>>> 'canon' problem from evan -- Fri Jan  6 12:23:03 1989 <<<

the 5vdc power supply is fried. I will be finding a substitute for it
and installing it this afternoon..

>>> 'canon' problem from evan -- Fri Jan  6 17:02:10 1989 <<<

Replacing the power supply returned power to the logic boards.  The
turntable still fails to rotate and the x-y adj. servos are still.
The canon control circuitry is broken.
The canon will be down for the week-end. 

>>> 'canon' problem from hebert -- Fri Jan  6 17:12:26 1989 <<<

Electronics to console went out after table rotation was stopped
because wafer chuck didn't drop.

>>> 'canon' problem from evan -- Mon Jan  9 13:36:07 1989 <<<

problem: canon power supply (5vdc) died.
cause: unknown, the table not dropping or rotating was a result, not
a cause of the power supply failure.
solution: wired in a temporary supply; cleaned the contact glass;
a new power supply will be installed when it arrives.
Dave Hebert will be running some wafers through this afternoon and
will see if all functions are working properly.

The canon is up.

>>> 'canon' problem from bob -- Tue Jan 10 15:46:55 1989 <<<

Marilyn and Kmm have optimized the focus on the canon and figured
out the likely cause for erratic focus problems. The problem
has been adjusted for and the canon is up for use. Hopefully 
users will report excellent results.
The canon is up for use.
.

>>> 'canon' problem from vallath -- Tue Jan 10 22:37:17 1989 <<<

the lens does not move out of the way as much as it used to
there is a tightness in the motion.
vallath

>>> 'canon' problem from evan -- Wed Jan 11 09:37:15 1989 <<<

problem: lamp housing would not swing away when loading mask.
cause: power cables to lamp were caught on power supply corner.
solution: freed up the cables and attached to a strain relief
on the wall behind canon to prevent this from reoccuring.

>>> 'canon' problem from vallath -- Wed Jan 11 10:46:52 1989 <<<

The nine flashes did not come out correctly placed wrt to
each other - there was a displacement between them of more
than 25 microns in places.  Looks like the stepping mechanism is
not functioning well.
The focus was ok.
Vallath

>>> 'canon' problem from evan -- Wed Jan 11 15:48:43 1989 <<<

The usual cause for this, having the elevator piston set too high, was
not the case this time.  bob had checked the setting earlier in the evening.
I will ask kim to help me check the stepping location with a test wafer
tomorrow.  Anyone else having this situation occur, even if it is not
critical to your application, please report this info to canon problem.
This will help in resolving the issue.
evan

>>> 'canon' problem from evan -- Tue Jan 17 16:51:51 1989 <<<

A new power supply to replace the temp. hook-up has arrived.
I will be installing this Wednesday a.m.
This will have no effect on any operating parameters.

>>> 'canon' problem from evan -- Thu Jan 19 08:17:57 1989 <<<

I am replacing the power supply now.  The canon should be back up
by 10:00 am today.

>>> 'canon' problem from evan -- Thu Jan 19 09:35:08 1989 <<<

The 5vdc power supply has been replaced.
The canon is up and ready.

>>> 'canon' problem from kim -- Fri Jan 20 14:56:02 1989 <<<

When dial was set for 4 steps, exposure lamp wouldn't trigger.

>>> 'canon' note from evan -- Mon Jan 23 10:20:00 1989 <<<

The canon part number for the sheet glass used in the wafer chuck is:
  BN9-0031-000     NSF20706



>>> 'canon' problem from evan -- Mon Jan 23 11:21:19 1989 <<<

problem: no exposure in 4-step mode.
cause: when 4-step mode is selected, the chuck is moved to an initial
position of x/2, y/2.  This position puts the intersection of the four
positions at the center of the wafer. This pre-positioning was not occuring
and prevented any further steps in the exposure process.
solution: problem was traced from the 1-4-9 switch to the circuit board
connector.  Cleaned the contacts of the associated circuit board and normal
functions returned.
The 4-step mode of the canon is now functioning.
The canon is up.

>>> 'canon' problem from vallath -- Tue Jan 24 22:10:35 1989 <<<

1.  The flashes definitely do not come out aligned to each other.
    If there is a test mask available, it can be checked,since
    my wafers were done on my own masks.
    I would like to hear about others' recent results with this .

2.  The systematic misalignment we used to have seems to have gone,
    at least to a large extent.

3.  The mask rotaional misalignment still occurs when the button
    on the translation control is pressed.  An old problem.
Vallath

>>> 'canon' problem from evan -- Wed Jan 25 11:59:05 1989 <<<

Still looking into the random alignment stepping errors.
Discovered that contact with guide ball-bearings seems inconsistant.
I have to figure out how to get better access for a true measurement
of contact pressure or gap (if there is one, this might be the cause)
In the meantime, be sure to check scribe lines during alignment.
to be continued...
Canon is up.

>>> 'canon' problem from bob -- Fri Jan 27 15:52:01 1989 <<<

The canon was serviced today by Canon:

The x-y-z microscope had new bearings races installed. This make for a 
much more positive feel and it now looks on both the in and out position.

The mask holder was diassembled and burrs removed from the
vacuum disc. This has cured the problem of the mask rotating
when the vacuum button is released. Cleaning this assembly
has also created a new problem, the vacuum is no never
better than 40cm. I am asured that this will not cause any
focus problems as the cause of this lower vacuum is not
leakage at the wafer chuck and 40cm is enough vacuum for
positive chuck positioning. Tony Ha the service tech will be
back next week to try and repair this.

The position was crudely checked as no users were available
with wafers to test positioning errors. Tony has pointed out
some of the causes of transient errors and the fact that
Vallath clains his errors are always the same tends to point
to poor contact in the rotary position switches or bad
contacts on the cables between the tool and the electronics.

Positioning errors will be checked next week.

