>>> 'cpa' problem from rnorman -- Tue Jan  3 11:59:58 1989 <<<

Problem: The RT load lock chamber chain jumped off its track.

Cause: This is usually caused by a pallet in crooked; but the pallet of
       wafers were removed this time, so I'm not sure.

Solution: The chain was replaced and tested the cpa is up.

>>> 'cpa' problem from rnorman -- Fri Jan 20 14:39:02 1989 <<<

Problem: The compressor was always on; which was noticed by Bob.

Cause: The Watts Miniature Air Filter clear housing was cracked 
       and leaking air.

Solution: The whole air filter assembly was replaced and is now
          working properly.

>>> 'cpa' problem from bob -- Wed Feb  1 13:54:02 1989 <<<

The cpa cryopump has been regenerated after a power failure and
the system is ready for use. The main chamber remained under 
vacuum however the target may need to be run in (conditioned)
prior to use.

>>> 'cpa' problem from carlos -- Mon Mar  6 01:29:26 1989 <<<

the chain on the lam side is jammed

>>> 'cpa' problem from rnorman -- Wed Mar  8 12:11:06 1989 <<<

Problem: The RT. side load lock chain came off.

Solution: The chain was put back on track and the cpa was tested.
          It is up for use.

>>> 'cpa' problem from jimmoon -- Thu Mar 16 07:52:46 1989 <<<

The cpa is making a strange thumping noise that I haven't heard
before.  I'm not trying to use it, but it doesn't sound very good.

>>> 'cpa' problem from rnorman -- Thu Mar 16 08:10:44 1989 <<<

The cpa cryo is ratcheting; this means the cryo is contaminated and
will need to be regenerated and the He lines will have to be purged
with pure He. The cpa will be down for about 4 hrs to finish this work.
If things go well, that is if the cryo purging is sufficient to decontaminate
the cryo, it will be up by 1PM today.

>>> 'cpa' problem from rnorman -- Thu Mar 16 12:52:16 1989 <<<

Problem: Cryo ratcheting; making a thumping sound.

Cause: The cryo was contaminated with H2O or low on He in the compressor.

Solution: The cryo was regenerated and then purged with pure He thru the
          cryo. I then recharged the compressor because it was low on
          He, it was at 175 PSI. Recharged to 190 PSI. The cryo is chilling
          down now and it will be up by 2:30 pm today.

>>> 'cpa' problem from bill -- Fri Mar 17 15:05:20 1989 <<<

Lots of debris noticed in the cpa main chamber -
especially under the W target.
Some of these "flakes" ended up on my wafers.
Already mentioned problem to Robert Norman 
who said he is awaiting new target shielding
before opening up the cpa for cleanout.

If the shielding doesn't arrive soon, the cpa
really needs this stuff cleaned out.

Pressure and aluminum sputtering were good.

>>> 'cpa' problem from rnorman -- Fri Mar 17 15:57:40 1989 <<<

The cpa new shielding should arrive next week at that time I will
clean the cpa chamber and windows. If they do not arrive by latter
in the week or if the partical problem reaccures I will go in and
vacuum out the flakes.

>>> 'cpa' problem from bob -- Mon Mar 27 13:15:48 1989 <<<

The cryo pump is ratcheting again and needs attention.

>>> 'cpa' problem from rnorman -- Mon Apr  3 08:57:44 1989 <<<

The cpa cryo was ratcheting again and will be purged out and regenerated.
You will be informed on progress.

>>> 'cpa' problem from rnorman -- Tue Apr  4 09:29:58 1989 <<<

Problem: Cryo ratcheting.

Cause: The compressor static pressure was at 50 PSI, very low; this
       could have a lot to do with the cryo problem.

Solution: I purged the cryo with H2 and recharged the compressor to
          205 PSI, a little more then normal. The cryo is chilling down
          and should be up by 12 noon.

>>> 'cpa' problem from evan -- Fri Apr  7 16:37:40 1989 <<<

The air pressure alarm is 'on' due to the loss of house air.  The 70 psi
of nitrogen back-up is below the 75 psi needed.  When house air returns,
the alarm will automatically re-set.
See facilities problems for further info.

>>> 'cpa' problem from bailey -- Mon Apr 10 11:48:37 1989 <<<

unable to pump the left load lock because air pressure was low--warning light
was lit.

>>> 'cpa' problem from bill -- Mon Apr 10 12:14:05 1989 <<<


Incoming compressed air at 54psi -
Tom thought this might be sufficient for cpa operation -
but there must be an interlock preventing operation,
still unable to pumpdown left load lock
( see previous problem already reported by bailey ).
It seems cpa inoperable until pressure is corrected
or interlock is bypassed.

>>> 'cpa' problem from robin -- Thu Apr 13 06:51:57 1989 <<<

Alarm sounding on one of the TC's.

RRR

>>> 'cpa' problem from bob -- Thu Apr 13 09:38:28 1989 <<<

The cryo on the cpa was purged. In attempting to turn the compressor
on nothing happened. We have had failure of the Airpax power switches
in the past and this may be the problem. It will be investigated.

>>> 'cpa' problem from bob -- Thu Apr 13 14:46:22 1989 <<<

The cpa has a problem with its cold head. I have been intructed by Dirk
at CTI that HiVac'ing the cold head for 5 hrs may get it back up. I have 
hooked up the He leak detector to it and I'm pumping on it. The He leak
detector has been filled with LN so it can pump throughout this
evening.. The cpa will be down at least until tomorow afternoon.

>>> 'cpa' problem from rnorman -- Fri Apr 14 16:14:01 1989 <<<

The cryo motor is still froze up. I got the hld to pump on the cryo lines
and cryo down to 10 mtorr or so, at that point I let it pump for about an
hour. I then charged the cryo and lines to 200 PSI of He. I turned on the 
compressor but the cryo motor was still froze. I think were are in need
of a rebuilt cryo. The cpa will be down until mid-next week atleast.

>>> 'cpa' problem from rnorman -- Mon Apr 17 11:04:53 1989 <<<

The CPA CTI cryo has been pulled out. The word is that a rebuilt cryo,
PN 8018116, will be ready tomorrow afternoon. We have a Cryo-Torr 10
SN 10D52401. If things go well and we have a cryo here tomorrow from
CTI the CPA will be up by noon on Wendesday.

