore line was fixed and the system has been regenerated 
pressure in the chamber is 3x10-7 after 3hours. I don`t know wheather
it will pump down to the 8 range or not. will check on monday. 

>>> 'dw' problem from parrish -- Mon May 15 07:33:09 1989 <<<

problem: system found at high pressure with compressor on(1.6 torr)

cause:   undetermined, all the valves and pressures were normal positions

solution:   regenerated system, chamber pressure 5.6x10-8. system up

>>> 'dw' problem from hebert -- Wed May 17 17:21:36 1989 <<<

The telephone type connector to the Taurus box is loose, causing
the box not to enable the dw thru the wand.

>>> 'dw' problem from phillip -- Thu May 18 10:48:32 1989 <<<

P: Local taurus controller malfunctioning.
S: Replaced faulty male modular connector.
   The problem is remidied.

>>> 'dw' problem from hebert -- Tue May 23 15:52:02 1989 <<<

Problem: The cryo pump dumped agin today after being in the
low 10E-7 Torr range. This happened two weeks ago (i.e. the
pump was regenerated two weeks ago)

The pump may need to be rebuilt, or there is a problem with
the compressor.

>>> 'dw' problem from bob -- Fri May 26 14:34:02 1989 <<<

Dave Hebert reports short operating life after the last regen on the
dw. It may be time to replace this pump. It has been regenerated 
recently and we wiill monitor the system and make a recommendation
shortly.

>>> 'dw' problem from hebert -- Tue May 30 12:41:08 1989 <<<

Problem: High vac valve won't close.

There is a loose wire to the high vac solenoid. I shorted it
together, and the hi vac valve still won't close. I also
got a shock while trying to repair. I'm not sure about the
way that the hi vac valve was wired in. I think that James Parrish
is familiar with the wiring to the valve.

There is a wafer in the chamber that is ready to be removed. We need
this wafer ASAP.

EST REPAIR TIME: 30 minutes.

>>> 'dw' problem from sylee -- Tue May 30 13:43:21 1989 <<<

high vac valve does not close. the problem has been reportrd to Bob by Hebert.

>>> 'dw' problem from parrish -- Tue May 30 15:28:08 1989 <<<

system is down for repair of the high vacuum valve. I t looks like it just
a matter of cleaning at this point. It is out, lying on the compressor.

>>> 'dw' problem from parrish -- Fri Jun  2 07:35:22 1989 <<<

problem:    high vacuum valve won`t close

cause:      there seem to have been something jammed in the valve closing
            system, and the o-ring was gouged up.

solution:   removed the valve, replaced the o-ring, sanded the inside of the
            valve, cleaned every thing up and reinstalled into the system
            pressure in the system is 1x10-7 this morning.

>>> 'dw' problem from hebert -- Wed Jun  7 00:18:59 1989 <<<

Problem: The high vac valve wouldn't close all the way after
several attempts. This caused the cryo to dump upon venting
the chamber.


I think that the air pressure to the high vac valve needs to be 
increased to make sure that the valve closes completely when venting.

The cryo compressor has been turned OFF to regenerate the cryo pump.

I appreciate it if the air pressure to the high vac valve was
increased and the cryo roughed out first thing in the morning.
Upon roughing the cryo, please restart the compressor. I have a
wafer in the chamber that needs to be processed on Wed, 6/7. Thank you.

DH

>>> 'dw' problem from hebert -- Fri Jun  9 17:26:07 1989 <<<

Problem: Dirty chamber.

Solution: I cleaned the chamber, replenished the SiO and Mo'
sources. I burnt in the Mo source. The dw is UP.

>>> 'dw' problem from mikeb -- Wed Jun 28 10:59:19 1989 <<<

The hi-vac valve bangs loudly when it opens and closes, but is otherwise
working well.  It's possible that no adjustment is necessary, but the
problem should be looked at.  This is not a high priority job.

>>> 'dw' problem from sylee -- Wed Jul  5 10:53:24 1989 <<<

The pressure of DW rises rapidly when the high vac valve is opened. It
looks we have a gross leak in the gate valve. 

>>> 'dw' problem from parrish -- Wed Jul  5 11:56:00 1989 <<<

system down for repair of high vacuum valve, also there is a water leak
in the hose going to the cryo-compressor.

>>> 'dw' problem from parrish -- Wed Jul  5 15:27:47 1989 <<<

problem:   high vacuum valve leaking

cause:     debree between o-ring and sealing surface

solution:  removed gate valve and cleaned surfaces, replaced. system coming
           down in temp. should be up in the morning.

>>> 'dw' problem from hebert -- Wed Jul  5 20:30:39 1989 <<<

The "magnet" interlock to the power supply is not being met.