The canon is up for use. The vacuum will likely be around
40cm and I am assured the tool is fully useable at this
vacuum.

>>> 'canon' problem from cleland -- Fri Jan 27 17:06:11 1989 <<<

Poor vacuum - couldn't get more than 20cm. Exposures uneven,
hopefully due to vacuum.

>>> 'canon' problem from bob -- Mon Jan 30 14:45:27 1989 <<<

The canon appears operational although the vacuum is only 40cm and
there is still some play in the mask alignment. Canon will be here
this week to finish adjustment to the canon.

>>> 'canon' problem from cleland -- Mon Jan 30 16:42:30 1989 <<<

When the alignment scope is pulled back for an exposure, it only
barely closes the microswitch that starts the exposure; as a result,
on several exposures I had to jiggle the scope to get an exposure.
Otherwise it's OK.

>>> 'canon' problem from vallath -- Mon Jan 30 21:56:43 1989 <<<

The microscope portion is too tight when pulled out.
The split image dividing line is to the right.
THe second one is not a significant problem.

>>> 'canon' problem from evan -- Tue Jan 31 11:03:31 1989 <<<

problem: exposure not occuring consistantly when microscope is pulled out.
cause:microswitch not aligned with new guides.
solution: repositioned microswitch roller with the actuating bevel on the
guide.

problem: microscope is difficult to pull out.
cause: replacement of guides.
solution: this is the normal operating mode.  It indeed is tighter than
before but the old guides were worn out and caused the loose motion. 
The new, tighter guides will provide more consistant microscope alignment.
You will soon get used to the new 'feel'.

The canon is up.

>>> 'canon' problem from evan -- Tue Jan 31 13:38:09 1989 <<<

problem: split image line is not centered
cause: misalignment in optics
solution: no information on this problem is available in our manuals.
          This problem will be refered to the technician from Canon.
Since this is not a critical problem, the canon is up.

>>> 'canon' problem from rolfe -- Tue Jan 31 15:26:50 1989 <<<


Exposure microswitch intermittent.
Withdrawing alignment objectives will not trigger exposure--
I had to manually toggle microswitch.

>>> 'canon' problem from evan -- Tue Jan 31 16:55:38 1989 <<<

problem: exposure microswitch erratic
cause :  bad lever allignment or possible bad microswitch
solution: since I just reset the allignment a bit this morning,
I reset it even more. I also tightened the microswitch mounting
nuts which seemed a little loose. It is possible that the switch
moved a bit after the lever was adjusted the first time.
If the problem reoccurs, then I will replace the microswitch.

Users should make sure that the microscope is being pulled out all
the way.  Since the new guides were installed, it takes a bit more
effort to do this.

>>> 'canon' problem from evan -- Wed Feb  1 14:59:04 1989 <<<

problem: lamp would not restart after the morning power failure
cause: arcing on the anode connector
solution: removed frayed wire and added a new lug connector
canon is up

>>> 'canon' problem from rooney -- Fri Feb  3 08:37:58 1989 <<<

doesn't expose--cam doesn't engage microswitch--can activate microswitch
with a Q-tip

>>> 'canon' problem from evan -- Fri Feb  3 09:26:59 1989 <<<

problem: exposure switch failure
cause: misalignment of guides
solution: the microswitch is ok. The problem was that the end stop
tabs on the scope guides were misaligned. The scope could not come
all the way out to where the spring loaded ball engaged the vertical
notch in the guide.  This prevented the microswitch roller lever from
rising to the top of the activation bevel.
I altered the end stop tabs so the scopes comes out to the proper position.

I placed an arrow on the spring-ball holder to indicate the proper location
of the vertical groove when scope is out.  Users should slide the scope
in and out a few times while observing this indicator to get a feel for
the proper position. It can be found to the right of the microswitch
(follow the white, black and blue wires in front of the focus ring).
The scope should not be forced past this position.  Extreme pulling
could break off the stop tabs and you will have the microscope in your lap!
There is a difinite click when the spring ball engages.

>>> 'canon' problem from hebert -- Mon Feb 13 11:29:31 1989 <<<

The slide that gets pulled out when aligning mask to wafer
doesn't pull out smoothly and pulls to one side. This makes it
necessary to realign the mask, rotate wafer, and realign mask to wafer
with each exposure. The litho I did came out OK despite this
problem.

>>> 'canon' problem from voros -- Mon Feb 13 16:23:40 1989 <<<

The canon is being serviced, pls do not touch it.
Thank you.
Katalin

>>> 'canon' problem from bob -- Tue Feb 14 15:10:22 1989 <<<

Canon was here today and did the following:

Replaced the yellow filter in the alignment optics to try 
and prevent inadvertent exposure. Some users have complained
that ghost images are exposed during alignment.

Increased spring tension on the  X-Y stage to elimate stepping
errors. The machine was registering less than 5 micron errors
which is better than specs. If errors return Canon will replace
the math pc board and thumbwheel switches.

Replaced steel plates in mask alignment system to improve vacuum
and eliminate rotation during fine aligns. The rotation problem
has been improved but will never be as good as when the machine
was new.

Aligned the X-Y-Z microscope and  loosened the tension to make sliding
it easier. Replaced the bearing keepers and end stops.

The canon is now up for use. Please report any problems if you
find them.

>>> 'canon' problem from vallath -- Wed Feb 15 11:50:10 1989 <<<

Registration problem persists.
VN

>>> 'canon' problem from vallath -- Thu Feb 16 14:57:27 1989 <<<

Kim and I checked the canon for the stepping error problem.
The different flashes are perfectly parallel in both x and
y directions.
the problem is probably that the mask is not quite square
even when it is perfectly squared up in the microscope
prior to exposure.
the vertical displacement error from the top right corner of
one flash to the top left corner of the next flash to the right
is about 30 microns, for a flash about 10 mm. square.
the "prealignment error" is +/- .15 mm, according to the canon
manual.
Vallath

.,

>>> 'canon' problem from mcarey -- Sat Feb 18 13:29:20 1989 <<<

The right retaining screw on the new/old disk was very sticky.