>>> 'cpa' problem from bob -- Mon Apr 17 11:47:06 1989 <<<

The cpa will be down until 4/19/89, around 14:00.
We will install a new cryopump 4/18/89 and the following day, Wednesday
4/19/89, High Vacuum Specialists will come to install new
shielding and a new magnet assembly on a target.
The machine will be up for use after their service.

>>> 'cpa' problem from rnorman -- Wed Apr 19 12:45:03 1989 <<<

The CTI rebuilt cryo was installed and is under rough vacuum. Since
monday when I recharged the compressor to 200 PSI the pressure has 
dropped to 50 PSI; after I pulled the cryo. So, I filled the
compressor and lines to 255 PSI and then disconnected both lines
from the compressor. Tomorrow we will check the pressure in the
compressor and each line to see which one is leaking. Also, High
Vacuum Specialist was up and delivered our new sputter shielding.
They will return on Friday, 4/21, will some parts that needed
cleaning. Mostlikly the cpa will be up late in the afternoon on
Friday, 4/21.

>>> 'cpa' problem from bob -- Fri Apr 21 08:52:20 1989 <<<

Down for maintenance.

>>> 'cpa' problem from rnorman -- Fri Apr 21 12:50:35 1989 <<<

The cpa will be down until monday. The cryo compressor has a major
He leak in the Return pressure release valve. I have ordered the
part and it will be installed on monday. The chamber is also being
clean, the view port windows replaced and the new shielding installed.
It should be up for use by late monday or tuesday morning.

>>> 'cpa' problem from rnorman -- Tue Apr 25 16:40:00 1989 <<<

The chamber is cleaned and the window glass has been replaced. The cryo is
now under high vacuum and pumping on the chamber. The only shielding installed
at this time is target #2, Al/Si. The rest don't fit, but will be installed
when they do; which will be latter this week. I have burned in all the targets
but the ONLY target usualbe at this time is #2. You will be informed when the 
cpa will be down to install the rest of the shielding.

>>> 'cpa' problem from rnorman -- Tue Apr 25 16:49:38 1989 <<<

The last report has a error in it; there is no shielding it the
cpa none fit; the dark space shield hits the shielding. The cpa is
still up for use.

>>> 'cpa' problem from carlos -- Wed Apr 26 14:17:02 1989 <<<

there is a screw on the track blocking the way of the trashes.

>>> 'cpa' problem from bailey -- Thu Apr 27 09:55:28 1989 <<<

umy pallet rotated 45 degrees somehow and could not be extracted.
robert n. will open the chamber today to remove it, I think.

>>> 'cpa' problem from rnorman -- Thu Apr 27 14:04:38 1989 <<<

Problem: After the chamber clean we have had various problems; pallet
         twisted, pallets jamming and non-uniform deposition.

Cause: The chamber clean was unfinished. Pallets were jamming at the 
       left L/L side due to a bolt being left in the chamber were it
       should not have been. The non-uniformity was caused by, most
       likly, the shielding not being in place; this caused the
       plasma not to be contained close to the wafers. As for the 
       twisted pallet it could have been caused by many things, we will
       have to keep an eye on this problem.

Solution: All the shielding was modified to fit the chamber and were installed
          with the dark space shielding for targets 1 and 2. The bolt had to 
          be cut out and removed. The rail-bias was reconnected, but is
          not operational due to ceramic spacers needed to lift the new 
          type of shielding above the track potential. The chamber is now
          under hi-vac and pumping down. I have not burned in the targets
          yet but will after 1 hour. After that time the cpa will be up
          for use.

>>> 'cpa' problem from rnorman -- Thu Apr 27 14:25:51 1989 <<<

The targets have not yet been burned in, but will after 1 hour for now.
You will be informed when it is done.

>>> 'cpa' problem from rnorman -- Thu Apr 27 16:00:37 1989 <<<

All the cpa targets have been burned-in. The system is pumping down
and will probably out gas until tomorrow, due to the installation
of the new shielding. All cpa targets are now ready for use.
NOTE: The rail-bias is not ready for use; if you need it let me know.
      Most users don't use it any way.

>>> 'cpa' problem from bill -- Wed May  3 17:57:59 1989 <<<

Pallet jammed in main chamber near left load lock,
slight rotation of pallet during first pass ( right to left )'

Turned off plasma and left cpa pumping.
If there is a technique to solve this without
venting the entire chamber please let me know,
otherwise the whole chamber needs to be opened and
I thought this procedure should wait for staff in the 
morning.

I have two wafers on the stuck pallet -
please just send me mail as to which load lock you leave
them in - or my box is next to the cpa.

Thanks, Bill

>>> 'cpa' problem from rnorman -- Thu May  4 09:59:07 1989 <<<

Problem: Pallet stuck at left end of cpa.

Cause: Unknown, the pallet could have been scraping  on  the L/L
       sensor plate, I did here a noise when I ran the pallet
       through; and adjusted it a little bit off the pallet.

Solution: Vented the cpa and took out the pallet. I put the wafers
          in his box. I burned in the targets and the cpa is now pumping
          down. IT is up for use.

>>> 'cpa' problem from rnorman -- Mon May  8 12:47:13 1989 <<<

The cpa will be down shortly to look at the Rail-bias. Chris Malocsay
from HVS is here to check it out.

>>> 'cpa' problem from rnorman -- Mon May  8 14:29:15 1989 <<<

Problem: cpa down to check out the rail bias.

Solution: The cpa was vented and the rail bias was looked at.
          Chris Malocsay of High Vacuum Specialists will send
          us up some ceramic "caps" to fit over the rail rollers;
          these will insulate the rail from the shielding so a
          bias can be applied without shorting. Chris will send
          them up tomorrow; if so, the rail bias will be usable
          this week. The cpa is now up for use.

>>> 'cpa' problem from rnorman -- Mon May  8 14:59:35 1989 <<<

The targets were burned in after venting and is ready for use.

>>> 'cpa' problem from robin -- Fri May 12 14:25:46 1989 <<<

How useless!!!  Why are there now bars in front of the viewports??
I can't see a thing?  Can this be remedied?  The way it is now,
the viewports are virtually useless.  What a waste.

>>> 'cpa' problem from moazzami -- Sat Jun 17 09:05:53 1989 <<<

When I came in this morning, the TCF alarm was on:
Cryo pump temp. was near room temp.  All chambers were on standby
The Cryopump needs regeneration.