>>> 'dw' problem from mikeb -- Thu Jul  6 10:29:31 1989 <<<

problem:	Magnet interlock not satisfied

possible sol'n:	The interlock can be satisfied by gently wiggling the
		wires at the electrical feedthrough.

problem:	With all interlocks satisfied, and the green "on"
		light illuminated and blinking, there is not beam
		current at any pot setting.

cause?		Filament?

>>> 'dw' problem from bob -- Fri Jul  7 07:23:34 1989 <<<

Dave Hebert is investigating problems with the e-gun in the dw. A
request for a vacuum interlock added to the e-gun supply has been
entered in rnormans joblist.

>>> 'dw' problem from hebert -- Fri Jul  7 09:16:54 1989 <<<

Problem: Magnet interlock light is not coming on. I can't
find and obvious reason why. I'll have to vent and remove the
electrical feedthrough to check for mag int continuity at the
feedthrough.

>>> 'dw' problem from mikeb -- Fri Jul  7 12:32:46 1989 <<<

problems:	Magnet interlock not satisfied and zero beam current

cause:		Remote control was disconnected

		dw is up.

>>> 'dw' problem from sylee -- Mon Jul 10 16:47:32 1989 <<<

FDC 8000 controller has a problem in setting a process number. Only
process 5 which is set up for SiO deposition. When you need to use
for depositing other materials, please make sure of putting right inputs
of tooling factor, density and acoustic impedience. 

>>> 'dw' problem from mikeb -- Mon Jul 17 12:01:14 1989 <<<

problem:	FDC-8000 Dep. rate controller won't change process
		number; READY lamp does not stay illuminated, but rather
		the controller reverted directly to "IN PROCESS".

cause:		I/O board not properly seated in card-edge connector.

fix:		Reseated I/O board.

		dw and v775 should both be up for normal use.

>>> 'dw' problem from rnorman -- Fri Jul 21 15:48:41 1989 <<<

Problem: No vacuum interlock on the DC Gun Controll power supply.

Solution: There was already existing on the dw gate valve a
          vacuum switch, so I connected the interlock wire
          from the Gun Control.  The interlock was tested and
          open at about 550 torr.  The dw is up.

           It would be good if we could connect some interlocks and
           TC tubes to the Vacuum Controll so that it could be utilized
           effectivly as an Automatic Vacuum Controller.  All we need
           to do is connect the cryo TC gauge to the Foreline readout,
           connect the chamber TC to the Bell Jar readout, connect the 
           H2O, Vacuum and cryo interlock to the correct pins. I think
           all this could be done in 4 hours.  Just somethimg to think
           about.

>>> 'dw' problem from hebert -- Tue Sep 12 15:37:43 1989 <<<

The mech pump drive belt squeeks when the chamber is roughing out.

>>> 'dw' problem from hebert -- Mon Sep 25 19:05:30 1989 <<<


The toggle switch to the hi vac valve is bad and needs to be
replaced.

>>> 'dw' problem from rnorman -- Tue Sep 26 12:32:03 1989 <<<

Problem: The "Hi Vac" switch locked up electricly and was not able
         to operate the hi vac valve.

Cause: Parrish turned off the controller and turned it back on which
       allowed hebert to continue with operation.  Toggle switches normally
       can not be reset by turn the power off, so I looked on the schematic
       and a relay is activated by this switch, which in turn activates the 
       hi vac valve and LEDS.  I suspect the relay is locking up intermittantly.

Solution: We have a spare board some place, I will look for it; if not I
          will order the relay.  The next time this problem occurs find
          me so I can  check it out while it is latched-up, because it
          may be the switch or the relay board; if your process can
          wait.  The dw is up.

>>> 'dw' problem from hebert -- Fri Oct 13 16:54:54 1989 <<<

The high vac valve won't close. I removed power to the high vac
solenoid, and the valve still didn't close. 

System can't be vented until the high vac can be closed.
THE DW IS DOWN.

>>> 'dw' problem from hebert -- Fri Oct 20 10:19:14 1989 <<<

The high vac valve won't close.

>>> 'dw' problem from hebert -- Fri Oct 20 11:07:55 1989 <<<

I got the high vac valve to close by removing the air line
from the solenoid valve, and then reconnecting the air line
to the valve. I left the air on while disconnecting. 

Disconnecting the power to the solenoid didn't cause the high vac 
valve to close.

I think that the problem with the high vac valve notr closing
at times may be due to a bad air solenoid.

>>> 'dw' problem from parrish -- Wed Oct 25 10:41:06 1989 <<<

problem:   high vacuum valve won`t close

cause:     bad 4 way soleniod 

solution:  removed bad solenoid, and replaced with a new one
           high vacuum valve works properly.

>>> 'dw' problem from hebert -- Wed Oct 25 11:10:17 1989 <<<

I've had two wafers with peeling films this week. One was
peeling SiO, the other had peeling Mo. I fear that the 
foreline trap may be saturated and that mech pump oil may
be getting into the chamber. Can I get the foreline trap
inspected and replaced if necessary?