>>> 'canon' problem from evan -- Thu Feb 23 08:58:45 1989 <<<

problem: right retaining screw sticky
cause: wear on threads from overtightening
solution: reworked burr on threads, cleaned and reinstalled.
threads showed flatening due to stress of having the shaft overdeflected
due to overtightening.  
USERS should remember to lift the disk while tightening the screws and
not to rely only on the rod hitting the bevel to raise and lock the plate.
Overtightening will eventually wear the threads and bend the rod making
it harder to secure the plate.

>>> 'canon' problem from liu -- Sat Mar  4 18:32:32 1989 <<<


	To me, the focus position chenged a lot, from about 950 to
680, it works.
	Xiaoming Liu

>>> 'canon' problem from evan -- Mon Mar  6 09:22:27 1989 <<<

problem: drastic change is focus ring
solution: I checked out the focus using both the old and new chucks.
Found that the standard focus values were correct.  The reported
problem must have been caused from using a wafer on the old chuck
and the new disk, or the old disk and the new chuck.  The new chuck
was in place when I enabled the canon.

Whenever it appears that a large change in focus is needed, users should
check to see if everything else is correct with the set-up. It is most
likely that the problem is something other than the focus changing.

>>> 'canon' problem from hebert -- Thu Mar  9 16:11:07 1989 <<<

Previous user left the focus ring at 550 microns. I tried
turning up to and down to 966 microns, and can't focus
on substrate. I don't know how many times to turn the
focus ring and in what direction in order to focus onto
my substrate. The user also left the f-stop at 2.8, where
shut down procedure calls for returning it to 1.4.

The canon cannot be used because of this.

>>> 'canon' problem from liu -- Thu Mar  9 19:40:43 1989 <<<

	Again, the focus position chenges a lot from about 950 to
about 570. But, the machine works well at this position.
	Xiaoming Liu

>>> 'canon' problem from mudie -- Fri Mar 10 13:01:35 1989 <<<


< Evan Stateler, please reply when you get this message... >

Repeat of problem posted by liu:

Again, the focus position chenges a lot from about 950 to
about 570. But, the machine works well at this position.

>>> 'canon' problem from kim -- Fri Mar 10 14:12:19 1989 <<<

Problem:  Focus changed to 550 um.

Cause:    Two pins for holding the wafer disk up in position were to loose.

Solution: Tighten the two pins that holds the wafer disk up.

>>> 'canon' problem from vallath -- Sat Mar 25 15:56:33 1989 <<<

1.  The new wafer disk had *lots* of spots on one side, so
	I tried to clean it like Bob told me.  Even after 3 tries,
	there was a little colloidon left on the disk.  It needs
	to be cleaned again.  I have to take the glass out, and
	I don't have the proper tool.  It's better if someone
	with more experience does it.

2. 	The focus on the wafer with the old wafer disk was terrible.
	I had to change the helicoid setting *down to 200* from
	976 to get a focus on the wafer.
I didn't use the canon.
VN

>>> 'canon' problem from vallath -- Sat Mar 25 16:01:45 1989 <<<

Error in the pr'evious message :  Both comments applied to the
*old* wafer disk.

>>> 'canon' problem from hphlee -- Sun Mar 26 16:50:05 1989 <<<

	I clean the new wafer stage and it works ok.

>>> 'canon' problem from evan -- Mon Mar 27 09:22:06 1989 <<<

test logout

>>> 'canon' problem from evan -- Mon Mar 27 09:23:06 1989 <<<

problem: focus out of spec.
cause: elevator piston too low to achieve vacuum
solution: tightened piston locking rings 
 tested both old and new chuck/plate combinations, both seal ok.
Also found that the old plate allignment pins (on the turntable) were
not seating into the plate holes. Reamed out the edge burr on the holes
and plate now fits down completely over pins.

canon is up

>>> 'canon' problem from mcarey -- Sat Apr  1 15:52:36 1989 <<<

No Vacuum...The whole lab today seems amiss as there was no vacuum for
the Technics-c either

>>> 'canon' problem from straub -- Mon Apr  3 12:48:43 1989 <<<

Could someone use some kind of diagnostic mask to check the split field
allignment?  I have a mask with allignment marks in each corner, and 
a horizontal line running completely across the mask, which should be
parallel to the allignment marks(actually a box drawn with Kic and generated
by GCAPG).  If I allign the mask by rotating to level the allignment marks,
then the line is not level.  Further, if I allign the outside edges of the
line, then move the split field in along the line(without any rotation)
then the center is not alligned.  I have repeated this with several masks.
This seems to be a problem that shows up for me since I have very long 
features, but if it's possible I hope it could be corrected.

>>> 'canon' problem from rolfe -- Tue Apr  4 15:49:37 1989 <<<

Olympus microscope in Y1: light is out.

>>> 'canon' problem from evan -- Wed Apr  5 11:42:57 1989 <<<

problem:light out on olympus
cause:bad connector
solution: the lamp power cord recepticle on the back of the Olympus BH2
model is a poor design.  The contacts spread apart as cord moves.  I
encased the contacts in a small piece of shrink tubing.  The fit is now
tight and the contacts should not spread again.  I also made this repair
to the BH2 in V3 and the one in VLSI area.

>>> 'canon' problem from vallath -- Wed Apr  5 13:59:01 1989 <<<

One of the motors in the xy motion makes a grinding sound.
VN

>>> 'canon' problem from evan -- Wed Apr  5 15:45:20 1989 <<<

problem: motor noise
cause: these are normally noisy motors. the noise in the x-direction seems
louder due to its location outside the cabinet. I did not notice any sound
out of the ordinary.