>>> 'cpa' problem from rnorman -- Mon Jun 19 08:56:40 1989 <<<

The cpa cryo is now under regeneration. The reason it went down
is because the compressor pressure is at 30 psi; this is extremly
low, normal pressure is at 185 +/-5 PSI.  We have a major leak in the 
cryo system and the cpa will be down until the leak it found.
Previously a major leak was found in the pump unit of the compressor and
was thought to be fixed; another leak was found in the cryo He lines and
the solution at that time was to get new 20" He lines, which in-turn would
give us 2 sets of 10" lines for replacementsd on other systems. Now might
be the time to purchase those 20~ lines.  You will be informed on the cpa
progress. Now may be a good time to install the new Al/Si target, install the
ceramic stand-offs, for the rail bias, and clean the windows. All this work
could take 2 to 3 days to finish.

>>> 'cpa' problem from rnorman -- Wed Jun 21 15:24:37 1989 <<<

The cpa cryo is still down, partly due to the many problems with other
equipment the last couple of days. Tomorrow the cryo will be chilled down,
the new Al/Si target installed with the new Varimag from HVS; also, the 
ceramics will be installed and the windows cleaned.  Most likly the cpa
will be read for operation friday morning.

>>> 'cpa' problem from rnorman -- Fri Jun 23 14:09:25 1989 <<<

Problem: Cryo compessor turned off.

Cause: Either a water failure in the lab last weekend, like the gartek; or
       the low He pressure in the compressor, less then 50 psi.

Solution: I recharged the compressor and purged it out a few times, then 
          "snooped" the whole compessor and found no bubbles. I leak checked
          the He lines and found one of the fittings leaking, return on the cryo
          side; inwhich the fitting was replaced.  The New Al/Si target was l a leak in the compressor, but it is usuable for 
          now and will not effect the cryo's pumping speed; I will leak check
         the compressor on monday.

NOTE: The cpa Al/Si target needs to be ran for about 10 min before use to
      help  burn in the target.  THE CPA IS UP FOR USE.

>>> 'cpa' problem from rnorman -- Fri Jun 23 14:25:09 1989 <<<

Inshort, the new Al/Si target was installed and burnt in. The cpa
is up for use.

>>> 'cpa' problem from tom -- Mon Jun 26 16:28:06 1989 <<<

Will not hold plasma. I ran the Al/Si target for 1.5 hrs at 0.5 kWatts
and still it will not even stay on at 1 kWatt. It's not burning in.

>>> 'cpa' problem from rnorman -- Mon Jun 26 16:51:10 1989 <<<

The Al/Si target is arcing very badly for some reason. I will look
into it ASAP. The other targets are fine and may be used.

>>> 'cpa' problem from rnorman -- Tue Jun 27 08:32:48 1989 <<<

The cpa will be down to repair the arcing problem.

>>> 'cpa' problem from rnorman -- Tue Jun 27 16:24:24 1989 <<<

The new Al/Si target was arcing due to poor target bonding to the 
backing plate; doing so the target de-bonded from the backing plate.
The target was removed and HVS came up and took it back to get rebonded.
Chris of HVS said he will return in the morning with the target. 
I did not install the old Al/Si target because it is depleted to the
point of punching through to the Cu backing plate.  When I receive the
Al/Si from HVS it will be installed ASAP.

>>> 'cpa' problem from rnorman -- Wed Jun 28 16:48:40 1989 <<<

Problem: Al/Si target arcing badly.

Cause: The target had a void in the bonding of the target this
       produced excesive heat on the bond, which in turn caused
       the target to de-bond from the backing plate.

Solution: HVS came up and took the target back for rebonding. The
          target was re-installed and burned-in. The cpa is up for
          use with all targets. Target 2 is newly installed Al/2%Si.

>>> 'cpa' problem from tom -- Fri Jul 14 11:05:32 1989 <<<

The left load lock leaks. With it closed the vacuum is good but when it
is open the system won't poump down below 4x10E-5.

Also the Al/Si target started arcing severly during my deposition.

>>> 'cpa' problem from gian -- Fri Jul 14 13:47:20 1989 <<<

Key switch for Al power supply is intermittant

>>> 'cpa' problem from rnorman -- Mon Jul 17 11:54:06 1989 <<<

The Lt side load lock gate valve has a leak across the gate valve
o-ring; as long as the Lt' side is not vented up no leak will occure.
Tomorrow morning I will pull the gate vlave and clean and/or replace the 
o-ring. The cpa is up for use today, don't use the LT. load lock.

>>> 'cpa' problem from rnorman -- Tue Jul 18 14:12:13 1989 <<<

Problem: Lt. load lock gate valve is leaking when closed.

Cause: The load lock o-ring  was dirty and in need of replacement.

Solution: The cpa chamber was vented and the gate valve was removed;
          the sealing o-ring was replaced and the gate-valve was cleaned.
          The cpa was pumped down and the valve was tested, no leak was found.
          All the targets were burned-in and the system is up for use.
          The Al target arced once real bad, drawing 26 amp for 2-4 seconds.
          this may be a sign of the target de-bonding again; please keep your
          eye on the "amps" LED on target #2 and let me know if it continues
          to draw 26 amps intermittantly.

>>> 'cpa' problem from davor -- Wed Jul 19 00:41:41 1989 <<<

One of my pallets got stuck coming out of the left load-lock on
its return trip after being Al sputtered.  It became crooked and
became wedged so that it could neither be moved forwards or backwards,
and since it protudes out a bit, I could not just vent that load-lock.
Could someone please vent the system and recover my wafers for me?
Also, if I someone knows how to prevent such occurancences, please send
me mail.
The Aluminum came down a bit cloudy on one side, though acceptable enough
for my purposes.

>>> 'cpa' problem from rnorman -- Wed Jul 19 09:24:37 1989 <<<

Problem: Pallet stuck in Lt. load lock.

Cause: The pallet interlock for the load lock was met; this will disable
       the gate valve and the indexing  of pallets, pallets will not move.

Solution: The Pallet Interlock sensor was adjusted toward the chamber more, and
          the stopping rods for loading pallets were too high and needed to              be lowered abit so the pallet interlock would not sense when loading 
         pallets.  The cpa is up for use.

>>> 'cpa' problem from bill -- Wed Jul 19 13:30:42 1989 <<<

1) After 2 hours of pumpdown - with both loadlocks open -
   Pressure only reached 7-8 E-7.

