>>> 'breact' problem from hebert -- Wed Feb  8 12:05:54 1989 <<<

The chamber doesn't pump down. The mech pump is plugged in.
I can't tell why the system doesn't work when enabled.

>>> 'breact' problem from bob -- Fri Feb 10 09:58:18 1989 <<<

The breact was set on remote 1 instead of remote 2. hsin set it 
right and the reactor is working fine. Evan may be able to remove 
this function so it doesn't cause future confusion.

>>> 'breact' problem from bmartin -- Tue May 23 16:45:29 1989 <<<

The barrel reactor did not power up when the "VAC ON" switch
is flipped on.  All power cords seem to be connected.

>>> 'breact' problem from evan -- Wed May 24 09:53:26 1989 <<<

breact is working normally.  Chamber was left at atmosphere and is 
undergoing a N2 purge for an hour or so.  equipment repair report to
come when I disable around 10:45.

>>> 'breact' problem from evan -- Wed May 24 11:06:28 1989 <<<

Problem: no power to breact
Cause: The power to the vacuum switch comes from the RF generator.  It
must be turned on before attempting to pump down the chamber.
Solution: Unit operated correctly when RF generator A.C. power was on.
Purged chamber for 1 hr with N2 at 450-500 mTorr.  Base pressure was
27 mTorr.

breact is up

>>> 'breact' problem from cleland -- Sun Jun 25 01:07:16 1989 <<<

Couldn't get plasma to ignite, nor any indication of reflected/forward
power.

>>> 'breact' problem from evan -- Mon Jun 26 10:28:23 1989 <<<

User tried again this morning and plasma ignited with no problem.
breact is up

>>> 'breact' problem from hebert -- Thu Jun 29 11:30:25 1989 <<<

The plasma won't ignite with or without the tesla coil.

>>> 'breact' problem from liang -- Thu Jun 29 23:57:28 1989 <<<


There is no power supply to create the plasma.

>>> 'breact' problem from evan -- Fri Jun 30 16:47:31 1989 <<<

problem: no RF
cause: dirty contacts
solution: cleaned contacts on the RF tube and rotary switch(50-300selector).
RF supply now ignits plasma at normal pressures.
breact is up

>>> 'breact' problem from rooney -- Tue Jul  4 10:10:00 1989 <<<

vacuum solenoid does not open

enable light does not come on, but this is likely just a burned out bulb
as the enable/disable box clicks on and off

vacuum pump is operating normally

>>> 'breact' problem from rooney -- Thu Jul  6 14:24:36 1989 <<<

no vacuum

>>> 'breact' problem from evan -- Thu Jul  6 15:40:09 1989 <<<

No problem found with breact.  Base pressure 25 mTorr.  Plasma ignited
with no problem.
breact is up

>>> 'breact' problem from rooney -- Fri Jul  7 14:43:52 1989 <<<

main fuse (15A) on power supply blew within a minute of striking a
plasma.  This is the second time this fuse has blown.

Blew during O2 clean at 300W, 300 millitorr

>>> 'breact' problem from rooney -- Fri Jul  7 14:46:32 1989 <<<

addition to previous problem report:

fwd power was 300W
reflected power was below 50W

>>> 'breact' problem from evan -- Mon Jul 10 08:04:02 1989 <<<

problem: blown fuse
cause: 15 amp fuse had been replaced with a 5 amp
	blew quickly when full power was applied
solution: replaced with req'd 15 amp fuse.
         plasma at 300 mTorr O2 and 300 watt was run for 15 min with no problem.
breact is up

>>> 'breact' problem from hebert -- Tue Oct 17 13:54:58 1989 <<<

The chamber will not rough out below about 250 mTorr.
The silicone gasket on the door is cracked and needs to 
be replaced.

>>> 'breact' problem from evan -- Tue Oct 17 16:43:08 1989 <<<

problem: not pumping below 250 mTorr.
cause: suspected bad door gasket (cracked)
solution: replaced door gasket but still not pumping down
foreline hose/pvc barb fitting showed a massive leak when moved.
the end of the hose was brittle and cracking, it was shortened and reconnected.
this removed the large leak but still not pumping down.
finally found the o-ring in the glass/glass fitting of the fraction chamber
was also brittle and cracked. replaced this oring and reclamped this fitting.
the leak was gone and chamber pumped down well.

breact is back up

>>> 'breact' problem from hebert -- Tue Oct 17 17:19:40 1989 <<<

I saw the breact pump down to about 60 mTorr after Evan repaired
it. But when I went to use it (a few minutes after the big earth-
quake: 5:10 PM), the chamber wouldn't pump down below about
6.5 Torr.

>>> 'breact' problem from evan -- Wed Oct 18 10:34:10 1989 <<<

problem: chamber not pumping down
solution: checked the glass ball-socket fitting and replaced o-ring in
the glass/flex tubing compression fitting. this fixed the leak.
breact is up  base prtessure 50 mTorr.

>>> 'breact' problem from hebert -- Wed Oct 18 10:51:03 1989 <<<

The plasma ignites but has high reflected power. Most of the power
is reflected. I'm unable to use the breact to etch.