>>> 'canon' problem from hebert -- Tue May  2 16:22:50 1989 <<<

There is a problem when stepping from flash 6 to flash 7.
The wafer takes about 5 seconds to step between these two
flashes. This causes the exposure to be "smeared" when using
"without alignment" mode and causes flash 7 to be misplaced
on the wafer. When using the "with alignment" mode, you can
see the problem thru the microscope (i.e. it takes several
seconds for the wafer to index into alignment with the mask).

For nonaligned exposures, I had to intentionally operate the Canon
in the "with alignment" mode to get around this problem, and wait
patiently for flash 7 to come into view when aligning to wafer.

>>> 'canon' problem from sylee -- Tue May  2 18:03:12 1989 <<<

Focusing both mask and substrate using 976 for old disk was pretty
difficult. I did manage to focus but it seemed much harder than before.
Can we check the optimum setting for better focusing soon?
SYLee

>>> 'canon' problem from evan -- Wed May  3 11:57:11 1989 <<<

The problem hebert reported is still effective.  The x-y positioner is
sticking between position 6 and 7.  I am trying to locate which
bearing is causing the problem.  
canon can be used but refer to problem log for stepping through 6 to 7
until this is fixed.

>>> 'canon' problem from vallath -- Wed May  3 21:59:40 1989 <<<

No problem with the motion between flashes.

>>> 'canon' problem from vallath -- Thu May  4 22:56:35 1989 <<<

Features on some flashes so badly out of focus that alignment
was difficult.  OK on some of the flashes.  If repairs are to be made,
I must say that I will need it urgently tomorrow morning.
VN
p.s.  This problem is not entirely new, but has gotten worse.

>>> 'canon' problem from bob -- Fri May  5 10:02:19 1989 <<<

The canon was placed in die position 9 and moved manualy to check
any problems with the lower bearings. All motions were smooth and
nothing unusual could be felt. Marilyn and Kim are going to do
focus exposure test this afternoon.

>>> 'canon' problem from kim -- Fri May  5 15:40:01 1989 <<<

Problem:  Focus drifted.

Cause:  Temperature drifted?

Solution:  Ran focus test.  Temperature today was 25.5C.
           Best focus= 972 micron on the old wafer disk.

>>> 'canon' problem from cleland -- Mon May 22 14:52:57 1989 <<<

This is more a complaint than a problem, but here goes:
  1. The x-drive on the wafer disc has a new, high pitched whine.
  2. The wafer disc did not load up properly on two consecutive 
     wafers; I had to push it up to get a good seal and focus.

>>> 'canon' problem from hsin -- Mon May 22 16:05:32 1989 <<<

The moter gives noise and can not advance to next position.
The translation stage has problem. Multiple expose can not be
performed.

Wei Hsin

>>> 'canon' problem from bob -- Tue May 23 08:17:24 1989 <<<

Problem:
Users report a strange noise from the canon x-axis motor. Machine
will not advance.

Solution: 
I have have stepped the 2: chuck with the old disc
in place. Placement accuracy seems normal and stepping was
ok. The movement of the lower plate plate was checked in die
position #9 allowing the plate to be grasped and slid
manualy. No excess friction or binding could be found. There
is a very different sound to the x-axis motor particulary
when returning to home position (#1 from #9). Evan is out
today and I will ask Steve Hoagland to check the waveform of
the drive for both motors and compare them to see if there
is a problem in the stepper motor drive voltages. If users
can demonstrate a problem it would be very helpfull. With so
many experienced users reporting problems, something is
wrong.

>>> 'canon' problem from hoagland -- Wed May 24 08:42:36 1989 <<<

problem:  Users report X-axis stepper motor making excessively
          loud grinding sound, espcially on return to home after
          last exposure.

cause:  Vibration of drive assembly gears.  Stepper motor has
        2 speeds; coarse positioning runs at 3000 steps/sec and
        produces a whirring sound(between exposures), and a
        fine positioning rate of 800 steps/sec, used as stage
        approaches exposure position and to home after all
        exposures are complete.  Step rate on current X stepper
        motor was scoped to determine if fine step rate was in fact
        800 steps/sec- pulse rate was correct.  During homing 
        phase X stepper motor was disconnected to extend the drive
        signal indefinitely and a second spare motor connected to
        observe it's performance.  Motor rotated smoothly with no
        sound whatsoever.

solution:  None- grinding sound appears normal.  Drive signals to
           motor are correct and no damage to motor or drive train
           is apparent.

>>> 'canon' problem from nfan -- Wed Jun  7 15:41:00 1989 <<<

The previous user left the canon in the state that it should not be.

>>> 'canon' problem from vallath -- Wed Jun  7 19:27:18 1989 <<<



For the record, I did not use the canon, since I discovered another user
on it after I enabled it.  So I was not the user who is
supposed to have left it in an improper state.
Vallath

>>> 'canon' problem from vallath -- Tue Jul 18 22:36:28 1989 <<<

The start button has no response.  the chuck does not rotate.
it is already in the down posn.
Vallath

>>> 'canon' problem from evan -- Wed Jul 19 09:55:01 1989 <<<

Canon is not responding to controls (per vallath). Nothing obvious has been
found (fuses, power supplies ok) so canon will be down for major repair.

>>> 'canon' problem from evan -- Wed Jul 19 17:20:48 1989 <<<

The canon problem has not been found. The sequence logic is not
acting as it should during power-up (the centering motion is skipped-no wait light).
the canon will be down for another day.