  I isolated left load lock and pressure quickly came below
  5 E-7.
  New seal on left load lock probably needs further attention.

2) Al/Si target occasionally arcs, power drops to < 1 Kwatt
   and current goes to ~27 amps			amps





















.'

>>> 'cpa' problem from rnorman -- Wed Jul 19 16:46:13 1989 <<<

The cpa looks like it has a vacuum leak or the cryo is saturated.
I will regenerate the cryo tonight and chill it down in the 
morning.  I leak checked the load lock and it doesn't look like
it is leaking.  The cpa should be ready for use by noon tomorrow.

>>> 'cpa' problem from rnorman -- Thu Jul 20 10:34:06 1989 <<<

I leak checked the cpa and found no leak, anywhere.  Since I
was working on it I vented the chamber and looked at the target
to see why it's arcing; the target is debonding again. Also, the
teflon insulator and the dark space grounding shield has major
arc dammage, both are melted in areas.  At this time it may be a
good idea to install the old Al/Si target, even though it is very low,
for a couple days until the target is rebonded correctly.  The cpa
should be ready for use by noon today.

>>> 'cpa' problem from rnorman -- Thu Jul 20 16:50:39 1989 <<<

The old Al/Si target was installed but it was arcing so bad I had to
take it out.  The chamber was blanked off and pumped down.  Tomorrow
the new target will be returned, newly bonded, and installed.  The
cpa will be up by the end of the day if not sooner.

>>> 'cpa' problem from rnorman -- Fri Jul 21 16:29:26 1989 <<<

The Al/Si target was finish rebonding, so my speculation is
HVS will be here monday with the target.  The cpa will be
down for the weekend.

>>> 'cpa' problem from rnorman -- Wed Jul 26 08:17:49 1989 <<<

The target came in and was installed.  I am installing the rail bias
at this time, some modifications are necessary and some have been done.
I will continue the rail bias install and most likly the cpa will be
up today.

>>> 'cpa' problem from rnorman -- Wed Jul 26 16:53:40 1989 <<<

The cpa is under hi-vac. Tomorrow I will leak check the system and
if all goes well it should be up by noon.

>>> 'cpa' problem from rnorman -- Thu Jul 27 09:34:10 1989 <<<

The cpa cryo temperature was at 15~K, much too high for use, and
will need regeneration.  I am purging the cryo now and will be chilled
down by noon.  I will then burning the targets and it should be ready for use
by 12:30. The vacuum will not be the best until tomorrow morning; today
the cryo will be in the upper 10-7's, and tomorrow low 10-7 torr.

>>> 'cpa' problem from rnorman -- Thu Jul 27 14:47:01 1989 <<<


Well, the cpa ran good for about 30 min., then started arcing at 26 amps!
The good news is the rail bias was installed, but the track had to be
lowered 1/4" so the shielding would not hit the cpa chamber lid.  The track
shieling had to have new holes drilled in for the rail bias ceramics to be
installed. The ceramics from High Vacuum (rookies)Specialists did not fit
properly. Sorry about the target, I have no clue as to why we keep on having
an arcing problem with this new Al/Si target. All I can do is pull the target
out clean it up real good and reinstall it; I will call HVS and let them know
the situation. The W and Ti target are up for use, but DO NOT USE TARGET 2.

>>> 'cpa' problem from rnorman -- Thu Jul 27 16:56:35 1989 <<<

The new Al/Si target was removed and it has DE-BONDED AGAIN!  This is
the 4th time.  We will ship this target to Degussa to get bonded correctly
and bill HVS.  The cpa is under hi-vac and the W and Ti targets are up for use.

>>> 'cpa' problem from rnorman -- Wed Aug  2 09:05:42 1989 <<<

The newly bonded Al/Si target has arrived and was installed. I
will leak check the target area and then do a burn-in.  The cpa
should be operational and have fairly good vacuum, upper 10-7, by
1:pm to day.  

>>> 'cpa' problem from rnorman -- Wed Aug  2 12:20:40 1989 <<<

Problem: Al/Si target de-bonding, 4 times.

Cause: We used HVS and their bonding technique was bad, or who ever
       they used to do it for them.

Solution: The target was sent to Degussa, the place were we buy our targets,
          and had the target bonded to the backing plate.  The targets were
          burned-in and no major arcing occurred with the Al/Si.  At this time 
          all targets W, Al/Si, and Ti are up for use. Also, the rail-bias
          has been repaired and is up for use.  The vacuum looked very good
          before burn-in @ 8x10-7.  The cpa is up.

       NOTE: Keep your eye on the center LED on target 2 power supply 
             for high current arcs for this week, 25 amps or so. 

>>> 'cpa' problem from rnorman -- Fri Aug  4 07:24:21 1989 <<<

The cpa will be down for a cryo regen; it should be chilled down and 
ready for use by 10am today.

>>> 'cpa' problem from rnorman -- Fri Aug  4 11:22:30 1989 <<<

Problem: the cryo had warmed up to 15~K, 2 days ago, when I
         installed the Al/Si target.

Solution: The cryo was regenerated and is now chilled down and
          ready for use.

>>> 'cpa' problem from wenzel -- Fri Aug  4 18:50:32 1989 <<<


Al target is arcing -- could not do depostion

>>> 'cpa' problem from rnorman -- Mon Aug  7 14:47:03 1989 <<<

Problem: Target 2 arcing.

Cause: Unknown, there was alot of carbon build-up on the
       target, shielding and teflon ring; possibly due to
       a small leak on one of the target o-rings.

Solution: the target was remove and cleaned along with the 
          teflon ring and the dark-space shield.  I re-installed
          all with the most detail.  The targets were burned-in and
          the cpa will be up for use tomorrow morring.

>>> 'cpa' problem from wenzel -- Tue Aug  8 15:14:28 1989 <<<

There is a metal part blocking the track near the right load
lock just before the sputter etch target.  It is only possible
to use the left load lock as is.

>>> 'cpa' problem from rnorman -- Wed Aug  9 09:12:14 1989 <<<

Problem: The pallets were getting stopped just before the Rf
         station.

Cause: The RF Etch station was in the up possition.

Solution: The RF Etch can be operated manually; doing so it can
          be left in the up possition, which it was. The cpa
          was ran and works well.