>>> 'dw' problem from parrish -- Wed Oct 25 13:57:57 1989 <<<

I removed the foreline trap, inspected and reinstalled, there was 
no oil or oil film in the foreline.The problem is not with the oil.

>>> 'dw' problem from hebert -- Tue Dec  5 09:07:08 1989 <<<

Elevated base pressure: 5.0 x 10 E-7 Torr. The base pressure
has been in the mid 10E-8 Torr range until about 10 days ago.
The pump dumps regularly during a film dep cycle (especially Mo).
Low base pressure is needed to deposit Mo films that are 
suitable for circuit resistors. The pump has taken over 6 hours
to cool down after regen for over a year now. The pump has to
be regenerated weekly, whereas it used to be regenerated monthly.

The Varian cryo is old and showing classic signs of an aged cryo pump.

I'd like to be able to swap the Varian pump for another CTI 8 or
CTI 7, if the lab has one that is not in use at this time.

>>> 'dw' problem from parrish -- Wed Dec  6 09:55:16 1989 <<<

system down for exchange of compressors and cold heads.

>>> 'dw' problem from parrish -- Fri Dec  8 08:09:04 1989 <<<

update:    I am waiting for a switch for the compressor in order to complete
           the pump-compressor change.

>>> 'dw' problem from parrish -- Mon Dec 11 15:13:11 1989 <<<

problem:    compressor on the CTI-cryo will not turn on.

cause:      switch on compressor bad

solution:   ordered a new switch from CTI, it came in today and was insalled
            system is being pumped down. should be up in the morning.

>>> 'dw' problem from hebert -- Thu Dec 14 08:36:07 1989 <<<

Problem: Auto crossover has not been installed to date. I'd like to
get this done, since I expect students from the Cryo Group to become
more actively involved in the fabrication of our circuits after the
first of the year.

Auto crossover will prevent damage to the cryo pump, high vac valve,
and will prevent the chamber from being over roughed.


The controller in place will allow for auto crossover. All that is
needed is some TC gauges and an interconnect cable.

>>> 'dw' problem from hebert -- Wed Jan  3 08:34:25 1990 <<<

Problem: Dirty chamber.

Solution: I cleaned the chamber, replenished the sources (Mo, Al, SiO).
 

The Al is now in crucible #2. Crucible #3 is not being used. The Mo
source needs to be conditioned before it can be used. The cryo pump was
regenerated.

This morning the base pressure is 9.0 x 10 E-8 Torr with the copper
shroud hot.

The DW is UP.

>>> 'dw' problem from parrish -- Fri Jan 26 07:00:59 1990 <<<

system down for investigation of noises from roughing pump.

>>> 'dw' problem from parrish -- Fri Jan 26 09:38:23 1990 <<<

problem:    noises at the roughing-pump

cause:      the fan on the motor worked itself loose

solution:   removed the motor readjusted the fan, and retightened
            replaced the motor. system is up.

>>> 'dw' problem from bob -- Mon Jan 29 11:08:15 1990 <<<

The mechanical pump on the dw has problems with its motor. It has
been turned off and vented. James Parrish has been informed.

>>> 'dw' problem from parrish -- Fri Feb  2 09:25:42 1990 <<<

problem:    motor making noise

cause:      have not determined the source of the noise, other than it
            seem to be coming from the motor.

solution:   allow pump to be used temporarely, and order another motor.

>>> 'dw' problem from hebert -- Fri Feb 23 15:40:19 1990 <<<

The mechanical pump makes noise and must be turned off
after roughing the chamber.

Also, the water pump does not turn off after the e-gun and
power supply water cooling valves are turned off.

>>> 'dw' problem from bob -- Wed Mar 21 10:23:23 1990 <<<

The mechanical pump on the dw is being changed to a D16A.
Problems reported by Dave Hebert on the recirc water have
been serviced by him.
The dw will be up by 11:00am today.
.

>>> 'dw' problem from parrish -- Wed Mar 21 11:11:56 1990 <<<

problem:    pump making noises

cause:      undetermined, pending further inspection

solution:   removed pump and replaced with a spare. system is up.

>>> 'dw' problem from hebert -- Thu Apr  5 16:08:38 1990 <<<

The cryo pump dumped this afternoon. I regenerated it. I have to
regenerate this pump about once a week or every 4 pump downs.


The chamber should be He leak checked. The problem may be due
in part to a the high vac valve seal: maybe it has dirt on it
again.

>>> 'dw' fix from hebert -- Wed Apr 11 14:16:41 1990 <<<

Problem: resistance monitor bridge lead broken.

Solution: resoldered lead to bridge contact.
>>> 'dw' problem from hebert -- Thu Apr 12 07:46:51 1990 <<< [No Comment]