>>> 'canon' problem from evan -- Thu Jul 20 11:24:47 1989 <<<

The problem has been repaired. The canon will be up sometime early
afternoon after I get it put back together. A complete repair report will
come at that time.
the canon is almost up

>>> 'canon' problem from evan -- Thu Jul 20 12:11:39 1989 <<<

problem: loss of all functions
cause: sequencer hanging up in indeterminate state
solution:fault was traced to improper power-up reset conditions.  
   Disabled the sequence clock and did a manual reset and found 
IC 74193 in location u40 of the main body control card (slot 1) to
be reset into random outputs. It should reset to all outputs low.
Replaced this IC and sequence reset properly to step 1.  Canon now
cycles through all steps correctly.
canon is back in service

>>> 'canon' problem from bullard -- Thu Jul 20 19:15:29 1989 <<<

I'm not sure if this is even a problem, but the focus may not be working
properly.  I had really poor definition with the focus set at 966 using the
new disk; however, since I haven't been using the Canon for very long, I 
may be mistaking this for overexposure or overdevelopment, etc.  My mask is 
composed of 10 groups of parallel wires, with varying widths and spacings
(between 5 and 50 microns). These lines had very ragged edges after develop-
ment, and some of the groups were either completely obliterated or 
very underexposed.

Again, I'm not sure it is a focus problem, but someone else today (I don't
know his name) commented to me that he was having a little focusing prob-
lems earlier today; he may have already reported it himself.

>>> 'canon' problem from raicu -- Thu Jul 20 20:07:31 1989 <<<

The canon is OK. The wafer disk had not been tightened enough.

>>> 'canon' problem from rooney -- Mon Jul 31 10:40:24 1989 <<<

standard wafer disk does not seal properly resulting in low vacuum
the chuck is not held up and the pedastal rubs on the chuck causing
stepper errors

the rubber seal on the standard disk looks clean

>>> 'canon' problem from bob -- Mon Jul 31 11:45:16 1989 <<<

The rubber gasket on the standard disc was replaced. User
report the wafer disc was not sealing reliably. The canon
is operating normally and up for use.

>>> 'canon' problem from seh -- Mon Jul 31 11:55:14 1989 <<<

Even after the gasket was changed the Canon didn't work properly.
The stepping from pattern to pattern is not correct although
the vacuum was 60 during exposure.  This is with the standard disk.

>>> 'canon' problem from bob -- Mon Jul 31 12:07:55 1989 <<<

seh came to me with a canon problem, stepping pattern erratic.
The cause was likely the pedastal clearance. If it is excessive
the wafer disc fails to pull the wafer chuck fully against it
and the wafer chuck drags on the pedestal causing stepping
srrors. This clearance has been adjusted to ~.3mm. The canon
appears up.

>>> 'canon' problem from hsin -- Fri Aug  4 23:12:12 1989 <<<

The focus for new disk seems changed.  Something is wrong with
the canon.  The focus is NOT 966!  May be Kim should take a look
at it.

Wei

>>> 'canon' problem from costello -- Wed Aug 16 17:20:13 1989 <<<

vacuum low causing dies to overlap and come out crooked as
though the wafer is slipping on the chuck as canon steps.

>>> 'canon' problem from hebert -- Wed Aug 16 17:56:14 1989 <<<

Vacuum with the STD disk is about 57 cmHg. With the NEW disk it
is about 59. Wafer vacuum is lower than normal. This will effect
the wafer focus, and will effect smaller features (<10 microns)
more than larger features.

DH

>>> 'canon' problem from rooney -- Thu Aug 17 09:53:49 1989 <<<

The glass on the new disk is contaminated with particulates (looks like
aluminum).  When using this disk, the particles become imbedded in the
resist and punch holes through it causing problems during wet etching.
I didn't clean the glass plate because I was afraid of scratching it.

>>> 'canon' problem from bob -- Thu Aug 17 11:45:48 1989 <<<

The new wafer disc was cleaned and returned to its holder. The old
wafer disc-chuck was installed and Dave Hebert did an exposure. His
results were excellent and uniform. Dave gives the canon "a clean bill
of health". If there are further problems reported, they will be looked
into.

>>> 'canon' problem from dchin -- Thu Aug 17 15:35:03 1989 <<<

 I tried to pattern a series of equally spaced slits (three microns wide and one centimeter long)
  on Cr thin films. But there was photoresist residue left in the slit area when I set canon at usual   exposure level (~ 6 on the integrator).
  I had to take extreme measures ( increase exposure level and develop time) to get rid of the 
  residue.
  Then the pattern definition suffered. I am wondering if the machine is not well focused. Also I
  found the same problem of lower vacuum reported by DH. 

  A frustrated lab user

>>> 'canon' problem from bob -- Fri Aug 18 09:56:33 1989 <<<

hebert and I both checked over the canon. It appears to be operating
well and the vacuum is at 60cm, excellent! It is possible the canon
wasn't enabled when dchin tried to use it. hebert will be running
some critical focus exposures shortly and will report back on the 
results. A mystery reamins. dchin does not show up on labhist canon
for the time of his report?? How did he report a problem or use the
canon wihtout it showing on labhist?

>>> 'canon' problem from seh -- Mon Aug 28 10:55:58 1989 <<<

I had difficulty getting the chuck to vacuum seal properly.  In order
to get the chuck to seal I had to push up on it manually.  

>>> 'canon' problem from evan -- Mon Aug 28 11:47:41 1989 <<<

problem: vacuum chuck not sealing properly
cause: vacuum seal on old disk
solution: replaced the used seal with a new seal. The new one is much more
plyable than the used one. The chuck now seals ok.
canon is up

>>> 'canon' problem from cleland -- Fri Sep  8 10:39:46 1989 <<<

Mercury lamp off when I came in. Restarted it without problem.

>>> 'canon' problem from rolfe -- Mon Sep 11 10:48:37 1989 <<<

Light source not operating.

>>> 'canon' problem from rolfe -- Mon Sep 11 10:54:27 1989 <<<

Although the mercury power supply is on, there is no light.

>>> 'canon' problem from rolfe -- Mon Sep 11 11:04:26 1989 <<<

Restarted mercury lamp 11:00.