>>> 'cpa' problem from wenzel -- Thu Aug 10 15:02:05 1989 <<<

The Al target arcs occasionally -- maybe once per run

>>> 'cpa' problem from rnorman -- Fri Aug 11 09:12:47 1989 <<<

Problem: Al Target arcs occasionally.

Solution: I ran the Al target for 15 min. and did notice one glitch
          in the current reading, though it was too fast and could not
          see an exact current change. This was not a large current change
          and was possibly due to the target still cleaning itself off.
          High current arcs, 25amps, are very bad for the target and if 
          occurs the target should be turned off at once.  Please continue
          to keep your eye on the "current" LED when sputtering, and if
          any arcing occurs report what value it arced to and how many
          times it happened.  The cpa is up.

>>> 'cpa' problem from rolfe -- Thu Aug 24 15:21:20 1989 <<<

key switch for cathode 2 is intermittent (noisy).

>>> 'cpa' problem from straub -- Sat Aug 26 14:28:30 1989 <<<

I had problems with pallets jamming.  It was caused by one pallet which
was warped.  When a second pallet tried to enter the load lock after it
it hung up against the first and wedged it at an angle.  I reversed the
track and was able to move the second out, but it must have been bent
in the process and hung up in the other load lock.  Since the "pallet sensed"
light was on in both I couldn't remove the pallets, so I switched the
Maintenance Mode for the load locks and closed the valves manually.  Both
problem pallets are left out on the cabinet top for repairs, and the
system was pumped down normally.  Everything seems okay now.

>>> 'cpa' problem from rnorman -- Mon Aug 28 14:12:10 1989 <<<

Problem: Pallets jamming 

Cause: A user modified a pallet which another user used and the pallet
       got stuck.

Solution: Empty pallets were ran and no problem occurred.  The modified
          pallet was thrown away, so the problem will not occur again.

>>> 'cpa' problem from liew -- Tue Aug 29 15:04:56 1989 <<<

Cryo temperature seems a little bit high: 12K. The pressure I got
after pumping down 2h is 5e-7.

>>> 'cpa' problem from rnorman -- Wed Aug 30 07:09:55 1989 <<<

The cpa cryo will be down for regeneration. The cpa should be up
for use by 10am today.

>>> 'cpa' problem from rnorman -- Wed Aug 30 13:58:58 1989 <<<

P{roblem: Cryo temp at 12~K.

Solution: The cryo was regened and the temperature is now at 11~K.
          Before the cryo was  rebuilt the temp. would go down to
          10~K and stay there; CTI may have switched or replaced the
          temperature diode, which would give a little different reading.
          The cpa cryo is now chilled down and ready for use.

>>> 'cpa' problem from rolfe -- Thu Sep 21 14:39:31 1989 <<<


cooling water leakcooling water leak!

>>> 'cpa' problem from rnorman -- Thu Sep 21 15:09:36 1989 <<<

Problem: Major H2O leak from target water supply line.

Cause: The line just cracked open and water was everywhere at about
       5GPM.

Solution: Turned off main water supply to cpa and cut out the fitting
          and replace with a new one; it broke at the fitting. The 
          cpa is up for use.  Everyone took off and jules and I
          cleaned up the water!?!#$!

>>> 'cpa' problem from tom -- Fri Sep 22 10:56:27 1989 <<<

Water leaking again from the target cooling lines. Started when I 
enabled it.

>>> 'cpa' problem from evan -- Fri Sep 22 11:40:01 1989 <<<

H2O lines need to be replaced. This repair is underway.

>>> 'cpa' problem from jimmoon -- Fri Sep 22 12:22:12 1989 <<<

There's a puddle of water in front of the cpa.

>>> 'cpa' problem from robin -- Fri Sep 22 12:57:14 1989 <<<

The cpa is leaking.  Dave Hebert has located and tagged around 8 fittings
around the back of the system that show leakage at the ferrels.    
I have mopped up the puddle.

>>> 'cpa' problem from robin -- Fri Sep 22 13:02:08 1989 <<<

MORE!  In addition to what wes previously reported (see below),
Dave H. has located a cut hose (around the back of the system).

Date: Fri, 22 Sep 89 13:00:09 PDT
From: robin (Robin R. Rudell)
To: lab_equip_probs, rnorman, robin, tom
Subject: cpa problem

The cpa is leaking.  Dave Hebert has located and tagged around 8 fittings
around the back of the system that show leakage at the ferrels.    
I have mopped up the puddle.

>>> 'cpa' problem from hebert -- Fri Sep 22 13:16:03 1989 <<<

I found a water hose with a 1/4 cut in it behind the CPA.
I wrapped the area that is cut with red tape. I also put
a red arrow (red tape) on the window behind the CPA pointing
to the hose that is cut.

I dried behind the CPA with paper towels. I left a bundle of 
towels behind the CPA for whoever fixes the leak. I found
two water connections that appear to leak, and marked them
with red tape. Originally it looked as though there were several
fittings that were leaking, but after isolating the cut tube,
most of the wet fittings stayed dry after wiping them with a
paper towel.

DH

>>> 'cpa' problem from bob -- Fri Sep 22 15:50:01 1989 <<<

4 additional 1/2 inch polyethylene lines have been replaced. The
cpa has been checked for leaks and appears leak free. It was
run with cooling for 1/2 hr and not a drop of water
appeared. Additional lines need to be replaced ASAP in view
of the last two days experience. The worst have been replaced 
for now and the cpa is up for use.

>>> 'cpa' problem from rnorman -- Mon Oct  2 08:26:07 1989 <<<

The left load lock has a leak in it, so I closed the L/L valve
until it is repaired.  The cpa is UP FOR USE using the Rt. load 
lock only.

>>> 'cpa' problem from rnorman -- Mon Oct  2 14:55:57 1989 <<<

The feedthru on the left load lock is leaking and will need to be
replaced.  You can use the cpa from the RT. load lock for now.

>>> 'cpa' problem from rnorman -- Tue Oct  3 10:00:00 1989 <<<

The cpa LT. load lock is inoperative and needs a new L/L PCB.
The feedthru o-ring was replaced and roughly leak check, no leaks
were found.  The Rt load lock is operational and the cpa is up
using it.  I will replace the PCB shortly.

>>> 'cpa' problem from rnorman -- Tue Oct  3 11:59:10 1989 <<<

Problem: Leak in Lt. load lock and Lt. gate valve not operating.