>>> 'breact' problem from hebert -- Wed Oct 18 11:26:16 1989 <<<

The plasma only stays ignited below 400 mTorr. Normally it
will ignite and stay ignited at 650 mTorr. There must be
an electrical connection that is normally isolated that 
is becoming shorted as the gas pressure increases.

The door is difficult to open with the new silicone gasket.
As I opened the door the gasket came off. It has to stretched
so much to install it that I wasn't able to put it back on.
It's a three hand job to reinstall the gasket.

>>> 'breact' problem from evan -- Wed Oct 18 16:12:39 1989 <<<

problem: plasma not staying on at >400 mTorr.
cause: solder joint loosened while fixing leak
solution: resoldered joint
plasma functioning normally

the door was cleaned of some residual RTV from old seal.
door opens easily without pulling off gasket if user waits about ten seconds
for chamber to completely vent.
breact is up

>>> 'breact' problem from liang -- Thu Oct 19 23:44:38 1989 <<<

the rubber vaccum seal ring drop down from the front door.
I can not use it.

>>> 'breact' problem from bob -- Fri Oct 20 15:45:15 1989 <<<

After servicing the front gasket I could not get the plasma to ignite.
I am out of time therefore the repair of the breact will have to wait
for Monday.

>>> 'breact' problem from evan -- Mon Oct 23 09:58:11 1989 <<<

problem: no plasma
cause: load adjustment clip lead disconnected
solution: I found the chamber had been pulled forward almost 1/2 inch.
I relocated the chamber to it's proper position and reconnected the
HV load clip lead which had been pulled off.

If users are not waiting for the chamber to vent completely, attempts to open
the door will either pull off the seal and/or pull the entire chamber forward.

The door will almost open by itself if the vent is opened long enough. I will
label the door to this effect.

breact is up

>>> 'breact' problem from hoagland -- Tue Oct 24 10:33:27 1989 <<<

problem:  User reports failure of igniter to light plasma
          of breact with RF power applied to chamber.

cause:  Unknown.

solution:  Subsequent test of breact revealed no failure.
           Plasma ignited with RF power alone applied to
           chamber.  The breact is up and available for use.

>>> 'breact' problem from hebert -- Tue Oct 24 11:46:51 1989 <<<


SF6 + O2 plasma won't ignite above 450 mTorr. One of the etches in my
process uses 250W 650 mTorr SF6+O2.

>>> 'breact' problem from evan -- Tue Oct 24 14:10:27 1989 <<<

problem: no plasma with SF6/O2 at 650 mTorr
solution: changed the position of the RF load clip lead.
generated N2, SF6/O2 & O2 plasmas up to 900 mTorr with no problems.
breact is up

>>> 'breact' problem from bob -- Mon Oct 30 10:08:48 1989 <<<

The mechanical pump on the breact is making a grinding noise and has
been shutoff for James Parrish to inspect.

>>> 'breact' problem from parrish -- Mon Oct 30 15:31:29 1989 <<<

problem:   roughing pump making a grinding noise

cause:     undetermined at this time will have to inspect pump

solution:  removed pump and replaced with a spare.
           system up.

>>> 'breact' problem from parrish -- Tue Oct 31 07:30:55 1989 <<<

foreline needs replacing, in that it has a considerable amount of buildup
inside the tube. system down for repair

>>> 'breact' problem from parrish -- Tue Oct 31 14:13:17 1989 <<<

problem:   debris in the foreline

cause:     the deashing process of the system

solution:  removed hose(plastic) and replaced with stainless steel
           line and cleaned remaining parts. pumped system down
           system is up for use.

>>> 'breact' problem from bierach -- Thu Nov 30 14:23:16 1989 <<<

I could not pump down below 0.04 Torr.  The manual says to
pump down to 0.02 Torr.

>>> 'breact' problem from evan -- Fri Dec  1 16:36:00 1989 <<<

problem: base pressure reads 40 mTorr...too high
cause: zero drift of baratron
solution: rezeroed baratron...base pressure < 20 mTorr.
breact is up

>>> 'breact' problem from hebert -- Wed Feb 28 11:33:53 1990 <<<

Using 650 mTorr SF6+O2 to etch, the forward power fluctuates
at times between 200 and 300 W with the power set at 250 W.

>>> 'breact' problem from bob -- Fri Mar 16 14:00:51 1990 <<<

The barrel reactor is experiencing some power fluctuations
which will be investigated. It ise useable in its current state.
The power fluctuations will be looked into when more pressing
problems are out of the way.

>>> 'breact' problem from evan -- Tue Mar 27 13:31:30 1990 <<<

problem: power fluctuates at SF6/O2 650 mTorr at 250 watts.
cause: this point on the rf power control pot had dirty contacts
       causing erratic setting
solution: cleaned contacts by turning control full range several times.
this is a sealed pot so no contact cleaner could be used.  if similar
problem reoccurs, recommend replacement of pot.  hebert confirmed that
breact was now working properly
breact is up