>>> 'canon' problem from hebert -- Mon Sep 11 16:46:29 1989 <<<

The Canon won't print. When pulling back the microscope to print,
there is a sound like you normally hear when the Canon is in "STROKE
SETTING." 

>>> 'canon' problem from evan -- Tue Sep 12 09:30:47 1989 <<<

problem: not printing
cause: print switch in manual exposure setting.
solution: placed switch in 'light integrator' setting.

canon is up

>>> 'canon' problem from evan -- Tue Sep 12 09:32:46 1989 <<<

The lamp was replaced on Monday 9/11/89.  The cathode pigtail was replaced
and the power lead shortened past the heat hardened portion (3 " removed).
The heat sink had fused to the bulb contact and had to be drilled out in
the machine shop.
the canon is up.

>>> 'canon' problem from kuchta -- Tue Sep 19 13:40:33 1989 <<<

I found the UV light off before using.  

>>> 'canon' problem from evan -- Wed Sep 20 10:51:49 1989 <<<

The lamp was out but the housing was still hot! I turned off the power supply and will check out the lamp connections when it has cooled.  
the canon will be down until this afternoon.

>>> 'canon' problem from evan -- Wed Sep 20 13:46:21 1989 <<<

problem: lamp not lit
solution: checked lamp connections.  since the lamp alignment screws were
binding, the lamp base sliders were cleaned and lubed.  The housing was
reassembled and the lamp lit.
If the lamp fails again, a new lamp should be installed.

>>> 'canon' problem from hsin -- Thu Sep 21 17:33:06 1989 <<<

I found the power become weaker than before.  I use the same
expose time as before but I can not develop my pattern in the
same time.   I have to increase the exposure time or increase 
the developing time.  I don't know whether this has something
to do with Evan's operation on the lamp or the lamp is really
degrading very fast.

Wei Hsin

>>> 'canon' problem from bob -- Fri Sep 22 07:58:03 1989 <<<

A new canon lamp will be installed this morning. It appears there
are problems with the current lamp.

>>> 'canon' problem from evan -- Fri Sep 22 11:28:12 1989 <<<

A new bulb, SN 7X1596, has been installed.  The anode pigtail was moved
to the cathode end and a spare kasper pigtail installed on the anode.
The bulb is lit and the discharge images aligned.
the canon is up

>>> 'canon' problem from bmartin -- Mon Sep 25 16:17:41 1989 <<<

The vacuum guage is low (about 40 psi) so the chuck is not
pulled up into position to bring the wafer into focus.
Both the new and old chucks had the same low vacuum problem.

>>> 'canon' problem from evan -- Mon Sep 25 16:30:50 1989 <<<

problem of low vacuum fixed itself when hsin inserted the new vacuum plate.
cause of earlier problem unknown.
canon is up

>>> 'canon' problem from hebert -- Mon Sep 25 18:57:28 1989 <<<


On three attempts to align mask to wafer, the exposure was 
misaligned to the wafer even though the mask appeared to align
with the wafer. What could cause this?

>>> 'canon' problem from bob -- Tue Sep 26 14:27:41 1989 <<<

WARNING-The canon is systematically producing an offset image
of 180 microns to the right of the alignment marks.
Although alignments appear good, the image is displaced 180 microns
to the right when it is developed. We are working to solve this
problem. Until then the canon is useful for first level work only.

>>> 'canon' problem from bob -- Fri Oct  6 07:44:53 1989 <<<

The Canon was serviced yesterday by Tony Ha of Canon. A coupling
pin operating the iris (f#) had come loose and fallen into the lens 
switching mechanism. The canon uses two seperate lens, one for visual
focus and one for exposure. In addition the guide assembly these
lenses move on was lubricated. A test exposure was done by Dave
Hebert and the canon appears to be operating correctly. Focus
appears good at 970 however this may not be optimum and a focus
matrix will be run and the results posted.

Please note, longer exposure times on the canon had been noted by
hsin. He reported this as a problem. This was caused by the loss 
of the coupling pin. The canon exposures should now return
to normal as this has been repaired.

>>> 'canon' problem from mmesser -- Sat Oct  7 19:24:29 1989 <<<

Best focus varies erratically from 950 to 975. I noticed the pressure at 
one point was down to 40, but mostly seemed to be at 60.

I was using the rubber stage with the vaccuum line disconnected and plugged.

>>> 'canon' problem from bob -- Mon Oct  9 06:57:49 1989 <<<

The problem report of focus variation on the canon is being removed until
it can be confirmed by someone using a more traditional set up.
It is likely there isn't a problem.

>>> 'canon' problem from liang -- Mon Oct 16 23:12:12 1989 <<<


The glass on the new adaptor need to be changed. The scratch and
residual on the glass left image on developed wafer. I cleaned 
glass but did not help. We also don't have collodion which
we use to clean the glass in store any more.

>>> 'canon' problem from bob -- Tue Oct 17 10:39:40 1989 <<<

Problem: New wafer disc of canon dirty with possible scratch.
Solution: The wafer disc was cleaned with collodion and reinstalled.
It appears to be clean and no scratch is obvious. Users are requested
to use another die location in the event of a scratch as the wafer
replacement discs are extremely limited and not easily available.
The canon is up for use.

>>> 'canon' problem from bierach -- Tue Dec  5 15:14:22 1989 <<<

The vibration table seems a bit too wobbly -- almost unstable.  
Possible air leak ?

>>> 'canon' problem from kim -- Thu Dec  7 10:44:13 1989 <<<

Problem:  The table was too wobbly.
Cause:    ?
Solution: Readjusted the air flow a little bit.

>>> 'canon' problem from bullard -- Thu Dec  7 14:13:47 1989 <<<

The coarse and fine alignment levers seem to be locked.  I tried them only afterthe wafer was loaded and the wafer chuck was up.  Someone just came in and tried them and they seem to be working fine now.