Cause: The indexing motor feedthru was leaking and the L/L  control
       PCB was bad.

Solution: The feedthru O-ring was replaced and the L/L control PCB
          was also replaced.  The cpa was leak checked and tested;
          there was no detectable leak.  The cpa is up.

>>> 'cpa' problem from tom -- Tue Oct 10 11:35:04 1989 <<<

No power to Al/Si target. Shorted. Lots o' current, no voltage.

>>> 'cpa' problem from rnorman -- Tue Oct 10 13:23:26 1989 <<<

The Al target has de-bonded.  I don't know how it happened it was
running good before.  Fortunatly, I just sent out a new Al target
for bonding; which should be here in about one week.  I will call
to see about for a quicker turn around.  Target 2, Al, will not
be up for use until the new target is returned, next week some time.

>>> 'cpa' problem from rnorman -- Wed Oct 11 09:50:33 1989 <<<

The Al target was removed and it looks very bad.  The target will
be sent out for re-bonding ASAP.  We should be receiving a new Al
bonded target early next week that will be installed.  I do not
expect an Al target to be ready for use until that time.  The other 
targets, Ti & W, are up for use at this time, just no Al at target 2.
If you need Al, but not too critical, the randex can be used; it has
a 99.999% Al target that can be installed.

NOTE: Ti and W are up for use, targets 1 & 3.

>>> 'cpa' problem from rnorman -- Wed Oct 25 06:43:26 1989 <<<

I was told that we may be getting the Al target back today, if so
it will be installed.  You will be informed if anything happens.

>>> 'cpa' problem from rnorman -- Wed Oct 25 13:59:11 1989 <<<

The Al target did not arrive today; it should tomorrow.  At that
time I will install it ASAP.

>>> 'cpa' problem from rnorman -- Fri Oct 27 13:53:02 1989 <<<

The Al/Si target has been installed and the system is now pumping
down.  After lunch I will connect the target water and burn in the 
targets.  The cpa will be ready for use, if all goes well, by 3:30
today, but only for non-critical depositions.  It will take until
tonight or tomorrow morning to reach base pressure of low 10-7 range.

>>> 'cpa' problem from rnorman -- Fri Oct 27 14:50:41 1989 <<<

Problem: De-bonded target.

Solution: We sent a new Al target from HVS to Jack Kavanaugh with
          a backing plate for bonding. All the targets were burned-in
          and the Al target did not arc very much at all; at 4KW of power
          the current is at 9.5 Amp.  I replaced the window at the Al target,
          because it was covered.  Also,  an optical sensor at the RT gate
          valve, Optical Pallet Detection LED #7, was open and needed 
          replacement; GE LED55C and GE L14G1.  The cpa is now pumping
          down and ready for use.

>>> 'cpa' problem from rnorman -- Mon Oct 30 14:42:25 1989 <<<

The cpa cryo curcuit braker, on the front of the cpa, was accidently
turned off by one of our lab cleaners.  The cpa will be regenerated
overnight and chilled down in the morning.  It will be operational
by noon tomorrow.

>>> 'cpa' problem from rnorman -- Tue Oct 31 07:48:00 1989 <<<

Problem: CPA cryo compressor off.

Cause: A lab cleaner accidently turned off the front panel
       braker, shutting down the cryo.

Solution: The cryo was regenerated "Automaticly" overnight.
          The Auto-regen mode goes through the sequence of purging
          the cryo, roughing it out and then turns on the compressor.
          During the auto sequence the compressor failed to turn on
          last night, which I had to do manually this morning.  Looking
          over the cryo system I found 2 things wrong:  the cryo He pressure
          was very low this morning, at 75 PSI; which some loose He hose
          fittings were found and tightened up.  This most likely occurred
          when the "lab cleaners" were walking behind the cpa; because
          yesterday I checked the He pressure when the cryo failed and it
          was at 180 psi, just a little low.  The 2nd problem was that
          the compressor cabinet interlock was disengauged; which I believe
          also occurred during the "lab clean" by accidently bumping into
          the compressor.  

          The cryo was recharged with He to 185 PSI and the cabinet interlock
          re-engauged.  The cryo was repurged for 10 minutes, roughed out and
          the compressor was turned on.  The cpa will be up for use by 11AM.

>>> 'cpa' problem from rnorman -- Fri Nov  3 13:38:56 1989 <<<

Problem: left load lock would not pump down.

Solution: Vented Load lock secured L/L door and pumped
          back down.  The cpa is up for use.

>>> 'cpa' problem from weijie -- Fri Nov  3 21:03:59 1989 <<<


I sputtered three palletes of wafer and arcing was observed once
during the sputtering.  But the wafer looks good.

Weijie

>>> 'cpa' problem from rnorman -- Mon Nov  6 14:14:05 1989 <<<

Problem: Arcing occured.

Cause: New target.

Solution: I watched Kim run her wafers and no arcing occured.
          New targets often arc in the begaining a little.
          Heavy arcing is not good, such as 20-25 amps.  The
          cpa is up.

>>> 'cpa' problem from rnorman -- Fri Nov 17 12:39:32 1989 <<<

Problem: The chain was making a a funny sound and was stuck;
         not moving the pallets.

Cause: The chain on left side of the right load lock came off
       the track and got stuck.

Solution: The Rt. L/L was vented and the chain set back on track.
          The tension on the chain was tightened down.  The cpa
          is up for use.

>>> 'cpa' problem from bailey -- Fri Nov 17 20:37:13 1989 <<<


chain drive in right load lock disengaged.  It appears to be caused by mis-
alignment of the two drive gears and the tensioner.  I was able to pop the
chain on again, so the machine works, but it needs to be looked at soon.

>>> 'cpa' problem from rnorman -- Mon Nov 20 07:58:23 1989 <<<

Problem: Chain went off the track in the RT. load lock.

Cause: I found the load lock drive chain very loose.

Solution: I tightened the tension arm on the drive chain and of the
          pallet movement chain.  The cpa was tested and is up.

>>> 'cpa' problem from rnorman -- Mon Nov 20 14:07:15 1989 <<<

Problem: The RT. load lock chain came off the track.

Cause: Pallet loaded in crooked caused excess pressure on the chain,
       which popped it off the gear.

Solution: Unloaded the pallet and readjusted the chain.  The cpa is up.

>>> 'cpa' problem from kpister -- Wed Dec  6 19:45:01 1989 <<<

there's some kind of oil on the floor near the right load lock.

>>> 'cpa' problem from rnorman -- Thu Dec  7 06:59:28 1989 <<<

Problem: Oil on the floor at the right load lock.

Cause: The oil was comming from the Varian RTA system.  It seems to
       be leaking oil, because under it is full of oil.

Solution: The oil by the cpa was cleaned up.  The pumps will need
          to be pulled from the Varian System and the oil exhoust
          hoses made oil leak tight.

>>> 'cpa' problem from rnorman -- Wed Dec 20 08:06:39 1989 <<<

The cpa is down for a cryo regeneration.  The base pressure
this morning was 5x10-5, real bad.  I also suspect a leak.
The cpa should be up by noon today.

>>> 'cpa' problem from rnorman -- Wed Dec 20 11:51:55 1989 <<<

The cpa cryo has chilled down, but one of the sensors in the 
chamber is intermittent and will need to be repaired.  The cpa
will be down until about 2pm.

>>> 'cpa' problem from rnorman -- Wed Dec 20 14:01:29 1989 <<<

Well, I have some more bad news for you cpa users.  After regenerating the
cryo and pumping down the main chamber I noticed the left L/L was up in 
pressure.  So, I vented the left load lock to clean the door o-ring and
to my surprise the main chamber dumped to about 30 torr.  The problem is
the left L/L gate valve has a major vacuum leak into the main chamber and
will need to be pulled out and cleaned.  I will begin this project tomorrow
morning.  The cpa will be down until the gate valve is repaired, which will
be around 10am tomorrow.

>>> 'cpa' problem from rnorman -- Thu Dec 21 14:26:56 1989 <<<

Problem: left load lock gate valve had a leaky seal.

Solution: The gate valve was removed and the sealing o-ring
          was replaced.  After assembly the load lock was
          leak checked with the hld; no leaks were found.
          The cpa is up for use.

>>> 'cpa' problem from rnorman -- Fri Dec 22 11:45:02 1989 <<<

The cpa had a leak in the left load lock upper feedthru.  It was 
pulled and the port was blanked off.  A new feedthru will be here
after the New Year at that time it will be installed.

Note: At this time the left load lock is not operational.  You must
      load your wafers from the right side and remove them from the 
      right side.

>>> 'cpa' problem from rnorman -- Fri Dec 22 11:50:21 1989 <<<

The left load lock does not operate, due to a leaking feedthru
that was removed and blacked off. Load and remove your wafers
from the right side until further notic.

>>> 'cpa' problem from rnorman -- Mon Jan  8 14:56:05 1990 <<<

The left L/L feedthru has arrived and will be installed tomorrow
morning.  Please do not use the left load lock.  The right L/L
is still operational.

>>> 'cpa' problem from rnorman -- Thu Jan 11 14:54:22 1990 <<<

Problem: Leak in left L/L feedthru.

Solution: Received a free feedthru from HVS and installed.
          The left load lock was tested and works well.
          The cpa is up for use.

>>> 'cpa' problem from parrish -- Tue Jan 16 15:15:50 1990 <<<

problem:   oil on the floor by load lock

cause;     the exhaust hose was coupled together at the floor and was leaking

solution:  removed the two piece hose and replkaced with a single one.

>>> 'cpa' problem from parrish -- Tue Jan 16 15:18:57 1990 <<<

problem:   foreline pressure at 40 microns

cause:     pump operating at high pressure

solution:  changed the oil, and inline filter, pressure still at 22 microns
           system is up. pressure has to be monitored for rising pressures
           if pressure continue to rise we will have to pull the pump.

>>> 'cpa' problem from rolfe -- Fri Jan 26 11:49:11 1990 <<<

Three pallets left outside right LL.
Key lock on power supply #1 left on.

>>> 'cpa' problem from bob -- Fri Jan 26 12:06:12 1990 <<<

New pallets were left of weijie. The power supply switch
does not require turning off. 
The cpa is up.

>>> 'cpa' problem from rnorman -- Tue Jan 30 09:55:09 1990 <<<

The cpa up under a chamber clean and is NOT UP for use.  Parrish
at this time is modifying some new shielding to be installed.  When
he returns the shielding will be cleaned and installed and will be up
for use.

>>> 'cpa' problem from rnorman -- Tue Jan 30 13:51:42 1990 <<<

Problem: Chamber dirty

Solution: All the shielding was replaced.  The window glass
          were replaced. Also, the rail bias ceramics were
          replaced.  The chamber was thoroughly vacuumed out.
          All the targets were burned in and the cpa is
          pumping down.  The vacuum at this time is 3x10-6;
          it will be down at base pressure of 3x10-7 by tonight
          or tomorrow morning.  The cpa is up for use.

>>> 'cpa' problem from bailey -- Wed Feb  7 13:34:36 1990 <<<

left chain in right load lock derailed; I was able to replace it.  The chain
tensioners need to be improved.

>>> 'cpa' problem from bailey -- Fri Feb  9 00:23:12 1990 <<<

this time, the drive gears for the right track derailed in the right load
lock.  the gears are not aligned properly. I was able to pop the chain back
on, but this will happen again unless the gears are aligned.

>>> 'cpa' problem from rnorman -- Fri Feb  9 07:29:42 1990 <<<

The cpa will be down shortly to repair the chain drive in the Lt.
load lock.  DO NOT OPERATE.

>>> 'cpa' problem from rnorman -- Fri Feb  9 09:11:16 1990 <<<

Problem: Left load lock chains were poping off the track.

Cause: The chains were loose.

Solution: One link from each chain was removed to tighten the tension.
          The track was tested and is up.

>>> 'cpa' problem from phillip -- Tue Feb 27 06:35:23 1990 <<<

The cpa is in the audible 'alarm' mode as of this writing.

>>> 'cpa' problem from rnorman -- Tue Feb 27 06:52:08 1990 <<<

Problem: Error alarm.

Cause: House air pressure at 40 psi.

Solution: Phil when down to check out the compressor.
          The cpa will  be up when the flashing red
          light, low air pressure alarm, goes off.

>>> 'cpa' problem from rnorman -- Mon Mar  5 13:45:07 1990 <<<

There is no H2O supply to the cpa due to phil working on a 
water main.  When he gets done the cpa will be up for use.

>>> 'cpa' problem from rnorman -- Mon Mar  5 14:16:33 1990 <<<

Phil has finished his water line repairs  and the cpa is up.