>>> 'canon' problem from evan -- Fri Dec 15 14:53:40 1989 <<<

problem: lamp out
cause: positive voltage cable broken on back of lamp housing. due to normal
wear and tear of swinging the housing to the side.
solution: cut off frayed end of cable and attached a new high temp crimp lug.

canon is up

>>> 'canon' problem from rolfe -- Wed Jan 24 10:44:51 1990 <<<

Dummy wafer missing.
Headway spinner is a mess.
Microscope lights and Y1 and Y2 left on.

>>> 'canon' problem from miklich -- Mon Jan 29 20:14:36 1990 <<<

When the wafer chuck for odd-shaped pieces (not for standard, 2" wafers) is under the disk, there is a strange hissing sound.  The problem is not apparent when
the chuck is actually pressed to the disk (as it is just before exposure), but 
rather just when it is sitting on the turn-table just underneathe the disk.  
Also, when this chuck is pressed against the disk, the "vacuum" gauge reads only40cmHg.  Neither of these problems is present with the standard, 2" chuck.  
Perhaps there is a faulty or loose vacuum line.

Note: the standard disk was in place when I noticed these problems.  I didn't 
check if they went away if the new disk was used.

>>> 'canon' problem from seh -- Thu Feb  1 10:14:36 1990 <<<

I didn't have the problem that was noted by the previous user.
However, when moving the field of view with the knob on the upper
right a noise is observed which I've never noticed before and the
movement of the field is not as smooth as it used to be.	

>>> 'canon' problem from seh -- Thu Feb  1 11:48:37 1990 <<<

Problem was fixed by Kim

>>> 'canon' problem from bob -- Thu Feb  1 13:22:53 1990 <<<

Microscope problems described by seh have been taken care of by
Kim Chan. The canon is up.

>>> 'canon' problem from cleland -- Fri Feb 23 15:48:36 1990 <<<

First chip on a 9 chip exposure pattern is often completely out
of focus. Doesn't develop out. I've wasted 3 wafers this way already!

>>> 'canon' problem from bob -- Wed Feb 28 11:38:01 1990 <<<

cleland reports the first die exposed on the canon is
often (3 out of 3X for him) out of focus. A check of
the chuck reveals no problems.

The Process Supervisor will look into this problem and 
repairs will be made if warranted.

>>> 'canon' problem from bullard -- Wed Mar  7 14:11:47 1990 <<<

Exposure does not seem to be even.  Parts of my specimen were very over-
developed, while adjacent areas appeared as if they had not een been
exposed.  The vacuum on for the chuck seemed to be okay, and I checked the
focus and manual exposure setting.

>>> 'canon' problem from liang -- Wed Mar  7 21:45:00 1990 <<<

The vacuum which holds the wafer to the sample chuck has 
some problem. When the sample is raised to contact with 
the wafer disk, it moves. Andy who also notice the same 
problem. 

>>> 'canon' problem from miklich -- Wed Mar  7 22:25:14 1990 <<<

I confirm the last user's problem.  It looks like the sample when placed on the new chuck (the one for irregular samples) moves as it is put into position
under the disk.  I tried simply raising the sample and then lowering it right
away and the sample had shifted by a few mm.  There was no visible motion of
the sample while it was going up or coming down, so I am left to conclude that
the sample moves as the vacuum is being applied, or perhaps just as it makes contact with the disk.  Note also that in order to see anything on the sample the
focus had to be put way off (886 for the new disk!).  Finally, the vacuum for
both chucks using the new disk was a bit low (~50cm Hg) with or without the
sample.

>>> 'canon' problem from kim -- Thu Mar  8 16:29:39 1990 <<<

Focus on the Std. disk changed to ~939 um.  The temp. of this room is at
26.2 C today.  Collidian had harden on the new wafer disk.  Cleaned the
new wafer disk, but when attempted to clean the gasket, the gasket strunk
and harden and the vacuum seal is bad.  New gasket need to be order.  
Meanwhile only the standard wafer disk is usable.  

>>> 'canon' problem from bob -- Fri Mar  9 16:06:22 1990 <<<

The canon wafer disc has been cleaned of collodion and a new gasket
has been installed on the chuck. The canon is now useable.

Due to problems with the air conditioning associated with Y-1 we
will not do a focus exposure matrix to determine optimum focus.
The room is varying in temp about +- 2C which will vary the canon
focus. Users are notified that focus may change slightly from normal.
The AC will be serviced on Monday.

The canon is up for use with the above exception.

>>> 'canon' problem from missert -- Fri Mar 23 12:42:32 1990 <<<

I enabled the canon then noticed that the lamp was out. I then disabled
the canon and got a message that it was not "officially enabled"? In any
case, the green light that shows it is enabled is on, but I am not able
to disable it!

>>> 'canon' problem from evan -- Fri Mar 23 13:00:38 1990 <<<

problem: lamp off
cause: power glitchs in building?
solution: restarted lamp

>>> 'canon' problem from evan -- Fri Mar 23 13:11:59 1990 <<<

problem: canon wouldn't ddisable
cause: computer filespace full
solution: smiles corrected whatever was needed..disabled canon with normal
results
canon is up

>>> 'canon' problem from palantir -- Mon Mar 26 18:29:49 1990 <<<


had problem getting focus

>>> 'canon' problem from missert -- Mon Mar 26 18:54:22 1990 <<<

ican't get a uniform focus accross a 2 in. wafer - positions 3, 7, and 9 are
fine using a 964 focus (I CAN GET 2 MICRON FEATURES) but all other positions
are grossly out of focus - i.e. they behave as if they've barely been
exposed.  I was using the old "standard" disk.  The thermometer in the
room reads 21 C.