>>> 'cpa' problem from phillip -- Tue Mar  6 11:09:24 1990 <<<

Replaced expired visual illuminator on local taurus controller

>>> 'cpa' problem from denlinge -- Sun Mar 25 00:56:28 1990 <<<

I was watching the plasma as the wafers were heading toward the W target
and I saw stuff falling off the target.  Chunks were flaking off and some
were glowing red.  I never watched a target before so I don't know if it 
is unusual or not.

>>> 'cpa' problem from rnorman -- Thu Mar 29 13:35:29 1990 <<<

Problem: W target dropping "things" when sputtering.

Cause: Target was most likely contaminated by the other targets and
       trapped Water vapor or native oxide.

Solution: The cpa was vented and the W was looked at, no problem
         was observed.  The cpa is up for use.

>>> 'cpa' problem from parrish -- Thu Mar 29 13:43:05 1990 <<<

oil level was checked

>>> 'cpa' problem from denlinge -- Thu Mar 29 17:33:25 1990 <<<

The exterior drive chain near right LL started making more noise than normal.

>>> 'cpa' problem from rnorman -- Mon Apr  2 11:59:19 1990 <<<

Problem: Exterior drive chain making noise.

Cause: The chain was loose.

Solution: The exterior chain was tightened.  The cpa is up.

>>> 'cpa' problem from wenzel -- Sat Apr 21 14:40:14 1990 <<<

The cpa wouldn't pump down below 1e-7 torr after 1 hour.
Target arced some (Al/Si).
There was a grinding noise behind the machine when the track was on.

>>> 'cpa' problem from rnorman -- Mon Apr 23 07:20:18 1990 <<<

The ROR was tested and it does seam high.  The base pressure this
morning was 6x10-7 after the ROR it was 2x10-6 and TRYING to pump
back down.  I will start up the hld and leak check the cpa.  The cpa
is down.  DO NOT OPERATE.

>>> 'cpa' problem from rnorman -- Mon Apr 23 13:10:53 1990 <<<

The cpa was leak checked and a leak seems to be located in the RF
etch station at the lower hoist assembly area.  This is one of the 
worst locations for a leak, because it is not easy to remove and
replace this hoist assembly.  Fixing this leak may take a day or two.
The base pressure at this time with  both load locks closed is
5x10-6.  DO NOT OPERATE until further notice.

>>> 'cpa' problem from rnorman -- Wed Apr 25 09:58:58 1990 <<<

My plan at this time is to remove the lower RF assembly and then blank off
that part of the cpa so the system may be used.  I will then replace the 
bellows in the RF assembly and then re-install it at an other time.  I need
to get a blank off made at the mech. shop; the cpa being up is contingent
of when the plate is done, hopefully today.

>>> 'cpa' problem from rnorman -- Wed Apr 25 13:35:55 1990 <<<

I have the lower RF assembly removed.  I am waiting for the mech.shop
to finish the blank-off plate, they said sometime before noon tomorrow.
The cpa is down until the plate is done.

>>> 'cpa' problem from bob -- Thu Apr 26 17:16:23 1990 <<<

A dummy plate has been installed on the cpa and the main chamber and
the load locks are pumping. The current pressure is 3X10-6 after 1/2
hour of pumping. The machine has been open all day so this is a 
reasonable pressure. Robert Norman will inspect and condition the
targets tomorow. The cpa is down until checked out by Robert.

>>> 'cpa' fix from rnorman -- Fri Apr 27 08:37:34 1990 <<<

Problem: insufficient vacuum; low 10-6 range.

Cause: There was a vacuum leak in the Lower RF assembly, most likely
      located in the bellows.

Solution: The lower RF assembly was removed and the  station was blanked
         off with a plate.  At this time the targets are being burning in.
         THERE IS NO RF ETCH until further notice.  The cpa is up.
      

>>> 'cpa' problem from rnorman -- Fri Apr 27 14:45:34 1990 <<<

The base pressure of the cpa cryo is higher then normal.  This
will result in a higher pressure of the chamber; at this time it is
1x10-6.  It looks like the cryo needs regeneration, which I will do
on Monday.  If you wish to use the cpa and you CAN NOT wait until Monday
after noon, I recommend a dummy run fist then if the films are not
cloudy proceed with your process wafers.  Use according to your judgement.

>>> 'cpa' problem from davor -- Fri Apr 27 14:55:13 1990 <<<

ccryo needs regeneration. I spoke to Robert Norman already.

>>> 'cpa' problem from rnorman -- Mon Apr 30 07:05:11 1990 <<<

The cpa will be down for a cryo regeneration; it should be ready for use
by noon.

>>> 'cpa' fix from rnorman -- Mon Apr 30 10:28:45 1990 <<<

Problem: Base pressure of the cryo equals pressure of chamber, 1x10-6.

Cause: Cryo needs regeneration

Solution: the cryo was regenerated and is now chilling down.  The cpa will be
       up for use when the cryo is cold, which will be about noon today.
       Do not operate until noon.

>>> 'cpa' problem from tom -- Mon Apr 30 15:38:09 1990 <<<

Chain rattles a lot when going in the "forward" direction (toward the 
right load lock). System is usable but makes a lot of noise. Chain
needs to be tightened up.

>>> 'cpa' problem from davor -- Tue May  1 12:15:43 1990 <<<

ThThe chain is still a little loose, it  rattles.

>>> 'cpa' problem from bob -- Wed May  2 08:50:43 1990 <<<

The chain drive on the cpa is making noise. It does not effect it's
use. It will be adjusted when Robert Norman returns tomorow.

>>> 'cpa' fix from rnorman -- Thu May  3 11:42:09 1990 <<<

Problem: Chain making noise.

Cause: It was loose.

Solution: The chain drive was tightened down and tested.  The cpa is up.

>>> 'cpa' fix from rnorman -- Tue May  8 12:42:24 1990 <<<

Problem: RF Power Supply looked to be causing a voltage feedback onto
        main power distribution panel via the return line or white wire.

Solution: After Phil and I rechecked the RF supply no problem was
         found.  This power problem occurred when we were having 
         transformer problems, and looks like the problem 
         disappeared when the transformer problem corrected itself.
         After checking and testing the RF power supply is working.
         We are still in the process of repairing the lower
         RF assembly, as such, the RF Etch station is inoperative
         until further notice.