>>> 'canon' problem from missert -- Mon Mar 26 18:59:57 1990 <<<

Note - although I cannot get a uniform focus accross a 2 in. wafer
according to the features I end up with after developing, at each
position the pattern on wafer (which I can see from the previous
layer) appears to be in focus to the eye through the microscope.

>>> 'canon' problem from evan -- Tue Mar 27 07:56:05 1990 <<<

The focus problems do not appear to be due to the piston height or
dragging of turntable bearings. Marilyn is going to do a new focus test now that the room temperature is normal.  She will report results when testing is completed.

>>> 'canon' problem from marilyn -- Tue Mar 27 11:38:37 1990 <<<

Problem: Focus/exposure matrix tests needed for both old and new disks.
Solution: Focus/exposure matrix tests performed- using a coarse and then
          fine array- for both disks.

         New focus for the old disk: 973
         New focus for the new disk: 967

>>> 'canon' problem from palantir -- Tue Mar 27 15:49:39 1990 <<<


The print lens seems to be randomly sticking, sometimes the exposure woprks and sometimes it is so out of focuss that I cant even print a 100 micron line. Also, there are often ghost images.

>>> 'canon' problem from bob -- Tue Mar 27 16:00:55 1990 <<<

A call has been placed to canon for field service. Users
report focus problems that are random in nature. The canon
is useable; however, problems with focus may occurr. When
canon returns our call a date will be announced for repair.
We have requested a rapid response.
~

>>> 'canon' problem from evan -- Wed Mar 28 09:12:24 1990 <<<

The erratic focus problem is being caused by the microscope moving
during exposure.  When the scope is retracted, the lens is switched
for exposure.  A scope 'out' position retaining device has failed
and was allowing to scope to move in a bit.  This was causing the
lens to switch during exposure.  
While this is being repaired, the canon will work if you slide the scope
out very carefully and release it lightly.  You should watch to see
if it is moving in.  The place to watch is the microswitch on the left
slide bearing of the scope track.  Try it while in STROKE SETTING to
see if the scope is moving enough to deactivate the switch.  If so,
report this and do not expose your wafer.
.

>>> 'canon' problem from evan -- Wed Mar 28 14:06:16 1990 <<<

problem: erratic focus
cause: lens switching during exposure. see previous report
solution: repaired microscope slide position retainer. reinstalled
and adjusted for proper locking at both in and out positions.

canon is up

>>> 'canon' problem from miklich -- Wed Mar 28 18:26:21 1990 <<<

There is a blob of something on the glass plate of the new disk.  It is
on the side of the glass which makes contact with the sample, and I 
have noticed that dummy Si wafers tend to stick to this blob when raised
into place.  I did *not* attampt to clean the disk (except to blow it off
with the air gun).

>>> 'canon' problem from palantir -- Wed Mar 28 20:07:30 1990 <<<


the new disk needs to be cleaned. There is a large spot of something on it, as reported by the previous user.

>>> 'canon' problem from evan -- Thu Mar 29 16:39:11 1990 <<<

The new disk glass has been cleaned.

>>> 'canon' problem from cleland -- Thu Mar 29 18:09:23 1990 <<<

The lock bearing (or whatever it's called) on the alignment microscope,
the one that was replaced a couple of days ago, is starting to get a
little bit stiff -- it's getting hard to pull the scope out and then
push it back in. The Canon is still completely useable.

>>> 'canon' problem from denlinge -- Sat Mar 31 02:03:27 1990 <<<

I did not find it usable at all.  The eyepeice would not pull out.
I do not think it should be used until staff looks at it.

>>> 'canon' problem from evan -- Mon Apr  2 08:46:47 1990 <<<

parrish is machining a new mounting plate for the alignment scope position
index pin assy.  The canon should be repaired by 10:30 today.

>>> 'canon' problem from evan -- Mon Apr  2 13:08:38 1990 <<<

The mounting plate/ index pin has been reinstalled.
Users should continue to slide the alignment scope in and out with
a light touch.
canon is up

>>> 'canon' problem from miklich -- Mon Apr  2 23:07:15 1990 <<<

When I came to use the canon, I found the new disk *stuck* to the rubber on
the bottom of the holding rack. I removed it with some force, but in the
process some rubber tore and is still on the end of the disk.  

The disk needs to be cleaned of the rubber.  I don't know how this happened,
but I suspect that someone was trying to clean the disk and got some solvent
on the end of the disk.

The canon is still useable. The disk seats well and I get good vacuum using
the new chuck (the old chuck has only ~45 cm Hg).  However, steps need to be
taken to ensure this does not happen again.

>>> 'canon' problem from evan -- Tue Apr  3 08:46:06 1990 <<<

problem:silicon rubber on new disk
solution: cleaned it off.  since I was the last person to clean the disk,
it is possible that a drop of methenol remained after wiping the vac seal.
I do not know why this would corrode the silicone pad unless it was already
worn from use.

>>> 'canon' problem from miklich -- Fri Apr  6 12:05:46 1990 <<<

Two problems:

The old disk gives very bad vacuum with either the new or old chucks (45 cm Hg).Someone should see if this can be improved.


There is a mark on the face of the glass plate for the new disk.  It looks like a streak of metal.  Is there some way to clean this?

>>> 'canon' fix from evan -- Fri Apr  6 15:04:45 1990 <<<

The new disk was cleaned.  There were spots of resist stuck on the dummy
wafer.  This was cleaned.

>>> 'canon' fix from evan -- Fri Apr  6 15:12:02 1990 <<<

The vac gasket was cleaned on the old disk.  vacuum seems ok.

canon is up

>>> 'canon' problem from cleland -- Fri Apr 13 15:44:05 1990 <<<

Wafer disk not loading up properly, getting poor vacuum and 
focus. 

>>> 'canon' fix from evan -- Fri Apr 13 16:49:10 1990 <<<

problem: wafer disk not loading
cause: lifting piston out of adjustment
solution: adjusted piston height and tightened locking ring

canon is up
